Gas-phase liquid on-line filtering device and gas-phase liquid on-line filtering equipment

Abstract

The embodiment of the utility model discloses a gas phase liquid on-line type filtering device and equipment, which comprises a filtering component and a condenser arranged above the filtering component, a liquid discharge pipe is arranged below the condenser, a liquid discharge valve is arranged on one side of the liquid discharge pipe, the filtering component is connected with the condenser through the liquid discharge pipe, and the condenser is connected with the filtering component through the liquid discharge valve. The condenser is used for converting the gas-phase-liquid mixed steam into liquid, and the filtering assembly is used for separating gas phase and liquid in the liquid. Compared with the prior art, through the cooperation of the valves, the pipelines, the condenser and the filter, impurities mixed in gas-phase liquid steam are effectively filtered, the filtered gas-phase liquid can be recycled for multiple times, the production cost is greatly reduced, the filtering process is whole-course online filtering, and the production efficiency is improved. By means of an online filtering mode, gas-phase liquid can be filtered while being conveyed, the real-time filtering effect is achieved, and then the production efficiency is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor heating, in particular to a gas-phase liquid online filtering device and equipment. Background Art

[0002] When using gas phase heating, the product will have some volatile substances during the heating process, including flux used for welding, etc. These substances will be mixed in the gas phase steam during the heating process. When the gas phase liquid is reused for heating, the product is very likely to be contaminated. In the field of semiconductor heating, there are high requirements for the cleanliness of the gas phase liquid, and the gas phase liquid is expensive and cannot be easily replaced. When the impurities mixed in the gas phase liquid are not filtered out, the processed product cannot meet the production requirements. At this time, the gas phase liquid cannot be recycled and reused, and the production cost will be significantly increased. Utility Model Content

[0003] The utility model aims to provide a gas-phase liquid online filtering device and equipment, aiming to solve the problem of high production cost caused by difficulty in filtering gas-phase liquid impurities in the prior art.

[0004] In order to solve the above technical problems, the purpose of the utility model is achieved through the following technical solutions:

[0005] In the first aspect, the utility model provides a gas-liquid online filtering device, including a filtering assembly and a condenser arranged above the filtering assembly, a drain pipe is provided below the condenser, a drain valve is provided on one side of the drain pipe, the filtering assembly is connected to the condenser through the drain pipe, the condenser is used to convert gas-liquid mixed vapor into liquid, and the filtering assembly is used to separate gas-liquid in the liquid.

[0006] Furthermore, the filter assembly includes a multi-layer filter, a recovery pipe and a recovery valve, the multi-layer filter is divided into a cylindrical part and a conical part, the cylindrical part is located above the conical part, the drain pipe is connected to the top of the cylindrical part, the recovery pipe is connected to the bottom of the conical part, and the recovery valve is located on the recovery pipe.

[0007] Furthermore, the multi-layer filter includes a first filter layer, a second filter layer, a third filter layer and a gas-liquid layer, the first filter layer, the second filter layer and the third filter layer are all located in the columnar portion, and the gas-liquid layer is located in the conical portion.

[0008] Furthermore, the first filter layer, the second filter layer and the third filter layer are all cylindrical filter screens, the inner diameters of the first filter layer, the second filter layer and the third filter layer are arranged from small to large, and the first filter layer, the second filter layer and the third filter layer are sequentially connected.

[0009] Furthermore, the first filter layer and the second filter layer are respectively evenly provided with a plurality of first filter holes and second filter holes on their bodies, the third filter layer is provided with third filter holes on its bottom and top, and the sizes of the first filter holes, the second filter holes and the third filter holes decrease in sequence.

[0010] Furthermore, an air intake pipe, an air intake valve, an exhaust pipe and an exhaust valve are provided at the top of the condenser. The air intake valve is located on the air intake pipe, the exhaust valve is located on the exhaust pipe, the exhaust pipe is located on one side of the air intake pipe, and the exhaust pipe and the air intake pipe are both fixedly connected to the top of the condenser.

[0011] Furthermore, a storage tank is provided on one side of the multi-layer filter, and the storage tank is connected to the other end of the recovery pipe.

[0012] Furthermore, an adsorptive material is provided between the cylindrical filter screens.

[0013] Furthermore, a controller is included, and the air intake valve, the exhaust valve, the drain valve and the recovery valve are all controlled by the controller to achieve switching.

[0014] In a second aspect, the utility model provides a filtering device, comprising a gas-liquid online filtering device as described in any one of the above embodiments.

[0015] Compared with the prior art, the utility model has the following beneficial effects: the utility model injects gas-liquid mixed steam into the condenser for condensation, the unliquefied gas is discharged from the exhaust pipe, the liquefied gas is filtered layer by layer by the multi-layer filter in the filter assembly, and the gas-liquid layer is statically stratified, and the obtained gas-liquid flows into the storage tank from the recovery pipe for recycling. Compared with the prior art, the utility model effectively filters the impurities mixed in the gas-liquid steam through the coordination between the valves, pipelines, condensers and filters, and the filtered gas-liquid can be recycled for many times, which greatly reduces the production cost, and the filtering process is a full-process online filtering, which can filter while the gas-liquid is being transmitted through the online filtering method, achieving a real-time filtering effect, thereby effectively improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1A side view of a gas-liquid online filtering device provided by an embodiment of the utility model;

[0018] Figure 2 A front view of a gas-liquid online filtering device provided by an embodiment of the utility model;

[0019] Figure 3 A schematic diagram of a multi-layer filter structure of a gas-liquid online filtering device provided by an embodiment of the utility model;

[0020] Figure 4 A schematic diagram of a multi-layer filter structure of a gas-liquid online filtering device provided by an embodiment of the utility model;

[0021] Reference numerals:

[0022] 1. Condenser; 2. Filter assembly; 21. Multilayer filter; 211. Columnar portion; 212. Conical portion; 213. First filter layer; 2131. First filter hole; 214. Second filter layer; 2141. Second filter hole; 215. Third filter layer; 2151. Third filter hole; 216. Gas-liquid layer; 22. Recovery pipe; 23. Recovery valve; 3. Drain pipe; 4. Drain valve; 5. Inlet pipe; 6. Inlet valve; 7. Exhaust pipe; 8. Exhaust valve. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0025] It should also be understood that the terms used in this utility model specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. As used in this utility model specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0026] It should be further understood that the term “and / or” used in the present specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0027] See also Figures 1 to 4 The utility model provides a gas-liquid online filtering device and equipment, including a filtering component 2 and a condenser 1 arranged above the filtering component 2, a drain pipe 3 is arranged below the condenser 1, a drain valve 4 is arranged on one side of the drain pipe 3, the filtering component 2 is connected to the condenser 1 through the drain pipe 3, the condenser 1 is used to convert the gas-liquid mixed steam into liquid, and the filtering component 2 is used to separate the gas-liquid in the liquid.

[0028] Specifically, after the high-temperature steam mixed with gas-phase liquid enters the condenser 1, the condenser 1 provides sufficient refrigeration capacity to cool the gas-phase liquid mixed steam to the liquid phase temperature and then convert it into a mixed liquid. Some of the unliquefied gas is discharged from the condenser 1. When the mixed liquid accumulates to a certain amount, it gathers into a certain liquid level. By opening the drain valve 4, the mixed liquid enters the filter component 2. The mixed liquid is filtered through multiple layers in the filter component 2 to recover the gas-phase liquid. In this way, other substances mixed in the gas-phase liquid steam can be separated out to maintain the purity of the gas-phase liquid. In addition, through online filtration, filtration can be performed while the fluid is being transmitted, thereby achieving real-time filtration effect, thereby effectively improving production efficiency.

[0029] like Figure 2 As shown, the filter assembly 2 includes a multi-layer filter 21, a recovery pipe 22 and a recovery valve 23. The multi-layer filter 21 is divided into a cylindrical portion 211 and a conical portion 212. The cylindrical portion 211 is located above the conical portion 212. The drain pipe 3 is connected to the top of the cylindrical portion 211, the recovery pipe 22 is connected to the bottom of the conical portion 212, and the recovery valve 23 is located on the recovery pipe 22.

[0030] Specifically, the gas phase mixture cooled by the condenser 1 enters the multilayer filter 21 through the drain pipe 3 and the drain valve 4. The upper half of the multilayer filter 21 is cylindrical and the lower half is conical. Due to the structure of the conical filter, the flow performance of the fluid can be improved. When the liquid passes through the conical filter, a natural flow path is formed, which reduces the resistance of the liquid, improves the filtration efficiency, and ensures that the fluid can pass through the filter evenly.

[0031] like Figure 2-4 As shown, the multi-layer filter 21 includes a first filter layer 213 , a second filter layer 214 , a third filter layer 215 and a gas-liquid layer 216 . The first filter layer 213 , the second filter layer 214 and the third filter layer 215 are all located in the columnar portion 211 , and the gas-liquid layer 216 is located in the conical portion 212 .

[0032] Specifically, after entering the multi-layer filter 21, the gas-phase mixed liquid needs to pass through the first filter layer 213, the second filter layer 214, and the third filter layer 215 for three-stage filtration, gradually intercepting large solid impurities, small impurities, oil stains, etc. in the mixed liquid, and the remaining liquid flows into the conical part 212, and is stratified by density difference. The gas-phase liquid is deposited at the bottom of the gas-phase liquid layer 216. Utilizing the high density of the gas-phase liquid, the gas-phase liquid is separated from the gas-phase mixed liquid by static stratification extraction.

[0033] like Figure 4 As shown, the first filter layer 213, the second filter layer 214 and the third filter layer 215 are all cylindrical filter screens, and the inner diameters of the first filter layer 213, the second filter layer 214 and the third filter layer 215 are arranged from small to large, and the first filter layer 213, the second filter layer 214 and the third filter layer 215 are sequentially connected.

[0034] Specifically, in this embodiment, the multi-layer filter 21 is a multi-layer cylindrical filter structure, which can increase the surface area of ​​the multi-layer filter 21, increase the chance of contact between the substance and the filter, and thus improve the filtering efficiency. The multi-layer filter can better capture and remove solid particles, impurities or other pollutants suspended in the fluid, and the multi-layer cylindrical filter has a larger volume than the single-layer filter, which can accommodate more solid particles or pollutants, which means that the multi-layer filter 21 can process more fluids and extend the use time and replacement cycle.

[0035] like Figure 3-4 As shown, the first filter layer 213 and the second filter layer 214 are evenly provided with a plurality of first filter holes 2131 and second filter holes 2141 respectively, and the third filter layer 215 is provided with third filter holes 2151 at the bottom and top of the cylinder, and the sizes of the first filter holes 2131, the second filter holes 2141 and the third filter holes 2151 decrease successively.

[0036] Specifically, the outermost wall of the multi-layer cylindrical filter has no filter holes, and the gas phase mixed liquid flows out from the bottom of the third filter layer 215 after being filtered by the second layer, thereby preventing pollutants from entering the gas phase liquid layer 216 from the side wall of the cylindrical filter, thereby improving the filtering effect. Different levels of filter screens can filter particles of different sizes, and the coarser filter screen layer can capture large particles, while the finer filter screen layer can further remove tiny particles, thereby achieving more precise filtering control.

[0037] like Figure 1-2 As shown, the top of the condenser 1 is provided with an intake pipe 5, an intake valve 6, an exhaust pipe 7 and an exhaust valve 8. The intake valve 6 is located on the intake pipe 5, the exhaust valve 8 is located on the exhaust pipe 7, the exhaust pipe 7 is located on one side of the intake pipe 5, and the exhaust pipe 7 and the intake pipe 5 are both fixedly connected to the top of the condenser 1.

[0038] Specifically, in this embodiment, the gas phase liquid is recycled and enters the condenser 1 through the air inlet pipe 5 together with other vapors such as flux, while the exhaust pipe 7 can be pre-filtered to discharge the unliquefied gas.

[0039] like Figure 2 As shown, a storage tank (not shown) is also provided on one side of the multilayer filter 21, and the storage tank is connected to the other end of the recovery pipe 22. Specifically, when the gas phase liquid is filtered to a certain amount, the recovery valve 23 is opened, and the pure gas phase liquid is recovered to the storage tank for recycling.

[0040] In this embodiment, an adsorbent material is provided between the cylindrical filters.

[0041] Specifically, the adsorbent material is activated carbon, molecular sieve and other materials. In other embodiments, other types of materials may also be used according to the adsorption effect. By arranging the adsorbent material between the cylindrical filter screens, large solid impurities, small impurities, oil stains, etc. in the mixed liquid can be gradually intercepted, and particles and pollutants of different sizes and properties can be filtered layer by layer to provide a more effective purification effect.

[0042] In this embodiment, a controller is also included, and the air intake valve 6, the exhaust valve 8, the drain valve 4 and the recovery valve 23 are all controlled by the controller to realize switching.

[0043] Specifically, the controller can realize automatic control and optimized management of the filter system through the on-off control of each valve, thereby improving the filtering efficiency of the filter system, reducing operating costs, and extending the service life of the equipment.

[0044] See also Figures 1 to 4 The utility model also provides a filtering device, including a gas-liquid online filtering device as described in any one of the above embodiments.

[0045] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the utility model, and these modifications or replacements should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A gas-liquid online filtering device, characterized in that: It includes a filter assembly and a condenser arranged above the filter assembly, a drain pipe is arranged below the condenser, a drain valve is arranged on one side of the drain pipe, the filter assembly is connected to the condenser through the drain pipe, the condenser is used to convert gas-liquid mixed steam into liquid, and the filter assembly is used to separate gas-liquid in the liquid.

2. A gas-liquid online filtering device according to claim 1, characterized in that: The filter assembly includes a multi-layer filter, a recovery pipe and a recovery valve. The multi-layer filter is divided into a cylindrical part and a conical part. The cylindrical part is located above the conical part. The drain pipe is connected to the top of the cylindrical part. The recovery pipe is connected to the bottom of the conical part. The recovery valve is located on the recovery pipe.

3. A gas-liquid online filtering device according to claim 2, characterized in that: The multi-layer filter comprises a first filter layer, a second filter layer, a third filter layer and a gas-phase liquid layer, wherein the first filter layer, the second filter layer and the third filter layer are all located in the columnar portion, and the gas-phase liquid layer is located in the conical portion.

4. A gas-liquid online filtering device according to claim 3, characterized in that: The first filter layer, the second filter layer and the third filter layer are all cylindrical filter screens, the inner diameters of the first filter layer, the second filter layer and the third filter layer are arranged from small to large, and the first filter layer, the second filter layer and the third filter layer are sequentially connected.

5. A gas-liquid online filtering device according to claim 4, characterized in that: The first filter layer and the second filter layer are respectively evenly provided with a plurality of first filter holes and second filter holes on their bodies, the third filter layer is provided with third filter holes at the bottom and top of the cylinder, and the sizes of the first filter holes, the second filter holes and the third filter holes decrease in sequence.

6. A gas-liquid online filtering device according to claim 2, characterized in that: An air inlet pipe, an air inlet valve, an exhaust pipe and an exhaust valve are provided at the top of the condenser. The air inlet valve is located on the air inlet pipe, the exhaust valve is located on the exhaust pipe, the exhaust pipe is located on one side of the air inlet pipe, and the exhaust pipe and the air inlet pipe are both fixedly connected to the top of the condenser.

7. A gas-liquid online filtering device according to claim 5, characterized in that: A storage tank is also provided on one side of the multi-layer filter, and the storage tank is connected to the other end of the recovery pipe.

8. The gas-liquid online filtering device according to claim 4, characterized in that: Adsorbent materials are arranged between the cylindrical filters.

9. The gas-liquid online filtering device according to claim 6, characterized in that: It also includes a controller, and the air intake valve, the exhaust valve, the drain valve and the recovery valve are all controlled by the controller to achieve switching.

10. A filtering device, characterized in that: A gas-liquid online filtering device comprising any one of claims 1-9.

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