Silicon material slice spraying device with novel positioning structure

Abstract

The utility model discloses a silicon material slice spraying device with a novel positioning structure, which relates to the technical field of silicon material slice processing and comprises a right-angle bent plate, a water inlet pipe is arranged on the outer surface of one side of the right-angle bent plate, a water diversion plate is arranged in the water inlet pipe, and a water outlet groove is arranged on the outer surface of the bottom of the water inlet pipe. A water inlet pipe connector is arranged on the outer surface of the water inlet pipe, a bent pipe connector is arranged at the tail end of the water inlet pipe connector, a supporting flat plate is arranged at the top end of the water inlet pipe, and a first long bent plate is arranged on the lower side of the water inlet pipe. According to the novel silicon material slice spraying device with the positioning structure, water flow sprayed in the water inlet pipe can be controlled and adjusted through the arranged water distribution plate and the water outlet adjusting plate, so that a curtain-shaped water curtain can be formed at the liquid outlet, the water flow is uniform in size, continuous and consistent, and free of a flow cutoff phenomenon, and sufficient cooling of a cutting line is ensured; and the risk of line breaking in the wafer cutting process caused by non-uniform cooling is prevented, and the yield of output is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon material slicing processing, in particular to a silicon material slicing spraying device with a novel positioning structure. Background Art

[0002] As we all know, the foundation of modern information technology and modern electronic technology is semiconductor technology, and semiconductor silicon is the most important semiconductor material. Multi-wire cutting machines are widely used in the cutting of large-diameter ultra-thin silicon wafers due to their extremely high production efficiency and output rate. A spray device is required in the process of silicon wafer cutting. The silicon wafer must be sprayed with water to quickly cool the silicon wafer and can enter the next process only after it is separated from the glass plate.

[0003] The thickness and flow rate of water released by the existing spray device are inconsistent, resulting in poor spraying effect of the water curtain and uneven cooling, which causes the risk of wire breakage during wafer cutting. In order to solve the shortcomings of the existing technology, we propose a silicon material slicing spray device with a new positioning structure. Utility Model Content

[0004] The main purpose of the utility model is to provide a silicon material slice spraying device with a novel positioning structure, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A silicon material slicing spray device with a novel positioning structure comprises a right-angle bent plate, a water inlet pipe is arranged on the outer surface of one side of the right-angle bent plate, a water dividing plate is arranged inside the water inlet pipe, a water outlet trough is arranged on the outer surface of the bottom of the water inlet pipe, a water inlet pipe joint is arranged on the outer surface of the water inlet pipe, a bend pipe joint is arranged at the end of the water inlet pipe joint, a supporting plate is arranged on the top of the water inlet pipe, a No. 1 long bent plate is arranged on the lower side of the water inlet pipe, end plugging plates are arranged at both ends of the No. 1 long bent plate, the right-angle bent plate and the supporting plate are respectively fixed to the upper ends of two groups of end plugging plates, a baffle is arranged on the outer surface of the upper end of the No. 1 long bent plate, a No. 2 long bent plate is arranged at the bottom of the outer surface of the water inlet pipe, a sealing gasket is arranged on the outer surface of the front end of the No. 2 long bent plate, a water outlet regulating plate is arranged on the outer surface of the front end of the sealing gasket, a plurality of groups of screws are arranged on the outer surface of the water outlet regulating plate, and the screws pass through the water outlet regulating plate and are connected to the sealing gasket.

[0007] Preferably, bent plate supporting ribs are provided on the inner side of the right-angle bent plate, water inlet pipe supporting ribs are provided at the connection between the water inlet pipe and the right-angle bent plate, and water inlet pipe supporting ribs are also provided at the connection between the water inlet pipe and the supporting plate.

[0008] Preferably, plugs are provided at both ends of the water inlet pipe, wherein one end of the water inlet pipe passes through the right-angle bent plate, and the other end of the water inlet pipe passes through the supporting plate.

[0009] Preferably, the No. 1 long curved plate is fixedly connected to the supporting plate, the No. 1 long curved plate is fixedly connected to the right-angle curved plate, and the water inlet pipe is fixedly connected to the No. 2 long curved plate.

[0010] Preferably, screws are provided between the water outlet regulating plate and the sealing gasket, and the water outlet regulating plate and the sealing gasket are detachably connected via the screws; a water inlet pipe joint is provided between the water inlet pipe and the elbow joint, and the water inlet pipe and the elbow joint are detachably connected via the water inlet pipe joint.

[0011] Preferably, a plug is provided between the water inlet pipe and the right-angle bent plate, and the water inlet pipe and the right-angle bent plate are detachably connected via the plug. A plug is provided between the water inlet pipe and the supporting plate, and the water inlet pipe and the supporting plate are detachably connected via the plug.

[0012] Beneficial Effects

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. In the utility model, the water flow sprayed in the water inlet pipe can be controlled and adjusted by setting the water distribution plate and the water outlet regulating plate, so that a curtain-like water curtain can be formed at the liquid outlet, and the water flow is uniform, continuous and consistent, without interruption, ensuring that the cutting line is fully cooled, preventing the risk of line breakage during wafer cutting caused by uneven cooling, and improving the output qualification rate.

[0015] 2. In the utility model, the water inlet pipe is supported and fixed by the right-angle bent plate and the supporting plate, and the No. 1 long bent plate at the bottom is used to make the structure of the spray device strong and durable, and the connection points are well sealed, so there will be no water leakage, which is conducive to use in large-scale processing occasions. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the connection structure of the No. 1 long curved plate and the water inlet pipe of the utility model;

[0018] Figure 3 It is a schematic diagram of the structure of the water outlet regulating plate of the utility model;

[0019] Figure 4 It is a schematic diagram of the water inlet pipe structure of the utility model.

[0020] In the figure: 1. right-angle bent plate; 2. bent plate supporting ribs; 3. water inlet pipe supporting ribs; 4. water inlet pipe; 5. No. 1 long bent plate; 6. baffle; 7. water inlet pipe joint; 8. support block; 9. support plate; 10. end plugging plate; 11. water outlet regulating plate; 12. sealing gasket; 13. water distribution plate; 14. plug; 15. elbow joint; 16. screws; 17. No. 2 long bent plate; 18. water outlet trough. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0022] Embodiment 1, as Figure 1-4 As shown, a silicon material slicing spray device with a novel positioning structure is used in the cooling process during silicon material slicing processing. When in use, the device is fixed to the upper end of the cutting device, and the water inlet pipe joint 7 is connected to the inside of the water inlet pipe 4, and the external water source is connected using the elbow pipe joint 15 to continuously supply water to the water inlet pipe 4. Then, the silicon wafer is sprayed through the water outlet trough 18 on the lower side of the water inlet pipe 4, so as to achieve the cooling effect. The water flow sprayed in the water inlet pipe 4 can be controlled and adjusted through the water distribution plate 13 inside the water inlet pipe 4 and the water outlet regulating plate 11 at the lower end, so as to achieve the effect of accurately controlling the water output, so that the water outlet trough 18 can finally form a curtain-like water curtain, and the water flow is uniform, continuous and consistent, and there is no interruption phenomenon, so as to ensure that the cutting line is fully cooled, prevent the risk of line breakage during wafer cutting caused by uneven cooling, and improve the output qualification rate.

[0023] Embodiment 2, as Figure 1-3 As shown, a silicon material slicing spray device with a novel positioning structure is used. The device utilizes right-angle bent plates 1 and supporting flat plates 9 arranged at both ends to support and fix the water inlet pipe 4. End plugging plates 10 are installed on both sides of the No. 1 long bent plate at the bottom. By utilizing multiple positioning reinforcement structures, the structure of the spray device is highly firm and durable, and the connection points are well sealed. A sealing gasket 12 is connected and fixed between the water outlet regulating plate 11 and the water inlet pipe 4, so that water leakage will not occur. The device has high reliability and is conducive to use in large-scale processing occasions.

[0024] How it works

[0025] It should be noted that the utility model is a silicon material slicing spraying device with a novel positioning structure. When in use, the device is fixed to the upper end of the cutting device, and the water inlet pipe joint 7 is connected to the inside of the water inlet pipe 4, and the external water source is connected by the elbow pipe joint 15 to continuously supply water to the water inlet pipe 4, and then the silicon wafer is sprayed through the water outlet trough 18 at the lower side of the water inlet pipe 4, so as to achieve the effect of cooling. The water flow sprayed in the water inlet pipe 4 can be controlled and adjusted through the water distribution plate 13 inside the water inlet pipe 4 and the water outlet regulating plate 11 at the lower end, so as to adjust the water output. The effect of precise control is achieved, so that the water outlet trough 18 can eventually form a curtain-like water curtain, the water flow is uniform, continuous and consistent, and there is no interruption, ensuring that the cutting line is fully cooled. The device uses the right-angle bent plates 1 and the supporting flat plates 9 set at both ends to support and fix the water inlet pipe 4. End plugging plates 10 are installed on both sides of the No. 1 long bent plate at the bottom. Using multiple positioning reinforcement structures, the structure of the spray device is highly firm and durable, and the connection points are well sealed. A sealing gasket 12 is connected and fixed between the water outlet adjustment plate 11 and the water inlet pipe 4, and there will be no water leakage.

[0026] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A silicon material slice spraying device with a novel positioning structure, comprising a right-angle bent plate (1), characterized in that: A water inlet pipe (4) is arranged on the outer surface of one side of the right-angle bent plate (1), a water dividing plate (13) is arranged inside the water inlet pipe (4), a water outlet trough (18) is arranged on the outer surface of the bottom of the water inlet pipe (4), a water inlet pipe joint (7) is arranged on the outer surface of the water inlet pipe (4), a bend pipe joint (15) is arranged at the end of the water inlet pipe joint (7), a supporting plate (9) is arranged at the top of the water inlet pipe (4), a No. 1 long bent plate (5) is arranged on the lower side of the water inlet pipe (4), and end plugging plates (10) are arranged at both ends of the No. 1 long bent plate (5), and the right-angle bent plate (1) is provided at the bottom of the water inlet pipe (4). The plate (1) and the supporting plate (9) are respectively fixed to the upper ends of the two groups of end blocking plates (10); a baffle (6) is provided on the outer surface of the upper end of the first long curved plate (5); a second long curved plate (17) is provided at the bottom of the outer surface of the water inlet pipe (4); a sealing gasket (12) is provided on the front end outer surface of the second long curved plate (17); a water outlet regulating plate (11) is provided on the front end outer surface of the sealing gasket (12); a plurality of screws (16) are provided on the outer surface of the water outlet regulating plate (11); the screws (16) pass through the water outlet regulating plate (11) and are connected to the sealing gasket (12).

2. According to the novel positioning structure of the silicon material slice spraying device of claim 1, it is characterized by: The inner side of the right-angle bent plate (1) is provided with bent plate support ribs (2), the connection between the water inlet pipe (4) and the right-angle bent plate (1) is provided with water inlet pipe support ribs (3), and the connection between the water inlet pipe (4) and the supporting plate (9) is also provided with water inlet pipe support ribs (3).

3. The silicon material slice spraying device with a novel positioning structure according to claim 1 is characterized in that: Both ends of the water inlet pipe (4) are provided with plugs (14), wherein one end of the water inlet pipe (4) passes through the right-angle bent plate (1), and the other end of the water inlet pipe (4) passes through the supporting plate (9).

4. The silicon material slice spraying device with a novel positioning structure according to claim 1 is characterized in that: The first long curved plate (5) is fixedly connected to the supporting plate (9), the first long curved plate (5) is fixedly connected to the right-angle curved plate (1), and the water inlet pipe (4) is fixedly connected to the second long curved plate (17).

5. The silicon material slice spraying device with a novel positioning structure according to claim 1 is characterized in that: A screw (16) is provided between the water outlet regulating plate (11) and the sealing gasket (12), and the water outlet regulating plate (11) and the sealing gasket (12) are detachably connected via the screw (16); a water inlet pipe joint (7) is provided between the water inlet pipe (4) and the elbow joint (15), and the water inlet pipe (4) and the elbow joint (15) are detachably connected via the water inlet pipe joint (7).

6. The silicon material slice spraying device with a novel positioning structure according to claim 3 is characterized in that: A plug (14) is provided between the water inlet pipe (4) and the right-angle bent plate (1), and the water inlet pipe (4) and the right-angle bent plate (1) are detachably connected via the plug (14); a plug (14) is provided between the water inlet pipe (4) and the supporting plate (9), and the water inlet pipe (4) and the supporting plate (9) are detachably connected via the plug (14).

Images