Locking mechanism of wafer box opener

Abstract

The utility model discloses a locking mechanism of a wafer box opener, which comprises a lock catch base, a lock catch and an elastic component, the lock catch base is provided with the lock catch, and the side end of the lock catch base is movably connected with a mobile platform of the wafer box opener through the elastic component. The locking mechanism is of a mechanical structure and a non-electrically-driven structure, an electrically-driven mechanism is omitted, space is saved, and the locking mechanism can be suitable for space compact scenes. Meanwhile, the mechanical structure is not prone to faults, and the service life is longer.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a locking mechanism of a wafer box opener. Background Art

[0002] A wafer box is a container used in the semiconductor manufacturing process to protect, transport and store wafers. Currently, 12-inch and 8-inch wafer boxes are commonly used.

[0003] Most wafer box openers in the prior art use an electric drive structure to achieve the displacement of the locking mechanism. For example, Chinese invention patent CN202211223632.5 discloses a loadport that is compatible with 8-inch and 12-inch wafer boxes, and its locking mechanism needs to be displaced by a locking drive mechanism set on the inner side of the bottom of the mounting seat. The electric drive structure occupies a large space and cannot be used in scenarios such as wafer cleaning machines where the overall space is compact and a robotic arm is required to complete the loading of wafer transfer boxes; at the same time, the electric drive structure is prone to failure.

[0004] Therefore, there is a need for a locking mechanism for a wafer box opener that can be suitable for space-compact scenarios such as wafer cleaning machines. Utility Model Content

[0005] To achieve the above-mentioned purpose, the utility model provides a locking mechanism of a wafer box opener, including a lock base, a lock and an elastic component, wherein a lock is arranged on the lock base, and a side end of the lock base is movably connected to a moving platform of the wafer box opener through an elastic component.

[0006] Preferably, the elastic component is kept in a compressed state.

[0007] Preferably, when the locking mechanism moves outward to the loading position, it cooperates with a limiting member provided on the wafer box opener platform support frame to limit the position.

[0008] Preferably, a slide groove and slide rail mechanism is also provided between the locking base and the movable platform.

[0009] Preferably, the lock is matched with a slot at the bottom of the wafer box.

[0010] Preferably, the elastic component comprises a spring.

[0011] Preferably, a buffer wheel is provided on the lock buckle.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The locking mechanism of the utility model is a mechanical structure, not an electric drive structure, which saves the electric drive mechanism and space, and can be applied to compact space scenes. At the same time, the mechanical structure is not prone to failure and has a longer service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a structural schematic diagram of the locking mechanism of the wafer box opener disclosed in the embodiment of the utility model;

[0016] Figure 2 and Figure 3 The utility model is a schematic diagram of the structure in which the locking mechanism of the wafer box opener disclosed in the embodiment of the utility model cooperates with the wafer box to clamp.

[0017] In the figure: a locking base 1, a locking buckle 2, an elastic component 3, a moving platform 4, a wafer box opener platform support frame 5, a limiter 6, a slide groove and slide rail mechanism 7, a card slot 8, a buffer wheel 9, and a wafer box 10. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Figure 1 The locking mechanism of the wafer box opener disclosed in the embodiment of the utility model is shown, including a locking base 1, a lock 2 and an elastic component 3. The lock 2 is arranged on the locking base 1. The side end of the locking base 1 is movably connected with the moving platform 4 of the wafer box opener through the elastic component 3. The elastic component 3 maintains a clamped state. When the locking mechanism moves outward to the loading position, it cooperates with the limiting piece 6 arranged on the platform support frame 5 of the wafer box opener to limit the position. A slide groove and slide rail mechanism 7 is also arranged between the locking base 1 and the moving platform 4. The slide groove and slide rail mechanism 7 can make the locking mechanism more accurately positioned during the movement to prevent deviation.

[0020] The locking mechanism of this embodiment is a mechanical structure, not an electric drive structure, which saves the electric drive mechanism, and the mechanical structure is not prone to failure and has a longer service life. Figure 2 As described above, when the locking mechanism is in the loading position, the locking base 1 is pressed by the elastic component 3 against the stopper 6. When the wafer box is loaded, the slot 8 at the bottom of the wafer box 10 has not yet been locked with the lock 2. Then the mobile platform 4 drives the wafer box 10 to move inward, and the lock 2 and the slot 8 are gradually locked. Figure 3 As shown, the card slot 8 will drive the lock base 1 to move inward, and the elastic component 3 will always remain in a compressed state, which can ensure that the lock 2 and the card slot 8 are always in a locked state.

[0021] After the wafer box 10 is opened, the mobile platform 4 starts to move outward. During this process, the elastic component 3 will always apply an outward thrust to the lock base 1 to ensure that the lock 2 and the card slot 8 are locked. Figure 3 After the lock base 1 abuts against the limiter 6, the mobile platform 4 will continue to move outward for a short distance, so that the card slot 8 is separated from the lock 2 and restored to the state as shown. Figure 2 Status shown.

[0022] In a preferred embodiment, the elastic component 3 is a spring. In a preferred embodiment, the lock buckle 2 is provided with a buffer wheel 9, which can reduce wear and tear and extend the service life.

[0023] The locking mechanism of the wafer box opener disclosed in the embodiment of the utility model is a mechanical structure, not an electric drive structure, which saves the electric drive mechanism and space, and can be applied to space-compact scenes such as wafer cleaning machines. At the same time, the mechanical structure is not prone to failure and has a longer service life.

[0024] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0025] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A locking mechanism for a wafer box opener, characterized in that: The invention comprises a locking base, a locking buckle and an elastic component. The locking buckle is arranged on the locking base. The side end of the locking base is movably connected with a moving platform of a wafer box opener through the elastic component.

2. The locking mechanism of the wafer box opener according to claim 1, characterized in that: The elastic component is kept in a compressed state.

3. The locking mechanism of the wafer box opener according to claim 1, characterized in that: When the locking mechanism moves outward to the loading position, it cooperates with the limiting member arranged on the platform support frame of the wafer box opener to limit the position.

4. The locking mechanism of the wafer box opener according to claim 1, characterized in that: A slide groove and slide rail mechanism is also provided between the lock base and the moving platform.

5. The locking mechanism of the wafer box opener according to claim 1, characterized in that: The lock buckle is matched with the card slot at the bottom of the wafer box.

6. The locking mechanism of the wafer box opener according to claim 1, characterized in that: The elastic component includes a spring.

7. The locking mechanism of the wafer box opener according to claim 1, characterized in that: The lock buckle is provided with a buffer wheel.

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