Automatic wafer conveying device for wafer detection

Abstract

The utility model relates to the field of automatic wafer conveying devices, in particular to an automatic wafer conveying device for wafer detection. Comprising a machine body, a workbench is fixedly connected to the upper surface of the machine body, a mechanical arm is installed on the upper surface of the workbench, two mechanical arms are installed on one side of the mechanical arm, a plurality of suction cups are installed on the upper surfaces of the mechanical arms, and an adjusting structure is arranged on the lower surfaces of the mechanical arms and comprises a fixing base; a connecting plate is rotatably connected to the inner wall of the fixing seat, a servo motor is fixedly connected to one side of the fixing seat, the output end of the servo motor is fixedly connected with the connecting plate, and a supporting plate is fixedly connected to one side of the connecting plate. The automatic wafer conveying device for wafer detection provided by the utility model has the advantages that the supporting plate can be automatically driven to unfold to lift a wafer with a larger diameter, so that the wafer can be conveyed to a specified detection position more safely, and the effect of improving the use stability of the wafer conveying device is achieved.

Description

Technical Field

[0001] The utility model relates to the field of automatic film conveying devices, in particular to an automatic film conveying device for wafer detection. Background Art

[0002] When wafers are being manufactured, a testing device is needed to detect whether the quality of the wafers is qualified. The automatic wafer transport device is a device that transports the wafers to the designated testing position.

[0003] The invention with the publication number CN101436562B discloses a dual-arm wafer transfer robot, and the key points of its technical solution are: solving the problems of low reliability of line and air pipe connection, short service life, limited vertical stroke and inability to meet the needs of large telescopic ratio movement in the vertical direction, and inconvenient disassembly and maintenance in the existing wafer transfer robot. The upper end of the auxiliary screw shaft of the auxiliary screw drive assembly passes through the middle flange and maintains a suspended state, the upper end of the main screw shaft of the main screw drive assembly passes through the middle flange, Z-axis sliding bracket, T-axis lower flange, T-axis upper flange and R-axis lower flange and maintains a suspended state, the lower end of the main spline guide rail spline shaft of the main spline guide rail assembly is fixedly connected to the middle flange, and the wiring module assembly is arranged between the T-axis upper flange and the R-axis lower flange. The present invention has the advantages of high reliability of line and air pipe connection, long service life, large vertical stroke and extremely convenient disassembly and maintenance.

[0004] With regard to the relevant contents mentioned above, the inventors believe that the following defects exist: in the prior art, the automatic wafer transfer device uses a robotic arm to drive a robotic arm to transfer the wafer, but the structure of the robotic arm in the device is fixed. When lifting and transferring wafers with a larger diameter, part of the wafer will be exposed in the air, which may easily lead to unstable lifting and transfer of the wafer, and may even cause the wafer to fall and cause large losses. Utility Model Content

[0005] The utility model aims to solve the shortcomings in the prior art and proposes an automatic wafer detection and wafer conveying device.

[0006] In order to solve the above technical problems, the utility model provides an automatic wafer inspection conveying device, comprising: a body, a workbench is fixedly connected to the upper surface of the body, a robot arm is installed on the upper surface of the workbench, two robot arms are installed on one side of the robot arm, a plurality of suction cups are installed on the upper surface of the robot arm, and an adjustment structure is provided on the lower surface of the robot arm, the adjustment structure comprises a fixed seat, the inner wall of the fixed seat is rotatably connected to a connecting plate, a servo motor is fixedly connected to one side of the fixed seat, the output end of the servo motor is fixedly connected to the connecting plate, a support plate is fixedly connected to one side of the connecting plate, and the cross-section of the support plate is "L" shaped.

[0007] The effect achieved by the above components is: by setting the adjustment structure, the support plate can be automatically driven to expand to lift the wafer with a larger diameter, so that the wafer can be more safely transferred to the designated inspection position, thereby achieving the effect of improving the stability of the wafer transmission device.

[0008] Preferably, a sliding hole is opened on one side of the fixed seat, the center of the sliding hole and the axis of rotation of the connecting plate are located on the same straight line, the inner wall of the sliding hole is slidably connected with a sliding rod, one end of the sliding rod is fixedly connected to the connecting plate, and one side of the inner wall of the sliding hole is fixedly connected with a positioning rod.

[0009] The effect achieved by the above-mentioned components is: when the servo motor drives the connecting plate to rotate along the inner wall of the fixed seat, the connecting plate will drive the sliding rod to move along the inner wall of the sliding hole, thereby achieving the effect of improving the rotation stability of the connecting plate, and after the connecting plate drives the supporting plate to rotate to a horizontal position, the sliding rod will abut against the positioning rod, thereby achieving the effect of enabling the supporting plate to rotate quickly to the specified position.

[0010] Preferably, a protective cover is provided on the outside of the servo motor, and one side of the protective cover is fixedly connected to a fixing seat.

[0011] The effects achieved by the above components are: the protective cover can cover and protect the servo motor, thereby achieving the effect of increasing the service life of the servo motor.

[0012] Preferably, a rubber pad is fixedly connected to the upper surface of the support plate, and the rubber pad is adapted to the size of the upper surface of the support plate.

[0013] The effect achieved by the above components is that the rubber pad can increase the friction on the upper surface of the support plate, thereby preventing the wafer from sliding on the upper surface of the support plate.

[0014] Preferably, an auxiliary structure is provided on one side of the body, and the auxiliary structure includes a baffle, the side of the baffle is in contact with the body, and two partitions are fixedly connected to the side of the baffle away from the body, a limit rod is slidably penetrated through the side of the partition, one end of the limit rod is fixedly connected to the body, a pressure rod is threadedly penetrated through one side of the partition, and a plurality of heat dissipation holes are opened on the side of the baffle.

[0015] The effect achieved by the above components is: by setting up the auxiliary structure, personnel can easily remove the baffle to inspect and maintain the electronic components inside the body, thereby increasing the service life of the wafer detection automatic film conveying device.

[0016] Preferably, one end of the limiting rod is fixedly connected to a guide block, and the guide block is specifically in a conical structure.

[0017] The effect achieved by the above components is: by arranging a guide block with a conical structure at one end of the limiting rod, the guide block has a small volume, so that the limiting rod can be easily inserted into the partition.

[0018] Preferably, two handles are fixedly connected to a side of the baffle away from the machine body.

[0019] The effect achieved by the above components is that the baffle can be driven by moving the handle, thereby achieving the effect of conveniently controlling the baffle.

[0020] Compared with the related art, the wafer inspection automatic film conveying device provided by the utility model has the following beneficial effects:

[0021] The utility model provides an automatic wafer conveying device for wafer inspection. By setting an adjustment structure, the support plate can be automatically driven to expand to lift wafers with larger diameters, so that the wafers can be more safely conveyed to a designated inspection position, thereby achieving the effect of improving the stability of the wafer conveying device.

[0022] By setting up the auxiliary structure, personnel can easily dismantle the baffle to inspect and maintain the electronic components inside the machine body, thereby increasing the service life of the wafer inspection automatic film conveying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the structure of the automatic wafer transfer device for wafer inspection provided by the utility model;

[0024] Figure 2 for Figure 1 A schematic diagram of the structure of the regulatory structure shown;

[0025] Figure 3 for Figure 2 The enlarged view of point A is shown;

[0026] Figure 4 for Figure 1 A schematic diagram of the local structure of the regulating structure shown;

[0027] Figure 5 for Figure 1 A schematic diagram of the auxiliary structure shown.

[0028] Numbers in the figure: 1. Machine body; 2. Workbench; 3. Adjustment structure; 31. Fixed seat; 32. Connecting plate; 33. Support plate; 34. Servo motor; 35. Rubber pad; 36. Protective cover; 37. Sliding hole; 38. Sliding rod; 39. Positioning rod; 4. Auxiliary structure; 41. Partition; 42. Pressure rod; 43. Limit rod; 44. Baffle; 45. Handle; 46. Heat dissipation hole; 47. Guide block; 5. Robot arm; 6. Robot hand; 7. Suction cup. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0030] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0031] See also Figures 1 to 5 The wafer inspection automatic wafer conveying device provided by the embodiment of the utility model includes: a body 1, a workbench 2 is fixedly connected to the upper surface of the body 1, a mechanical arm 5 is installed on the upper surface of the workbench 2, two mechanical hands 6 are installed on one side of the mechanical arm 5, a plurality of suction cups 7 are installed on the upper surface of the mechanical hand 6, an adjustment structure 3 is provided on the lower surface of the mechanical hand 6, and an auxiliary structure 4 is provided on one side of the body 1.

[0032] In the embodiments of the present invention, please refer to Figure 2 , Figure 3 and Figure 4 The adjusting structure 3 includes a fixing seat 31, the inner wall of the fixing seat 31 is rotatably connected with a connecting plate 32, one side of the fixing seat 31 is fixedly connected with a servo motor 34, the output end of the servo motor 34 is fixedly connected to the connecting plate 32, one side of the connecting plate 32 is fixedly connected with a supporting plate 33, and the cross-section of the supporting plate 33 is "L"-shaped. By setting the adjusting structure 3, the supporting plate 33 can be automatically driven to expand to lift a wafer with a larger diameter, so that the wafer can be more safely transmitted to the designated detection position, thereby achieving the effect of improving the stability of the wafer transmission device. A sliding hole 37 is provided on one side of the fixing seat 31, and the center of the sliding hole 37 is located on the same straight line as the axis of rotation of the connecting plate 32. A sliding rod 38 is slidably connected to the inner wall of the sliding hole 37, one end of the sliding rod 38 is fixedly connected to the connecting plate 32, and a positioning rod 39 is fixedly connected to one side of the inner wall of the sliding hole 37. When the servo motor 34 drives During the process of the connecting plate 32 rotating along the inner wall of the fixing seat 31, the connecting plate 32 will drive the sliding rod 38 to move along the inner wall of the sliding hole 37, thereby achieving the effect of improving the rotation stability of the connecting plate 32, and after the connecting plate 32 drives the supporting plate 33 to rotate to the horizontal position, the sliding rod 38 will abut against the positioning rod 39, thereby achieving the effect of enabling the supporting plate 33 to rotate quickly to the specified position. The outer sleeve of the servo motor 34 is provided with a protective cover 36, one side of the protective cover 36 is fixedly connected to the fixing seat 31, and the protective cover 36 can cover and protect the servo motor 34, thereby achieving the effect of increasing the service life of the servo motor 34, and the upper surface of the support plate 33 is fixedly connected with a rubber pad 35, and the rubber pad 35 is adapted to the size of the upper surface of the support plate 33. The rubber pad 35 can increase the friction force on the upper surface of the support plate 33, thereby achieving the effect of preventing the wafer from sliding on the upper surface of the support plate 33.

[0033] In the embodiments of the present invention, please refer to Figure 5 The auxiliary structure 4 includes a baffle 44, the side of the baffle 44 is in contact with the body 1, and the side of the baffle 44 away from the body 1 is fixedly connected to two partitions 41, and a limit rod 43 is slidably penetrated on the side of the partition 41, and one end of the limit rod 43 is fixedly connected to the body 1. A pressure rod 42 is threadedly penetrated on one side of the partition 41, and a plurality of heat dissipation holes 46 are opened on the side of the baffle 44. By setting the auxiliary structure 4, personnel can easily disassemble the baffle 44 to inspect and maintain the electronic components inside the body 1, thereby The service life of the wafer inspection automatic conveying device can be improved. One end of the limit rod 43 is fixedly connected to a guide block 47, and the guide block 47 is specifically a conical structure. By arranging the guide block 47 with a conical structure at one end of the limit rod 43, the volume of the guide block 47 is small, and the limit rod 43 can be easily inserted into the partition 41. Two handles 45 are fixedly connected to the side of the baffle 44 away from the body 1. Moving the handle 45 can drive the baffle 44, thereby achieving the effect of convenient control of the baffle 44.

[0034] The working principle of the automatic wafer conveying device for wafer inspection provided by the utility model is as follows: when the device is in use, it is necessary to start the mechanical arm 5 to drive the mechanical hand 6 to convey the wafer to the designated position for inspection. When the diameter of the transported wafer is large, the servo motor 34 is started to drive the connecting plate 32, so that the connecting plate 32 rotates along the inner wall of the fixed seat 31, and the connecting plate 32 drives the supporting plate 33 until the supporting plate 33 rotates to a horizontal position, so as to expand the lifting area of ​​the wafer. In the process of the servo motor 34 driving the connecting plate 32 to rotate along the inner wall of the fixed seat 31, the connecting plate 32 will drive the sliding rod 38 to move along the inner wall of the sliding hole 37, thereby achieving the effect of improving the rotation stability of the connecting plate 32. The effect is achieved, and after the connecting plate 32 drives the supporting plate 33 to rotate to the horizontal position, the sliding rod 38 will abut against the positioning rod 39, thereby achieving the effect of enabling the supporting plate 33 to rotate quickly to the specified position, wherein the protective cover 36 can cover and protect the servo motor 34, thereby achieving the effect of increasing the service life of the servo motor 34. In addition, the protective cover 36 can cover and protect the servo motor 34, thereby achieving the effect of increasing the service life of the servo motor 34. By setting the adjustment structure 3, the supporting plate 33 can be automatically driven to expand to lift the wafer with a larger diameter, so that the wafer can be more safely transmitted to the specified detection position, thereby achieving the effect of improving the stability of the wafer transmission device.

[0035] When it is necessary to remove the baffle 44 to maintain and repair the electronic options inside the body 1, first rotate the pressure rod 42 to separate the limit rod 43, and then move the handle 45 to drive the partition 41 to separate the partition 41 from the limit rod 43, and the baffle 44 can be removed. When the components inside the body 1 are repaired, the handle 45 is moved again to drive the baffle 44, and the baffle 44 drives the partition 41 to insert the limit rod 43 into the partition 41. When the partition 41 is moved to a suitable position, the pressure rod 42 is rotated again to abut against the limit rod 43, and the baffle 44 can be fixed. Among them, a guide block 47 with a conical structure is provided at one end of the limit rod 43. The volume of the guide block 47 is small, so that the limit rod 43 can be easily inserted into the partition 41. By providing the auxiliary structure 4, personnel can easily remove the baffle 44 to inspect and maintain the electronic components inside the body 1, thereby improving the service life of the wafer detection automatic transmission device.

[0036] The circuits and controls involved in the present invention are all prior art and will not be described in detail here.

[0037] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. Wafer inspection automatic wafer conveyor device, characterized in that: include: A machine body (1), wherein the upper surface of the machine body (1) is fixedly connected to a workbench (2), the upper surface of the workbench (2) is mounted with a mechanical arm (5), one side of the mechanical arm (5) is mounted with two mechanical hands (6), the upper surface of the mechanical hands (6) is mounted with a plurality of suction cups (7), the lower surface of the mechanical hands (6) is provided with an adjustment structure (3), the adjustment structure (3) comprises a fixed seat (31), the inner wall of the fixed seat (31) is rotatably connected to a connecting plate (32), one side of the fixed seat (31) is fixedly connected to a servo motor (34), the output end of the servo motor (34) is fixedly connected to the connecting plate (32), one side of the connecting plate (32) is fixedly connected to a support plate (33), and the cross section of the support plate (33) is in an "L" shape.

2. The wafer inspection automatic film conveying device according to claim 1, characterized in that: A sliding hole (37) is provided on one side of the fixing seat (31), the center of the sliding hole (37) and the axis of rotation of the connecting plate (32) are located on the same straight line, the inner wall of the sliding hole (37) is slidably connected to a sliding rod (38), one end of the sliding rod (38) is fixedly connected to the connecting plate (32), and one side of the inner wall of the sliding hole (37) is fixedly connected to a positioning rod (39).

3. The wafer inspection automatic wafer conveying device according to claim 1, characterized in that: The servo motor (34) is externally sleeved with a protective cover (36), and one side of the protective cover (36) is fixedly connected to the fixing seat (31).

4. The wafer inspection automatic wafer conveying device according to claim 1, characterized in that: A rubber pad (35) is fixedly connected to the upper surface of the support plate (33), and the rubber pad (35) is adapted to the size of the upper surface of the support plate (33).

5. The wafer inspection automatic wafer conveying device according to claim 1, characterized in that: An auxiliary structure (4) is provided on one side of the machine body (1), and the auxiliary structure (4) comprises a baffle (44), the side of the baffle (44) is in contact with the machine body (1), and the side of the baffle (44) away from the machine body (1) is fixedly connected to two partitions (41), a limit rod (43) is slidably penetrated through the side of the partition (41), one end of the limit rod (43) is fixedly connected to the machine body (1), a pressure rod (42) is threadedly penetrated through one side of the partition (41), and a plurality of heat dissipation holes (46) are opened on the side of the baffle (44).

6. The wafer inspection automatic wafer conveying device according to claim 5, characterized in that: One end of the limiting rod (43) is fixedly connected to a guide block (47), and the guide block (47) is specifically a conical structure.

7. The wafer inspection automatic wafer conveying device according to claim 5, characterized in that: Two handles (45) are fixedly connected to a side of the baffle (44) away from the machine body (1).

Images