Automatic locking device and silicon wafer blanking machine

Abstract

The utility model relates to the technical field of silicon wafer processing, and particularly discloses an automatic material locking device and a silicon wafer blanking machine. The automatic material locking device comprises a base, a conveying line used for conveying material frames and two material locking mechanisms arranged on the two sides of the conveying line respectively. The locking mechanism comprises a sliding seat, two clamping jaws with clamping grooves, a rotary driving assembly and a linear driving assembly; the sliding base is slidably connected with the base in the direction perpendicular to the material frame conveying direction. The linear driving assembly drives the sliding seat to move relative to the base; the two clamping jaws are arranged at intervals in the conveying direction of the material frame and are rotationally arranged on the sliding seat; the rotating central axes of the two clamping jaws are collinear and are parallel to the conveying direction of the material frame; the rotary driving assembly drives the two clamping jaws to jointly rotate relative to the sliding base. According to the automatic material locking device and the silicon wafer blanking machine, the material frame can be automatically opened before framing and can be automatically locked after framing, the labor cost is saved, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to an automatic material locking device and a silicon wafer unloading machine. Background Art

[0002] In the silicon wafer production process, after the silicon rod is cut into silicon wafers by a slicer, each silicon wafer is still bonded to the wafer tray; in order to facilitate transportation to the next process, a feeder is usually used to assemble the silicon wafers bonded to the wafer tray into a feed frame.

[0003] In order to prevent the silicon wafers from being damaged during transportation, two rotatable locking rollers are installed on the material frame to lock the silicon wafer group in the material frame. However, the existing silicon wafer feeder can only perform simple framing operations; before the silicon wafer feeder is framed, it is necessary to manually push the two locking rollers on the material frame to rotate outward to open the material frame; after the silicon wafer feeder is framed, it is necessary to manually push the two sponge rollers on the material frame to rotate inward to lock all the silicon wafers in the material frame. This requires at least two operators to be deployed at the silicon wafer feeder, which not only has high labor costs, but also low efficiency, affecting the production capacity of the silicon wafer production line.

[0004] Therefore, it is necessary to improve the existing silicon wafer unloading machine to solve the above problems. Summary of the invention

[0005] The utility model aims to provide an automatic material locking device and a silicon wafer unloading machine, which can realize automatic opening of the material frame before framing and automatic material locking after framing, thereby saving labor costs and improving work efficiency.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] An automatic material locking device is used to enable two material locking rollers of a material frame to rotate and lock the silicon wafer group in the material frame; the automatic material locking device comprises a base, a conveying line for conveying the material frame, and two material locking mechanisms respectively arranged on both sides of the conveying line;

[0008] The material locking mechanism includes a slide, two claws with slots, a rotation drive assembly and a linear drive assembly; the slide is slidably connected to the base along a direction perpendicular to the material frame conveying direction; the linear drive assembly drives the slide to move relative to the base; the two claws are arranged at intervals along the material frame conveying direction and are rotatably arranged on the slide; the rotation center axes of the two claws are colinear and parallel to the material frame conveying direction; the rotation drive assembly drives the two claws to rotate together relative to the slide.

[0009] Furthermore, the rotary drive assembly includes a push rod connected to the two claws, a hinged joint and a lifting drive member, and the push rod is connected to the driving end of the lifting drive member through the hinged joint.

[0010] Furthermore, the slide seat includes a U-shaped slide seat body and two L-shaped connecting components, the slide seat body is slidably connected to the base; the two connecting components are relatively connected to two sides of the slide seat body, and the opposite sides of the two connecting components are respectively rotatably connected with the claws.

[0011] Furthermore, the automatic material locking device also includes a first material blocking mechanism located at one end of the conveying line; the first material blocking mechanism includes a lifting plate, a lifting drive, a first material blocking block and a material blocking drive; the lifting plate is connected to the base for up and down sliding, and the lifting drive drives the lifting plate to move up and down relative to the base; the material blocking drive is installed on the lifting plate, and can drive the first material blocking block to move along a direction parallel to the material frame conveying direction.

[0012] Furthermore, a group of rollers are rotatably provided on one side of the first material blocking block, and the rollers can be in rolling contact with the material frame located on the conveyor line.

[0013] Furthermore, the automatic material locking device also includes a fixing mechanism for fixing the material frame located on the conveyor line; the fixing mechanism includes two groups of side pressure components relatively arranged on both sides of the conveyor line; the side pressure component includes a side pressure block and a side pressure driving member for driving the side pressure block to move along the vertical material frame conveying direction.

[0014] Furthermore, the automatic material locking device also includes four detection components arranged on both sides of the conveyor line, and the detection components include a bracket and two detection sensors for detecting the material locking roller. The two detection sensors are installed on the bracket up and down, and the installation height is adjustable.

[0015] Furthermore, the linear drive assembly includes a screw, a motor and a screw nut matched with the screw thread arranged along the vertical material frame conveying direction; both ends of the screw are rotatably connected to the base, and the motor drives the screw to rotate; the screw nut matches the screw thread and is connected to the slide seat.

[0016] Furthermore, two opposite guide plates are arranged on the conveying line.

[0017] The utility model also provides a silicon wafer unloading machine, comprising a frame, a material discharge mechanism and the above-mentioned automatic material locking device; the base is connected to the frame; the material discharge mechanism is located above the conveyor line, can take the silicon wafer group from the robot and put it into the material frame located on the conveyor line, and comprises a clamping mechanism and a lifting mechanism for driving the clamping mechanism to rise and fall.

[0018] Furthermore, it also includes a second material blocking mechanism arranged on one side of the material discharge mechanism, and the second material blocking mechanism includes a material blocking plate, two second material blocking blocks installed on the material blocking plate, and two second rollers rotatably arranged on both sides of the material blocking plate.

[0019] The beneficial effects of the utility model are as follows: the automatic material locking device and the silicon wafer unloading machine of the utility model can realize automatic opening of the material frame before framing and automatic material locking after framing, thereby saving labor costs and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The utility model is a structural schematic diagram of an automatic material locking device provided by the utility model.

[0021] Figure 2 It is a side view of an automatic material locking device provided by the utility model.

[0022] Figure 3 The utility model is a structural schematic diagram of a silicon wafer blanking machine provided by the utility model.

[0023] Figure 4 yes Figure 3 Schematic diagram of the structure of the discharge mechanism. DETAILED DESCRIPTION

[0024] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0025] like Figures 1 to 2 As shown, an automatic material locking device is used to make two locking rollers 110 of a material frame 100 rotate and lock the silicon wafer group 200 in the material frame 100; wherein the upper end of the silicon wafer group 200 is bonded to the bottom surface of the wafer support. The automatic material locking device includes a base 1, a conveyor line 2 for conveying the material frame 100, a material blocking mechanism 3 arranged at one end of the conveyor line 2, a fixing mechanism for fixing the material frame 100 on the conveyor line 2, and two locking mechanisms 4 arranged on both sides of the conveyor line 2.

[0026] Specifically, in the automatic material locking device, the conveyor line 2 is preferably a powered roller line, which is used to receive the material frame 100 from the rear conveyor line and convey the material frame 100 forward; two opposite guide plates 21 are provided on the conveyor line 2 to guide the material frame 100 to move along the conveying direction.

[0027] In the automatic material locking device, the first material blocking mechanism 5 is used to limit and block the material frame 100 transported by the conveyor line 2, and includes a lifting plate 51, a lifting drive 52, a first material blocking block 53 and a material blocking drive 54. Among them, the lifting plate 51 is connected to the base 1 for sliding up and down through two guide rods and two guide sleeves, and the lifting drive 52 drives the lifting plate 51 to move up and down relative to the base 1; the material blocking drive 54 is installed on the lifting plate 51, and can drive the first material blocking block 53 to move along the direction parallel to the material frame conveying. In this embodiment, the lifting drive 52 and the material blocking drive 54 are preferably cylinders.

[0028] Furthermore, a group of first rollers 55 are rotatably provided on one side of the first material stopper 53 , and the first rollers 55 can be in rolling contact with the material frame 100 located on the conveyor line 2 to prevent the surface of the material frame 100 from being worn.

[0029] In the automatic material locking device, the fixing mechanism includes two sets of side pressure components 6 arranged on both sides of the conveying line 2; the side pressure components 6 include side pressure blocks 61 and side pressure driving members 62 driving the side pressure blocks 61 to move along the vertical material frame conveying direction. In this embodiment, each set of side pressure components 6 is provided with two, and these four side pressure components 6 can perform side pressure fixing on both ends of the material frame 100. The side pressure driving member 62 is preferably a cylinder.

[0030] In the automatic material locking device, the material locking mechanism 4 includes a slide 41, two claws 42 with a slot 421, a rotation drive assembly 43 and a linear drive assembly 44. The slide 41 is slidably connected to the base 1 along the vertical material frame conveying direction, and the linear drive assembly 44 drives the slide 41 to move relative to the base 1; the two claws 42 are arranged at intervals along the material frame conveying direction and are rotatably arranged on the slide 41; the rotation center axes of the two claws 42 are collinear and parallel to the material frame conveying direction; the rotation drive assembly 43 drives the two claws 42 to rotate relative to the slide 41.

[0031] In this embodiment, the slide 41 includes a U-shaped slide body 411 and two L-shaped connecting members 412. The slide body 411 is slidably connected to the base 1; the two connecting members 412 are relatively connected to the two sides of the slide body 411, and the opposite sides of the two connecting members 412 are rotatably connected with claws 42. Further, the slide body 411 is located between the two side pressure components 6 on the same side, and the connecting member 412 is located above the side pressure component 6; the two inner side surfaces of the slide body 411 are connected by a connecting rod 413, and the connecting member 412 is also connected to the slide body 411 through a reinforcing plate 414, so that the overall structure is more compact and the sliding of the slide 41 is more stable.

[0032] It should be noted that the sliding seat body 411 and the connecting member 412 can be an integral structure or a separate connecting structure.

[0033] In this embodiment, the linear drive assembly 44 includes a screw, a motor and a screw nut matched with the screw thread arranged along the vertical material frame conveying direction; both ends of the screw are rotatably connected to the base 1, and the motor is connected to the screw through a pulley assembly for driving the screw to rotate; the screw nut matches the screw thread and is connected to the slide 41.

[0034] In this embodiment, the rotation drive assembly 43 includes a push rod 431 connected to the two claws 42, a hinged joint 432 and a lifting drive member 433. The push rod 431 is connected to the driving end of the lifting drive member 433 through the hinged joint 432. In this embodiment, the lifting drive member 433 is preferably a cylinder.

[0035] When in use, under the drive of the lifting drive member 433, the two claws 42 rotate together, driving the clamped locking roller 110 to rotate inward or outward, thereby realizing the locking or unlocking action.

[0036] The automatic material locking device also includes four detection components 7 disposed on both sides of the conveyor line 2. The detection component 7 includes a bracket 71 and two detection sensors 72 for detecting the material locking roller 110. The two detection sensors 72 are mounted up and down on the bracket 71, and the mounting height is adjustable. In this embodiment, the detection sensor 72 is preferably a photoelectric sensor.

[0037] When in use, the detection sensor 72 located below first performs detection. When the detection sensor 72 located below detects the locking roller 110, the slide 41 moves toward the conveyor line 2 under the drive of the linear drive assembly 44, driving the two claws 42 to move together, thereby clamping the locking roller 110 in the locking position into the clamping groove 421; under the drive of the rotary drive assembly 43, the two claws 42 drive the clamped locking roller 110 to rotate outward together, thereby rotating the locking roller 110 to the open position, so that the locking roller 110 can be opened. It is convenient to put the silicon wafer group 200 into the material frame 100; after the silicon wafer group 200 is put into the material frame 100, under the drive of the rotary drive component 43, the two claws 42 drive the clamped locking roller 110 to rotate inward together, so that the locking roller 110 rotates to the locking position to lock the silicon wafer group 200 in the material frame 100; under the drive of the linear drive component 44, the slide 41 moves away from the conveyor line 2, driving the two claws 42 to move together, thereby releasing the clamping of the two claws 42 on the locking roller 110.

[0038] When the detection sensor 72 located at the bottom fails to detect the locking roller 110, the detection sensor 72 located at the top is started for detection; when the detection sensor 72 located at the top detects the locking roller 110, the rotation drive component 43 is first used to drive the two claws 42 to rotate outward together; then the linear drive component 44 is used to drive the slide 41 to move toward the conveyor line 2, driving the two claws 42 to move together, so that the locking roller 110 in the open position is clamped into the clamping groove 421 of the two claws 42, so as to facilitate the placement of the silicon wafer group 200 into the material frame 100.

[0039] like Figure 3 and 4 As shown, the utility model also provides a silicon wafer unloading machine, including a frame 10, a material unloading mechanism 3 and the above-mentioned automatic material locking device. The automatic material locking device is connected to the frame 10 through a base 1, and the material unloading mechanism 3 is located above the conveyor line 2, and can take the silicon wafer group 200 from the robot and put it into the material frame 100 located on the conveyor line 2, and includes a clamping mechanism 31 and a lifting mechanism 32 installed on the frame 10 and used to drive the clamping mechanism 31 to rise and fall.

[0040] Specifically, the clamping mechanism 31 includes a clamping seat 311, two clamps 312 slidably disposed on the bottom surface of the clamping seat 311, and two clamping cylinders 313. The two clamps 312 move toward or away from each other under the drive of the two clamping cylinders 313. The lifting mechanism 32 is preferably a cylinder, and its driving end is connected to the clamping seat 311.

[0041] The silicon wafer unloading machine further includes a second material blocking mechanism 8 disposed on one side of the material unloading mechanism 3, and the second material blocking mechanism 8 is used to limit and block the silicon wafer group 200 carried by the manipulator, so that the clamping mechanism 31 can accurately clamp the silicon wafer group 200. In this embodiment, the second material blocking mechanism 8 includes a material blocking plate 81, two second material blocking blocks 82 mounted on the material blocking plate 81, and two second rollers 83 rotatably disposed on both sides of the material blocking plate 81, wherein the two second material blocking blocks 82 are in contact with the crystal tray bonded to the silicon wafer group 200, and the two second rollers 83 are in rolling contact with the crystal tray.

[0042] The utility model discloses an automatic material locking device and a silicon wafer unloading machine. When in use, the conveying line 2 conveys the material frame 100 and moves forward, and the first material blocking mechanism 5 limits and blocks the material frame 100; the fixing mechanism fixes the material frame 100; at the same time, the manipulator transports the silicon wafer group 200 to the bottom of the clamping mechanism 31, and limits and blocks the silicon wafer group 200 through the second material blocking mechanism 8; the clamping mechanism 31 clamps the silicon wafer group 200 and moves downward, and puts the silicon wafer group 200 into the material frame 100 fixed by the fixing mechanism; under the action of the two locking mechanisms 4, the two locking rollers 110 lock the silicon wafer group 200 in the material frame 100, thereby realizing automatic opening of the material frame 100 before framing and automatic locking of the silicon wafer group 200 in the material frame 100 after framing, saving labor costs and improving work efficiency.

[0043] The technical principle of the present invention is described above in combination with specific embodiments. These descriptions are only for explaining the principle of the present invention and cannot be interpreted as limiting the protection scope of the present invention in any way. Based on the explanations here, technicians in this field can think of other specific implementation methods of the present invention without creative work, and these methods will fall within the protection scope of the present invention.

Claims

1. An automatic material locking device, used to enable two material locking rollers (110) of a material frame (100) to rotate and lock a silicon wafer group (200) in the material frame (100); characterized in that: The automatic material locking device comprises a base (1), a conveying line (2) for conveying a material frame (100), and two material locking mechanisms (4) arranged on both sides of the conveying line (2); The material locking mechanism (4) comprises a slide (41), two claws (42) with a slot (421), a rotation drive assembly (43) and a linear drive assembly (44); the slide (41) is slidably connected to the base (1) along a direction perpendicular to the material frame conveying direction; the linear drive assembly (44) drives the slide (41) to move relative to the base (1); the two claws (42) are arranged at intervals along the material frame conveying direction and are rotatably arranged on the slide (41); the rotation center axes of the two claws (42) are colinear and parallel to the material frame conveying direction; the rotation drive assembly (43) drives the two claws (42) to rotate relative to the slide (41).

2. The automatic material locking device according to claim 1, characterized in that: The rotary drive assembly (43) comprises a push rod (431) connected to the two claws (42), a hinged joint (432) and a lifting drive member (433); the push rod (431) is connected to the driving end of the lifting drive member (433) via the hinged joint (432).

3. The automatic material locking device according to claim 1, characterized in that: The slide seat (41) comprises a U-shaped slide seat body (411) and two L-shaped connecting components (412); the slide seat body (411) is slidably connected to the base (1); the two connecting components (412) are relatively connected to two sides of the slide seat body (411), and the opposite sides of the two connecting components (412) are rotatably connected to the claws (42).

4. The automatic material locking device according to claim 1, characterized in that: The automatic material locking device further comprises a first material blocking mechanism (5) located at one end of the conveying line (2); the first material blocking mechanism (5) comprises a lifting plate (51), a lifting drive member (52), a first material blocking block (53) and a material blocking drive member (54); the lifting plate (51) is connected to the base (1) in an up-and-down sliding manner, and the lifting drive member (52) drives the lifting plate (51) to move up and down relative to the base (1); the material blocking drive member (54) is mounted on the lifting plate (51) and is capable of driving the first material blocking block (53) to move in a direction parallel to the conveying direction of the material frame.

5. The automatic material locking device according to claim 4, characterized in that: A group of rollers (55) are rotatably provided on one side of the first material blocking block (53), and the rollers (55) are capable of rolling contact with a material frame (100) located on the conveyor line (2).

6. The automatic material locking device according to claim 1, characterized in that: The automatic material locking device further comprises a fixing mechanism for fixing a material frame (100) located on the conveying line (2); the fixing mechanism comprises two sets of side pressure assemblies (6) arranged on two sides of the conveying line (2); the side pressure assembly (6) comprises a side pressure block (61) and a side pressure driving member (62) for driving the side pressure block (61) to move in a direction perpendicular to the material frame conveying direction.

7. The automatic material locking device according to claim 1, characterized in that: The automatic material locking device further comprises four detection components (7) respectively arranged on both sides of the conveying line (2), the detection component (7) comprising a bracket (71) and two detection sensors (72) for detecting the material locking roller (110), the two detection sensors (72) being mounted on the bracket (71) up and down, and the mounting height is adjustable.

8. The automatic material locking device according to claim 1, characterized in that: The linear drive assembly (44) comprises a screw rod, a motor and a screw nut matched with the screw rod thread arranged along a direction perpendicular to the material frame conveying direction; both ends of the screw rod are rotatably connected to the base (1), and the motor drives the screw rod to rotate; the screw nut matches with the screw rod thread and is connected to the slide seat (41).

9. A silicon wafer unloading machine, characterized in that: It comprises a frame (10), a material discharge mechanism (3) and the automatic material locking device according to any one of claims 1 to 8; the base (1) is connected to the frame (10); the material discharge mechanism (3) is located above the conveyor line (2), can take the silicon wafer group (200) from the robot and put it into the material frame (100) located on the conveyor line (2), and comprises a clamping mechanism (31) and a lifting mechanism (32) for driving the clamping mechanism (31) to rise and fall.

10. The silicon wafer unloading machine according to claim 9, characterized in that: It also includes a second material blocking mechanism (8) arranged on one side of the material discharging mechanism (3), the second material blocking mechanism (8) including a material blocking plate (81), two second material blocking blocks (82) mounted on the material blocking plate (81), and two second rollers (83) rotatably arranged on both sides of the material blocking plate (81).

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