Double-arm type crystal taking equipment

Abstract

The utility model relates to the technical field of chip die bonding, and particularly discloses a double-arm type die taking device. Comprising a crystal ring storage mechanism used for storing crystal rings, an in-out carrying mechanism used for driving the crystal rings to enter and exit from the crystal ring storage mechanism, a demolding mechanism used for taking out chips on the crystal rings, and a double-arm manipulator used for conducting crystal ring transfer operation between the in-out carrying mechanism and the demolding mechanism. The double-arm mechanical arm comprises two suction cup assemblies used for adsorbing crystal rings and a transposition rotation driving mechanism used for driving the two suction cup assemblies to rotate around the vertical axis so as to achieve transposition. The double-arm type crystal taking equipment provided by the utility model can effectively realize mechanical operation of demolding and crystal taking, so that the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip solid crystal, in particular to a double-arm type crystal taking device. Background Art

[0002] The incoming wafers include a round ring, a film stretched tight on the ring, and multiple chips attached to the film. That is, the incoming state of the chips is as follows: a film is stretched tight on the ring, and many chips are attached to the film. When performing the crystal bonding operation, you only need to take out the chips on the film one by one (the process of taking out the chips is called "stripping the film"), and then put them into the bracket.

[0003] The utility model is devoted to the research and development of a crystal taking device, which is used to realize the mechanized operation of film stripping and crystal taking, thereby improving the production efficiency.

[0004] The above information disclosed in this Background section is included only for enhancement of understanding of the background of the present disclosure and therefore it may contain information that does not form the prior art that is currently known to a person of ordinary skill in the art. Utility Model Content

[0005] One purpose of the utility model is to provide a double-arm crystal retrieval device, which can effectively realize the mechanized operation of stripping and crystal retrieval, thereby improving production efficiency.

[0006] To achieve the above purpose, the utility model provides a double-arm crystal retrieval device, including a crystal ring storage mechanism for storing crystal rings, an in-out transport mechanism for driving crystal rings in and out of the crystal ring storage mechanism, a demolding mechanism for taking out chips on the crystal ring, and a double-arm manipulator for performing crystal ring transfer operations between the in-out transport mechanism and the demolding mechanism;

[0007] The dual-arm manipulator includes two suction cup assemblies for adsorbing the crystal ring, and a transposition rotation drive mechanism for driving the two suction cup assemblies to rotate around a vertical axis to achieve transposition.

[0008] Optionally, the dual-arm manipulator further includes:

[0009] A manipulator longitudinal linear drive mechanism, wherein a driving end of the manipulator longitudinal linear drive mechanism is connected to the transposition rotation drive mechanism to drive the transposition rotation drive mechanism to move up and down;

[0010] The robot transverse linear drive mechanism has a driving end connected to the robot longitudinal linear drive mechanism, and is used to drive the robot longitudinal linear drive mechanism to reciprocate between the in-and-out transport mechanism and the film stripping mechanism.

[0011] Optionally, the suction cup assembly includes a suction cup bracket connected to the driving end of the transposition rotation driving mechanism and a plurality of suction cup bodies mounted on the suction cup bracket.

[0012] Optionally, the crystal ring storage mechanism includes:

[0013] A crystal ring material box is provided with a plurality of ring storage grooves spaced apart from top to bottom, each of the ring storage grooves being used to accommodate a crystal ring.

[0014] Optionally, the crystal ring storage mechanism further includes:

[0015] A material box linear drive mechanism, wherein a driving end of the material box linear drive mechanism is connected to the crystal ring material box to drive the crystal ring material box to move up and down.

[0016] Optionally, the in-and-out transport mechanism includes a crystal ring carrier for placing a crystal ring, a crystal ring clamp located above the crystal ring carrier, and a transport linear drive mechanism for driving the crystal ring clamp to reciprocate between the crystal ring carrier and the crystal ring storage mechanism.

[0017] Optionally, the demolding mechanism includes a crystal ring fixing platform for fixing the crystal ring and a pin mechanism for ejecting the chip on the film upward out of the film.

[0018] Optionally, the crystal ring fixing platform includes a rotating crystal frame for placing the crystal ring and a crystal frame rotation driving mechanism for driving the rotating crystal frame to rotate.

[0019] Optionally, the ejector mechanism includes an ejector body and an ejector linear drive mechanism for driving the ejector body to move up and down.

[0020] The beneficial effect of the utility model is that it provides a double-arm crystal retrieval device. After the in-and-out transport mechanism takes out the unremoved crystal rings in the crystal ring storage mechanism, the double-arm manipulator performs the crystal ring transfer operation between the in-and-out transport mechanism and the demolding mechanism. Then, the demolding mechanism can take out the chips on the unremoved crystal rings, thereby completing the mechanized operation of demolding and crystal retrieval, thereby improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0022] Figure 1 A schematic diagram of the structure of a double-arm crystal extraction device provided in an embodiment;

[0023] Figure 2 A schematic diagram of the structure of the crystal ring storage mechanism and the in-and-out transport mechanism provided in the embodiment;

[0024] Figure 3 A schematic diagram of the structure of a dual-arm manipulator provided in an embodiment.

[0025] In the figure:

[0026] 100, the crystal ring has not been removed; 200, the crystal ring has been removed;

[0027] 1. Crystal ring storage mechanism; 101. Crystal ring material box; 1011. Crystal ring storage groove; 102. Material box linear drive mechanism;

[0028] 2. In-and-out transport mechanism; 201. crystal ring carrier; 202. crystal ring clamp; 203. transport linear drive mechanism;

[0029] 3. Demolding mechanism; 301. Crystal ring fixing platform; 3011. Rotating crystal frame; 3012. Crystal frame rotating driving mechanism; 302. Ejector mechanism; 3021. Ejector body; 3022. Ejector linear driving mechanism;

[0030] 4. Double-arm manipulator; 401. Suction cup assembly; 4011. Suction cup bracket; 4012. Suction cup body; 402. Transposition rotation drive mechanism; 403. Manipulator longitudinal linear drive mechanism; 404. Manipulator transverse linear drive mechanism. DETAILED DESCRIPTION

[0031] In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the embodiment described below is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In the description of the present utility model, it is to be understood that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be a centrally arranged component at the same time.

[0033] In addition, terms such as "long", "short", "inside" and "outside" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings and are only used to facilitate the description of the present invention. They do not indicate or imply that the device or component referred to must have this specific direction or operate with a specific direction structure, and should not be understood as a limitation of the present invention.

[0034] The present invention will be described in detail below in conjunction with the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional changes made by a person skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0035] The utility model provides a double-arm type crystal taking device, which is suitable for the application scenario of taking chips out of a film. It can effectively realize the mechanized operation of film stripping and crystal taking, thereby improving production efficiency.

[0036] See also Figure 1 The double-arm crystal retrieval equipment provided in this embodiment includes a crystal ring storage mechanism 1 for storing crystal rings, an in-and-out transport mechanism 2 for driving the crystal rings in and out of the crystal ring storage mechanism 1, a demolding mechanism 3 for taking out the chips on the crystal rings, and a double-arm manipulator 4 for performing crystal ring transfer operations between the in-and-out transport mechanism 2 and the demolding mechanism 3.

[0037] The double-arm crystal extraction equipment provided in this embodiment has the following working process:

[0038] S10: At the beginning, each crystal ring is stored in the crystal ring storage mechanism 1;

[0039] See also Figure 2 In this embodiment, the crystal ring storage mechanism 1 includes a crystal ring material box 101 and a material box linear driving mechanism 102 .

[0040] The wafer ring material box 101 is provided with a plurality of storage ring grooves 1011 arranged at intervals from top to bottom, and each storage ring groove 1011 is used to accommodate a wafer ring. The driving end of the material box linear driving mechanism 102 is connected to the wafer ring material box 101 to drive the wafer ring material box 101 to move up and down.

[0041] When the unremoved crystal ring 100 in a ring storage slot 1011 is taken out and the removed crystal ring 200 is put back in, the material box linear drive mechanism 102 can drive the crystal ring material box 101 to move downward one grid so as to enter and exit the conveying mechanism 2 for the next crystal ring conveying operation.

[0042] S20: the in-and-out transport mechanism 2 takes out a crystal ring that has not been demolded and crystal-removed (i.e., the “crystal ring 100 that has not been crystal-removed”) from the crystal ring storage mechanism 1;

[0043] See also Figure 2 In this embodiment, the in-and-out transport mechanism 2 includes a crystal ring carrier 201 for placing a crystal ring, a crystal ring clamp 202 located above the crystal ring carrier 201, and a transport linear drive mechanism 203 for driving the crystal ring clamp 202 to reciprocate between the crystal ring carrier 201 and the crystal ring storage mechanism 1.

[0044] When the crystal ring needs to be taken out from the crystal ring storage mechanism 1, the transport linear drive mechanism 203 moves the crystal ring clamp 202 to a position close to the crystal ring storage mechanism 1, and the crystal ring clamp 202 clamps the crystal ring; then, the transport linear drive mechanism 203 moves the crystal ring clamp 202 to the end of the crystal ring carrier 201 away from the crystal ring storage mechanism 1, and the crystal ring can be pulled out of the crystal ring box 101; finally, the crystal ring clamp 202 releases the crystal ring, and the crystal ring can be placed on the crystal ring carrier 201, waiting for the dual-arm manipulator 4 to take away the crystal ring.

[0045] S30: the double-arm manipulator 4 moves to complete the wafer ring transfer operation between the in-and-out transport mechanism 2 and the demolding mechanism 3;

[0046] See also Figure 3 In this embodiment, the dual-arm manipulator 4 includes two suction cup assemblies 401 for adsorbing crystal rings, a rotation drive mechanism 402 for driving the two suction cup assemblies 401 to rotate around a vertical axis to achieve transposition, a manipulator longitudinal linear drive mechanism 403, and a manipulator transverse linear drive mechanism 404.

[0047] The driving end of the manipulator longitudinal linear drive mechanism 403 is connected to the transposition rotation drive mechanism 402 to drive the transposition rotation drive mechanism 402 to move up and down; the driving end of the manipulator transverse linear drive mechanism 404 is connected to the manipulator longitudinal linear drive mechanism 403 to drive the manipulator longitudinal linear drive mechanism 403 to reciprocate between the in-and-out transport mechanism 2 and the film stripping mechanism 3.

[0048] Furthermore, the suction cup assembly 401 includes a suction cup bracket 4011 connected to the driving end of the transposition rotation driving mechanism 402 and a plurality of suction cup bodies 4012 mounted on the suction cup bracket 4011 .

[0049] Specifically, step S30 can be refined as follows:

[0050] S301: the longitudinal linear driving mechanism 403 of the manipulator extends downward, and after one of the suction cup assemblies 401 sucks up the unremoved crystal ring 100, the longitudinal linear driving mechanism 403 of the manipulator retracts upward and resets;

[0051] S302: the robot lateral linear drive mechanism 404 extends, so that another suction cup assembly 401 moves to the top of the demolding mechanism 3;

[0052] S303: the robot longitudinal linear drive mechanism 403 extends downward, and another suction cup assembly 401 sucks up the wafer ring on the demolding mechanism 3 (all chips on the wafer ring have been taken away, that is, "the wafer ring 200 has been taken away"), and then the robot longitudinal linear drive mechanism 403 retracts upward and resets;

[0053] S304: The transposition rotation drive mechanism 402 drives the two suction cup assemblies 401 to rotate 180° to complete the transposition;

[0054] S305: the longitudinal linear driving mechanism 403 of the manipulator extends downward, and after the corresponding suction cup assembly 401 places the unremoved crystal ring 100 on the demolding mechanism 3, the longitudinal linear driving mechanism 403 of the manipulator retracts upward and resets;

[0055] S306: the robot transverse linear drive mechanism 404 retracts, so that the taken-wafer ring 200 moves to the top of the in-and-out transport mechanism 2;

[0056] S307: the robot longitudinal linear drive mechanism 403 extends downward, and after the corresponding suction cup assembly 401 places the taken wafer ring 200 on the in-and-out transport mechanism 2, the robot longitudinal linear drive mechanism 403 retracts upward and resets;

[0057] S40: the in-and-out transport mechanism 2 places the taken crystal ring 200 into the crystal ring storage mechanism 1, specifically, placing the taken crystal ring 200 to the position where the untaken crystal ring 100 was originally placed;

[0058] S50: The demolding mechanism 3 takes out the chip on the wafer ring, completing demolding and wafer collection.

[0059] See also Figure 1 In this embodiment, the film stripping mechanism 3 includes a crystal ring fixing platform 301 for fixing the crystal ring and a pin mechanism 302 for ejecting the chip on the film upward out of the film.

[0060] Specifically, the crystal ring fixing platform 301 includes a rotating crystal frame 3011 for placing a crystal ring and a crystal frame rotation driving mechanism 3012 for driving the rotating crystal frame 3011 to rotate.

[0061] The ejector mechanism 302 includes an ejector body 3021 and an ejector linear driving mechanism 3022 for driving the ejector body 3021 to move up and down.

[0062] When the double-arm manipulator 4 places the unremoved crystal ring 100 into the rotating crystal frame 3011, the crystal frame rotation drive mechanism 3012 drives the rotating crystal frame 3011 to rotate to a suitable angle, and the ejector linear drive mechanism 3022 drives the ejector body 3021 to move upward to lift the chip directly above the ejector body 3021. After the downstream equipment takes the chip away, the crystal frame rotation drive mechanism 3012 drives the rotating crystal frame 3011 to rotate a certain angle again, and the ejector linear drive mechanism 3022 drives the ejector body 3021 to move upward to lift the chip directly above the ejector body 3021. This reciprocating process can eject all chips upward.

[0063] In this embodiment, each of the linear drive mechanisms may be a motor screw linear module, a cylinder or an electric cylinder, etc., which is not limited in this embodiment.

[0064] In this embodiment, each of the rotation driving mechanisms may be a servo motor, a rotary cylinder, or a steering gear, etc., which is not limited in this embodiment.

[0065] In summary, the dual-arm crystal retrieval device provided in this embodiment has the following advantages:

[0066] ① After the in-and-out transport mechanism 2 takes out the unremoved crystal ring 100 from the crystal ring storage mechanism 1, the double-arm manipulator 4 performs the crystal ring transfer operation between the in-and-out transport mechanism 2 and the demolding mechanism 3, and the demolding mechanism 3 can then take out the chip on the unremoved crystal ring 100, thereby completing the mechanized operation of demolding and crystal retrieval, thereby improving production efficiency;

[0067] ② The double-arm manipulator 4 is a double suction cup structure. With one back-and-forth lateral displacement, the crystal ring 200 with the crystal removed can be placed on the in-and-out transport mechanism 2, and the crystal ring 100 with the crystal not removed can be placed in the demolding mechanism 3, which reduces the turnover time and further improves the production efficiency.

[0068] It should be understood that although this specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each implementation mode may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

[0069] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A double-arm crystal retrieval device, characterized in that: The invention comprises a crystal ring storage mechanism (1) for storing crystal rings, an in-and-out transport mechanism (2) for driving crystal rings in and out of the crystal ring storage mechanism (1), a demolding mechanism (3) for taking out chips on the crystal rings, and a double-arm manipulator (4) for performing crystal ring transfer operations between the in-and-out transport mechanism (2) and the demolding mechanism (3); The dual-arm manipulator (4) comprises two suction cup assemblies (401) for adsorbing the crystal ring, and a transposition rotation drive mechanism (402) for driving the two suction cup assemblies (401) to rotate around a vertical axis to achieve transposition.

2. The double-arm crystal retrieval device according to claim 1, characterized in that: The dual-arm manipulator (4) further comprises: A manipulator longitudinal linear drive mechanism (403), wherein a driving end of the manipulator longitudinal linear drive mechanism (403) is connected to the transposition rotation drive mechanism (402) to drive the transposition rotation drive mechanism (402) to move up and down; A robot transverse linear drive mechanism (404), wherein the driving end of the robot transverse linear drive mechanism (404) is connected to the robot longitudinal linear drive mechanism (403), and is used to drive the robot longitudinal linear drive mechanism (403) to reciprocate between the in-and-out transport mechanism (2) and the film stripping mechanism (3).

3. The double-arm crystal retrieval device according to claim 1, characterized in that: The suction cup assembly (401) comprises a suction cup bracket (4011) connected to the driving end of the transposition rotation driving mechanism (402) and a plurality of suction cup bodies (4012) mounted on the suction cup bracket (4011).

4. The double-arm crystal retrieval device according to claim 1, characterized in that: The crystal ring storage mechanism (1) comprises: A crystal ring material box (101), wherein the crystal ring material box (101) is provided with a plurality of ring storage grooves (1011) arranged at intervals from top to bottom, and each of the ring storage grooves (1011) is used to accommodate a crystal ring.

5. The double-arm crystal retrieval device according to claim 4, characterized in that: The crystal ring storage mechanism (1) further comprises: A material box linear drive mechanism (102), wherein a drive end of the material box linear drive mechanism (102) is connected to the wafer ring material box (101) to drive the wafer ring material box (101) to move up and down.

6. The double-arm crystal retrieval device according to claim 1, characterized in that: The in-and-out transport mechanism (2) comprises a crystal ring carrier (201) for placing a crystal ring, a crystal ring clamp (202) located above the crystal ring carrier (201), and a transport linear drive mechanism (203) for driving the crystal ring clamp (202) to reciprocate between the crystal ring carrier (201) and the crystal ring storage mechanism (1).

7. The double-arm crystal retrieval device according to claim 1, characterized in that: The film stripping mechanism (3) comprises a crystal ring fixing platform (301) for fixing the crystal ring and a pin mechanism (302) for pushing the chip on the film upward out of the film.

8. The double-arm crystal retrieval device according to claim 7, characterized in that: The crystal ring fixing platform (301) comprises a rotating crystal frame (3011) for placing a crystal ring and a crystal frame rotation driving mechanism (3012) for driving the rotating crystal frame (3011) to rotate.

9. The double-arm crystal retrieval device according to claim 7, characterized in that: The ejector mechanism (302) comprises an ejector body (3021) and an ejector linear drive mechanism (3022) for driving the ejector body (3021) to move up and down.

Images