Correction barrier strip assembly and magnetron sputtering coating machine

Abstract

The utility model relates to a correction barrier strip assembly and a magnetron sputtering coating machine. The correction barrier strip assembly comprises a supporting structure, a barrier strip structure and an adjusting structure. The blocking strip structure is arranged on the supporting structure and comprises a correction blocking strip, and the correction blocking strip is provided with gear teeth. The adjusting structure is matched with the correction blocking strip and comprises a rotary knob, a connecting shaft and a gear, the rotary knob is connected with the first end of the connecting shaft, the gear is connected with the second end of the connecting shaft, and the gear is meshed with the gear teeth. According to the technical scheme, the problems that in the prior art, the efficiency is low when the correction blocking strip is adjusted, and a corresponding adjusting structure is large in occupied space and high in cost are effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of coating, and in particular to a correction bar assembly and a magnetron sputtering coating machine. Background Art

[0002] Correction bars are one of the important methods for adjusting and controlling the uniformity of magnetron sputtering coating machines. Usually, one coating target corresponds to one correction bar. Correction bars can prevent coating materials from covering the surface of the product. Therefore, when coating the surface of the product, the coating thickness and coating range of the product surface can be regulated by adjusting the coverage area of ​​the correction bars on the product.

[0003] Since the correction bar is inside the vacuum chamber and the coating operation needs to be performed under vacuum, the uniformity adjustment commonly used in the industry requires breaking the vacuum of the coating chamber and then adjusting the correction bar. A single adjustment takes about 90 to 120 minutes, which is time-consuming.

[0004] The existing correction bar that is easy to adjust (for example: the authorization announcement number is: CN210560704U, the name is: a film thickness correction baffle of the radio frequency ion source system of a magnetron sputtering coating machine) has a rack fixed on the top of the cylinder of the top rod of the film thickness correction bar of the radio frequency ion source system of the magnetron sputtering coating machine, and the gear plate and the rack are meshed with each other. The rack can slide along the guide rail driven by the cylinder, and the movement of the rack drives the correction plate to rotate through the gear plate to complete the adjustment of the angle of the correction plate. However, this device requires a corresponding angle adjustment structure to be set for each set of correction bars, which occupies a large space and is too costly. Utility Model Content

[0005] The present application provides a correction bar assembly and a magnetron sputtering coating machine to solve the problems in the prior art that the correction bar has low efficiency during adjustment and the corresponding adjustment structure occupies a large space and has high cost.

[0006] A correction bar assembly provided by the present application includes: a support structure, a bar structure and an adjustment structure. The bar structure is arranged on the support structure, the bar structure includes a correction bar, and the correction bar has gear teeth. The adjustment structure cooperates with the correction bar, and the adjustment structure includes a knob, a connecting shaft and a gear, the knob is connected to the first end of the connecting shaft, the gear is connected to the second end of the connecting shaft, and the gear is meshed with the gear teeth.

[0007] In some embodiments, the correction bar has a first mating section and a second mating section, the first mating section is connected to the second mating section, and the gear teeth are arranged on the first mating section and face the second mating section.

[0008] In some embodiments, the second mating section has a slide groove, the supporting structure includes a first support plate, the first support plate has a first threaded hole and a second threaded hole, two sets of screws pass through the slide groove respectively and are screwed with the first threaded hole and the second threaded hole, and the second mating section is movably arranged on the first support plate.

[0009] In some embodiments, the support structure further includes a second support plate and a base, the first support plate and the second support plate are both disposed on the base, and the first support plate and the second support plate are disposed opposite to each other.

[0010] In some embodiments, the first support plate has a first matching hole, the second support plate has a second matching hole, the first end of the connecting shaft passes through the first matching hole, and the second end of the connecting shaft passes through the second matching hole.

[0011] In some embodiments, the knob is provided with scales and numbers.

[0012] The present application also provides a magnetron sputtering coating machine, which includes a correction bar assembly. The magnetron sputtering coating machine also includes a vacuum chamber, the vacuum chamber has a containing space, and the support structure and the bar structure are both located in the vacuum chamber.

[0013] In some embodiments, a through hole is provided on the side wall of the vacuum chamber, the connecting shaft passes through the through hole and is connected to the knob, and the knob is located outside the vacuum chamber.

[0014] In some embodiments, a sealed magnetic fluid is disposed between the via hole and the connecting shaft.

[0015] In some embodiments, the magnetron sputtering coating machine also includes a clamping assembly, which includes a driving motor, a rotating shaft, a turntable and multiple sets of clamps. The driving motor is connected to the rotating shaft through a transmission connection, the rotating shaft and the turntable are connected, and the multiple sets of clamps are all arranged on the turntable, and the clamps are used to fix the product to be coated.

[0016] By applying the technical solution of the present application, the correction bar assembly includes a supporting structure, a bar structure and an adjustment structure. The bar structure is arranged on the supporting structure to facilitate the uniformity adjustment of the bar structure. The adjustment structure cooperates with the correction bar, and the adjustment structure can adjust the correction bar, thereby adjusting the coverage area of ​​the correction bar. The knob is connected to the first end of the connecting shaft, and the connecting shaft can be driven to rotate synchronously by turning the knob. The gear is connected to the second end of the connecting shaft, and the connecting shaft drives the gear to rotate synchronously. The gear and the gear teeth are meshed, and as the gear rotates, the correction bar is driven to move, thereby adjusting the coverage area of ​​the correction bar. The correction bar can be adjusted by turning the knob, which greatly improves the efficiency of the adjustment, and the overall space occupied by the adjustment structure is small and the cost is low. The technical solution of the present application effectively solves the problems in the prior art that the correction bar is inefficient when adjusting, and the corresponding adjustment structure occupies a large space and is costly. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0019] Figure 1 A schematic structural diagram of a support structure of an embodiment of the present application is shown;

[0020] Figure 2 Shows Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0021] Figure 3 A schematic diagram showing the structure of the gear bar structure and the adjustment structure of an embodiment of the present application is shown;

[0022] Figure 4 A schematic structural diagram of a magnetron sputtering coating machine according to an embodiment of the present application is shown;

[0023] Figure 5 A left-side structural schematic diagram of a correction bar assembly according to an embodiment of the present application is shown;

[0024] Figure 6 A cross-sectional structural schematic diagram of a correction bar assembly according to an embodiment of the present application is shown;

[0025] Figure 7 A front structural schematic diagram of a correction bar assembly according to an embodiment of the present application is shown.

[0026] The above drawings include the following reference numerals:

[0027] 10. Correction bar assembly; 11. Support structure; 111. First support plate; 112. Second support plate; 113. Base; 12. Bar structure; 121. Correction bar; 1211. Gear; 1212. First mating section; 1213. Second mating section; 13. Adjustment structure; 131. Knob; 132. Connecting shaft; 133. Gear; 20. Vacuum chamber; 30. Sealed magnetic fluid; 100. Product to be coated. DETAILED DESCRIPTION

[0028] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0029] It should be noted that the following detailed descriptions are illustrative and are intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present application belongs.

[0030] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways, rotated 90 degrees or in other orientations, and the spatially relative descriptions used herein are interpreted accordingly.

[0031] like Figures 1 to 3 As shown, the embodiment relates to a correction bar assembly 10, comprising: a support structure 11, a bar structure 12 and an adjustment structure 13. The bar structure 12 is arranged on the support structure 11, and the bar structure 12 comprises a correction bar 121, and the correction bar 121 has gear teeth 1211. The adjustment structure 13 cooperates with the correction bar 121, and the adjustment structure 13 comprises a knob 131, a connecting shaft 132 and a gear 133, the knob 131 is connected to a first end of the connecting shaft 132, the gear 133 is connected to a second end of the connecting shaft 132, and the gear 133 is meshed with the gear teeth 1211.

[0032] By applying the technical solution of this embodiment, the correction bar assembly 10 includes a support structure 11, a bar structure 12 and an adjustment structure 13. The bar structure 12 is arranged on the support structure 11 to facilitate the uniformity adjustment of the bar structure 12. The adjustment structure 13 cooperates with the correction bar 121, and the adjustment structure 13 can adjust the correction bar 121, thereby adjusting the coverage area of ​​the correction bar 121. The knob 131 is connected to the first end of the connecting shaft 132, and the connecting shaft 132 can be driven to rotate synchronously by rotating the knob 131. The gear 133 is connected to the second end of the connecting shaft 132, and the connecting shaft 132 drives the gear 133 to rotate synchronously. The gear 133 is meshed with the gear 1211. As the gear 133 rotates, the correction bar 121 is driven to move, thereby adjusting the coverage area of ​​the correction bar 121. The correction bar 121 can be adjusted by turning the knob 131, which greatly improves the efficiency of the adjustment, and the adjustment structure 13 occupies a small space as a whole and is low in cost. The technical solution of this embodiment effectively solves the problem in the prior art that the correction bar 121 is inefficient when adjusting, and the corresponding adjustment structure 13 occupies a large space and is high in cost.

[0033] It should be noted that there are multiple groups of correction bars 121 and multiple groups of adjustment structures 13 , and the multiple groups of adjustment structures 13 and the multiple groups of correction bars 121 are arranged in a one-to-one correspondence.

[0034] like Figure 3 As shown, in some embodiments, the correction bar 121 has a first mating section 1212 and a second mating section 1213, the first mating section 1212 is connected to the second mating section 1213, and the gear 1211 is arranged on the first mating section 1212 and faces the second mating section 1213. It should be noted that when viewed from top to bottom, the second mating section 1213 is located within the projection of the first mating section 1212. The purpose of this arrangement is that the sliding groove on the second mating section 1213 can support the connecting shaft 132, and the meshing of the gear 133 and the gear 1211 is not easily affected.

[0035] like Figures 1 to 3 As shown, in some embodiments, the second mating section 1213 has a slide groove, the support structure 11 includes a first support plate 111, the first support plate 111 has a first threaded hole and a second threaded hole, two groups of screws pass through the slide groove respectively and are screwed with the first threaded hole and the second threaded hole, the two groups of screws are set with a spacing distance, the screws and the slide groove are abutted against each other to achieve support for the bar structure 12, the second mating section 1213 is movably set on the first support plate 111, the gear 133 is engaged with the gear teeth 1211 to drive the first mating section 1212 to move, at this time the slide groove moves relative to the screw, and the second mating section 1213 moves under the drive of the adjustment structure 13 to achieve adjustment of the covering area of ​​the product 100 to be coated.

[0036] like Figure 1 , Figure 5 , Figure 6 and Figure 7 As shown, in some embodiments, the support structure 11 further includes a second support plate 112 and a base 113, and the first support plate 111 and the second support plate 112 are both disposed on the base 113, and the first support plate 111 and the second support plate 112 are disposed opposite to each other. The first support plate 111 and the second support plate 112 are used to support the adjustment structure 13 and the stop bar structure 12. It should be noted that an emission source may be installed on the second support plate 112 to emit a material for coating onto the product 100 to be coated.

[0037] like Figure 1 and Figure 2 As shown, in some embodiments, the first support plate 111 has a first matching hole, the second support plate 112 has a second matching hole, the first end of the connecting shaft 132 passes through the first matching hole, and the second end of the connecting shaft 132 passes through the second matching hole. The connecting shaft 132 passes through the slide slot and then passes through the first matching hole, and the connecting shaft 132 is rotatably arranged in the first matching hole and the second matching hole. The connecting shaft 132 is fixedly connected to the knob 131 after passing through the second matching hole, and the first support plate 111 and the second support plate 112 jointly support the connecting shaft 132. The gear 133 is located between the first support plate 111 and the second support plate 112, and the knob 131 is located on the side of the second support plate 112 away from the gear 133.

[0038] like Figure 3 As shown, in some embodiments, the knob 131 is provided with scales and numbers. The purpose of this setting is that for different products 100 to be coated, the number of correction bars 121 that need to be involved in the work and the covering area are different, so setting scales and numbers can better control. The scale is set so that the angle of rotation of the knob 131 is readable, and the degree of rotation of the knob 131 reflects the degree of movement of the correction bar 121. Therefore, by recording the rotation of the knob 131, the movement of the correction bar 121 can be accurately controlled. Multiple groups of adjustment structures 13 are numbered accordingly, and the number of adjustment structures 13 involved in the adjustment can be selected according to the corresponding products 100 to be coated.

[0039] like Figure 4As shown, the present application also provides a magnetron sputtering coating machine, the magnetron sputtering coating machine includes a correction bar assembly 10, the magnetron sputtering coating machine also includes a vacuum chamber 20, the vacuum chamber 20 has a containing space, the support structure 11 and the bar structure 12 are both located in the vacuum chamber 20, and the product to be coated 100 is located in the vacuum chamber 20. The emission source is arranged on the inner wall of the vacuum chamber 20, facing the product to be coated 100. The spacing distance between the correction bar 121 and the emission source can be adjusted by moving the base 113.

[0040] like Figure 4 As shown, in some embodiments, a through hole is provided on the side wall of the vacuum chamber 20, and the connecting shaft 132 passes through the through hole and is connected to the knob 131, and the knob 131 is located outside the vacuum chamber 20. The connecting shaft 132 passes through the second matching hole on the second support plate 112, and then passes through the through hole on the side wall of the vacuum chamber 20, and then is connected to the knob 131. Or the connecting shaft 132 passes through the through hole and is connected to the knob 131, and the second support plate 112 is not provided, and the support of the connecting shaft 132 is achieved by the first support plate 111 and the side wall of the vacuum chamber 20. A sealing magnetic fluid 30 is provided between the through hole and the connecting shaft 132, and the sealing magnetic fluid 30 can play a good sealing role to maintain the vacuum environment in the vacuum chamber 20.

[0041] In some embodiments, the magnetron sputtering coating machine further includes a clamping assembly, which is arranged in the vacuum chamber. The clamping assembly includes a driving motor, a rotating shaft, a rotating disk and a plurality of clamps. The driving motor is connected to the rotating shaft, the driving motor drives the rotating shaft to rotate, the rotating shaft is connected to the rotating disk, the rotating shaft drives the rotating disk to rotate synchronously, and the plurality of clamps are arranged circumferentially on the rotating disk, and the clamps are used to fix the product 100 to be coated. The driving motor drives the rotating shaft to rotate the rotating disk, and the rotating disk drives the clamps to rotate synchronously so that the product 100 to be coated is opposite to the emission source. At this time, the position of the clamp is the coating position. The adjustment structure 13 is adjusted according to the type of the product 100 to be coated, so that the gear bar structure 12 is in a correction state, and then the coating is carried out. After the coating is completed, the driving motor drives the rotating shaft to rotate, so that another group of clamps rotates to the coating position, and the coating is carried out again. For the same product 100 to be coated, this arrangement can coat multiple groups of products 100 to be coated at one time, and the correction gear bar 121 does not need to be adjusted multiple times, which greatly improves the coating efficiency.

[0042] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0043] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0044] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A correction bar assembly (10), characterized in that: include: Support structure (11); A gear bar structure (12), the gear bar structure (12) being arranged on the support structure (11), the gear bar structure (12) comprising a correction gear bar (121), the correction gear bar (121) having gear teeth (1211); An adjustment structure (13), wherein the adjustment structure (13) cooperates with the correction gear bar (121), and the adjustment structure (13) comprises a knob (131), a connecting shaft (132) and a gear (133), wherein the knob (131) is connected to a first end of the connecting shaft (132), the gear (133) is connected to a second end of the connecting shaft (132), and the gear (133) is meshed with the gear teeth (1211).

2. The correction bar assembly (10) according to claim 1, characterized in that: The correction strip (121) comprises a first mating section (1212) and a second mating section (1213), the first mating section (1212) being connected to the second mating section (1213), and the gear teeth (1211) being arranged on the first mating section (1212) and facing the second mating section (1213).

3. The correction bar assembly (10) according to claim 2, characterized in that: The second mating section (1213) has a slide groove, the supporting structure (11) comprises a first supporting plate (111), the first supporting plate (111) has a first threaded hole and a second threaded hole, two groups of screws respectively pass through the slide groove and are screwed with the first threaded hole and the second threaded hole, and the second mating section (1213) is movably arranged on the first supporting plate (111).

4. The correction bar assembly (10) according to claim 3, characterized in that: The support structure (11) further comprises a second support plate (112) and a base (113); the first support plate (111) and the second support plate (112) are both arranged on the base (113), and the first support plate (111) and the second support plate (112) are arranged opposite to each other.

5. The correction bar assembly (10) according to claim 4, characterized in that: The first support plate (111) has a first matching hole, the second support plate (112) has a second matching hole, the first end of the connecting shaft (132) passes through the first matching hole, and the second end of the connecting shaft (132) passes through the second matching hole.

6. The correction bar assembly (10) according to claim 5, characterized in that: The knob (131) is provided with scales and numbers.

7. A magnetron sputtering coating machine, comprising the correction bar assembly (10) as described in any one of claims 1 to 6, and the magnetron sputtering coating machine also includes a vacuum chamber (20), the vacuum chamber (20) has a accommodating space, and the support structure (11) and the bar structure (12) are both located in the vacuum chamber (20).

8. The magnetron sputtering coating machine according to claim 7, characterized in that: A through hole is provided on the side wall of the vacuum chamber (20); the connecting shaft (132) passes through the through hole and is connected to the knob (131); and the knob (131) is located outside the vacuum chamber (20).

9. The magnetron sputtering coating machine according to claim 8, characterized in that: A sealing magnetic fluid (30) is provided between the through hole and the connecting shaft (132).

10. The magnetron sputtering coating machine according to claim 9, characterized in that: The magnetron sputtering coating machine also includes a clamping assembly, which includes a driving motor, a rotating shaft, a turntable and multiple groups of clamps. The driving motor is connected to the rotating shaft in a transmission manner, and the rotating shaft is connected to the turntable. Multiple groups of clamps are arranged on the turntable, and the clamps are used to fix the product to be coated (100).

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