Furnace door structure and diffusion furnace equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a furnace door structure and diffusion furnace equipment, the furnace door structure comprises an outer door body and an inner door body which are coaxially arranged, the outer door body is provided with a first rotary connection part, the inner door body is provided with a second rotary connection part, one of the first rotary connection part and the second rotary connection part is a rotary connection groove with an opening at one end, and the other end is a rotary connection groove with an opening at the other end. One of the outer door body and the inner door body is an opening, the other one is a rotary connecting piece, the rotary connecting groove extends in the circumferential direction of the furnace door structure, and when the outer door body and the inner door body relatively rotate in the axial direction, the rotary connecting piece can enter the rotary connecting groove through the opening so that the inner door body can be detachably connected with the outer door body. According to the furnace door structure, detachable connection of the outer door body and the inner door body can be achieved through rotary connection between the first rotary connection part and the second rotary connection part, the disassembly and assembly process is simple, installation stress cannot be applied to the inner door body, deformation and damage of the inner door body are avoided, and the service life of the furnace door structure is prolonged. Diffusion furnace equipment with the furnace door structure has good sealing performance and heat insulation performance.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a furnace door structure and diffusion furnace equipment. Background Art

[0002] The diffusion furnace is an important process equipment in the semiconductor production line, which is used for surface treatment of wafers. The process temperature in the diffusion furnace can be close to 1050℃, and metal ions are not allowed to enter. Therefore, the diffusion furnace has high requirements for the thermal insulation and sealing of the furnace door structure. In order to achieve the above-mentioned thermal insulation and sealing, the furnace door of the diffusion furnace is usually a double-layer door body composed of an outer metal furnace door and an inner quartz furnace door. The inner quartz furnace door has multiple functions such as protecting the furnace tube and isolating heat diffusion. The existing double-layer door body generally realizes the connection between the outer metal furnace door and the inner quartz furnace door through a clamping structure. A clamping block is installed on the outer metal furnace door, and a mounting hole is opened on the inner quartz furnace door. The clamping block can be clamped in the mounting hole.

[0003] However, this clamping structure is not convenient for disassembly and assembly, and the clamping block and the mounting hole are generally interference fit to prevent loosening. This interference fit also makes the inner quartz furnace door bear installation stress, and the inner quartz furnace door is prone to deformation and damage, which in turn affects the sealing and thermal insulation of the furnace door. Utility Model Content

[0004] The purpose of the utility model is to provide a furnace door structure and a diffusion furnace device. The furnace door structure is used to solve the problem that the existing double-layer door body is not convenient for disassembly and assembly, and the inner quartz furnace door is prone to deformation and damage, which further affects the sealing and thermal insulation properties; the diffusion furnace device uses the above-mentioned furnace door structure to improve the assembly convenience and sealing and thermal insulation properties.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] In a first aspect, a furnace door structure is provided, comprising an outer door body and an inner door body arranged coaxially, the outer door body being provided with a first rotational connection portion, the inner door body being provided with a second rotational connection portion, one of the first rotational connection portion and the second rotational connection portion being a rotational connection groove having an opening at one end, and the other being a rotational connection member, the rotational connection groove extending along the circumference of the furnace door structure, when the outer door body and the inner door body are relatively rotated axially, the rotational connection member can enter the rotational connection groove through the opening, so that the inner door body can be detachably connected to the outer door body.

[0007] In one embodiment, the furnace door structure includes a chuck assembly, the chuck assembly is detachably connected to the outer door body, the chuck assembly includes a claw piece, and the claw piece extends away from the outer door body to form the rotational connection; and / or,

[0008] The inner door body has a side frame extending toward the outer door body, and the end of the side frame extends toward the center of the inner door body to form a mounting frame. The side frame and the mounting frame are arranged to form the rotation groove.

[0009] In one embodiment, the rotating joint is parallel to the outer door body so that there is a buffer gap between the outer door body and the inner door body, and the furnace door structure also includes an elastic support component, which is connected to the outer door body and the claw plate, and the elastic support component is used to keep the outer door body and the claw plate parallel at all times.

[0010] In one embodiment, the elastic support assembly includes a support column and a first elastic member, one end of the support column is connected to the outer door body, and the other end is movably connected to the claw plate, the first elastic member is arranged between the outer door body and the claw plate, and the first elastic member elastically pushes the claw plate so that the outer door body and the claw plate always remain parallel.

[0011] In one embodiment, a limiting frame is provided at the end of the installation frame, and the opening is formed between the other end of the installation frame opposite to the limiting frame and the inner door body, and the limiting frame is used to abut against and limit the rotating part.

[0012] In one of the embodiments, a support member is provided at the end of the claw piece, and the support member extends from the surface of the claw piece toward away from the outer door body. When the claw piece is screwed into the screw-on groove, the support member fits against the inner door body so that the distance between the inner door body and the claw piece remains unchanged.

[0013] In one embodiment, the furnace door structure also includes a limit stopper, which is detachably connected to the outer door body. When the rotational connection is screwed into the rotational connection groove, the limit stopper is used to abut and limit the inner door body to prevent the inner door body from rotating relative to the outer door body.

[0014] In one embodiment, along the circumference of the furnace door structure, a plurality of the rotational connection grooves and the rotational connection members are provided, and the plurality of rotational connection grooves and the rotational connection members are connected one by one; and / or,

[0015] The inner door body has a filling cavity, and the filling cavity is filled with heat insulation cotton.

[0016] In a second aspect, a diffusion furnace device is provided, comprising the furnace door structure as described above, wherein the diffusion furnace device further comprises a furnace body assembly with a furnace opening at one end, and the furnace door structure is used to block the furnace opening.

[0017] In one of the embodiments, the diffusion furnace equipment further includes an angle adjustment component, and the angle adjustment component is used to adjust the installation angle of the furnace door structure so that the furnace door structure is perpendicular to the axial direction of the furnace body assembly to fit and seal the furnace opening.

[0018] Beneficial effects of the utility model:

[0019] The furnace door structure and diffusion furnace equipment provided by the utility model, the outer door body of the furnace door structure is provided with a first rotating part, the inner door body is provided with a second rotating part, one of the first rotating part and the second rotating part is a rotating groove with an opening at one end, and the other is a rotating part, the rotating groove extends along the circumference of the furnace door structure, and this embodiment does not limit the extension angle of the rotating groove in the circumferential direction. The rotating groove can be a plane groove or a spiral groove around the axial direction of the furnace door structure. When the outer door body and the inner door body rotate relative to each other around the axial direction, the rotating part can enter the rotating groove through the opening so that the inner door body can be detachably connected to the outer door body. Correspondingly, when the furnace door structure needs to be disassembled, the outer door body and the inner door body are rotated in the opposite direction around the axial direction until the rotating part exits the rotating groove through the opening. The above-mentioned disassembly and assembly process is relatively simple, and it is easy to realize the assembly or maintenance of the furnace door structure; moreover, the rotating structure of the rotating part and the rotating groove will not impose installation stress on the inner door body, avoid deformation and damage of the inner door body, and ensure the sealing and heat insulation of the furnace door structure. The diffusion furnace equipment has the above-mentioned furnace door structure, and its outer door body and inner door body can rotate relative to each other around the axial direction, so that the rotating part enters the rotating groove through the opening, so that the inner door body can be detachably connected to the outer door body. The furnace door structure has a simple disassembly and assembly process, and will not impose installation stress on the inner door body, thereby avoiding deformation and damage to the inner door body. The diffusion furnace equipment has good sealing and heat insulation properties. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the furnace door structure provided by an embodiment of the utility model;

[0021] Figure 2 It is a structural schematic diagram of an outer door body provided by an embodiment of the utility model with a chuck assembly and an elastic support assembly;

[0022] Figure 3 It is a structural schematic diagram of the inner door body provided by an embodiment of the utility model;

[0023] Figure 4 It is a structural cross-sectional view of the furnace door structure provided by an embodiment of the utility model;

[0024] Figure 5 yes Figure 4 A partial enlarged schematic diagram of part A;

[0025] Figure 6 yes Figure 4 A partial enlarged schematic diagram of part B.

[0026] In the figure:

[0027] 1. Outer door body; 10. Buffer gap; 2. Inner door body; 20. Opening; 21. Rotary groove; 22. Side frame; 23. Mounting frame; 24. Limit frame; 25. Filling cavity; 26. Filling hole; 3. Chuck assembly; 31. Claw piece; 32. Support member; 4. Elastic support assembly; 41. Support column; 42. First elastic member; 5. Limit stopper; 51. Mounting screw; 6. Angle adjustment assembly; 61. Angle adjustment plate; 62. Locking screw; 63. Second elastic member. DETAILED DESCRIPTION

[0028] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0029] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0031] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0032] like Figures 1 to 3 As shown, this embodiment first provides a furnace door structure, which includes an outer door body 1 and an inner door body 2 arranged coaxially. The furnace door structure can be applied to a variety of tubular furnace equipment, including but not limited to diffusion furnaces. When the furnace door structure is applied to a diffusion furnace, the outer door body 1 is a metal door body, and the inner door body 2 is a quartz door body.

[0033] The outer door body 1 is provided with a first rotating part, and the inner door body 2 is provided with a second rotating part. One of the first rotating part and the second rotating part is a rotating groove 21 with an opening 20 at one end, and the other is a rotating part. The rotating groove 21 extends along the circumference of the furnace door structure. This embodiment does not limit the extension angle of the rotating groove 21 in the circumferential direction. The rotating groove 21 can be a plane groove or a spiral groove around the axial direction of the furnace door structure. When the outer door body 1 and the inner door body 2 rotate relative to each other around the axial direction, the rotating part can enter the rotating groove 21 through the opening 20, so that the inner door body 2 can be detachably connected to the outer door body 1. Accordingly, when the furnace door structure needs to be disassembled, the outer door body 1 and the inner door body 2 are rotated in the opposite direction around the axial direction until the rotating part exits the rotating groove 21 through the opening 20. The above-mentioned disassembly and assembly process is relatively simple, and it is easy to assemble or repair the furnace door structure; moreover, the screw-on structure of the screw-on part and the screw-on groove 21 will not impose installation stress on the inner door body 2, thereby avoiding deformation and damage of the inner door body 2 and ensuring the sealing and heat insulation of the furnace door structure.

[0034] It should be noted that the relative rotation of the outer door body 1 and the inner door body 2 around the axis can be that the outer door body 1 remains stationary and the inner door body 2 rotates, or the inner door body 2 remains stationary and the outer door body 1 rotates, or the outer door body 1 and the inner door body 2 rotate relative to each other at the same time.

[0035] Optionally, along the circumference of the furnace door structure, there are multiple rotation grooves 21 and multiple rotation parts, and the multiple rotation grooves 21 and the rotation parts are connected one by one. Preferably, the multiple rotation grooves 21 are evenly spaced, and the multiple rotation parts are evenly spaced, so that when the outer door body 1 and the inner door body 2 rotate relative to each other around the axial direction, multiple connection points can be formed, so that the rotation connection between the outer door body 1 and the inner door body 2 is more reliable.

[0036] In one embodiment, the furnace door structure includes a chuck assembly 3, which is detachably connected to the outer door body 1. The chuck assembly 3 and the outer door body 1 can be connected by fasteners such as screws, and the fasteners will not damage the metal door body. The chuck assembly 3 includes a claw piece 31, which extends in a direction away from the outer door body 1 to form a screw-on part.

[0037] In one embodiment, the inner door body 2 has a side frame 22 extending toward the outer door body 1, and the end of the side frame 22 extends toward the center of the inner door body 2 to form a mounting frame 23, and the side frame 22 and the mounting frame 23 are arranged to form a rotation groove 21. In the initial state, the claw piece 31 is located at one end of the mounting frame 23, and as the outer door body 1 and the inner door body 2 rotate relative to each other around the axial direction, the claw piece 31 and the mounting frame 23 gradually intersect to enter the rotation groove 21.

[0038] In order to limit the relative rotation angle between the outer door body 1 and the inner door body 2, a limit frame 24 is provided at the end of the installation frame 23, and an opening 20 is formed between the other end of the installation frame 23 relative to the limit frame 24 and the inner door body 2, and the limit frame 24 is used to abut the limit rotation member. The claw piece 31 enters the rotation groove 21 through the opening 20 until it abuts the limit frame 24, indicating that the claw piece 31 rotates to the right position, and the connection between the outer door body 1 and the inner door body 2 has been completed.

[0039] The furnace door structure also includes a limit stopper 5, which is detachably connected to the outer door body 1 and is used to abut against and limit the inner door body 2 to prevent the inner door body 2 from rotating relative to the outer door body 1. When the rotary joint is screwed into the rotary joint groove 21 and the outer door body 1 and the inner door body 2 are connected, the limit stopper 5 limits the rotation of the inner door body 2, thereby preventing the inner door body 2 from loosening due to vibration during use of the furnace door structure and reducing safety hazards.

[0040] Specifically, the stopper 5 can be a sheet structure, which is installed on the outer door body 1 by installing screws 51, and is easy to disassemble. In order to avoid affecting the rotation of the inner door body 2, the stopper 5 adopts the above-mentioned detachable structure. After the first screw connection part and the second screw connection part are screwed together, it can be installed on the outer door body 1 to block the inner door body 2. The installation position of the stopper 5 can be set at multiple different positions, such as Figure 2 As shown, the limit stopper 5 is installed on the outer door body 1 at a position that can abut against the outside of the limit frame 24. In this way, when the rotating joint enters the rotating groove 21, the limit frame 24 of the outer door body 1 is clamped between the rotating joint and the limit stopper 5, preventing the inner door body 2 from rotating on the outer door body 1, and preventing the connection between the first rotating joint and the second rotating joint from failing, causing the inner door body 2 to fall off due to shaking.

[0041] In one embodiment, the rotary joint is parallel to the outer door body 1, so that there is a buffer gap 10 between the outer door body 1 and the inner door body 2. The buffer gap 10 avoids direct contact between the inner door body 2 and the outer door body 1, and can reduce the wear of the inner door body 2 during the assembly and connection process with the outer door body 1. The furnace door structure also includes an elastic support component 4, which is connected to the outer door body 1 and the claw piece 31. The elastic support component 4 is used to keep the outer door body 1 and the claw piece 31 always parallel. In this way, when the furnace door structure is impacted by external force, if the gap between the inner door body 2 and the outer door body 1 is reduced, the elastic support component 4 can provide buffering on the one hand, and on the other hand, when the external force is removed, the elastic reset force is used to restore the outer door body 1 and the inner door body 2 to the initial state, so as to keep the furnace door structure reliable and stable in performance.

[0042] Specifically, if Figure 4 and Figure 5 As shown, the elastic support assembly 4 includes a support column 41 and a first elastic member 42. One end of the support column 41 is connected to the outer door body 1 through a detachable structure such as a bolt connection, and the other end is movably connected to the claw piece 31. When the inner door body 2 is squeezed and stressed, the second rotating part squeezes the first rotating part, so that the claw piece 31 slides along the support column 41. The first elastic member 42 is arranged between the outer door body 1 and the claw piece 31. The first elastic member 42 elastically pushes against the claw piece 31 so that the outer door body 1 and the claw piece 31 are always kept parallel, and the outer door body 1 and the inner door body 2 are restored to the initial state through the elastic reset force.

[0043] In one embodiment, a support member 32 is provided at the end of the claw piece 31, and the support member 32 extends from the surface of the claw piece 31 toward the direction away from the outer door body 1. When the claw piece 31 is screwed into the screw groove 21, the support member 32 fits the inner door body 2 so that the distance between the inner door body 2 and the claw piece 31 remains unchanged, thereby preventing the claw piece 31 from shaking in the screw groove 21 and affecting the position accuracy between the outer door body 1 and the inner door body 2. This embodiment does not limit the specific shape of the support member 32. Figure 2 As shown, the support member 32 is a sheet-like body, which is bent to form a frame-type support structure, has good structural strength and is not easy to deform; the support member 32 extends from the surface of the claw piece 31 toward the direction away from the outer door body 1, is light in weight, and can fill the gap between the claw piece 31 and the inner door body 2 in the rotation groove 21, thereby preventing the claw piece 31 from shaking in the rotation groove 21.

[0044] The inner door body 2 has a double-layer structure to form a filling cavity 25, and the filling cavity 25 is filled with heat insulation cotton. The inner door body 2 is also provided with a filling hole 26 connected to the filling cavity 25, and the heat insulation cotton is filled into the filling cavity 25 through the filling hole 26 to improve the heat insulation performance of the furnace door structure. This embodiment does not limit the heat insulation cotton.

[0045] This embodiment also provides a diffusion furnace device, the diffusion furnace device has the above-mentioned furnace door structure, and the diffusion furnace device also includes a furnace body assembly with a furnace opening at one end, and the furnace door structure is used to block the furnace opening. The outer door body 1 and the inner door body 2 of the furnace door structure can rotate relative to each other around the axial direction, so that the rotating part enters the rotating groove 21 through the opening 20, so that the inner door body 2 can be detachably connected to the outer door body 1. The furnace door structure has a simple disassembly and assembly process, and will not apply installation stress to the inner door body 2, thereby avoiding deformation and damage to the inner door body 2, thereby ensuring the sealing and heat insulation of the diffusion furnace device.

[0046] In one embodiment, the diffusion furnace device further includes an angle adjustment component 6, such as Figure 1 As shown, the angle adjustment component 6 is used to adjust the installation angle of the furnace door structure so that the furnace door structure is perpendicular to the axial direction of the furnace body assembly to fit and seal the furnace opening. The diffusion furnace equipment has a furnace door bracket (not shown in the figure), the axial position between the furnace door bracket and the furnace body assembly is determined, and the furnace door structure is installed on the furnace door bracket through the angle adjustment component 6. The position of the furnace door structure relative to the furnace door bracket is adjusted through the angle adjustment component 6 so that the furnace door structure is perpendicular to the axial direction of the furnace body assembly, thereby fitting and sealing the furnace opening.

[0047] Specifically, the angle adjustment assembly 6 includes an angle adjustment plate 61 and at least three locking screws 62 that are not arranged in a colinear manner; the locking screws 62 pass through the angle adjustment plate 61 and are threadedly connected to the outer door body 1, such as Figure 4 and Figure 6 The angle adjustment plate 61 is installed on the furnace door bracket. Since at least three non-collinear locking screws 62 can confirm a plane, by adjusting the tightness of different locking screws 62 on the outer door body 1, the horizontality of the outer door body 1 relative to the angle adjustment plate 61 is adjusted, so that the furnace door structure is perpendicular to the axial direction of the furnace body assembly.

[0048] Preferably, a second elastic member 63 is sheathed on the locking screw 62. The second elastic member 63 is a compression spring and always has a tendency to push the outer door body 1 away from the angle adjustment plate 61. When the locking screw 62 is loosened, the outer door body 1 is away from the angle adjustment plate 61. Under the action of the second elastic member 63, jamming between the locking screw 62 and the angle adjustment plate 61 is avoided, thereby affecting the position accuracy of the outer door body 1.

[0049] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. The furnace door structure is characterized by: The invention comprises an outer door body (1) and an inner door body (2) which are coaxially arranged, wherein the outer door body (1) is provided with a first rotational connection part, and the inner door body (2) is provided with a second rotational connection part, wherein one of the first rotational connection part and the second rotational connection part is a rotational connection groove (21) having an opening (20) at one end, and the other is a rotational connection member, wherein the rotational connection groove (21) extends along the circumference of the furnace door structure, and when the outer door body (1) and the inner door body (2) rotate relative to each other axially, the rotational connection member can enter the rotational connection groove (21) through the opening (20) so that the inner door body (2) can be detachably connected to the outer door body (1).

2. The furnace door structure according to claim 1, characterized in that: The furnace door structure comprises a chuck assembly (3), the chuck assembly (3) is detachably connected to the outer door body (1), the chuck assembly (3) comprises a claw piece (31), and the claw piece (31) extends in a direction away from the outer door body (1) to form the rotating joint; and / or, The inner door body (2) has a side frame (22) extending toward the outer door body (1), and the end of the side frame (22) extends toward the center of the inner door body (2) to form a mounting frame (23), and the side frame (22) and the mounting frame (23) are arranged to form the rotation groove (21).

3. The furnace door structure according to claim 2, characterized in that: The rotating joint is parallel to the outer door body (1) so that a buffer gap (10) is provided between the outer door body (1) and the inner door body (2). The furnace door structure also includes an elastic support component (4), wherein the elastic support component (4) is connected to the outer door body (1) and the claw piece (31). The elastic support component (4) is used to keep the outer door body (1) and the claw piece (31) always parallel.

4. The furnace door structure according to claim 3, characterized in that: The elastic support assembly (4) includes a support column (41) and a first elastic member (42), one end of the support column (41) is connected to the outer door body (1), and the other end is movably connected to the claw plate (31), the first elastic member (42) is arranged between the outer door body (1) and the claw plate (31), and the first elastic member (42) elastically pushes against the claw plate (31) so that the outer door body (1) and the claw plate (31) always remain parallel.

5. The furnace door structure according to claim 2, characterized in that: A limiting frame (24) is arranged at the end of the installation frame (23), and the opening (20) is formed between the other end of the installation frame (23) opposite to the limiting frame (24) and the inner door body (2), and the limiting frame (24) is used to abut against and limit the rotating part.

6. The furnace door structure according to claim 2, characterized in that: A support member (32) is provided at the end of the claw piece (31), and the support member (32) extends from the surface of the claw piece (31) in a direction away from the outer door body (1). When the claw piece (31) is screwed into the screw-on groove (21), the support member (32) fits the inner door body (2) so that the distance between the inner door body (2) and the claw piece (31) always remains unchanged.

7. The furnace door structure according to any one of claims 1 to 6, characterized in that: The furnace door structure also includes a limit stopper (5), which is detachably connected to the outer door body (1). When the rotating member is screwed into the rotating groove (21), the limit stopper (5) is used to abut against and limit the inner door body (2) to prevent the inner door body (2) from rotating relative to the outer door body (1).

8. The furnace door structure according to any one of claims 1 to 6, characterized in that: Along the circumference of the furnace door structure, a plurality of the rotational connection grooves (21) and the rotational connection members are provided, and the plurality of rotational connection grooves (21) and the rotational connection members are connected in a one-to-one correspondence; and / or, The inner door body (2) has a filling cavity (25), and the filling cavity (25) is filled with heat insulation cotton.

9. Diffusion furnace equipment, characterized in that, The diffusion furnace device comprises a furnace door structure as described in any one of claims 1 to 8, and further comprises a furnace body assembly with a furnace opening at one end, and the furnace door structure is used to seal the furnace opening.

10. The diffusion furnace equipment according to claim 9, characterized in that: The diffusion furnace equipment further comprises an angle adjustment component (6), wherein the angle adjustment component (6) is used to adjust the installation angle of the furnace door structure so that the furnace door structure is perpendicular to the axial direction of the furnace body component to fit and seal the furnace opening.

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