Probe, probe module and conductive matching structure

Abstract

The utility model provides a probe, a probe module and a conductive matching structure. The probe comprises an elastic part which can elastically deform in the use direction of the probe and two support arms which are arranged at two ends of the elastic part and extend along the use direction of the probe. The probe is integrally formed by cutting a sheet; the end part, far away from the elastic part, of at least one of the two support arms comprises a contact part which is contracted inwards in the radial direction, and a step surface is formed between the side wall of the contact part and the side wall of the support arm. The probe can realize stable contact and conduction with a product, avoids poor contact, and ensures the transmission rate and quality of a test signal.

Description

Technical Field

[0001] The utility model relates to the technical field of signal transmission and testing, and more specifically, to a probe, a probe module and a conductive matching structure. Background Art

[0002] Electronic products need to be tested for various performance parameters before leaving the factory. Generally, the product under test is connected to the test equipment through a probe, and the test equipment outputs the test signal and receives feedback from the product under test to confirm whether there are any defects in the product under test.

[0003] However, with the continuous development of the electronics industry, there are more and more categories of electronic products, more and more demands for the conduction test of electronic components, and higher requirements for the rate and quality of signal transmission. As a result, conventional probes are increasingly unable to meet the needs of practical applications. Specifically, since the contact area between conventional probes and the tested products is small, the contact reliability and stability are poor, the rate and quality of signal transmission cannot be guaranteed. Utility Model Content

[0004] In view of the above problems, the utility model provides a probe, a probe module and a conductive matching structure, wherein the probe can achieve stable contact and conduction with the product, avoid poor contact, and ensure the rate and quality of test signal transmission.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] The utility model provides a probe, comprising:

[0007] An elastic part that can be elastically deformed in the use direction of the probe and two supporting arms arranged at both ends of the elastic part and extending along the use direction of the probe;

[0008] The probe is formed in one piece by cutting a sheet;

[0009] The end of at least one of the two support arms away from the elastic portion comprises a radially inwardly contracted contact portion, and a step surface is formed between a side wall of the contact portion and a side wall of the support arm.

[0010] Preferably, the step surface is formed in one of the following ways:

[0011] 1) The step surface is located on one side of the contact portion;

[0012] 2) The step surface is located on two adjacent sides of the contact portion;

[0013] 3) The step surface is located at two opposite sides of the contact portion;

[0014] 4) The step surface circumferentially surrounds the contact portion.

[0015] A preferred solution is that the surface of the step surface is a plane, a curved surface, an inclined surface, or a combination of multiple surfaces.

[0016] Preferably, the step surface includes a planar structure perpendicular to the use direction of the probe.

[0017] Preferably, the step surface includes a plurality of protrusions arranged in an array.

[0018] The utility model also provides a probe module, comprising a probe fixing seat formed with a cavity and the probe as described above; the probe is accommodated and fixed in the cavity.

[0019] The utility model also provides a conductive matching structure, which comprises a conductive structure and the probe as described above;

[0020] The conductive structure includes a first contact portion corresponding to the probe contact portion and capable of abutting against the probe contact portion to form electrical conduction, and a second contact portion corresponding to the step surface and capable of abutting against the step surface to form electrical conduction.

[0021] The utility model also provides a conductive matching structure, which comprises a conductive structure and the probe as described above;

[0022] The conductive structure includes a contact portion corresponding to the probe contact portion and capable of abutting against each other to form electrical conduction, and an insulating member surrounding the contact portion; the step surface can abut against an edge of the insulating member on a side away from the contact portion.

[0023] The utility model also provides a conductive matching structure, which comprises a conductive structure and the probe as described above;

[0024] The conductive structure includes an opening for inserting the contact portion;

[0025] At least the edge surface of the hole of the opening forms a contact portion corresponding to the step surface and capable of abutting against it to form electrical conduction.

[0026] Preferably, the conductive structure further comprises an insulating member surrounding the opening; and the contact portion is located inside the insulating member.

[0027] The beneficial effects of the utility model are:

[0028] The utility model improves the structure of the probe end, utilizes the deformation of the shape of the arm end, and makes the end of the arm away from the elastic part include a radially inward contact part, and a step surface is formed between the side wall of the contact part and the side wall of the arm. The contact area between the conductive structure and the probe is increased through the cooperation of the step surface and the contact part, thereby ensuring the stability of the contact connection, avoiding poor contact, ensuring the rate and quality of the test signal transmission, and thus improving the stability and transmission efficiency of the signal transmission. Compared with the probe obtained by the simple sharpening process, the probe provided by the utility model requires a lower degree of process, is easier to process, and is not prone to poor contact. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings.

[0030] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0031] Figure 2 It is one of the structural schematic diagrams of the second supporting arm of the utility model.

[0032] Figure 3 This is the second structural schematic diagram of the second supporting arm of the utility model.

[0033] Figure 4 This is the third structural schematic diagram of the second support arm of the utility model.

[0034] Figure 5 This is one of the schematic diagrams of the coordination between the conductive structure and the probe of the utility model.

[0035] Figure 6 This is the second schematic diagram of the coordination between the conductive structure and the probe of the utility model.

[0036] Figure 7 This is the third schematic diagram of the coordination between the conductive structure and the probe of the utility model.

[0037] Figure 8 yes Figure 7 A top view of the conductive structure in FIG. DETAILED DESCRIPTION

[0038] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0039] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present invention, unless otherwise clearly stipulated and limited, the first feature being "on" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them.

[0041] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0042] In the prior art, electronic products need to be tested for various performance parameters before leaving the factory. Generally, the product to be tested is connected to the test equipment through a probe, and the test equipment outputs the test signal and receives the feedback information of the product to be tested to confirm whether there is any defect in the product to be tested. The existing probe has a small contact area with the product to be tested, poor contact reliability and stability, and high impedance, and cannot pass a large current, and the conductivity cannot be guaranteed.

[0043] In order to solve the problem that the existing probe has a small contact area with the product being tested, and has poor contact reliability and stability. Figures 1 to 8 As shown, specifically, the probe comprises: an elastic portion 3 elastically deformable in the direction of use of the probe and two arms arranged at both ends of the elastic portion 3 and extending in the direction of use of the probe; the probe is formed as one piece by cutting from a sheet; at least one of the two arms has an end away from the elastic portion and comprises a radially inwardly retracted contact portion 21, and a step surface 22 is formed between the side wall of the contact portion 21 and the side wall of the arm. The contact portion 21 cooperates with the step surface 22 to increase the contact area between the probe and the conductive structure, thereby avoiding poor contact due to too small a contact area and ensuring the rate and quality of test signal transmission. More specifically, Figure 1For example, the probe includes a first arm 1, a second arm 2 and an elastic part 3, wherein the second arm 2, the elastic part 3 and the first arm 1 are sequentially arranged along the first direction, specifically, the second arm 2 is located at one end of the elastic part 3 and extends upward along the first direction; the first arm 1 is located at the other end of the elastic part 3 and extends downward along the first direction. The ends of the first arm 1 and the second arm 2 are respectively abutted against the test equipment and the product to be tested to achieve test conduction of the product to be tested. It can be understood that in this embodiment, the first direction is the length direction of the probe, and is also the use direction of the probe. The probe includes but is not limited to a flat one-piece structure, which can simplify the structural composition and assembly process, improve the structural strength of the probe, ensure continuous effectiveness, and also improve the service life of the probe; the step surface 22 can be formed on the first arm 1 or the second arm 2, or both the first arm 1 and the second arm 2 include the step surface 22, which can be determined according to specific usage requirements. The utility model does not limit this. Taking the first arm 1 corresponding to the test equipment and the second arm 2 corresponding to the product to be tested as an example, when the test equipment needs to increase the contact area with the probe to ensure stable and reliable conduction, the step surface 22 needs to be formed on the first arm 1; when the product to be tested needs to increase the contact area with the probe to ensure stable and reliable conduction, the step surface needs to be formed on the second arm 2; when both the test equipment and the product to be tested need to increase the contact area with the probe to ensure stable and reliable conduction, the step surface 22 needs to be formed on the first arm 1 and the second arm 2.

[0044] In one embodiment, Figure 1 As shown, the elastic portion 3 is in a continuous meandering shape in the first direction, that is, the elastic portion 3 can be extended and retracted along the first direction. Specifically, the elastic portion 3 is an S-shaped member. Under the action of an external force, the S-shaped member is pressed downward and contracted, and the width of the elastic portion 3 is equal in the first direction. The S-shaped member has a longer deformation distance than the C-shaped member or the U-shaped member, so that the force is more uniform, which can increase the service life of the probe. In other embodiments, the width of the elastic portion 3 can also change regularly, such as gradually increasing or decreasing, or intermittently increasing or decreasing, etc., without specific limitation, and the specific size of the elastic portion 3 is not limited.

[0045] In addition, the elastic part 3 includes a through hole 30 in the width direction, and the through hole 30 penetrates in the thickness direction of the elastic part 3 and extends along the winding shape of the elastic part 3, thereby improving the spring characteristics of the elastic part 3. Optionally, the through hole 30 can also be one or more, which are intermittently or continuously arranged along the extension direction of the through hole 30, which can enhance the structural strength of the elastic part 3, provide an opposite force when the probe is compressed and deformed, and better exert the spring characteristics of the elastic part.

[0046] In one embodiment, the through hole 30 separates the elastic part 3 into a first elastic part 31 and a second elastic part 32. When the elastic part 3 undergoes elastic deformation, the first elastic part 31 and the second elastic part 32 can improve the elasticity of the elastic part 3, effectively disperse the force generated by the elastic deformation of the elastic part 3, avoid stress concentration, avoid fatigue fracture of the elastic part 3, and increase the service life of the elastic part 3. Both ends of the elastic part 3 include arc-shaped closed ends, and the closed ends connect the first elastic part 31 and the second elastic part 32, which can reduce stress concentration at the elastic part 3 when the test equipment and the product to be tested are crimped and connected, and avoid the first elastic part 31 and the second elastic part 32 from breaking and being damaged when subjected to force.

[0047] In one embodiment, the first arm 1 and the second arm 2 are respectively located at two opposite sides of the elastic part 3, and the probe comprises two first arms 1 arranged along a second direction, the first arms 1 extending downward along the first direction, and the second direction is a direction perpendicular to the first direction in a vertical plane; the end of the first arm 1 forms a contact terminal 11 for electrically contacting the test equipment. Figure 1 As shown, in this embodiment, the contact end 11 is configured in a wave shape. It should be noted that the configuration of the contact end 11 is not limited to the wave shape, and can be optimized according to actual conditions, such as a sawtooth shape, a triangle shape, a round head shape, and other forms.

[0048] In a specific embodiment, the step surface is formed in one of the following ways: when the radial cross-section of the support arm is a rectangular surface, the step surface 22 is located on one side of the contact portion 21 or the step surface 22 is located on two adjacent sides of the contact portion 21 or the step surface 22 is located on two opposite sides of the contact portion 21 or the step surface 22 circumferentially surrounds the contact portion 21. Specifically, when the step surface 22 is located on one side of the contact portion 21, the step surface 22 is specifically located on the long side or short side of the rectangular radial cross-section of the support arm; when the step surface 22 is located on two adjacent sides of the contact portion 21, the step surface 22 is specifically located at two adjacent sides of the rectangular radial cross-section of the support arm; when the step surface 22 is located on two opposite sides of the contact portion 21, the step surface 22 is specifically located on two opposite long sides or two opposite short sides of the rectangular radial cross-section of the support arm; when the step surface 22 circumferentially surrounds the contact portion 21, the step surface 22 is in the shape of a rectangular ring; and when the radial cross-section of the support arm is a circular surface or an elliptical surface, the step surface 22 circumferentially surrounds the contact portion 21, and the step surface 22 is in the shape of a circular ring or an elliptical ring.

[0049] In a specific embodiment, the surface of the step surface 22 is one or a combination of a plane, a curved surface, and a slope. Through the above-mentioned setting, the utility model can constitute the step surface 22 in a variety of combinations, and based on a variety of different combinations, a suitable surface shape of the step surface 22 is selected to achieve the purpose of increasing the contact area and improving the contact stability.

[0050] In a specific embodiment, the step surface 22 includes a planar structure perpendicular to the direction of use of the probe, and the planar structure is used to contact and conduct with the conductive structure, which can further increase the contact area and thus improve the contact and conduction stability; further, the contact portion 21 also includes a plane for contacting and cooperating with the conductive structure to achieve contact and conduction with the conductive structure, and the contact surface between the contact portion 21 and the conductive structure is planar contact to avoid the occurrence of different impedances, and the flat head of the contact portion 21 can reduce its sliding on the conductive structure and will not cause scratches to the conductive structure.

[0051] In a specific embodiment, the step surface 22 includes a plurality of protrusions arranged in an array, and the protrusions can increase the friction force when in contact with the conductive structure to prevent the probe from shaking and loosening after the contact is turned on. Figure 3 As shown, the protrusion includes a tooth-like structure for increasing the friction force during contact, and also includes a planar structure for increasing the contact and conduction area with the conductive structure.

[0052] The utility model also provides a probe module, which specifically comprises a probe fixing seat with a cavity and the probe as described above; the probe is accommodated and fixed in the cavity, and a plurality of probes are inserted in the probe fixing seat in parallel and at intervals.

[0053] In the above embodiment, each probe includes an elastic portion 3, a first arm 1 and a second arm 2. The first arm 1 and the second arm 2 are respectively located at the two ends of the corresponding elastic portion 3, and in the electrically connected state, each first arm 1 and the second arm 2 are respectively protruded from the probe fixing seat. A mating portion 23 with a step structure for mating with the probe fixing seat is formed on the second arm 2, and the probe can be assembled and fixed on the probe fixing seat through the mating portion 23.

[0054] For the probe module provided by the utility model, since multiple probes are inserted in parallel and spaced apart in the probe fixing seat, each probe is independent of each other, and each first arm 1 and second arm 2 are respectively located at the two ends of the corresponding elastic part 3, and each first arm 1 and second arm 2 are respectively protruded out of the probe fixing seat, so that the first arm 1 and second arm 2 of the probe can be connected to the test equipment and the product under test respectively.

[0055] In one embodiment, any two adjacent probes are arranged in parallel and staggered manner, so that the first arms 1 of adjacent probes or the second arms 2 of adjacent probes can be avoided from being arranged in a straight line, thereby increasing the arrangement spacing of the first arm 1 and the second arm 2, and further increasing the spacing between the test points of the test equipment and the product to be tested, thereby reducing the processing difficulty of the product and the test equipment.

[0056] Moreover, the flat sheet-shaped probe of the present application has more contact surfaces than the traditional cylindrical probe. Under the same specifications, the effective contact area is larger and the space required for probe arrangement is smaller, which can better meet the close-packing requirements and is suitable for different usage scenarios.

[0057] In a specific embodiment, the first arm 1 or the second arm 2 includes an extension arm 4 extending along the width direction of the elastic portion 3, and the extension arm 4 is configured to abut against the inner wall of the probe holder when the probe is received in the probe holder to limit the position of the probe. Figure 1 As shown, the second arm 2 includes an extension arm 4 extending along the width direction of the elastic portion 3. When the probe is installed in the probe fixing seat, the second arm 2 extends out of the top of the probe fixing seat, and the upper surface of the extension arm 4 abuts against the top wall of the probe fixing seat cavity to limit the probe, fix the probe, and improve the stability of the probe installation.

[0058] The utility model also provides a conductive matching structure, which includes a conductive structure and a probe as described above; the conductive structure is a part of a product to be tested or a test device, and the probe can be connected to the product to be tested or the test device through the conductive structure; the conductive structure includes a first contact portion 51 that can be abutted with the contact portion 21 of the probe to form electrical conduction and a second contact portion 52 that can be abutted with the step surface 22 to form electrical conduction. Specifically, the plane on the contact portion 21 on the second arm 2 of the probe is abutted with the first contact portion 51 for conduction, and the step surface 22 is abutted with the second contact portion 52 for conduction, thereby increasing the contact conduction area between the probe and the conductive structure, and then improving the contact conduction stability. In this embodiment, the contact portion 21 and the step surface 22 can be in contact with the conductive structure at the same time, and then realize simultaneous electrical conduction, and if there is a poor contact between the two, it will not affect the contact conduction state between the probe and the product to be tested, thereby ensuring the stability of the connection between the probe and the conductive structure.

[0059] The utility model also provides a conductive matching structure, which includes a conductive structure and the probe as described above; the conductive structure includes a contact portion 5 corresponding to the contact portion of the probe and abutting to form electrical conduction, and an insulating member 6 surrounding the contact portion 5; the step surface 22 can abut against the edge of the insulating member 6 on the side away from the contact portion 5. In this embodiment, the contact portion 21 can be in contact with the contact portion 5 for conduction, and the step surface 22 can abut against the insulating member 6, which increases the contact area between the probe and the conductive structure, ensures the stability of the connection between the probe and the conductive structure, and then ensures that the contact portion 21 can be stably electrically conductive with the contact portion 5. Specifically, in the use direction of the probe, the height of the contact portion 21 is not greater than the thickness of the insulating member 6; the above description can be specifically divided into the following two situations: 1) The height of the contact portion 21 is equal to the thickness of the insulating member 6. Excluding process and matching errors, the contact portion 21 is in abutment with the contact portion 5 for conduction and the step surface 22 is fully matched with the upper surface of the insulating member 6, thereby increasing the contact area between the probe and the conductive structure and ensuring the stability of the contact and conduction between the probe and the conductive structure; 2) The height of the contact portion 21 is less than the thickness of the insulating member 6. The insulating member 6 is elastic. By utilizing the elastic compressible property of the insulating member 6 itself, the step surface 22 is in close contact with the insulating member 6 and compresses the insulating member 6, thereby providing a certain pre-tightening force for the abutment conduction and ensuring that the contact portion 21 can be stably abutted with the contact portion 5 for conduction. It should be noted that the elastic coefficient of the above insulating member 6 needs to be less than the elastic coefficient of the elastic portion 3 of the probe, otherwise the contact portion 21 will not be in contact with the contact portion 5, resulting in a virtual connection. It is understandable that the insulating member 6 may be a continuous annular structure or a segmented structure, as long as the step surface 22 can abut against the edge of the insulating member 6 on the side away from the contact portion 5 .

[0060] The utility model also provides a conductive matching structure, which includes a conductive structure and the probe as described above; the conductive structure includes an opening 7 for inserting a contact portion 21; at least the hole edge surface of the opening 7 forms a contact portion 5 that can abut against the step surface 22 to form electrical conduction. In this embodiment, the contact portion 21 needs to be inserted into the opening 7 along the use direction of the probe, and the step surface 22 abuts against the contact portion 5 formed on the hole edge surface of the opening 7 to achieve electrical conduction between the probe and the conductive structure. The contact portion 21 cooperates with the opening 7, and the restriction of the opening 7 on the contact portion 21 is used to improve the stability of the connection between the probe and the conductive structure, thereby ensuring that the step surface 22 can be stably electrically conductive with the contact portion 5.

[0061] Furthermore, in the above embodiment, the conductive structure further includes an insulating member 6 surrounding the opening 7; the contact portion 5 is located inside the insulating member 6. Through the above arrangement, the insulating member 6 can play a guiding role when the contact portion 21 is inserted into the opening 7 along the use direction of the probe, and after the contact portion 21 is fully inserted into the opening 7, the insulating member 6 can also play a certain limiting role on the probe, thereby further improving the conduction stability between the probe and the conductive structure.

[0062] Specifically, when the inner side wall of the insulating member 6 is in contact with the side wall of the contact portion 21 of the probe, the step surface 22 is located on one side of the contact portion 21 or the step surface 22 is located on two adjacent sides of the contact portion 21 or the step surface 22 is located on two opposite sides of the contact portion 21, and the inner side wall of the insulating member 6 can be used to guide the contact portion 21 of the probe, so that the contact portion 21 can be accurately inserted into the opening 7 and the step surface 22 can abut against the contact portion 5; when the inner side wall of the insulating member 6 is not in contact with the side wall of the contact portion 21 of the probe, the step surface 22 circumferentially surrounds the contact portion 21, and the inner side wall of the insulating member 6 can be in contact with the side wall of the support arm to guide and limit the support arm so that the contact portion 21 is accurately inserted into the opening 7 and the step surface 22 abuts against the contact portion 5, thereby improving the conduction stability between the probe and the conductive structure.

[0063] In summary, the utility model improves the structure of the probe end, utilizes the deformation of the shape of the arm end, and makes the end of the arm away from the elastic part include a radially inward contact portion, and a step surface is formed between the side wall of the contact portion and the side wall of the arm. The contact area between the conductive structure and the probe is increased through the coordination of the step surface and the contact portion, thereby ensuring the stability of the contact connection, avoiding poor contact, ensuring the rate and quality of the test signal transmission, and thus improving the stability and transmission efficiency of the signal transmission. Moreover, compared with the probe obtained by the simple sharpening process, the probe provided by the utility model requires a lower degree of process, is easier to process, and is less likely to have poor contact.

[0064] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the implementation methods of the present invention. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present invention are still within the scope of protection of the present invention.

Claims

1. A probe, characterized in that: include: An elastic part that can be elastically deformed in the use direction of the probe and two supporting arms arranged at both ends of the elastic part and extending along the use direction of the probe; The probe is formed in one piece by cutting a sheet; The end of at least one of the two support arms away from the elastic portion comprises a radially inwardly contracted contact portion, and a step surface is formed between a side wall of the contact portion and a side wall of the support arm.

2. The probe according to claim 1, characterized in that The step surface is formed in one of the following ways: 1) The step surface is located on one side of the contact portion; 2) The step surface is located on two adjacent sides of the contact portion; 3) The step surface is located at two opposite sides of the contact portion; 4) The step surface circumferentially surrounds the contact portion.

3. The probe according to claim 1, characterized in that The surface of the step surface is a plane, a curved surface, an inclined surface, or a combination of multiple surfaces.

4. The probe according to claim 1, characterized in that The step surface includes a plane structure perpendicular to the use direction of the probe.

5. The probe according to claim 1, characterized in that: The step surface includes a plurality of protrusions arranged in an array.

6. A probe module, characterized in that: It comprises a probe fixing seat with a cavity and a probe as claimed in any one of claims 1 to 5; the probe is accommodated and fixed in the cavity.

7. A conductive matching structure, characterized in that: The conductive matching structure comprises a conductive structure and a probe as claimed in any one of claims 1 to 5; The conductive structure includes a first contact portion corresponding to the probe contact portion and capable of abutting against the probe contact portion to form electrical conduction, and a second contact portion corresponding to the step surface and capable of abutting against the step surface to form electrical conduction.

8. A conductive matching structure, characterized in that: The conductive matching structure comprises a conductive structure and a probe as claimed in any one of claims 1 to 5; The conductive structure includes a contact portion corresponding to the probe contact portion and capable of abutting against each other to form electrical conduction, and an insulating member surrounding the contact portion; the step surface can abut against an edge of the insulating member on a side away from the contact portion.

9. A conductive matching structure, characterized in that: The conductive matching structure comprises a conductive structure and a probe as claimed in any one of claims 1 to 5; The conductive structure includes an opening for inserting the contact portion; At least the edge surface of the hole of the opening forms a contact portion corresponding to the step surface and capable of abutting against it to form electrical conduction.

10. The conductive matching structure according to claim 9, characterized in that: The conductive structure further includes an insulating member surrounding the opening; the contact portion is located inside the insulating member.

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