Simple atom sieve for improving deep hole sputtering capacity

Abstract

The utility model provides a simple atom sieve for improving deep hole sputtering ability, which comprises a working table, a fixed sleeve is fixedly connected to the middle position of the upper end of the working table, the upper end of the fixed sleeve passes through a fixed rod, a sputtering target gun is fixedly mounted at the lower end of the fixed rod, a molecular sieve is arranged in the middle position of the fixed rod, and the molecular sieve is arranged in the middle position of the fixed rod. And the outer side of the molecular sieve is wrapped with a restraining sleeve, a fixing bolt is inserted in the middle of the right side of the restraining sleeve, the front end and the rear end of the fixing bolt are both sleeved with nuts, and a wafer is fixedly installed at the upper end of the fixing rod. By arranging the restraining sleeve, the restraining sleeve can be clamped on the outer side of the molecular sieve, the restraining sleeve is fixed through the fixing bolt and the nut, the molecular sieve can be fixed, meanwhile, the restraining sleeve can be detached through the fixing bolt and the nut, the molecular sieve can be detached, the molecular sieve can be conveniently overhauled or replaced, and the practicability of the device is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of atomic sieves, and in particular relates to a simple atomic sieve for improving deep hole sputtering capability. Background Art

[0002] Simple atomic sieve is a device used to improve deep hole sputtering capability, usually made of metal mesh or porous material, its working principle is similar to that of traditional atomic sieve, but the design is simpler and more economical, simple atomic sieve is usually composed of densely arranged small holes or pores, these channels can effectively capture and isolate the tiny particles or ions generated in the sputtering process, so as to prevent these particles from causing adverse effects on the surrounding environment or equipment, while improving the efficiency and accuracy of the sputtering process, simple atomic sieve may be made of various materials, including metal mesh, ceramic, polymer, etc., the specific choice depends on the materials and conditions involved in the sputtering process. They are usually durable, easy to install and maintain, and can be widely used in various sputtering equipment and processes to improve the capability and effect of deep hole sputtering.

[0003] The atomic sieve needs to be cleaned after being used several times to prevent the film material particles attached to the surface of the atomic sieve from falling onto the target material and causing contamination of the deposited film. However, the existing simple atomic sieve device is inconvenient to disassemble during use, resulting in poor overall practicality of the device. Therefore, it is necessary to provide a new simple atomic sieve for improving deep hole sputtering capability to solve the above technical problems. Utility Model Content

[0004] The utility model aims to provide a simple atomic sieve for improving deep hole sputtering capability.

[0005] In order to solve the above technical problems, the utility model provides a simple atomic sieve for improving the deep hole sputtering capability, including a workbench, a fixed sleeve is fixedly connected to the middle position of the upper end of the workbench, and the upper end of the fixed sleeve passes through a fixed rod, and a sputtering target gun is fixedly installed on the lower end of the fixed rod, a molecular sieve is arranged in the middle position of the fixed rod, and the outer side of the molecular sieve is wrapped with a constraint sleeve, and a fixing bolt is inserted in the middle position of the right side of the constraint sleeve, the front and rear ends of the fixing bolt are both sleeved with nuts, and a wafer is fixedly installed on the upper end of the fixed rod.

[0006] Preferably, support rods are fixedly connected to the four right angles of the lower surface of the workbench, and rubber anti-slip pads are fixedly connected to the lower surfaces of the support rods, so that the workbench can be supported by the support rods.

[0007] Preferably, the lower end of the fixing rod is arranged in an inverted T-shaped structure, and the fixing sleeve is provided with a slot matching with the fixing rod so as to rotate the fixing rod.

[0008] Preferably, the molecular sieve is formed by splicing a plurality of groups of stainless steel tubes into a disc, and the inner diameter of the stainless steel tube is 2 mm, the wall thickness is 0.5 mm, and the length is 10 mm, so that the cost of the molecular sieve is reduced.

[0009] Preferably, the constraint sleeve is composed of two sets of arc-shaped plates that are hingedly connected, and the inner surface of the constraint sleeve is provided with rubber protrusions, and the molecular sieve can be fixed by the constraint sleeve.

[0010] Preferably, threads are evenly distributed on the outer surface of the fixing bolt, the fixing bolt is threadedly inserted into the restraining sleeve, and a threaded slot matching the fixing bolt is provided on the restraining sleeve, and the restraining sleeve can be fixed by the fixing bolt and the nut.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The utility model clamps the fixing rod on the fixing sleeve, and the wafer and the molecular sieve on the fixing rod can be driven to rotate by rotating the fixing rod, so that the device is more convenient to use. The atomic sieve is made of a general thin-walled steel pipe, which is easy to make and cheap;

[0013] 2. The utility model is provided with a constraint sleeve, which can be engaged on the outside of the molecular sieve, and the constraint sleeve can be fixed by a fixing bolt and a nut, so that the molecular sieve can be fixed. At the same time, the constraint sleeve can be disassembled by the fixing bolt and the nut, so that the molecular sieve can be disassembled for inspection or replacement, thereby increasing the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0015] Figure 1 This is a schematic diagram of the front view structure of a simple atomic sieve for improving deep hole sputtering capability of the utility model;

[0016] Figure 2 This is a schematic diagram of the exploded structure of a fixing sleeve and a fixing rod component of a simple atomic sieve for improving deep hole sputtering capability according to the utility model;

[0017] Figure 3 This is a schematic diagram of the exploded structure of a restraining sleeve and molecular sieve components of a simple atomic sieve for improving deep hole sputtering capability of the utility model;

[0018] Figure 4 The utility model is a schematic diagram of the exploded structure of a restraining sleeve and fixing bolt components of a simple atomic sieve for improving deep hole sputtering capability.

[0019] In the figure: 1. workbench; 2. fixing sleeve; 3. fixing rod; 4. sputtering target gun; 5. molecular sieve; 6. restraint sleeve; 7. fixing bolt; 8. nut; 9. wafer. DETAILED DESCRIPTION

[0020] Please refer to Figure 1-4 A simple atomic sieve for improving deep hole sputtering capability comprises a workbench 1, a fixed sleeve 2 is fixedly connected to the middle position of the upper end of the workbench 1, and the upper end of the fixed sleeve 2 passes through a fixed rod 3, a sputtering target gun 4 is fixedly installed at the lower end of the fixed rod 3, a molecular sieve 5 is arranged in the middle position of the fixed rod 3, and the outer side of the molecular sieve 5 is wrapped with a restraining sleeve 6, and a fixing bolt 7 is inserted in the middle position of the right side of the restraining sleeve 6, and nuts 8 are sleeved on the front and rear ends of the fixing bolt 7, and a wafer 9 is fixedly installed on the upper end of the fixing rod 3.

[0021] The four right angles of the lower surface of the workbench 1 are fixedly connected to support rods, and the lower surface of the support rods is fixedly connected to rubber anti-skid pads. The rubber anti-skid pads can provide additional friction, making the contact between the support rods and the ground closer and more stable, helping to prevent the workbench 1 from becoming unstable due to movement or shaking during use, thereby improving the overall stability of the workbench 1; the rubber anti-skid pads have buffering and shock-absorbing functions, which can reduce the transmission of vibration and impact between the support rods and the ground, thereby reducing the noise and vibration generated by the workbench 1 during operation, providing a quieter and more comfortable working environment; the rubber anti-skid pads can effectively protect the ground from being damaged by the friction and pressure of the support rods, especially for floor surfaces or other fragile floors; the rubber anti-skid pads can reduce scratches and wear and extend the service life of the floor; the high friction surface of the rubber anti-skid pads can effectively prevent the support rods from sliding or shifting on the ground, helping to ensure that the workbench 1 maintains a stable position during use, and avoids work interruptions or safety hazards caused by accidental sliding or movement.

[0022] The lower end of the fixing rod 3 is arranged in an inverted T-shaped structure, and a slot matching the fixing rod 3 is opened on the fixing sleeve 2. The slot matches the inverted T-shaped structure of the fixing rod 3 to ensure that the connection between the fixing sleeve 2 and the fixing rod 3 is more stable, which can prevent the connection failure caused by loosening or shaking during use, improve the stability and reliability of the fixing sleeve 2, and ensure that the relative position between the fixing sleeve 2 and the fixing rod 3 always remains stable, and the position of the fixing sleeve 2 will not be offset or unstable due to rotation.

[0023] The molecular sieve 5 is made of multiple groups of stainless steel tubes spliced ​​into a disc, and the inner diameter of the stainless steel tube is 2mm, the wall thickness is 0.5mm, and the length is 10mm. By splicing multiple groups of stainless steel tubes, the surface area of ​​the molecular sieve 5 can be maximized. The inner and outer surfaces of each stainless steel tube can be used as active surfaces for adsorption or reaction, which effectively improves the adsorption capacity and reaction efficiency of the molecular sieve 5. The inner diameter of the stainless steel tube is 2mm, the wall thickness is 0.5mm, and the length is 10mm. This design can improve the permeability of the molecular sieve 5 and facilitate the passage of fluids or gases, which helps to reduce the resistance when the fluid passes through and improve the molecular The operating efficiency of the sieve 5, the stainless steel tube has good mechanical properties and corrosion resistance, can provide good structural stability and durability, and can be spliced ​​into a disc design to enhance the overall stability of the molecular sieve 5 and reduce deformation or damage caused by external environment or pressure changes. The stainless steel material has good high temperature resistance and corrosion resistance, and is easy to clean and maintain. The stainless steel tube has a simple structure and a smooth surface, which can be easily cleaned and extend the service life of the molecular sieve 5. The material of the stainless steel tube is suitable for various high temperature and corrosive environments, and can meet the needs under special process conditions, such as chemical, petroleum and other fields.

[0024] The restraint sleeve 6 is composed of two groups of arc-shaped plate bodies that are hingedly connected. The inner surface of the restraint sleeve 6 is provided with rubber bumps, and the outer surface of the fixing bolt 7 is evenly distributed with threads. The fixing bolt 7 is threadedly inserted in the restraint sleeve 6, and a threaded slot matching the fixing bolt 7 is opened on the restraint sleeve 6. The thread is inserted in the restraint sleeve 6 so that the fixing bolt 7 can be tightly fixed on the restraint sleeve 6. This design can ensure that the connection between the restraint sleeve 6 and the fixing bolt 7 is more firm and not easy to loosen or fall off, thereby improving the stability of the device. The design of the threaded slot allows the fixing bolt 7 to be flexibly adjusted on the restraint sleeve 6. By rotating the fixing bolt 7, the restraint sleeve 6 can be tightened or loosened. The inner surface of the constraint sleeve 6 is provided with rubber bumps, and when the fixing bolt 7 is inserted into the constraint sleeve 6, the rubber bumps can provide a certain shock absorption and buffering effect, which helps to reduce the vibration and impact generated by the device during operation and protect the equipment and workpiece from damage. The design of the threaded slot allows the fixing bolt 7 to be easily inserted into or removed from the constraint sleeve 6, which is convenient for installation and maintenance, thus saving time and labor costs and improving operating efficiency. Through the tightening effect of the threaded slot, the relative position and angle between the constraint sleeve 6 and the fixing bolt 7 can be ensured to remain stable, which helps to improve the accuracy and stability of the device.

[0025] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A simple atomic sieve for improving deep hole sputtering capability, comprising: A workbench (1) is characterized in that: a fixing sleeve (2) is fixedly connected to the middle position of the upper end of the workbench (1), and the upper end of the fixing sleeve (2) passes through a fixing rod (3), a sputtering target gun (4) is fixedly installed at the lower end of the fixing rod (3), a molecular sieve (5) is arranged at the middle position of the fixing rod (3), and the outer side of the molecular sieve (5) is wrapped with a restraining sleeve (6), and a fixing bolt (7) is inserted in the middle position of the right side of the restraining sleeve (6), and the front and rear ends of the fixing bolt (7) are both sleeved with nuts (8), and a wafer (9) is fixedly installed at the upper end of the fixing rod (3).

2. A simple atomic sieve for improving deep hole sputtering capability according to claim 1, characterized in that: Support rods are fixedly connected at four right angles on the lower surface of the workbench (1), and rubber anti-slip pads are fixedly connected to the lower surfaces of the support rods.

3. A simple atomic sieve for improving deep hole sputtering capability according to claim 1, characterized in that: The lower end of the fixing rod (3) is arranged in an inverted T-shaped structure, and the fixing sleeve (2) is provided with a slot matching the fixing rod (3).

4. The simple atomic sieve for improving deep hole sputtering capability according to claim 1, characterized in that: The molecular sieve (5) is composed of multiple groups of stainless steel tubes spliced ​​into a disc, and the stainless steel tube has an inner diameter of 2 mm, a wall thickness of 0.5 mm, and a length of 10 mm.

5. The simple atomic sieve for improving deep hole sputtering capability according to claim 1, characterized in that: The restraining sleeve (6) is composed of two sets of arc-shaped plates that are hingedly connected, and the inner surface of the restraining sleeve (6) is provided with rubber bumps.

6. The simple atomic sieve for improving deep hole sputtering capability according to claim 1, characterized in that: The outer surface of the fixing bolt (7) is evenly distributed with threads, the fixing bolt (7) is threadedly inserted in the restraining sleeve (6), and the restraining sleeve (6) is provided with a threaded slot that matches the fixing bolt (7).

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