Conveying device

Abstract

The utility model belongs to the technical field of wafer conveying, and particularly relates to a transmission device, which comprises a conveying assembly and a clamping assembly, wherein the conveying assembly comprises an L-shaped conveying seat, a lifting assembly and a clamping assembly; the conveying base is arranged on the supporting guide rail in a sliding mode, the lifting assembly is arranged on a transverse plate of the conveying base, the clamping assembly comprises a clamping supporting plate and a pair of clamping arms, the clamping supporting plate is arranged at the output end of the lifting assembly, the clamping arms are arranged on the side wall of the clamping supporting plate in a relatively sliding mode, and the first conveying assembly corresponds to an ascending elevator in position; the second conveying assembly corresponds to the descending elevator in position; by arranging the conveying part, when it is found that the wafer is polluted, the manipulator stops cleaning, takes away the wafer and directly carries the polluted wafer to the position of the descending elevator, and the second conveying assembly carries the corresponding flower basket to the position of the descending elevator, so that the original flower basket is matched with the polluted wafer, and other flower baskets are prevented from being polluted; and the cleaning efficiency and quality are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer conveying, and in particular relates to a transmission device. Background Art

[0002] Before the wafer is prepared into a chip, it must first be cleaned in a chemical solution to ensure that the wafer is clean and tidy and to prevent contamination on the wafer surface that may cause the wafer to be scrapped; when the wafer is cleaned, the wafer is separated from the basket used to carry the wafer by a robot, the robot cleans the wafer, and the basket is placed in order by the cooperation of the elevator and the overhead crane. When the wafer is cleaned, the conveying component on the overhead crane transports the basket to the elevator at the other end, so that the elevator and the robot cooperate to recover the wafer; the existing overhead crane structure usually uses a single transport arm to transport the basket, which is inefficient and not conducive to large-scale wafer cleaning. Washing operation; after the wafer cleaning is completed, the existing overhead crane will move the flower basket placed closest to the elevator on the other side to another elevator, and repeat this procedure according to the placement of the flower basket to achieve the correspondence between the wafer and the flower basket; if the wafer is found to be contaminated during the wafer cleaning process, in order to avoid the contamination of the cleaning liquid caused by continuing to clean the contaminated wafer, the robot will skip the subsequent cleaning steps and directly put the wafer back into the flower basket. If the overhead crane continues to execute the above cycle procedure, the wafer and the flower basket will not correspond, and the contaminated wafer will continue to contaminate the new flower basket, resulting in reduced cleaning efficiency and reduced cleaning quality;

[0003] Therefore, it is necessary to provide a transmission device that can reduce flower basket contamination and improve cleaning quality. Utility Model Content

[0004] The purpose of the utility model is to provide a transmission device.

[0005] In order to solve the above technical problems, the utility model provides a transmission device, including: a conveying part, the conveying part includes a first conveying component, a second conveying component and a supporting guide rail; the conveying component includes an "L"-shaped conveying seat, a lifting component and a clamping component; the conveying seat is slidably arranged on the supporting guide rail, the lifting component is arranged on the horizontal plate of the conveying seat, the clamping component includes a clamping support plate and a pair of clamping arms, the clamping support plate is arranged on the output end of the lifting component, and the clamping arm is relatively slidably arranged on the side wall of the clamping support plate, wherein the first conveying component corresponds to the position of the ascending elevator, and the second conveying component corresponds to the position of the descending elevator; a positioning part, the positioning part includes a support seat and a plurality of placement stations, the support seat is arranged on the front side of the supporting guide rail, and the placement station is arranged on the top of the support seat, wherein the size of the placement station is adapted to the size of the flower basket.

[0006] Furthermore, the clamping assembly further comprises a finger cylinder, which is arranged on a side wall of the clamping support plate, wherein the clamping arm is connected to an output end of the finger cylinder.

[0007] Furthermore, the clamping assembly also includes a clamping guide rail and a clamping slider, the clamping guide rail is arranged on the side wall of the clamping support plate, and the clamping slider is arranged on the side wall of the clamping arm, wherein the clamping slider is slidably arranged on the clamping guide rail.

[0008] Furthermore, the lifting assembly includes a lifting cylinder and a lifting chain, the lifting cylinder is arranged on the horizontal plate of the conveying seat, one end of the lifting chain is connected to the lifting cylinder, and the other end of the lifting chain is connected to the clamping support plate, wherein the clamping support plate is connected to the piston rod of the lifting cylinder.

[0009] Furthermore, the conveying assembly also includes a conveying track and a conveying motor, the conveying track is arranged on the rear side of the supporting guide rail, the conveying motor is arranged on the top of the conveying seat, a gear is arranged on the output shaft of the conveying motor, and a rack is arranged on the side wall of the conveying track, wherein the gear is meshed with the rack.

[0010] Furthermore, a conveying slide block is provided on the conveying seat, wherein the conveying slide block is slidably provided on the supporting guide rail.

[0011] Furthermore, a pair of clamping notches are arranged facing each other at the top of the clamping arm, wherein the clamping notches are adapted to the flower basket.

[0012] Furthermore, the positioning portion includes a plurality of groups of positioning blocks, each group of positioning blocks is circumferentially arranged on the top of the support seat, and positioning notches are arranged on the tops of the positioning blocks facing each other, wherein the positioning notches are suitable for supporting the flower basket.

[0013] Furthermore, the conveying part also includes a plurality of conveying connecting plates and a plurality of conveying drag chains, wherein the conveying connecting plates are arranged on the conveying seat, wherein the movable ends of the conveying drag chains are connected to the conveying connecting plates.

[0014] Beneficial effects of the utility model:

[0015] 1. By setting up a conveying part, when cleaning the wafer, the ascending elevator conveys the flower basket and the wafer to the station of the first conveying component, the robot takes the wafer to clean the wafer, the clamping arms slide towards each other to clamp the flower basket, the lifting component drives the clamping support plate to rise and move to a position suitable for transportation, the conveying seat slides and drives the flower basket to move to a suitable placement position above the positioning part, the lifting component drives the clamping component to descend, the clamping arm releases the flower basket, and places the flower basket on the placement position to achieve the positioning of the flower basket. When it is found that the wafer is contaminated, the robot stops cleaning, takes the wafer away, and directly transports the contaminated wafer to the position of the descending elevator. The second transport component transports the corresponding flower basket to the position of the descending elevator, so that the original flower basket cooperates with the contaminated wafer to prevent other flower baskets from being contaminated, thereby improving the cleaning efficiency and quality.

[0016] 2. By setting the positioning part, the support seat can set up a placement station. The size of the placement station and the flower basket can avoid fixing the position of the flower basket and prevent the movement of the flower basket, providing a good placement position for subsequent wafers to be placed in the flower basket, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 This is a schematic diagram of the overall structure of the transmission device of the utility model from a front view perspective;

[0019] Figure 2 yes Figure 1 A partial enlarged view of the middle A;

[0020] Figure 3 yes Figure 1 A partial enlarged view of point B in the middle;

[0021] Figure 4 It is a schematic diagram of the overall structure of the transmission device of the utility model from a rear-view perspective;

[0022] Figure 5 yes Figure 4 A partial enlarged view of point C in the middle.

[0023] In the figure:

[0024] Conveying part, 110, supporting guide rail, 120, conveying connecting plate, 130, conveying drag chain;

[0025] first conveying assembly, 210, conveying seat, 211, conveying slider, 220, lifting assembly, 221, lifting cylinder, 222, lifting drag chain, 230, clamping assembly, 231, clamping support plate, 232, clamping arm, 2321, clamping notch, 233, finger cylinder, 234, clamping guide rail, 235, clamping slider, 240, conveying track, 241, rack, 250, conveying motor, 251, gear;

[0026] a second conveying assembly;

[0027] 400, positioning portion, 410, support seat, 420, placement station, 430, positioning block, 431, positioning notch. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] Embodiment 1, as Figure 1-5As shown, the utility model provides a transmission device, including: a conveying part 100, the conveying part 100 includes a first conveying assembly 200, a second conveying assembly 300 and a supporting rail 110; the conveying assembly includes an "L"-shaped conveying seat 210, a lifting assembly 220 and a clamping assembly 230; the conveying seat 210 is slidably arranged on the supporting rail 110, the lifting assembly 220 is arranged on the transverse plate of the conveying seat 210, the clamping assembly 230 includes a clamping support plate 231 and a pair of clamping arms 232, the clamping support plate 231 is arranged on the output end of the lifting assembly 220, and the clamping arm 232 is relatively slidably arranged on the side wall of the clamping support plate 231, Among them, the first conveying component 200 corresponds to the position of the ascending elevator, and the second conveying component 300 corresponds to the position of the descending elevator; by setting the conveying part 100, when cleaning the wafer, the ascending elevator conveys the flower basket and the wafer to the workstation of the first conveying component 200, the robot takes the wafer and cleans the wafer, the clamping arms 232 slide towards each other to clamp the flower basket, the lifting component 220 drives the clamping support plate 231 to rise and move to a position suitable for transportation, the conveying seat 210 slides and drives the flower basket to move to a suitable placement station 420 above the positioning part 400, the lifting component 220 drives the clamping component 230 to descend, the clamping arm 232 releases the flower basket, and places the flower basket on the placement station 420 to achieve the positioning of the flower basket. When it is found that the wafer is contaminated, the robot stops cleaning, takes the wafer away, and directly transports the contaminated wafer to the position of the descending elevator. The second transport component transports the corresponding flower basket to the position of the descending elevator, so that its original flower basket cooperates with the contaminated wafer to prevent other flower baskets from being contaminated, thereby improving the cleaning efficiency and quality; the positioning part 400, the positioning part 400 includes a support seat 410 and a plurality of placement stations 420, the support seat 410 is arranged on the front side of the support guide rail 110, and the placement station 420 is arranged on the top of the support seat 410, wherein the size of the placement station 420 is adapted to the size of the flower basket; by setting the positioning part 400, the support seat 410 can set up the placement station 420, and the size of the placement station 420 and the flower basket can avoid fixing the position of the flower basket and prevent the movement of the flower basket, thereby providing a good placement position for subsequent wafers to be placed in the flower basket and improving work efficiency.

[0030] The clamping assembly 230 also includes a finger cylinder 233, which is arranged on the side wall of the clamping support plate 231, wherein the clamping arm 232 is connected to the output end of the finger cylinder 233; the clamping support plate 231 can stably install the finger cylinder 233, and by setting the driving element of the clamping assembly 230 to the finger cylinder 233, the finger cylinder 233 device is simple and reliable, easy to install and maintain, low in cost, and long in service life, and can accurately control the clamping arm 232 to move toward or away from each other, thereby achieving the clamping and release of the flower basket.

[0031] The clamping assembly 230 also includes a clamping rail 234 and a clamping slider 235, wherein the clamping rail 234 is arranged on the side wall of the clamping support plate 231, and the clamping slider 235 is arranged on the side wall of the clamping arm 232, wherein the clamping slider 235 is slidably arranged on the clamping rail 234; the clamping slider 235 is adapted to the clamping rail 234, and the clamping rail 234 can prevent the clamping slider 235 from shaking when sliding, so that the clamping arm 232 can slide stably to achieve the clamping and loosening of the flower basket, thereby improving work efficiency.

[0032] The lifting assembly 220 includes a lifting cylinder 221 and a lifting chain 222, wherein the lifting cylinder 221 is arranged on the horizontal plate of the conveying seat 210, one end of the lifting chain 222 is connected to the lifting cylinder 221, and the other end of the lifting chain 222 is connected to the clamping support plate 231, wherein the clamping support plate 231 is connected to the piston rod of the lifting cylinder 221; the conveying seat 210 can stably set up the lifting cylinder 221, and the lifting cylinder 221 has high working precision. By driving the piston rod, it can stably drive the clamping support plate 231 to rise and fall, thereby driving the clamping arm 232 to rise and fall, and the flower basket clamped by the clamping arm 232 can be accurately moved to the required height; by setting the lifting chain 222, the lifting chain 222 can protect the wiring harness of the lifting assembly 220, thereby improving the operating reliability of the equipment.

[0033] The conveying assembly also includes a conveying track 240 and a conveying motor 250, wherein the conveying track 240 is arranged on the rear side of the supporting guide rail 110, and the conveying motor 250 is arranged on the top of the conveying seat 210, and a gear 251 is arranged on the output shaft of the conveying motor 250, and a rack 241 is arranged on the side wall of the conveying track 240, wherein the gear 251 is meshed with the rack 241; when the output shaft of the conveying motor 250 rotates, the gear 251 is driven to rotate, and the gear 251 can drive the conveying seat 210 to slide on the supporting guide rail 110 by cooperating with the rack 241.

[0034] The conveying seat 210 is provided with a conveying slider 211, wherein the conveying slider 211 is slidably arranged on the supporting guide rail 110; the supporting guide rail 110 is adapted to the conveying slider 211, which can avoid shaking when the conveying slider 211 slides, thereby allowing the conveying seat 210 to slide smoothly.

[0035] A pair of clamping notches 2321 are arranged facing each other at the top of the clamping arm 232, wherein the clamping notches 2321 are adapted to the flower basket; by providing the clamping notches 2321, after the clamping arm 232 completes clamping the flower basket, the clamping notches 2321 can provide good support for the side edges of the top of the flower basket, thereby preventing the flower basket from shaking during transportation, protecting the flower basket, and increasing the service life of the flower basket.

[0036] The positioning portion 400 includes a plurality of groups of positioning blocks 430, each group of positioning blocks 430 is circumferentially arranged on the top of the support seat 410, and positioning notches 431 are arranged on the tops of the positioning blocks 430 facing each other, wherein the positioning notches 431 are suitable for supporting the flower basket; by setting the positioning blocks 430, the positioning notches 431 on the positioning blocks 430 correspond to the four corners of the bottom of the flower basket, and when the clamping assembly 230 transports the flower basket to the placement station 420, the positioning blocks 430 can support the four corners of the bottom of the flower basket through the positioning notches 431, thereby avoiding the movement of the flower basket, allowing the flower basket to be stably mounted on the support seat 410, providing a good placement position for subsequent wafers to be placed in the flower basket, and improving work efficiency.

[0037] The conveying part 100 also includes a plurality of conveying connecting plates 120 and a plurality of conveying drag chains 130, wherein the conveying connecting plates 120 are arranged on the conveying seat 210, wherein the movable ends of the conveying drag chains 130 are connected to the conveying connecting plates 120; when the conveying seat 210 slides, the conveying connecting plates 120 are connected to the movable ends of the conveying drag chains 130, and the conveying drag chains 130 can protect the wiring harnesses on the conveying components, thereby increasing the service life of the equipment.

[0038] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A transmission device, characterized in that: include: The conveying part comprises a first conveying assembly, a second conveying assembly and a supporting guide rail; the conveying assembly comprises an "L"-shaped conveying seat, a lifting assembly and a clamping assembly; the conveying seat is slidably arranged on the supporting guide rail, the lifting assembly is arranged on the transverse plate of the conveying seat, the clamping assembly comprises a clamping support plate and a pair of clamping arms, the clamping support plate is arranged on the output end of the lifting assembly, and the clamping arm is relatively slidably arranged on the side wall of the clamping support plate, wherein, The first conveying assembly corresponds to the position of the ascending elevator, and the second conveying assembly corresponds to the position of the descending elevator; The positioning part includes a support seat and a plurality of placement stations, the support seat is arranged at the front side of the support rail, and the placement stations are arranged at the top of the support seat, wherein: The size of the placement station is adapted to the size of the flower basket.

2. A transmission device according to claim 1, characterized in that: The clamping assembly further includes a finger cylinder, which is arranged on the side wall of the clamping support plate, wherein: The clamping arm is connected to the output end of the finger cylinder.

3. A transmission device as claimed in claim 2, characterized in that: The clamping assembly further comprises a clamping guide rail and a clamping slide block, wherein the clamping guide rail is arranged on the side wall of the clamping support plate, and the clamping slide block is arranged on the side wall of the clamping arm, wherein: The clamping slide block is slidably arranged on the clamping guide rail.

4. A transmission device as claimed in claim 3, characterized in that: The lifting assembly includes a lifting cylinder and a lifting drag chain, wherein the lifting cylinder is arranged on the horizontal plate of the conveying seat, one end of the lifting drag chain is connected to the lifting cylinder, and the other end of the lifting drag chain is connected to the clamping support plate, wherein: The clamping support plate is connected to the piston rod of the lifting cylinder.

5. A transmission device as claimed in claim 4, characterized in that: The conveying assembly further comprises a conveying track and a conveying motor, wherein the conveying track is arranged at the rear side of the supporting guide rail, the conveying motor is arranged at the top of the conveying seat, a gear is arranged on the output shaft of the conveying motor, and a rack is arranged on the side wall of the conveying track, wherein: The gear meshes with the rack.

6. A transmission device as claimed in claim 5, characterized in that: The conveying seat is provided with a conveying slide block, wherein: The conveying slide block is slidably arranged on the supporting guide rail.

7. A transmission device according to claim 6, characterized in that: A pair of clamping notches are disposed at the top of the clamping arm facing each other, wherein: The clamping notch is adapted to the flower basket.

8. A transmission device according to claim 7, characterized in that: The positioning part includes a plurality of positioning blocks, each of which is circumferentially arranged on the top of the support seat, and the tops of the positioning blocks are provided with positioning notches facing each other, wherein: The positioning notch is suitable for supporting the flower basket.

9. A transmission device according to claim 8, characterized in that: The conveying part further comprises a plurality of conveying connecting plates and a plurality of conveying drag chains, wherein the conveying connecting plates are arranged on the conveying seat, The movable end of the conveying drag chain is connected to the conveying connecting plate.

Images