Wafer fixing device
By designing a wafer fixing device including a flower basket, handle and fixing bracket, the barrier is used to reduce the floating range of the wafer, the problem of liquid surface floating in the wafer during silicon corrosion is solved, and the corrosion uniformity is improved sex.
Patent Information
- Application Number
- CN202421280854.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-06
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-06-06
AI Technical Summary
During the silicon corrosion process on the back of the wafer, due to the high density of the silicon corrosion liquid, the wafer is prone to float out of the liquid surface when shaking the flower basket, resulting in uneven corrosion.
Design a wafer fixture, including a flower basket, handle and fixing bracket. The fixing bracket consists of a fastener and a barrier member, which connects the first fixing part and the second fixing part of the handle. The barrier member is located on the side of the fastener close to the flower basket, reducing the up and down floating range of the wafer.
By reducing the up and down float range of the wafer, the corrosion level of the wafer is reduced, thereby improving the uniformity of wafer corrosion.
Smart Images
Figure CN222507569U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of wafer manufacturing technology, and in particular to a wafer fixing device. Background Art
[0002] When performing groove-type back-side silicon etching on the wafer, it is necessary to fix it on the flower basket with a handle, and then put it into the reaction tank and shake it up and down. During this process, due to the high density of some silicon etching liquid formulas, shaking the flower basket will cause the wafer to float to the surface of the liquid, resulting in uneven silicon corrosion on the back of the silicon wafer. Utility Model Content
[0003] The purpose of the present application is to provide a wafer fixing device, aiming to reduce the situation where the wafer floats above the etching liquid surface.
[0004] The present application provides a wafer fixing device, comprising:
[0005] Flower basket, used to hold wafers;
[0006] A handle comprising a first fixing portion and a second fixing portion respectively connected to opposite sides of the flower basket;
[0007] The fixing bracket comprises a fastener and a blocking member connected to each other, wherein the fastener connects the first fixing part and the second fixing part, and the blocking member is located on a side of the fastener close to the flower basket.
[0008] In some embodiments, the fixing bracket further comprises:
[0009] A connecting member connected between the fastener and the blocking member, wherein the fixing bracket is in an I-shape;
[0010] A reinforcing rib connects the connecting member and the blocking member.
[0011] In some embodiments, a first hook is disposed on a side of the first fixing portion close to the fixing bracket, a second hook is disposed on a side of the second fixing portion close to the fixing bracket, and the blocking member is located on a side of the first hook and the second hook close to the flower basket;
[0012] The fastener is provided with a first opening and a second opening at both ends thereof, respectively. The first opening is engaged with the first hook, and the second opening is engaged with the second hook.
[0013] In some embodiments, the fastener is further provided with a third opening and a fourth opening, wherein the third opening and the fourth opening are provided between the first opening and the second opening;
[0014] The blocking member is provided with a fifth opening and a sixth opening at both ends thereof.
[0015] In some embodiments, the first opening, the second opening, the third opening and the fourth opening all penetrate the fastener along a first direction, and the first direction is parallel to an extension direction of the handle.
[0016] In some embodiments, the fastener is arranged along a second direction, and the second direction is perpendicular to the extension direction of the handle;
[0017] A size of the first opening along the second direction is greater than a size of the second opening along the second direction.
[0018] In some embodiments, the first fixing portion and the second fixing portion each include a lifting rod and a connecting portion connected to each other, the connecting portion is arranged along a third direction and connected to the edge of the flower basket, the third direction is perpendicular to the extension direction of the handle and the extension direction of the fastener;
[0019] The fastener is arranged at one end of the lifting rod close to the connecting portion.
[0020] In some embodiments, the flower basket includes a first limiting portion and a second limiting portion, wherein the first limiting portion is disposed at an edge of the flower basket, and the second limiting portion is disposed at a side of the first limiting portion away from the handle along a first direction, and the first direction is parallel to an extension direction of the handle;
[0021] The connecting portion is arranged between the first limiting portion and the second limiting portion.
[0022] In some embodiments, the handle further comprises:
[0023] a lifting portion connected between the first fixing portion and the second fixing portion;
[0024] The reinforcing member is connected between the first fixing portion and the second fixing portion and is disposed between the fixing bracket and the lifting portion.
[0025] In some embodiments, the reinforcement is V-shaped.
[0026] The present application provides a wafer fixing device, which includes a flower basket, a handle and a fixing bracket. The flower basket is used to fix the wafer. The handle includes a first fixing part and a second fixing part respectively connected to opposite sides of the flower basket. The fixing bracket includes a fastener and a blocking member connected to each other. The fastener connects the first fixing part and the second fixing part, and the blocking member is located on a side of the fastener close to the flower basket. Therefore, the blocking member can reduce the range of the wafer floating up and down, thereby reducing the situation of the wafer floating out of the liquid surface during the wafer etching process, thereby improving the uniformity of the wafer etching. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.
[0028] Figure 1 is a schematic diagram of the three-dimensional structure of a wafer fixing device provided in some embodiments of the present application;
[0029] Figure 2 is a schematic diagram of the structure of the handle provided in some embodiments of the present application;
[0030] Figure 3 is a schematic diagram of the structure of a handle and a fixing bracket provided in some embodiments of the present application;
[0031] Figure 4 is a schematic diagram of a three-dimensional structure of a fixing bracket provided in some embodiments of the present application;
[0032] Figure 5 is a schematic cross-sectional structure diagram of a fixing bracket provided in some embodiments of the present application;
[0033] Figure 6 is a schematic diagram of the three-dimensional structure of a flower basket provided in some embodiments of the present application;
[0034] Figure 7 is a side view of a side where a flower basket is connected to a first fixing portion provided in some embodiments of the present application;
[0035] Figure 8 It is a side view of a side where a flower basket is connected to a second fixing portion according to some embodiments of the present application. DETAILED DESCRIPTION
[0036] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.
[0037] In the description of the present application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present application, "plurality" means two or more, unless otherwise clearly and specifically defined.
[0038] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0039] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the various specific processes and material examples provided by the present application, but those of ordinary skill in the art can appreciate the application of other processes and / or the use of other materials.
[0040] This article uses Cartesian coordinates to represent directions, where "X" represents the first direction; "Y" represents the second direction; and "Z" represents the third direction, where "X", "Y" and "Z" are perpendicular to each other.
[0041] See also Figure 1 , Figure 1 1 is a schematic diagram of a three-dimensional structure of a wafer fixing device provided in some embodiments of the present application. The wafer fixing device 100 can be used to carry and fix a wafer 10, so that the wafer 10 can be placed in an etching solution for back etching.
[0042] The wafer fixing device 100 includes a flower basket 20, a handle 30 and a fixing bracket 40. The flower basket 20 is used to fix the wafer 10. The handle 30 includes a first fixing portion 31 and a second fixing portion 32 respectively connected to the opposite sides of the flower basket 20. The fixing bracket 40 includes a fastener 41 and a blocking member 42 connected to each other. The fastener 41 connects the first fixing portion 31 and the second fixing portion 32. The blocking member 42 is located on the side of the fastener 41 close to the flower basket 20.
[0043] The wafer 10 may include various semiconductor devices, such as power semiconductor devices, specifically, may include insulated gate bipolar transistors (IGBT), metal oxide semiconductor field effect transistors (MOSFET), etc.
[0044] The wafer 10 may be circular, and the flower basket 20 may have an arc-shaped fixing groove inside, and a plurality of wafers 10 may be inserted into the plurality of arc-shaped fixing grooves for fixing.
[0045] Please combine Figure 2 , Figure 2 It is a schematic diagram of the structure of the handle provided in some embodiments of the present application.
[0046] In some embodiments, the handle 30 extends along the first direction X, that is, the first fixing portion 31 and the second fixing portion 32 both extend along the first direction X, so the first fixing portion 31 and the second fixing portion 32 are arranged parallel to each other. The first direction X can be the direction in which the flower basket 20 shakes up and down, that is, the direction in which the handle 30 is pulled.
[0047] In some embodiments, the handle 30 includes not only a first fixing portion 31 and a second fixing portion 32, but also a lifting portion 33, wherein the lifting portion 33 is connected between the first fixing portion 31 and the second fixing portion 32. By applying an external force to the lifting portion 33, the flower basket 20 can be lifted and lowered, so that the wafer 10 is shaken up and down in the etching solution, thereby improving the etching rate and uniformity.
[0048] In some embodiments, the handle 30 further includes a reinforcing member 34, which is connected between the first fixing portion 31 and the second fixing portion 32 and is disposed between the fixing bracket 40 and the lifting portion 33. The reinforcing member 34 may be disposed close to the lifting portion 33, thereby reducing the risk of deformation of the handle 30.
[0049] In some embodiments, the reinforcement member 34 is V-shaped.
[0050] In some embodiments, the fastener 41, the lifting portion 33 and the blocking member 42 all extend along the second direction Y, and are therefore arranged parallel to each other, and the second direction Y is perpendicular to the extension direction of the handle 30 (i.e., the first direction X). The wafers 10 can be arranged in an array along the second direction Y, and the blocking member 42 is arranged on the side of the fastener 41 close to the basket 20 to reduce the activity space above the wafer 10 and limit the upward and downward activity range of the wafer 10, so that the wafer 10 will not float out of the liquid surface when the back side is etched, thereby improving the uniformity of the etching.
[0051] In some embodiments, a first hook 311 is provided on a side of the first fixing portion 31 close to the fixing bracket 40 , a second hook 321 is provided on a side of the second fixing portion 32 close to the fixing bracket 40 , and the blocking member 42 is located on a side of the first hook 311 and the second hook 321 close to the flower basket 20 .
[0052] Please combine Figure 3 , Figure 3 is a schematic diagram of the structure of the handle and the fixing bracket provided in some embodiments of the present application. Figure 4 and Figure 5 , Figure 4 is a schematic diagram of a three-dimensional structure of a fixing bracket provided in some embodiments of the present application, Figure 5 It is a schematic diagram of the cross-sectional structure of a fixing bracket provided in some embodiments of the present application.
[0053] In some embodiments, the two ends of the fastener 41 are respectively provided with a first opening 411 and a second opening 412, the first opening 411 is engaged with the first hook 311, and the second opening 412 is engaged with the second hook 321. Specifically, the first hook 311 and the second hook 321 are arranged along the first direction X toward the direction of the lifting portion 33 (i.e. Figure 3 ) extend into the first opening 411 and the second opening 412 respectively.
[0054] In some embodiments, the dimension W1 of the first opening 411 along the second direction Y is greater than the dimension W2 of the second opening 412 along the second direction Y. The first hook 311 and the second hook 321 may have the same size, and the second hook 321 is tightly engaged with the second opening 412, while the first hook 311 and the first opening 411 may be movably engaged, that is, the first hook 311 and the first opening 411 are detachable, so as to facilitate the fixing bracket 40 (or the fastener 41) to be installed on the handle 30.
[0055] In some embodiments, the fastener 41 is further provided with a third opening 413 and a fourth opening 414 , and the third opening 413 and the fourth opening 414 are provided between the first opening 411 and the second opening 412 .
[0056] In some embodiments, the blocking member 42 is provided with a fifth opening 421 and a sixth opening 422 at both ends thereof. The first opening 411, the second opening 412, the third opening 413 and the fourth opening 414 may all penetrate the fastener 41 along the first direction X (i.e., the extension direction of the handle 30). The third opening 413, the fourth opening 414, the fifth opening 421 and the sixth opening 422 are provided to facilitate the flow of the etching liquid when the fixing bracket 40 moves up and down along the first direction X, thereby improving the uniformity of etching of the wafer 10.
[0057] In some embodiments, the fixing bracket 40 further includes a connecting member 43 and a reinforcing rib 44, wherein the connecting member 43 is connected between the fastener 41 and the blocking member 42, that is, the fastener 41 and the blocking member 42 are connected via the connecting member 43. The reinforcing rib 44 connects the connecting member 43 and the blocking member 42, which can improve the strength of the blocking member 42 and reduce deformation. The reinforcing rib 44 can be in a triangular shape, which is not limited in the present application.
[0058] In some embodiments, the fixing bracket 40 is in an I-shape as a whole. Specifically, the fastener 41, the blocking member 42 and the connecting member 43 are in an I-shape together.
[0059] In some embodiments, continue to refer to Figure 1-Figure 3 The first fixing portion 31 and the second fixing portion 32 both include a lifting rod 301 and a connecting portion 302 that are connected to each other. The lifting rod 301 extends along a first direction X, and the connecting portion 302 is arranged along a third direction Z and connected to the edge of the flower basket 20. The third direction Z is perpendicular to the extension direction of the handle 30 (i.e., the first direction X) and is perpendicular to the extension direction of the lifting portion 33 (i.e., the second direction Y).
[0060] The fastener 41 can be arranged at one end of the lifting rod 301 close to the connecting portion 302, that is, the fastener 41 can be arranged at a position close to the bottom of the lifting rod 301. The fastener 41 can tighten the first fixing portion 31 and the second fixing portion 32, thereby clamping the flower basket 20 to prevent the flower basket 20 from falling off.
[0061] See also Figure 6-Figure 8 , Figure 6 is a schematic diagram of the three-dimensional structure of a flower basket provided in some embodiments of the present application, Figure 7 is a side view of a side where a flower basket is connected to a first fixing portion in some embodiments of the present application. Figure 8 It is a side view of a side where a flower basket is connected to a second fixing portion according to some embodiments of the present application.
[0062] In some embodiments, the flower basket 20 includes a first limiting portion 21 and a second limiting portion 22, wherein the first limiting portion 21 is disposed at an edge of the flower basket 20, and the second limiting portion 22 is disposed at a side of the first limiting portion 21 away from the handle 30 along the first direction X (i.e., located at the bottom as shown in the figure).
[0063] Specifically, the flower basket 20 includes a first side surface 201 and a second side surface 202 opposite to each other, and a third side surface 203 and a fourth side surface 204 opposite to each other, wherein two connecting portions 302 are respectively disposed on the first side surface 201 and the second side surface 202. Figure 7What is shown is the planar structure of the first side surface 201. Figure 8 The planar structure of the second side surface 202 is shown.
[0064] In some embodiments, Figure 7 As shown, the first side surface 201 has a hollow structure, which facilitates the etching liquid to corrode the back side of the wafer 10 .
[0065] like Figure 6 As shown, the first limiting portion 21 is disposed on the upper edge of the third side surface 203 and the upper edge of the fourth side surface 204. Figure 7 and Figure 8 As shown, the second limiting portion 22 is disposed on the first side surface 201 and the second side surface 202. Specifically, the second limiting portion 22 includes a blocking bar 221 and a blocking plate 222. The blocking bar 221 is disposed on the left and right edges of the first side surface 201, and the blocking plate 222 covers the second side surface 202. A first limiting groove is formed between the blocking bar 221 and the ends of the same side of the two first limiting portions 21, and a second limiting groove is formed between the blocking plate 222 and the ends of the other sides of the two first limiting portions 21.
[0066] The connecting portion 302 is disposed between the first limiting portion 21 and the second limiting portion 22. For a specific example, see Figure 2 The connecting portion 302 can be divided into a first connecting portion 302a and a second connecting portion 302b. The first connecting portion 302a belongs to the structure in the first fixing portion 31, and the second connecting portion 302b belongs to the structure in the second fixing portion 32. The first connecting portion 302a is arranged between the first limiting portion 21 and the blocking bar 221, and the second connecting portion 302b is located between the first limiting portion 21 and the baffle 222, that is, the first connecting portion 302a is arranged in the first limiting groove, and the second connecting portion 302b is arranged in the second limiting groove.
[0067] The wafer fixing device provided in the embodiment of the present application includes a basket 20, a handle 30 and a fixing bracket 40. The basket 20 is used to fix the wafer 10. The handle 30 includes a first fixing portion 31 and a second fixing portion 32 respectively connected to opposite sides of the basket 20. The fixing bracket 40 includes a fastener 41 and a blocking member 42 connected to each other. The fastener 41 connects the first fixing portion 31 and the second fixing portion 32, and the blocking member 42 is located on the side of the fastener 41 close to the basket 20. Therefore, the blocking member 42 can reduce the range of the up and down floating of the wafer 10, thereby reducing the situation of the wafer 10 floating out of the liquid surface during the etching process of the wafer 10, thereby improving the uniformity of the etching of the wafer 10.
[0068] The description of the above embodiments is only used to help understand the technical solutions and core ideas of the present application. Ordinary technical personnel in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A wafer fixing device, characterized in that: include: Flower basket, used to hold wafers; A handle comprising a first fixing portion and a second fixing portion respectively connected to opposite sides of the flower basket; The fixing bracket comprises a fastener and a blocking member connected to each other, wherein the fastener connects the first fixing part and the second fixing part, and the blocking member is located on a side of the fastener close to the flower basket.
2. The wafer fixing device according to claim 1, characterized in that: The fixing bracket also includes: A connecting member connected between the fastener and the blocking member, wherein the fixing bracket is in an I-shape; A reinforcing rib connects the connecting member and the blocking member.
3. The wafer fixing device according to claim 1, characterized in that: A first hook is provided on a side of the first fixing portion close to the fixing bracket, a second hook is provided on a side of the second fixing portion close to the fixing bracket, and the blocking member is located on a side of the first hook and the second hook close to the flower basket; The fastener is provided with a first opening and a second opening at both ends thereof, respectively. The first opening is engaged with the first hook, and the second opening is engaged with the second hook.
4. The wafer fixing device according to claim 3, characterized in that: The fastener is further provided with a third opening and a fourth opening, wherein the third opening and the fourth opening are provided between the first opening and the second opening; The blocking member is provided with a fifth opening and a sixth opening at both ends thereof.
5. The wafer fixing device according to claim 4, characterized in that: The first opening, the second opening, the third opening and the fourth opening all penetrate the fastener along a first direction, and the first direction is parallel to an extending direction of the handle.
6. The wafer fixing device according to claim 3, characterized in that: The fastener is arranged along a second direction, and the second direction is perpendicular to the extension direction of the handle; A size of the first opening along the second direction is greater than a size of the second opening along the second direction.
7. The wafer fixing device according to claim 1, characterized in that: The first fixing part and the second fixing part each include a lifting rod and a connecting part connected to each other, the connecting part is arranged along a third direction and connected to the edge of the flower basket, the third direction is perpendicular to the extension direction of the handle and the extension direction of the fastener; The fastener is arranged at one end of the lifting rod close to the connecting portion.
8. The wafer fixing device according to claim 7, characterized in that: The flower basket comprises a first limiting portion and a second limiting portion, wherein the first limiting portion is arranged at the edge of the flower basket, and the second limiting portion is arranged at a side of the first limiting portion away from the handle along a first direction, and the first direction is parallel to an extension direction of the handle; The connecting portion is arranged between the first limiting portion and the second limiting portion.
9. The wafer fixing device according to claim 1, characterized in that: The handle also includes: a lifting portion connected between the first fixing portion and the second fixing portion; The reinforcing member is connected between the first fixing portion and the second fixing portion and is disposed between the fixing bracket and the lifting portion.
10. The wafer fixing device according to claim 9, characterized in that: The reinforcement member is V-shaped.