Horizontal driving device for door opening mechanism of wafer box opener
By using the crank mechanism and the crank chute in the wafer box opener, the problem of large space occupancy and difficulty in applying to short-distance displacement in the prior art is solved, and a stable and space-saving short-distance is achieved Displacement effect.
Patent Information
- Application Number
- CN202421852564.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-01
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-08-01
AI Technical Summary
The wafer box opener horizontal drive device in the prior art takes up a large space and is difficult to be suitable for shorter distance displacement scenarios.
The crank mechanism is used to cooperate with the crank slide chute, and the crank mechanism is driven to move in the crank slide chute through the door-opening drive motor, which drives the horizontal slide of the door-opening mechanism to move on the guide rail.
The short-distance displacement of the door opening mechanism in the horizontal direction is realized, and the crank mechanism has a large torque, making the translation more stable, saving space in the horizontal direction, and is suitable for application scenarios with short-distance displacement.
Smart Images
Figure CN222507564U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a horizontal driving device for a door opening mechanism of a wafer box opener. Background Art
[0002] A wafer box is a container used in the semiconductor manufacturing process to protect, transport and store wafers. Currently, 12-inch and 8-inch wafer boxes are commonly used.
[0003] The wafer box opener has a door opening mechanism, which can realize fully automatic door opening of the wafer box. The door opening mechanism includes a horizontal drive device for realizing horizontal displacement and a vertical drive device for realizing vertical displacement. The horizontal drive device in the prior art usually adopts a drive method such as a cylinder or a screw rod, which occupies a large space, while the horizontal displacement distance of the door opening mechanism is very short, so a horizontal drive device suitable for a shorter displacement scenario is needed. Utility Model Content
[0004] To achieve the above-mentioned purpose, the utility model provides a door opening mechanism horizontal driving device of a wafer box opener, comprising a door opening mechanism horizontal guide rail, a door opening mechanism horizontal slider, a door opening driving motor and a crank mechanism;
[0005] The door opening mechanism horizontal guide rail is arranged on the main frame of the wafer box opener, the door opening mechanism horizontal slider is connected to the bottom of the door opening mechanism, a crank slide is arranged on the door opening mechanism horizontal slider, one end of the crank mechanism is connected to the door opening drive motor, and the other end of the crank mechanism is matched with the crank slide;
[0006] The door opening drive motor drives the crank mechanism to move in the crank slide slot, driving the horizontal slider of the door opening mechanism to move on the horizontal guide rail of the door opening mechanism.
[0007] Preferably, the crank mechanism includes a crank, a driving shaft and a driven shaft, the driving shaft and the driven shaft are fixedly arranged at both ends of the crank, the driving shaft is connected to the door opening drive motor, and the driven shaft is matched with the crank slide groove.
[0008] Preferably, the rotation angle of the crank mechanism in the crank slot is less than 90°.
[0009] Compared with the prior art, the beneficial effects of the utility model are:
[0010] The utility model is provided with a crank mechanism, which cooperates with the crank slide to realize the short-distance displacement of the door opening mechanism in the horizontal direction. The crank mechanism has a large torque, which makes the translation of the door opening mechanism more stable, and can also save space in the horizontal direction, and can be suitable for application scenarios with relatively short-distance displacement. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0012] Figure 1 and Figure 2 It is a structural schematic diagram of a horizontal driving device of a door opening mechanism of a wafer box opener disclosed in an embodiment of the utility model on the wafer box opener;
[0013] Figure 3 and Figure 4 It is a structural schematic diagram of the horizontal driving device of the door opening mechanism of the wafer box opener disclosed in the embodiment of the utility model after the blocking part is hidden;
[0014] Figure 5 for Figure 4 A partial enlarged view of point A in the middle.
[0015] In the figure: a door opening mechanism horizontal driving device 100, a door opening mechanism horizontal guide rail 110, a door opening mechanism horizontal slider 120, a crank slide 130, a crank 140, a driving shaft 150, a driven shaft 160, a main frame 200, and a door opening mechanism 300. DETAILED DESCRIPTION
[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0017] Figure 1 and Figure 2 The structure diagram of a horizontal driving device 100 of a door opening mechanism of a wafer box opener disclosed in an embodiment of the utility model on the wafer box opener is shown. Figure 3 and Figure 4 The schematic diagram of its structure after hiding the blocking part is shown, including the door opening mechanism horizontal guide rail 110, the door opening mechanism horizontal slider 120, the door opening drive motor (not shown in the figure) and the crank mechanism.
[0018] The door opening mechanism horizontal guide rail 110 is disposed on the main frame 200 of the wafer box opener, and the door opening mechanism horizontal slider 120 is connected to the bottom of the door opening mechanism 300. Figure 5 As shown, a crank slot 130 is provided on the horizontal slider 120 of the door opening mechanism, and the crank mechanism includes a crank 140, a driving shaft 150 and a driven shaft 160. The driving shaft 150 and the driven shaft 160 are fixedly provided at both ends of the crank 140, respectively. The driving shaft 150 is connected to the door opening drive motor, and the driven shaft 160 is matched with the crank slot 130.
[0019] The door opening drive motor drives the crank mechanism to move in the crank chute 130, driving the door opening mechanism horizontal slider 120 to move on the door opening mechanism horizontal guide rail 110. The crank mechanism has a large torque, which makes the translation of the door opening mechanism 300 more stable and can also save space in the horizontal direction. Those skilled in the art can infer that the rotation angle of the crank mechanism in the crank chute 130 of this embodiment should be less than 90°.
[0020] The door opening mechanism horizontal driving device 100 of the wafer box opener disclosed in the embodiment of the utility model realizes the short-distance displacement of the door opening mechanism in the horizontal direction. The crank mechanism has a large torque, which makes the translation of the door opening mechanism more stable, and can also save space in the horizontal direction, and can be suitable for application scenarios with relatively short-distance displacement.
[0021] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.
[0022] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A horizontal drive device for a door opening mechanism of a wafer box opener, characterized in that: It includes a door opening mechanism horizontal guide rail, a door opening mechanism horizontal slide block, a door opening drive motor and a crank mechanism; The door opening mechanism horizontal guide rail is arranged on the main frame of the wafer box opener, the door opening mechanism horizontal slider is connected to the bottom of the door opening mechanism, a crank slide is arranged on the door opening mechanism horizontal slider, one end of the crank mechanism is connected to the door opening drive motor, and the other end of the crank mechanism is matched with the crank slide; The door opening drive motor drives the crank mechanism to move in the crank slide slot, driving the horizontal slide block of the door opening mechanism to move on the horizontal guide rail of the door opening mechanism.
2. The horizontal driving device for the door opening mechanism of the wafer box opener according to claim 1, characterized in that: The crank mechanism includes a crank, a driving shaft and a driven shaft. The driving shaft and the driven shaft are fixedly arranged at both ends of the crank respectively. The driving shaft is connected to the door opening drive motor, and the driven shaft is matched with the crank slide groove.
3. The horizontal driving device for the door opening mechanism of the wafer box opener according to claim 1, characterized in that: The rotation angle of the crank mechanism in the crank slot is less than 90°.