Novel vacuum gate valve

Abstract

The utility model relates to the technical field of vacuum gate valves, in particular to a novel vacuum gate valve which comprises a vacuum gate valve box with a feeding hole, a valve plate is arranged in the vacuum gate valve box, a sealing ring is adhered to the end face of one end of the valve plate, and the end face of the other end of the valve plate is fixedly connected with a driving connecting rod. The bottom of the driving connecting rod is connected with the driving end of the vertical air cylinder, the fixed end of the vertical air cylinder is slidably connected with the inner wall of the vacuum gate valve box, the outer surface of the driving connecting rod is connected with the connecting plate, the horizontal air bag is arranged between the connecting plate and the interior of the vacuum gate valve box, and the horizontal air bag is controlled to expand through a corresponding air pump. The connecting plate can be pushed to move forwards, the sealing ring connected with the valve plate and the vacuum gate valve box are attached together so as to achieve the sealing purpose, and the horizontal air bag is of a tire-like structure, so that compared with an air cylinder, the horizontal air bag is better in flexibility, larger in thrust, flexible in arrangement and not limited to a circle or an ellipse. And the size and the complexity of the system are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum gate valves, in particular to a novel vacuum gate valve. Background Art

[0002] Vacuum gate valves are often used in vacuum transfer systems, which usually have wafer front-end devices, vacuum locks, vacuum transfer systems, and vacuum process chambers. The wafer front-end device moves the wafers in the wafer box to the vacuum lock in the atmospheric environment, and the vacuum transfer system transfers the wafers in the vacuum lock to the vacuum process chamber for wafer processing. The vacuum gate valve is used to isolate the vacuum transfer system and the vacuum process chamber.

[0003] The common vacuum valve structure includes a vacuum valve box, a valve plate, a driving connecting rod, a sealing ring, a bellows, a connecting plate, a horizontal cylinder and a vertical cylinder. When the vacuum valve is closed, the vertical cylinder pushes the valve plate and the driving connecting rod upward. When the valve plate and the driving connecting rod are moved to the uppermost end, the horizontal cylinder pushes the valve plate and the driving connecting rod forward, so that the sealing ring on the valve plate and the vacuum valve box fit together to achieve the purpose of sealing.

[0004] Since the valve plate of the vacuum gate valve is subject to atmospheric pressure, the horizontal cylinder needs to provide a sufficiently large thrust. Since the cylinder thrust is proportional to the cylinder diameter, the piston of an ordinary cylinder is generally round or elliptical, and is controlled by the geometric shape. To achieve sufficient thrust, a large-area piston is required, which increases the volume and complexity of the system.

[0005] Therefore, it is necessary to provide a new vacuum gate valve to solve the above technical problems. Utility Model Content

[0006] In order to solve the above technical problems, the utility model provides a novel vacuum gate valve.

[0007] The utility model provides a novel vacuum gate valve, comprising: a vacuum gate valve box with a feed hole, a valve plate is arranged inside the vacuum gate valve box, a sealing ring is bonded to the end surface of one end of the valve plate, the other end surface of the valve plate is fixedly connected to a driving connecting rod, the bottom of the driving connecting rod is connected to the driving end of a vertical cylinder, the fixed end of the vertical cylinder is slidably connected to the inner wall of the vacuum gate valve box, the outer surface of the driving connecting rod is connected to a connecting plate, a horizontal air bag is arranged between the connecting plate and the inside of the vacuum gate valve box, and a bellows is sleeved on the outside of the driving connecting rod.

[0008] Preferably, the vacuum gate valve box includes an upper end and a lower end, the inner diameter of the upper end is smaller than the inner diameter of the lower end, the bellows is installed at the connection between the upper end and the lower end, and the feed hole is arranged on the inner wall of the upper end.

[0009] Preferably, the connecting plate is rectangular in shape, and is provided with a connecting hole, and the connecting hole sleeve is connected to the outer surface of the driving connecting rod.

[0010] Preferably, the driving connecting rod includes a driving upper end and a driving lower end, the width of the driving upper end is greater than the width of the driving lower end, and the driving lower end is shaft-shaped.

[0011] Preferably, a limit ring is installed at the connection between the upper end and the lower end, and the width of the inner side of the limit ring is smaller than the width of the driving upper end.

[0012] Preferably, the height of the top of the valve plate is higher than the height of the top of the driving connecting rod.

[0013] Compared with the related art, the novel vacuum gate valve provided by the utility model has the following beneficial effects:

[0014] 1. The utility model controls the horizontal airbag to expand, which can push the connecting plate forward, thereby driving the driving connecting rod and the valve plate forward, so that the sealing ring connected to the valve plate and the vacuum door valve box fit together to achieve the purpose of sealing. In addition, since the horizontal airbag is similar to a tire structure, it has better flexibility and greater thrust than the cylinder, and the layout is flexible and not limited to a circle or an ellipse, which reduces the volume and complexity of the system;

[0015] 2. The utility model provides a vacuum valve box that is narrow at the top and wide at the bottom, and provides the feed hole on the inner wall of the upper end, which can effectively reduce the moving distance required for sealing and improve the convenience of using the device. In addition, by providing a bellows, the stability of the driving connecting rod moving up and down can be improved through the limit of the bellows.

[0016] 3. The utility model sets the height of the valve plate higher than the height of the top of the driving connecting rod. When the valve plate moves to the upper end, only the valve plate can contact the vacuum door valve box, thereby avoiding contact between the driving connecting rod and the vacuum door valve box, thereby preventing damage to the driving connecting rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of a preferred embodiment of a novel vacuum gate valve provided by the utility model;

[0018] Figure 2 for Figure 1 The schematic diagram of the structure of the upper end and the lower end shown;

[0019] Numbers in the figure: 1. Vacuum gate valve box; 2. Valve plate; 3. Driving connecting rod; 4. Sealing ring; 5. Bellows; 6. Connecting plate; 7. Horizontal air bag; 8. Vertical cylinder; 9. Feed hole; 10. Upper end; 11. Lower end; 12. Driving upper end; 13. Driving lower end; 14. Limiting ring. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Generally, the components of the embodiment of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0023] In the description of the embodiments of the present utility model, it should be noted that if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use. It is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, if the terms "first", "second", "third", etc. appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0024] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0025] In the description of the embodiments of the present utility model, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0026] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0027] refer to Figure 1 to Figure 2 The utility model provides a new type of vacuum gate valve, including: a vacuum gate valve box 1 with a feed hole 9, a valve plate 2 is arranged inside the vacuum gate valve box 1, a sealing ring 4 is bonded to one end surface of the valve plate 2, and the other end surface of the valve plate 2 is fixedly connected to a driving connecting rod 3, the bottom of the driving connecting rod 3 is connected to the driving end of a vertical cylinder 8, the fixed end of the vertical cylinder 8 is slidably connected to the inner wall of the vacuum gate valve box 1, the outer surface of the driving connecting rod 3 is connected to a connecting plate 6, a horizontal air bag 7 is arranged between the connecting plate 6 and the inside of the vacuum gate valve box 1, and a bellows 5 is sleeved on the outside of the driving connecting rod 3.

[0028] It should be noted that: when the vacuum gate valve is closed, the vertical cylinder 8 pushes the driving connection to move upward, thereby driving the valve plate 2 to move upward. When it moves to the uppermost end 10, the horizontal air bag 7 is controlled to expand through the corresponding air pump, which can push the connecting plate 6 to move forward, thereby driving the driving connecting rod 3 and the valve plate 2 to move forward, so that the sealing ring 4 connected to the valve plate 2 and the vacuum gate valve box 1 fit together to achieve the sealing purpose. In addition, since the horizontal air bag 7 is similar to a tire structure, it has better flexibility and greater thrust than a cylinder, and its layout is flexible and does not have to be limited to a circle or an ellipse, thereby reducing the volume and complexity of the system.

[0029] In the embodiments of the present invention, reference is made to Figure 2 As shown, the vacuum door valve box 1 includes an upper end 10 and a lower end 11, the inner diameter of the upper end 10 is smaller than the inner diameter of the lower end 11, the bellows 5 is installed at the connection between the upper end 10 and the lower end 11, and the feed hole 9 is arranged on the inner wall of the upper end 10.

[0030] It should be noted that by providing a vacuum gate valve box 1 that is narrow at the top and wide at the bottom, and by providing the feed hole 9 on the inner wall of the upper end 10, the distance required for sealing can be effectively reduced, thereby improving the convenience of using the device. By providing a bellows 5, the stability of the up and down movement of the driving connecting rod 3 can be improved by limiting the position of the bellows 5.

[0031] In the embodiments of the present invention, reference is made to Figure 1 As shown, the connecting plate 6 is in a rectangular shape and is provided with a connecting hole, and the connecting hole sleeve is connected to the outer surface of the driving connecting rod 3.

[0032] It should be noted that: by connecting the connecting plate 6 and the driving connection using a sleeve connection, the connecting plate 6 can wrap the driving connecting rod 3. When the airbag is inflated, the driving connecting rod 3 will not contact the airbag, ensuring that the driving connecting rod 3 is evenly stressed and improving the stability of forward movement.

[0033] In the embodiments of the present invention, reference is made to Figure 2 As shown, the driving connecting rod 3 includes a driving upper end 12 and a driving lower end 13. The width of the driving upper end 12 is greater than the width of the driving lower end 13, and the driving lower end 13 is shaft-shaped.

[0034] In the embodiments of the present invention, reference is made to Figure 2 As shown, a limit ring 14 is installed at the connection between the upper end 10 and the lower end 11 , and the inner width of the limit ring 14 is smaller than the width of the driving upper end 12 .

[0035] It should be noted that by providing a driving connecting rod 3 that is wide at the top and narrow at the bottom, and providing a limiting ring 14, the driving upper end 12 can always be located inside the upper end 10, and by driving the upper end 12, the upper end 10 can be filled without affecting the movement, thereby improving the sealing of the upper end 10.

[0036] In the embodiments of the present invention, reference is made to Figure 2 As shown, the height of the top of the valve plate 2 is higher than the height of the top of the driving connecting rod 3.

[0037] It should be noted that: by setting the height of the valve plate 2 to be higher than the height of the top of the driving connecting rod 3, when moving to the upper end 10, only the valve plate 2 can be in contact with the vacuum door valve box 1, avoiding the driving connecting rod 3 from contacting the vacuum door valve box 1 and causing damage to the driving connecting rod 3.

[0038] The working principle of a new vacuum gate valve provided by the utility model is as follows:

[0039] When the vacuum gate valve is closed, the vertical cylinder 8 pushes the driving connection to move upward, thereby driving the valve plate 2 to move upward. When it moves to the uppermost end 10, the horizontal airbag 7 is controlled to expand through the corresponding air pump, which can push the connecting plate 6 to move forward, thereby driving the driving connecting rod 3 and the valve plate 2 to move forward, so that the sealing ring 4 connected to the valve plate 2 and the vacuum gate valve box 1 fit together to achieve the sealing purpose. In addition, since the horizontal airbag 7 is similar to a tire structure, it has better flexibility and greater thrust than a cylinder, and its layout is flexible and is not limited to a circle or an ellipse, thereby reducing the volume and complexity of the system.

[0040] The circuits and controls involved in the present invention are all prior art and will not be described in detail here.

[0041] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A new type of vacuum gate valve, characterized in that: include: A vacuum valve box (1) with a feed hole (9), wherein a valve plate (2) is provided inside the vacuum valve box (1), a sealing ring (4) is bonded to one end surface of the valve plate (2), and the other end surface of the valve plate (2) is fixedly connected to a driving connecting rod (3), the bottom of the driving connecting rod (3) is connected to the driving end of a vertical cylinder (8), the fixed end of the vertical cylinder (8) is slidably connected to the inner wall of the vacuum valve box (1), the outer surface of the driving connecting rod (3) is connected to a connecting plate (6), a horizontal air bag (7) is provided between the connecting plate (6) and the inside of the vacuum valve box (1), the outside of the driving connecting rod (3) is sleeved with a bellows (5), the connecting plate (6) is rectangular in shape, the connecting plate (6) is provided with a connecting hole, and the connecting hole sleeve is connected to the outer surface of the driving connecting rod (3).

2. A novel vacuum gate valve according to claim 1, characterized in that: The vacuum door valve box (1) comprises an upper end (10) and a lower end (11), and the inner diameter of the upper end (10) is smaller than the inner diameter of the lower end (11).

3. A new vacuum gate valve according to claim 2, characterized in that: The bellows (5) is installed at the connection between the upper end (10) and the lower end (11), and the feed hole (9) is arranged on the inner wall of the upper end (10).

4. A novel vacuum gate valve according to claim 1, characterized in that: The driving connecting rod (3) comprises a driving upper end (12) and a driving lower end (13); the width of the driving upper end (12) is greater than the width of the driving lower end (13); and the driving lower end (13) is shaft-shaped.

5. A novel vacuum gate valve according to claim 2, characterized in that: A limit ring (14) is installed at the connection between the upper end (10) and the lower end (11), and the width of the inner side of the limit ring (14) is smaller than the width of the driving upper end (12).

6. A novel vacuum gate valve according to claim 1, characterized in that: The height of the top of the valve plate (2) is higher than the height of the top of the driving connecting rod (3).

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