Quartz tube cleaning equipment

Abstract

The utility model relates to the technical field of photovoltaic production equipment, in particular to quartz tube cleaning equipment, which comprises a cleaning tank and a quartz tube transfer device for transferring a quartz tube into and out of the cleaning tank, wherein a rotary supporting assembly used for supporting a horizontal quartz tube and driving the quartz tube to rotate is arranged in the cleaning tank; the rotary supporting assembly comprises at least one pair of supporting rods arranged in the axial direction of the quartz tube, at least two supporting wheels arranged on each supporting rod in a sleeving mode and used for supporting the outer side wall face of the quartz tube, and a driving set used for driving the at least one pair of supporting rods to rotate.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic production equipment, in particular to a quartz tube cleaning device. Background Art

[0002] In the field of solar photovoltaic, silicon wafers are often inserted into quartz boats and placed in diffusion quartz tubes. Gases such as nitrogen, oxygen and POCI3 are passed through the silicon wafers to react chemically in a high temperature environment and diffuse on the surface of the silicon wafers to form a PN junction. At the same time, during the diffusion process, various process gases will also diffuse into the quartz tube, causing crystallization and affecting the diffusion effect. Therefore, the quartz tube generally needs to be cleaned every 15 days, and the service life of a quartz tube is usually 4-6 months.

[0003] In order to meet the above-mentioned cleaning requirements for the quartz tube, improve the cleaning efficiency of the quartz tube and reduce the harm of the chemical components in the cleaning solution to human labor, the following cleaning methods are generally used in the prior art to clean the quartz tube:

[0004] The first is a vertical cleaning method with a cleaning brush to clean the quartz tube. In this method, the quartz tube is placed along its height direction, and the cleaning brush needs to be configured with a mechanism for driving its movement to realize the cleaning operation. In addition, the maintenance of the position state of the quartz tube in the vertical cleaning method also relies on the corresponding structure. The structural requirements for the transfer process of the vertical quartz tube are also high to prevent it from falling unexpectedly. Therefore, the overall structure of the cleaning equipment of this cleaning method is relatively complex, the equipment cost is high, and the failure rate is also high.

[0005] The second is a horizontal cleaning method with a cleaning tank to achieve the soaking and washing of the quartz tube. Compared with vertical cleaning, the overall equipment structure can be simplified. The quartz tube in this method is placed vertically in the height direction. For example, the announcement number CN220406475U discloses an efficient quartz tube cleaning system, which uses a liftable container part in conjunction with a cleaning tank to achieve the cleaning of the quartz tube. Although this method simplifies the clamping of the quartz tube, it is difficult to ensure that the cleaning effect meets the requirements by only soaking the container part in the cleaning tank. Therefore, for the quartz tube cleaned horizontally, the cleaning equipment needs to be further improved to ensure that its cleaning effect meets the standards. Utility Model Content

[0006] The utility model aims to provide a quartz tube cleaning device to solve the technical problem of ensuring that the quartz tube cleaning effect reaches the standard.

[0007] The quartz tube cleaning equipment of the utility model is realized as follows:

[0008] A quartz tube cleaning device comprises: a cleaning tank and a quartz tube transfer device for transferring the quartz tube to enter and exit the cleaning tank; wherein

[0009] The cleaning tank is provided with a rotating support assembly for supporting a horizontal quartz tube and driving the quartz tube to rotate;

[0010] The rotating support assembly includes at least one pair of support rods arranged along the axial direction of the quartz tube, at least two support wheels respectively sleeved on each support rod for supporting the outer wall of the quartz tube, and a driving group for driving at least one pair of support rods to rotate.

[0011] In an optional implementation of the utility model, the rotating support assembly includes a pair of support rods arranged along the axial direction of the quartz tube and two support wheels respectively sleeved on each support rod for supporting the outer wall surface of the quartz tube;

[0012] The supporting wheels on the pair of supporting rods are adapted to support the quartz tube from both sides of the quartz tube respectively; and

[0013] The support wheel is fixed on the support rod so that the support wheel rotates along with the rotation of the support rod.

[0014] In an optional implementation of the utility model, the quartz tube cleaning device further includes a washing tank connected to the cleaning tank through a liquid pipeline; and

[0015] The cleaning tank and the washing tank are both provided with a liquid inlet suitable for connecting to the liquid pipeline, a water inlet for connecting to the flushing water pipeline to introduce flushing water into the cleaning tank and the washing tank, and a sewage outlet for discharging waste liquid.

[0016] In an optional implementation of the utility model, the cleaning tank and the washing tank are also provided with a connecting pipe for connecting to a blowing duct.

[0017] In an optional implementation of the present invention, the washing tank is also configured with the quartz tube transfer device for transferring the quartz tube into and out of the washing tank.

[0018] In an optional implementation of the utility model, the quartz tube transfer device includes a tube clamping mechanism for clamping and releasing the quartz tube, and a driving mechanism connected to the tube clamping mechanism for driving it to perform lifting motion.

[0019] In an optional implementation of the utility model, the tube clamping mechanism includes at least two pairs of tube clamping assemblies for use in conjunction with each other;

[0020] Each pair of the pipe body clamping assemblies comprises two clamping arms adapted to clamp the pipe body from two side walls in the length direction of the pipe body;

[0021] Each of the clamping arms comprises a contoured hook for lifting the tube body, a hook rod connected to the contoured hook, and a rotation drive structure connected to the hook rod for driving the hook rod to rotate; wherein the contoured hook is formed with an arc-shaped contact surface adapted to the outer side wall of the tube body;

[0022] When the contoured hooks of the two clamping arms of each pair of the pipe clamping assemblies are driven by the rotary drive structure to rotate until the two arc-shaped contact surfaces are arranged facing each other, they are suitable for clamping the pipe;

[0023] When the contoured hook claws of the two clamping arms included in each pair of the pipe clamping assemblies are driven by the rotary drive structure to rotate until the two arc-shaped contact surfaces are arranged opposite to each other, they are suitable for releasing the pipe.

[0024] In an optional implementation of the present invention, the driving mechanism includes a transverse support beam connected to the tube body clamping mechanism, and a longitudinal support lifting assembly connected to the transverse support beam for driving the transverse support beam to move up and down in the longitudinal direction.

[0025] In an optional implementation of the present invention, the quartz tube cleaning equipment also includes a quartz tube detection component arranged on the transverse support beam.

[0026] In an optional implementation of the utility model, the quartz tube detection assembly includes a connection seat for connecting the transverse support beam, a connecting rod connected to the connection seat, a hammer head provided on the connecting rod and suitable for abutting and cooperating with the quartz tube, and a detector connected to the hammer head; wherein

[0027] The hammer head is made of elastic material so that it is compressed when it abuts against the quartz tube.

[0028] By adopting the above technical scheme, the utility model has the following beneficial effects: the quartz tube cleaning equipment of the utility model is provided with a rotating support assembly in the cleaning tank for supporting the horizontal quartz tube and driving the quartz tube to rotate, so that the quartz tube can rotate in the cleaning tank, thereby enhancing the cleaning effect and ensuring that the quartz tube cleaning effect meets the standard.

[0029] Furthermore, at least two pairs of tube clamping assemblies are used to clamp the two ends of the tube axially, thereby ensuring the clamping of the tube in a horizontal state. For each pair of tube clamping assemblies, the clamping and release of the tube are achieved through the rotation of two clamping arms. This process is convenient to use and has a simple structure, a low failure rate, and improves the cleaning efficiency of the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a structural schematic diagram of the quartz tube cleaning equipment of the utility model;

[0031] Figure 2It is a structural schematic diagram of a cleaning tank of a quartz tube cleaning device of the utility model;

[0032] Figure 3 It is a structural schematic diagram of the support rod and the support wheel in the cleaning tank of the quartz tube cleaning equipment of the utility model;

[0033] Figure 4 This is a schematic diagram of the structure of the drive group corresponding to the support rod in the cleaning tank of the quartz tube cleaning equipment of the utility model.

[0034] Figure 5 It is a structural schematic diagram of a quartz tube detection assembly of the quartz tube cleaning device of the utility model;

[0035] Figure 6 It is a structural schematic diagram of the tube body clamping mechanism of the quartz tube cleaning equipment of the utility model in a state where the tube body is clamped;

[0036] Figure 7 It is a structural schematic diagram of a clamping arm of a tube body clamping mechanism of a quartz tube cleaning device of the utility model;

[0037] Figure 8 It is a schematic diagram of the quartz tube transfer device of the quartz tube cleaning equipment of the utility model in the first use state;

[0038] Fig. 9 It is a schematic diagram of the quartz tube transfer device of the quartz tube cleaning equipment of the utility model in the second use state.

[0039] In the figure: quartz tube 100, cleaning tank 200, tube body 100, cleaning tank 200, liquid inlet 201, water inlet 202, sewage outlet 203, overflow port 203, overflow pipe interface 205, connecting pipe 206, cover plate 208, cover plate handle 209, support rod 301, support wheel 302, transmission belt 303, transmission wheel 304, linkage wheel 305, connecting seat 401, connecting rod 402, hammer head 403, detector 404, clamping arm 1, contoured hook 11, arc-shaped contact surface 111, hook rod 12, rotating cylinder 13, outer shell 14, fixed seat 15, transverse support beam 2, longitudinal support lifting component 3. DETAILED DESCRIPTION

[0040] In order to make the content of the utility model more clearly understood, the utility model is further described in detail below based on specific embodiments and in conjunction with the accompanying drawings.

[0041] Example 1: Please refer to Figure 1 and Fig. 9As shown, this embodiment provides a quartz tube cleaning device, including: a cleaning tank 200 and a quartz tube transfer device for transferring a quartz tube 100 to enter and exit the cleaning tank 200; wherein the cleaning tank 200 stores a cleaning liquid for cleaning the quartz tube 100, and the quartz tube 100 is placed in the cleaning tank 200 when it needs to be cleaned, and is taken out of the cleaning tank 200 after being completely cleaned, and for the entire quartz tube 100, it is placed in a horizontal state in the cleaning tank 200 to complete the cleaning operation. In this process, the operation of placing the quartz tube 100 in the cleaning tank 200 and taking it out of the cleaning tank 200 is realized by the quartz tube transfer device.

[0042] Next, regarding the cleaning tank 200 used in this embodiment, it is necessary to explain:

[0043] First, a rotating support assembly is provided in the cleaning tank 200 for supporting the horizontal quartz tube 100 and driving the quartz tube 100 to rotate. On the one hand, the rotating support assembly is used to support the quartz tube 100 from the bottom of the quartz tube 100 so that it can be suspended in the cleaning tank 200 to ensure that each side of the quartz tube 100 can be fully in contact with the cleaning liquid. On the other hand, the rotating support assembly can also realize the self-rotation of the quartz tube 100, so that the quartz tube 100 can enhance its cleaning effect by self-rotation in the cleaning tank 200.

[0044] In order to meet the above-mentioned usage requirements, an optional rotating support assembly is given as an example in conjunction with the accompanying drawings, which generally includes at least one pair of support rods 301 arranged along the axial direction of the quartz tube 100, at least two support wheels 302 respectively sleeved on each support rod 301 for supporting the outer wall of the quartz tube 100, and a driving group for driving at least one pair of support rods 301 to rotate. The support rods 301 here are overhead arranged in the cleaning tank 200, and form a rotational matching relationship with the cleaning tank 200, so that the support rods 301 can rotate in the cleaning tank 200. The support wheels 302 on each support rod 301 are fixed on the support rod 301, so that the rotation of the support rod 301 can drive the corresponding support wheel 302 to rotate together.

[0045] The driving group used in this embodiment can optionally adopt, for example but not limited to, a pulley structure, so that the transmission belt 303 is combined with the transmission wheel 304 and is mounted on the support rod 301, and then the motor cooperates with the linkage wheel 305 to realize the circulation operation of the transmission belt 303, thereby realizing the rotation movement of the support rod 301.

[0046] From the perspective of simplifying the structure, the drawings of this embodiment only take the case where the rotating support assembly includes a pair of support rods 301 arranged along the axial direction of the quartz tube 100 and two support wheels 302 respectively sleeved on each support rod 301 for supporting the outer wall surface of the quartz tube 100 as an example. Here, the two support wheels 302 on each support rod 301 are respectively used to support the two ends of the axial direction of the quartz tube 100. The support wheels 302 on the pair of support rods 301 are preferably in a relatively matched structure, so that the support wheels 302 on the support rods 301 are suitable for supporting the quartz tube 100 from both sides of the quartz tube 100.

[0047] Secondly, the cleaning tank 200 also includes the following structure provided on its side wall:

[0048] Taking a relatively preferred implementation as an example, a liquid inlet 201 suitable for connecting to a liquid pipeline, a water inlet 202 for connecting to a flushing water pipeline to introduce flushing water into the cleaning tank 200, and a sewage outlet 203 for discharging waste liquid are provided on the bottom wall of the cleaning tank 200.

[0049] Furthermore, in order to prevent the cleaning liquid in the cleaning tank 200 from overflowing after the quartz tube 100 is placed in the cleaning tank 200, an overflow groove is designed on the side wall of the cleaning tank 200 near the top to accommodate the overflow of excess cleaning liquid, and an overflow port 203 connected to the inner cavity of the cleaning tank 200 is provided on the side wall of the overflow groove facing the inner cavity of the cleaning tank 200, and an overflow pipe interface 205 communicating with the overflow groove is provided on the outer side wall of the cleaning tank 200, so that the excess cleaning liquid can be discharged and collected for standby use in time.

[0050] In addition, considering that the surface of the quartz tube 100 contains moisture that needs to be cleaned after the cleaning is completed, the present embodiment further provides a connecting pipe 206 for connecting the blowing duct on the side wall of the cleaning tank 200. Under this structure, warm air can be introduced into the cleaning tank 200 through the connecting pipe 206 to accelerate the drying efficiency of the moisture on the surface of the quartz tube 100. In this regard, the connecting pipe 206 is preferably provided on the side wall near the top of the cleaning tank 200, so that the warm air introduced into the cleaning tank 200 by the connecting pipe 206 is directly blown toward the quartz tube 100.

[0051] On the basis of the above structure, this embodiment takes into account that the cleaning liquid is applicable to more than one quartz tube 100 at a time, that is, the cleaning liquid needs to be replaced only after a certain number of quartz tubes 100 are cleaned, that is, the cleaning liquid can be reused on multiple quartz tubes 100. In order to improve the cleaning efficiency of batches of quartz tubes 100, this embodiment also makes the following design:

[0052] A washing tank is designed beside the cleaning tank 200. The structure of the washing tank itself is exactly the same as that of the cleaning tank 200. In order to facilitate the distinction of names, it is named as a washing tank here, that is, the washing tank has every structure and function configured in the cleaning tank 200. The washing tank is connected to the cleaning tank 200 through a liquid pipeline, and an electromagnetic pump is arranged in the middle of the liquid pipeline, that is, one end of the liquid pipeline is connected to the liquid inlet 201 of the cleaning tank 200, and the other end is connected to the liquid inlet 201 of the washing tank. In this way, when the quartz tube 100 in the cleaning tank 200 needs to enter the flushing water flushing stage, the cleaning liquid originally in the cleaning tank 200 enters the washing tank through the liquid pipeline, and then another quartz tube 100 is placed in the washing tank for cleaning, thereby improving the cleaning efficiency of the batch of quartz tubes 100.

[0053] Next, it is to be explained that the quartz tube transfer device used in this embodiment includes a tube clamping mechanism for clamping and releasing the quartz tube 100, and a driving mechanism connected to the tube clamping mechanism for driving it to do lifting movement. This embodiment mainly realizes the movement of the tube clamping mechanism in the longitudinal dimension through the driving mechanism, thereby meeting the lifting and lowering requirements for the quartz tube 100 when it is used in the quartz tube cleaning equipment, thereby facilitating the cleaning of the quartz tube 100 and improving the transfer efficiency of the quartz tube 100 in and out of the cleaning tank 200 and the washing tank of the quartz tube cleaning equipment.

[0054] Specifically, in conjunction with the accompanying drawings, the tube clamping mechanism includes: at least two pairs of tube clamping assemblies for use in conjunction with each other. In an optional case, only two pairs of tube clamping assemblies are used, and the two tube clamping assemblies are used to clamp the first and last ends of the horizontal tube, respectively. Of course, three or even more pairs of tube clamping assemblies can also be used here, and this embodiment does not make an absolute limitation on this. The accompanying drawings of this embodiment only take the case of two pairs of tube clamping assemblies for use in conjunction with each other as an example, and the structures of the two pairs of tube clamping assemblies are the same. The structure of the tube clamping assemblies described below does not specify which pair it is.

[0055] Next, each pair of tube clamping assemblies includes two clamping arms 1 suitable for clamping the tube from two side walls in the length direction of the tube. It should be noted here that the structures of the two clamping arms 1 are actually completely identical, and only the arrangement angles during use are different. Therefore, the following description only describes the case of any one clamping arm 1.

[0056] Furthermore, each clamping arm 1 includes a profiling hook 11 for lifting the pipe, a hook rod 12 connected to the profiling hook 11, and a rotation drive structure connected to the hook rod 12 for driving the hook rod 12 to rotate; wherein the profiling hook 11 is formed with an arc-shaped contact surface 111 adapted to the outer wall of the pipe. Under this structure, the hook rod 12 is driven to rotate by the rotation drive structure, thereby driving the rotation of the profiling hook 11 through the rotation of the hook rod 12.

[0057] Based on the above structure, the general principle of clamping and releasing the pipe by each pair of pipe clamping assemblies is as follows:

[0058] When the contoured hooks 11 of the two clamping arms 1 included in each pair of tube body clamping assemblies are driven by the rotary drive structure to rotate until the two arc-shaped contact surfaces 111 are arranged facing each other, they are suitable for clamping the tube, that is, the facing arrangement of the pair of contoured hooks 11 just forms a clamping interval for supporting and clamping the tube; when the contoured hooks 11 of the two clamping arms 1 included in each pair of tube body clamping assemblies are driven by the rotary drive structure to rotate until the two arc-shaped contact surfaces 111 are arranged back to back, they are suitable for releasing the tube, that is, the above-mentioned clamping interval is released due to the rotational movement of the pair of contoured hooks 11.

[0059] Next, a specific optional situation is described in detail with reference to the accompanying drawings. First, in an optional implementation, the rotary drive structure adopts a rotary cylinder 13. The driving end of the rotary cylinder 13 is directly or indirectly connected to the hook rod 12 through a connecting piece, and the main body of the rotary cylinder 13 itself is fixed in an outer shell 14.

[0060] Secondly, the profiling hook 11 is arranged on the fixing seat 15; and the fixing seat 15 is connected to the hook rod 12. In the optional case here, considering that the profiling hook 11 needs to directly contact the pipe, in order to replace the profiling hook 11 in time when the profiling hook 11 is damaged and cannot achieve a good lifting effect on the pipe, the profiling hook 11 in this embodiment is detachably assembled on the fixing seat 15. The fixing seat 15 and the hook rod 12 can be optionally connected in a vertical structure.

[0061] For the tube clamping mechanism of this embodiment, at least two pairs of tube clamping assemblies are used to clamp the two ends of the tube in the length direction, thereby ensuring the clamping of the tube in a horizontal state. For each pair of tube clamping assemblies, the clamping and release of the tube are achieved through the rotation of the two clamping arms 1. This process is convenient to use and has a simple structure with a low failure rate. When it is used in a quartz tube cleaning device, the cleaning efficiency of the quartz tube 100 is improved.

[0062] As an example of an optional implementation, the driving mechanism includes a transverse support beam 2 connected to the tube clamping mechanism, and a longitudinal support lifting assembly 3 connected to the transverse support beam 2 for driving the transverse support beam 2 to move vertically. The outer shell 14 of the rotating drive structure of the tube clamping mechanism is connected to the transverse support beam 2.

[0063] More specifically, the longitudinal support lifting assembly 3 includes a pair of linear screw modules respectively connected to the two ends of the transverse support beam 2. Of course, the linear screw modules can also be replaced by a driving structure that can realize linear motion in the prior art, and this embodiment does not make an absolute limitation on this.

[0064] In summary, for the quartz tube cleaning device of this embodiment, the quartz tube 100 to be cleaned is sent into the cleaning tank 200 by the quartz tube transfer device, and the quartz tube 100 is placed on the support wheels 302 of a pair of support rods 301, and then the quartz tube transfer device withdraws the quartz tube 100. A sufficient amount of cleaning liquid is introduced into the cleaning tank 200, and then the pair of support rods 301 are started to rotate, thereby achieving the self-rotation effect of the quartz tube 100 on the support rods 301, ensuring that the quartz tube 100 is thoroughly cleaned in the cleaning tank 200. After the quartz tube 100 is cleaned, the cleaning liquid is introduced into the washing tank through the liquid pipeline, and at this time, another quartz tube 100 to be cleaned is placed in the washing tank. At the same time, washing water, such as pure water, is introduced into the washing tank 200 to wash away the residual washing liquid on the quartz tube 100. The liquid after washing the quartz tube 100 is completely discharged through the sewage outlet 203. Finally, warm air is introduced into the washing tank 200 through the blowing pipe to accelerate the drying of the quartz tube 100. In this way, when the quartz tube 100 in the washing tank 200 is washed and dried, the quartz tube 100 in the washing tank is washed. In this way, the washing liquid is recycled to wash the quartz tube 100 synchronously between the washing tank 200 and the washing tank, which can greatly improve the washing efficiency of the batch of quartz tubes 100.

[0065] Example 2: Please refer to Figures 1 to 9 As shown, based on the quartz tube cleaning device of Example 1, the quartz tube cleaning device provided in this embodiment further includes a quartz tube detection assembly disposed on the transverse support beam and adapted to move synchronously with the tube body clamping mechanism. In terms of design position, the quartz tube detection assembly is preferably located beside the quartz tube transfer device.

[0066] For example, in an optional implementation, the quartz tube detection assembly includes a connection seat 401 for connecting the transverse support beam, a connecting rod 402 connected to the connection seat 401, a hammer head 403 provided on the connecting rod 402 and suitable for abutting and cooperating with the quartz tube 100, and a detector 404 connected to the hammer head 403; wherein the hammer head 403 is made of elastic material so that it is compressed when abutting with the quartz tube 100. In an optional implementation, the connecting rod 402 here can be arranged in parallel with the hook rod 12, so that the hammer head 403 provided on the connecting rod 402 is more convenient to contact with the quartz tube 100.

[0067] Under this structure, when the clamping arm 1 is in the state of clamping the quartz tube 100, the hammer head 403 and the quartz tube 100 are in a low-contact state. At this time, the detector 404 can sense the state of the hammer head 403, thereby judging whether there is a quartz tube 100 on the clamping arm 1, ensuring that the clamped quartz tube 100 is effectively clamped and transferred to prevent the quartz tube 100 from being crushed. At the same time, it can also give an alarm in time when the quartz tube 100 is unexpectedly detached from the quartz tube transfer device.

[0068] Embodiment 3: Based on the quartz tube cleaning equipment of Embodiment 1 or Embodiment 2, the quartz tube cleaning equipment provided in this embodiment further includes: a cover plate 208 for covering the openings of the cleaning tank 200 and the washing tank. The design of the cover plate 208 here enables the cleaning tank 200 and the washing tank to be dustproof when not in use. In order to facilitate the movement of the cover plate 208 to open the openings of the cleaning tank 200 and the washing tank, a cover plate handle 209 is provided on the cover plate 208.

[0069] The cover plate 208 can be manually closed and opened. The quartz tube transfer device of this embodiment can also be used to open the cover plate 208. In this case, it is only necessary to design the outer wall edge of the cover plate handle 209 to be aligned with the arc surface of the outer wall of the quartz tube 100, so that the contoured hook 11 can lift the cover plate handle 209, thereby achieving the purpose of transferring the cover plate 208 to open the openings of the cleaning tank 200 and the washing tank. In other words, the process of transferring the quartz tube 100 by the quartz tube transfer device can be simultaneously applied to the clamping transfer of the cover plate 208, achieving the effect of killing two birds with one stone.

[0070] The above specific embodiments further illustrate the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

[0071] In the description of the present invention, it is necessary to understand that the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0072] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0073] In the present utility model, unless otherwise clearly specified and limited, the first feature being above or below the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, the first feature being above, above, and above the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being below, below, and below the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

Claims

1. A quartz tube cleaning device, characterized in that: It includes: a cleaning tank and a quartz tube transfer device for transferring the quartz tube into and out of the cleaning tank; in The cleaning tank is provided with a rotating support assembly for supporting a horizontal quartz tube and driving the quartz tube to rotate; The rotating support assembly includes at least one pair of support rods arranged along the axial direction of the quartz tube, at least two support wheels respectively sleeved on each support rod for supporting the outer wall of the quartz tube, and a driving group for driving at least one pair of support rods to rotate.

2. The quartz tube cleaning equipment according to claim 1, characterized in that: The rotating support assembly includes a pair of support rods arranged along the axial direction of the quartz tube and two support wheels respectively sleeved on each support rod for supporting the outer wall surface of the quartz tube; The supporting wheels on the pair of supporting rods are adapted to support the quartz tube from both sides of the quartz tube respectively; and The support wheel is fixed on the support rod so that the support wheel rotates along with the rotation of the support rod.

3. The quartz tube cleaning equipment according to claim 1, characterized in that: The quartz tube cleaning equipment also includes a washing tank connected to the cleaning tank through a liquid pipeline; and The cleaning tank and the washing tank are both provided with a liquid inlet suitable for connecting to the liquid pipeline, a water inlet for connecting to the flushing water pipeline to introduce flushing water into the cleaning tank and the washing tank, and a sewage outlet for discharging waste liquid.

4. The quartz tube cleaning equipment according to claim 3, characterized in that: The cleaning tank and the washing tank are also provided with connecting pipes for connecting to the blowing pipes.

5. The quartz tube cleaning equipment according to claim 3, characterized in that: The washing tank The quartz tube transfer device is configured to transfer the quartz tube into and out of the washing tank.

6. The quartz tube cleaning equipment according to claim 1 or 5, characterized in that: The quartz tube transfer device comprises a tube clamping mechanism for clamping and releasing the quartz tube, and a driving mechanism connected to the tube clamping mechanism for driving the tube clamping mechanism to perform lifting motion.

7. The quartz tube cleaning equipment according to claim 6, characterized in that: The tube clamping mechanism comprises at least two pairs of tube clamping assemblies used in conjunction with each other; Each pair of the pipe body clamping assemblies comprises two clamping arms adapted to clamp the pipe body from two side walls in the length direction of the pipe body; Each of the clamping arms comprises a contoured hook for lifting the tube body, a hook rod connected to the contoured hook, and a rotation drive structure connected to the hook rod for driving the hook rod to rotate; wherein the contoured hook is formed with an arc-shaped contact surface adapted to the outer side wall of the tube body; When the contoured hooks of the two clamping arms of each pair of the pipe clamping assemblies are driven by the rotary drive structure to rotate until the two arc-shaped contact surfaces are arranged facing each other, they are suitable for clamping the pipe; When the contoured hook claws of the two clamping arms included in each pair of the pipe clamping assemblies are driven by the rotary drive structure to rotate until the two arc-shaped contact surfaces are arranged opposite to each other, they are suitable for releasing the pipe.

8. The quartz tube cleaning equipment according to claim 7, characterized in that: The driving mechanism comprises a transverse support beam connected to the tube body clamping mechanism, and a longitudinal support lifting assembly connected to the transverse support beam and used for driving the transverse support beam to move vertically.

9. The quartz tube cleaning equipment according to claim 8, characterized in that: The quartz tube cleaning equipment also includes a quartz tube detection component arranged on the transverse support beam.

10. The quartz tube cleaning equipment according to claim 9, characterized in that: The quartz tube detection assembly includes a connection seat for connecting the transverse support beam, a connecting rod connected to the connection seat, a hammer head arranged on the connecting rod and suitable for abutting and cooperating with the quartz tube, and a detector connected to the hammer head; wherein The hammer head is made of elastic material so that it is compressed when it abuts against the quartz tube.

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