Vacuum furnace device

Abstract

The utility model relates to the technical field of vacuum sintering furnaces, in particular to a vacuum furnace device which comprises an inlet sealing door, at least one preheating station, a welding station, a soldering flux recovery device, at least one cooling station, a carrying mechanism and an outlet sealing door. The inlet end of the preheating station is sealed through the inlet sealing door, the preheating station is connected with the welding station, the welding station is connected with the cooling station, the outlet end of the cooling station is sealed through the outlet sealing door, the preheating station and the cooling station are provided with the scaling powder recovery devices, and the scaling powder recovery devices are connected with the welding station. And the preheating station, the welding station and the cooling station are circulated through the carrying mechanism, so that the recovery efficiency of the soldering flux is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering furnaces, in particular to a vacuum furnace device. Background Art

[0002] At present, semiconductor chip packaging equipment in the prior art mostly adopts the form of assembly lines, and the chips need to be welded and packaged. In order to ensure the quality of chip welding, the chip welding needs to be carried out in a vacuum environment or a reducing environment before and during the welding process. In the semiconductor chip packaging equipment in the prior art, the flux recovery is slow before the workpiece enters the welding station, which affects the production efficiency. Summary of the invention

[0003] The utility model provides a vacuum furnace device, which is used to solve the problem of slow recovery of soldering flux in the vacuum sintering furnace in the prior art.

[0004] The utility model provides a vacuum furnace device, comprising an inlet sealing door, at least one preheating station, a welding station, a solder flux recovery device, at least one cooling station, a conveying mechanism and an outlet sealing door; the inlet end of the preheating station is sealed by the inlet sealing door, the preheating station is connected to the welding station, the welding station is connected to the cooling station, the outlet end of the cooling station is sealed by the outlet sealing door, the preheating station and the cooling station are provided with the solder flux recovery device, and the preheating station, the welding station and the cooling station are circulated through the conveying mechanism.

[0005] According to the vacuum furnace device of the utility model, it also includes a fan motor and fan blades, the fan blades are arranged in the preheating station and the cooling station, the fan motor is arranged above the preheating station and the cooling station, and the fan motor drives the fan blades.

[0006] According to the vacuum furnace device of the utility model, fan blades are arranged in the cooling station, and the fan motor is arranged above the cooling station.

[0007] According to the vacuum furnace device of the utility model, the transport mechanism performs horizontal movement and vertical movement.

[0008] According to the vacuum furnace device of the utility model, the preheating station is set to the same temperature or a step-by-step temperature increase.

[0009] According to the vacuum furnace device of the utility model, the cooling stations are set to have the same temperature or to reduce the temperature in steps.

[0010] According to the vacuum furnace device of the utility model, the inlet sealing door and the outlet sealing door are provided with cylinders, and guide pillars are provided on both sides of the cylinders.

[0011] According to the vacuum furnace device of the utility model, the soldering flux recovery device comprises an exhaust pump, a manifold and a branch pipe; a plurality of branch pipes are arranged on the manifold, and the exhaust pump is connected to the manifold.

[0012] According to the vacuum furnace device of the utility model, the preheating station and the cooling station form a first vacuum chamber.

[0013] According to the vacuum furnace device of the utility model, the welding station forms a second vacuum chamber, and the first vacuum chamber is located above the second vacuum chamber.

[0014] Fans are installed in the chambers of the preheating station and cooling zone to speed up gas flow and improve the recovery efficiency of the flux. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of a vacuum furnace device;

[0017] Figure 2 It is a schematic diagram of the front view structure of the vacuum furnace device;

[0018] Figure 3 It is a cross-sectional structural schematic diagram of a vacuum furnace device;

[0019] Figure 4 It is a structural schematic diagram of a partial enlarged view of A in the cross-sectional view;

[0020] Figure 5 It is a schematic diagram of the three-dimensional structure of the lower cavity;

[0021] Figure 6 It is a schematic structural diagram of a partial enlarged view of B of the lower cavity;

[0022] Figure numerals: 1. Inlet sealing door; 2. Preheating station; 3. Welding station; 4. Cooling station; 5. Outlet sealing door; 6. Transport mechanism; 7. Fan motor; 8. Fan blades; 9. Manifold; 10. Branch pipe; 31. Driving mechanism; 32. First vacuum chamber; 33. Second vacuum chamber. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0024] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0025] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0026] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0027] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0028] Combine the following Figure 1-6 A vacuum furnace device according to an embodiment of the utility model is described, comprising an inlet sealing door 1, at least one preheating station 2, a welding station 3, a flux recovery device, at least one cooling station 4, a conveying mechanism 6 and an outlet sealing door 5; the inlet end of the preheating station 2 is sealed by the inlet sealing door 1, the preheating station 2 is connected to the welding station 3, the welding station 3 is connected to the cooling station 4, the outlet end of the cooling station 4 is sealed by the outlet sealing door 5, the preheating station 2 and the cooling station 4 are provided with a flux recovery device, and the preheating station 2, the welding station 3 and the cooling station 4 are circulated through the conveying mechanism 6.

[0029] The transport mechanism 6 performs horizontal and vertical movements. The vertical movement is to lift the fixture and the workpiece, and then the horizontal movement is used to transport the workpiece. After reaching the target position, the vertical movement is used to lower the workpiece onto the support column.

[0030] The preheating station 2 is set to the same temperature or a step-by-step temperature increase, that is, the step-by-step temperature increase, that is, the preheating station 2 is provided with a first preheating station, a second preheating station and a third preheating station, the first preheating station preheats to a first preheating temperature T1, the second preheating station preheats to a second preheating temperature T2, and the third preheating station preheats to a third preheating temperature T3. T3>T2>T1.

[0031] The cooling station 4 is set to the same temperature or step-down temperature. That is, the step-down temperature is set to the cooling station 4, i.e., the first cooling station is cooled to the first cooling temperature, and the second cooling station is cooled to the second cooling temperature.

[0032] Reducing gas and inert gas are filled into the preheating station 2, welding station 3 and cooling station 4. The reducing gas includes formic acid and hydrogen. The inert gas includes nitrogen.

[0033] A lifting mechanism is provided below the welding station 3, and the lifting mechanism lifts and lowers the fixture and the workpiece.

[0034] The preheating station 2, the welding station 3 and the cooling station 4 are divided into a lower cavity and an upper cavity.

[0035] In this embodiment, a fan motor 7 and a fan blade 8 are further included, the fan blade 7 is arranged in the preheating station 2 and the cooling station 3, the fan motor 7 is arranged above the preheating station 2 and the cooling station 4, and the fan motor 7 drives the fan blade 7. The fan accelerates the flow of gas in the preheating station 2 and the cooling station 4, and the gas includes air or formic acid nitrogen or soldering flux.

[0036] In this embodiment, fan blades 8 are provided in the cooling station 4, and a fan motor 7 is provided above the cooling station 4. The fan accelerates cooling on the one hand, and accelerates the recovery of the soldering flux on the other hand.

[0037] In this embodiment, the inlet sealing door 1 and the outlet sealing door 5 are provided with a cylinder and guide posts are provided on both sides of the cylinder. The sealing is performed by the up and down movement of the cylinder, and the guide posts provide the accuracy of the movement, that is, improve the sealing performance.

[0038] In this embodiment, the soldering flux recovery device includes an air extraction pump, a confluence pipe 9 and branch pipes 10 ; a plurality of branch pipes 10 are provided on the confluence pipe 9 , and the air extraction pump is connected to the confluence pipe 9 .

[0039] In this embodiment, the preheating station 2 and the cooling station 4 form a first vacuum chamber 32 .

[0040] In the above embodiment, the first vacuum chamber 32 is located above the second vacuum chamber 33. The driving mechanism 31 drives the second vacuum chamber 33 to be closed and sealed.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A vacuum furnace device, characterized in that: It includes an inlet sealing door, at least one preheating station, a welding station, a flux recovery device, at least one cooling station, a conveying mechanism and an outlet sealing door; the inlet end of the preheating station is sealed by the inlet sealing door, the preheating station is connected to the welding station, the welding station is connected to the cooling station, the outlet end of the cooling station is sealed by the outlet sealing door, the preheating station and the cooling station are provided with the flux recovery device, and the preheating station, the welding station and the cooling station are circulated through the conveying mechanism.

2. The vacuum furnace device according to claim 1, characterized in that: It also includes a fan motor and fan blades, wherein the fan blades are arranged in the preheating station and the cooling station, the fan motor is arranged above the preheating station and the cooling station, and the fan motor drives the fan blades.

3. The vacuum furnace device according to claim 2, characterized in that: The fan blades are arranged in the cooling station, and the fan motor is arranged above the cooling station.

4. The vacuum furnace device according to claim 1, characterized in that: The transport mechanism performs horizontal and vertical movements.

5. The vacuum furnace device according to claim 1, characterized in that: The preheating stations are set to the same temperature or step-by-step temperature increase.

6. The vacuum furnace device according to claim 1, characterized in that: The cooling stations are set to the same temperature or to reduce the temperature in steps.

7. The vacuum furnace device according to claim 1, characterized in that: The inlet sealing door and the outlet sealing door are provided with cylinders and guide columns are provided on both sides of the cylinders.

8. The vacuum furnace device according to claim 1, characterized in that: The soldering flux recovery device comprises an air extraction pump, a confluence pipe and a branch pipe; a plurality of branch pipes are arranged on the confluence pipe, and the air extraction pump is connected to the confluence pipe.

9. The vacuum furnace device according to claim 1, characterized in that: The preheating station and the cooling station form a first vacuum chamber.

10. The vacuum furnace device according to claim 9, characterized in that: The welding station forms a second vacuum chamber, and the first vacuum chamber is located above the second vacuum chamber.

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