Filtering device for single crystal furnace

Abstract

The utility model discloses a filtering device for a single crystal furnace. The filtering device for the single crystal furnace comprises a filtering body and an ash removal unit, wherein the ash removal unit is arranged at the bottom of the filter body; a dust accumulation cavity is formed in the dust removal unit, and sweeping equipment is arranged in the dust accumulation cavity and used for sweeping dust into the filtering area of the filtering body. The filtering device for the single crystal furnace is easy to clean and high in safety performance, and the filtering time and the filtering efficiency of the filtering device can be improved.

Description

Technical Field

[0001] The utility model relates to a filtering device for a single crystal furnace. Background Art

[0002] In the process of single crystal silicon production, a large amount of high-temperature volatiles will be generated, which need to be filtered and treated in time to avoid entering the vacuum pump, otherwise it will pollute the vacuum pump oil and affect the performance and safety of the vacuum pump. In addition, the replacement of vacuum pump oil and waste oil treatment are also very difficult. The decline in vacuum pump efficiency will directly affect the output and product quality of the single crystal furnace. Therefore, the gas entering the vacuum pump must be filtered first.

[0003] Currently, there are many types of filtering devices, but they generally have problems such as low filtration efficiency and short filtration time, which causes high production costs. Once the operation time is too long, a lot of dust will accumulate, which is difficult to clean and poses a safety hazard. Therefore, many companies directly choose not to use filters, and the service life of the vacuum pump will be very short.

[0004] In view of the above-mentioned defects of the prior art, it is necessary to provide a single crystal furnace vacuum filtration device which can conveniently and efficiently clean the filter element, is safe, has high filtration efficiency and long filtration time. Utility Model Content

[0005] In view of this, the purpose of the utility model is to provide a filtering device for a single crystal furnace, which is easy to clean, has high safety performance, and can improve the filtering time and filtering efficiency of the filtering device.

[0006] The utility model adopts the following technical solutions to achieve the above-mentioned purpose.

[0007] The utility model provides a filtering device for a single crystal furnace, comprising a filtering body and a dust removal unit; wherein:

[0008] The dust cleaning unit is arranged at the bottom of the filter body; a dust storage chamber is arranged in the dust cleaning unit, and a cleaning device is arranged in the dust storage chamber for cleaning dust into the filter area of ​​the filter body.

[0009] In the utility model, the filter device for a single crystal furnace is mainly composed of a filter body and a dust cleaning unit. A cleaning device is provided in the dust cleaning unit, which can clean the dust into the filter area of ​​the filter body for filtration. This makes it easy to clean and improves safety performance.

[0010] According to the filter device for a single crystal furnace described in the utility model, preferably, the filter body comprises an upper cylinder, a main cylinder and a flange sleeve; the flange sleeve is arranged between the upper cylinder and the main cylinder.

[0011] In the utility model, the filter body comprises an upper cylinder, a main cylinder and a flange sleeve. The flange sleeve is added between the upper cylinder and the main cylinder, which increases the filtering area, improves the filtering efficiency and the filtering time.

[0012] According to the filtering device for a single crystal furnace described in the utility model, preferably, it also includes a hose, a dust collecting main pipe and a dust collecting branch pipe; the dust collecting main pipe is arranged horizontally and is located above the filter body; the dust collecting branch pipe is arranged perpendicular to the dust collecting main pipe; one end of the dust collecting branch pipe away from the dust collecting main pipe is connected to one end of the hose; the other end of the hose is connected to the side of the cleaning unit.

[0013] According to the filter device for a single crystal furnace described in the utility model, preferably, the dust accumulation chamber is a hollow cavity structure, on which a dust cleaning port is provided, and the dust accumulation chamber is connected with the filter body through the dust cleaning port.

[0014] According to the filtering device for a single crystal furnace described in the utility model, preferably, the cleaning equipment includes an upper purge mechanism, a lower purge mechanism, a driving mechanism and a rotating shaft; the upper purge mechanism is arranged above the lower purge mechanism; the driving mechanism is arranged on the side of the upper purge mechanism and the lower purge mechanism close to the hose; the rotating shaft is arranged between the upper purge mechanism and the lower purge mechanism, the rotating shaft is arranged horizontally, one end of the rotating shaft is respectively connected to the upper purge mechanism and the lower purge mechanism, and the other end is connected to the driving mechanism; the driving mechanism is arranged to drive the lower purge mechanism to rotate through the rotating shaft to continuously and slowly move the dust to the cleaning port.

[0015] According to the filtering device for a single crystal furnace described in the utility model, preferably, one end of the upper purge mechanism away from the driving mechanism is connected to the air blowing pipe through a first pipe, and the air blowing pipe inputs compressed air into the upper purge mechanism to blow the dust from the cleaning port to the filtering area of ​​the filter body for filtering.

[0016] In the utility model, the cleaning device is arranged in the dust accumulation chamber, and mainly includes an upper cleaning mechanism and a lower cleaning mechanism. The upper cleaning mechanism can be set as a tubular structure, and the lower cleaning mechanism can be set as a paddle blade structure. The upper cleaning mechanism is fixed and cleans by blowing compressed air. The lower cleaning mechanism is movable and drives the lower cleaning mechanism to rotate through the driving mechanism and the rotating shaft to clean the dust. The upper cleaning mechanism and the lower cleaning mechanism can clean the dust better at the same time.

[0017] According to the filter device for a single crystal furnace of the utility model, preferably, the cleaning unit further comprises a secondary oxidation mechanism; the secondary oxidation mechanism is arranged on the side of the dust storage chamber.

[0018] According to the filtering device for a single crystal furnace described in the utility model, preferably, the secondary oxidation mechanism includes an active air intake valve, a passive air intake valve and a second pipe; one end of the second pipe is connected to the dust accumulation chamber, and the other end is connected to the hose; the active air intake valve and the passive air intake valve are sequentially arranged on the second pipe, and the active air intake valve is close to the dust accumulation chamber.

[0019] In the utility model, a secondary oxidation mechanism is also provided, which mainly includes an active air intake valve and a passive air intake valve. After the equipment is shut down, the pump is stopped, and the dust is purified for a certain period of time, and then the passive air intake valve is opened for passive air intake for a period of time and then closed, and then the active air intake valve is opened for active air intake for a period of time and then closed. The passive air intake time can be 30 to 100 minutes, preferably 40 to 80 minutes, and more preferably 45 to 60 minutes. The active air intake time can be 100 to 200 minutes, preferably 120 to 180 minutes, and more preferably 140 to 160 minutes. In this way, the substances in the dust can be fully oxidized, the temperature of the dust can be reduced, the dust can be prevented from burning and exploding, and the safety can be further improved.

[0020] According to the filtering device for a single crystal furnace of the utility model, preferably, a filter bag is provided in the filtering area.

[0021] According to the filter device for a single crystal furnace of the utility model, preferably, it further comprises a moving part; the moving part is arranged at the bottom of the cleaning unit. The moving part can be a universal wheel, which facilitates the movement and application of the device.

[0022] The single crystal furnace filtering device of the utility model is easy to clean, has high safety performance, can improve the filtering time and filtering efficiency of the filtering device, and has a simple structure and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic structural diagram of the filtering device for a single crystal furnace of the utility model.

[0024] Figure 2 It is a structural schematic diagram of the dust cleaning unit of the utility model.

[0025] Description of reference numerals:

[0026] 11-upper cylinder, 12-main cylinder;

[0027] 2-dust cleaning unit, 21-dust accumulation chamber, 22-cleaning device, 221-upper purge mechanism, 222-lower purge mechanism, 223-driving mechanism, 224-rotating shaft, 23-secondary oxidation mechanism, 231-active air intake valve, 232-passive air intake valve, 233-second pipeline;

[0028] 31-hose, 32-dust collecting branch pipe, 33-dust collecting main pipe, 34-first pipe, 35-air blowing pipe;

[0029] 4- Moving parts. DETAILED DESCRIPTION

[0030] Hereinafter, preferred embodiments of the present utility model will be described in detail with reference to the accompanying drawings. Before the description, it should be understood that the terms used in this specification and the appended claims should not be interpreted as limited to the general and dictionary meanings, but are interpreted based on the meanings and concepts corresponding to the technical aspects of the present utility model, which are based on the principle of allowing the inventor to appropriately define the terms for the best explanation.

[0031] In addition, the descriptions presented here are only preferred examples for illustrative purposes and are not intended to limit the scope of the present disclosure. Therefore, it should be understood that other equivalents and modifications may be made thereto without departing from the spirit and scope of the present invention when the present application was filed.

[0032] Example 1

[0033] Figure 1 It is a schematic structural diagram of the filtering device for a single crystal furnace of the utility model. Figure 2 It is a structural schematic diagram of the dust cleaning unit of the utility model.

[0034] like Figure 1 As shown, the filter device for a single crystal furnace of the utility model comprises a filter body, a dust removal unit 2, a pipeline for communication and a moving part 4.

[0035] like Figure 1 As shown, the filter body includes an upper cylinder 11, a main cylinder 12 and a flange sleeve (not shown). The flange sleeve is arranged between the upper cylinder 11 and the main cylinder 12, so that the height of the filter body can be increased, thereby increasing the filtering area, improving the filtering efficiency and filtering time. The filtering area of ​​the filter body is located in the main cylinder 12. In this embodiment, a filter bag is arranged in the filtering area.

[0036] The cleaning unit 2 is arranged at the bottom of the filter body (ie, below the main cylinder 12). The dust generated in the single crystal furnace enters the cleaning unit 2 through the communicating pipe and enters the filtering area of ​​the filter body after being cleaned.

[0037] The pipes for communication include a hose 31, a dust collecting branch pipe 32 and a dust collecting main pipe 33. The dust collecting main pipe 33 is arranged horizontally and located above the filter body. The dust collecting branch pipe 32 is arranged perpendicular to the dust collecting main pipe 33. One end of the dust collecting branch pipe 32 away from the dust collecting main pipe 33 is connected to one end of the hose 31. The other end of the hose 31 is connected to the dust cleaning unit 2.

[0038] The dust cleaning unit 2 comprises a dust storage chamber 21, a cleaning device 22 and a secondary oxidation mechanism 23. Dust enters the dust cleaning unit 2 through a hose 31.

[0039] The dust storage chamber 21 is a hollow cavity structure, on which a dust cleaning port is provided. The dust storage chamber 21 is connected with the filter body through the dust cleaning port, so that the dust in the dust storage chamber 21 enters the filter body.

[0040] The cleaning device 22 is arranged in the dust storage chamber 21. Figure 2 As shown, the cleaning device 22 includes an upper purge mechanism 221, a lower purge mechanism 222, a driving mechanism 223 and a rotating shaft 224. The upper purge mechanism 221 is arranged above the lower purge mechanism 222. The driving mechanism 223 is arranged on the side of the upper purge mechanism 221 and the lower purge mechanism 222 close to the hose 31; the rotating shaft 224 is arranged between the upper purge mechanism 221 and the lower purge mechanism 222, and the rotating shaft 224 is arranged horizontally, one end of the rotating shaft 224 is connected to the upper purge mechanism 221 and the lower purge mechanism 222 respectively, and the other end is connected to the driving mechanism 223. The upper purge mechanism 221 can be set as a tubular structure, and the lower purge mechanism is set as a paddle blade structure. The driving mechanism 223 drives the lower purge mechanism 222 to rotate through the rotating shaft 224 to continuously and slowly move the dust to the automatic dust cleaning port. The end of the upper purge mechanism 221 away from the driving mechanism 223 is connected to the air blowing pipe 35 through the first pipe 34. The air blowing pipe 35 inputs compressed air into the upper purge mechanism 221 for blowing, and the dust is sucked from the dust cleaning port to the filter area of ​​the filter body for filtering. This can prevent a large amount of dust from accumulating at the bottom and make it easy to clean the dust.

[0041] The secondary oxidation mechanism 23 is disposed on the side of the dust storage chamber 21 .

[0042] The secondary oxidation mechanism 23 includes an active air intake valve 231, a passive air intake valve 232 and a second pipe 233. One end of the second pipe 233 is connected to the dust chamber 21, and the other end is connected to the hose 31. The active air intake valve 231 and the passive air intake valve 232 are sequentially arranged on the second pipe 233 near the side of the dust chamber 21, so that the substances in the dust can be fully oxidized, and the temperature of the dust can be reduced to prevent the dust from burning and exploding.

[0043] The moving component 4 is arranged at the bottom of the dust cleaning unit 2. In this embodiment, the moving component 4 is a universal wheel, which can facilitate the movement and application of the device.

[0044] The following describes in detail the method of using the single crystal furnace filter device of this embodiment:

[0045] The dust in the single crystal furnace passes through the dust collecting main pipe 33, the dust collecting branch pipe 32, the hose 31, and the second pipe 233 into the cleaning unit 2. After the equipment is shut down, the pump is stopped to purify the dust for about 10 minutes, and then the passive air intake valve 232 is opened for passive air intake for 50 minutes and then closed. Then the active air intake valve 231 is opened for active air intake for 150 minutes and then closed. After the oxidation process of the dust is strengthened by air, the driving mechanism 223 drives the rotating shaft 224 to rotate, thereby driving the lower purge mechanism 222 to rotate. The blades continuously and slowly move the dust to the automatic cleaning port, and at the same time, the upper purge mechanism 221 starts blowing. The dust is sucked from the automatic cleaning port into the filter body by a combination of blowing, pushing and sucking, and then the dust is filtered onto the filter bag through the improved filter bag.

[0046] The present invention is not limited to the above-mentioned embodiments. Without departing from the essential content of the present invention, any deformation, improvement, and substitution that can be thought of by those skilled in the art shall fall within the scope of the present invention.

Claims

1. A filtering device for a single crystal furnace, characterized in that: It includes a filter body and a dust removal unit; wherein, The cleaning unit is arranged at the bottom of the filter body; a dust accumulation chamber is arranged in the cleaning unit, and the dust accumulation chamber is a hollow cavity structure, on which a cleaning port is arranged, and the dust accumulation chamber is connected with the filter body through the cleaning port; a cleaning device is arranged in the dust accumulation chamber for cleaning dust into the filter area of ​​the filter body; the cleaning device comprises an upper cleaning mechanism, a lower cleaning mechanism, a driving mechanism and a rotating shaft; the upper cleaning mechanism is arranged above the lower cleaning mechanism; the driving mechanism is arranged on one side of the upper cleaning mechanism and the lower cleaning mechanism; the rotating shaft is arranged between the upper cleaning mechanism and the lower cleaning mechanism, and the rotating shaft is arranged horizontally, one end of the rotating shaft is connected to the upper cleaning mechanism and the lower cleaning mechanism respectively, and the other end is connected to the driving mechanism; the driving mechanism is arranged to drive the lower cleaning mechanism to rotate through the rotating shaft to continuously and slowly move the dust to the cleaning port.

2. The single crystal furnace filtering device according to claim 1, characterized in that: The filter body comprises an upper cylinder, a main cylinder and a flange sleeve; the flange sleeve is arranged between the upper cylinder and the main cylinder.

3. The single crystal furnace filtering device according to claim 2, characterized in that: It also includes a hose, a dust collecting main pipe and a dust collecting branch pipe; the dust collecting main pipe is arranged horizontally and located above the filter body; the dust collecting branch pipe is arranged perpendicular to the dust collecting main pipe; one end of the dust collecting branch pipe away from the dust collecting main pipe is connected to one end of the hose; the other end of the hose is connected to the side of the cleaning unit.

4. The single crystal furnace filtering device according to claim 3, characterized in that: One end of the upper purge mechanism away from the driving mechanism is connected to the air blowing pipe through a first pipeline, and the air blowing pipe inputs compressed air into the upper purge mechanism to blow dust from the dust cleaning port to the filter area of ​​the filter body for filtering.

5. The single crystal furnace filtering device according to claim 4, characterized in that: The dust cleaning unit further comprises a secondary oxidation mechanism; the secondary oxidation mechanism is arranged on the side of the dust storage chamber.

6. The single crystal furnace filtering device according to claim 5, characterized in that: The secondary oxidation mechanism includes an active air intake valve, a passive air intake valve and a second pipe; one end of the second pipe is connected to the dust storage chamber, and the other end is connected to the hose; the active air intake valve and the passive air intake valve are sequentially arranged on the second pipe, and the active air intake valve is close to the dust storage chamber.

7. The single crystal furnace filtering device according to any one of claims 1 to 6, characterized in that: A filter bag is arranged in the filter area.

8. The single crystal furnace filtering device according to claim 1, characterized in that: It also includes a moving component; the moving component is arranged at the bottom of the cleaning unit.

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