Electrode connecting device of induction coil

Abstract

The utility model discloses an electrode connecting device of an induction coil, which comprises a bottom plate, a side wall and an upper cover covering the upper end of the side wall, a first fixing piece and a second fixing piece are arranged on the bottom plate in an upward protruding mode, the first fixing piece is provided with a first electrode hole penetrating through the bottom plate, and the second fixing piece is provided with a second electrode hole penetrating through the bottom plate. A first water cooling channel is clamped between the first fixing piece and the side wall, a second water cooling channel is clamped between the second fixing piece and the side wall, and a third water cooling channel which is in a wave shape and is communicated with the first water cooling channel and the second water cooling channel is clamped between the first fixing piece and the second fixing piece. According to the electrode connecting device, the contact area of the water cooling channels is increased as much as possible in a limited space in the electrode connecting device through the three water cooling channels which are arranged at intervals and are sequentially communicated, so that the heat dissipation and cooling effects of the electrode are improved, the contact area is further enlarged through the wavy third water cooling channel, and the heat dissipation effect is better.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an electrode connecting device of an induction coil. Background Art

[0002] Metal Organic Chemical Vapor Deposition (MOCVD) equipment is a vapor deposition equipment using metal organic compounds as source materials, and is mainly used to grow compound semiconductor materials such as silicon carbide, gallium nitride, gallium arsenide, zinc oxide, and indium phosphide. In MOCVD epitaxial process or other semiconductor processes, induction coil heating is often required. The induction coil usually has two electrodes, and alternating current is passed through the two electrodes to heat the induction coil. The two electrodes usually need to be fixed with an electrode connecting plate to prevent the electrodes from shifting and causing equipment failure. At the same time, when the induction coil is working, the temperature of the electrode is very high. If it is not cooled, it is very likely that the electrode temperature will be too high, affecting the service life and safe operation of the equipment. The existing electrode connection device has the problem of low heat dissipation efficiency. Summary of the invention

[0003] The utility model aims to solve the deficiencies of the prior art and provides an electrode connection device for an induction coil.

[0004] The technical solution of the utility model is: an electrode connection device for an induction coil, comprising:

[0005] A bottom plate, wherein the bottom plate is provided with a first fixing member and a second fixing member protruding upward, and the first fixing member is provided with a first electrode hole penetrating the bottom plate, and the second fixing member is provided with a second electrode hole penetrating the bottom plate;

[0006] A side wall fixedly connected to the bottom plate, a first water-cooling channel is sandwiched between the side wall and the first fixing member, a second water-cooling channel is sandwiched between the side wall and the second fixing member, and first connecting walls fixedly connected to the first fixing member and second connecting walls fixedly connected to the second fixing member are respectively extended inwardly from opposite sides of the side wall, the first connecting wall is used to separate the first water-cooling channel from the second water-cooling channel, and the second connecting wall is used to separate the first water-cooling channel from the second water-cooling channel;

[0007] An upper cover, which is arranged at the upper end of the side wall, and is provided with a first through hole correspondingly connected to the first electrode hole and a second through hole correspondingly connected to the second electrode hole;

[0008] Among them, the first fixing member, the second fixing member, the first connecting wall, and the second connecting wall are all fixedly connected to the upper cover, the bottom plate close to the first connecting wall and located on the side of the first water-cooling channel is provided with a water inlet hole, and the bottom plate close to the second connecting wall and located on the side of the second water-cooling channel is provided with a water outlet hole, the water inlet hole is communicated with the first water-cooling channel, and the water outlet hole is communicated with the second water-cooling channel, a wavy third water-cooling channel is sandwiched between the first fixing member and the second fixing member, and two ends of the third water-cooling channel are respectively communicated with the first water-cooling channel and the second water-cooling channel.

[0009] Optionally, the first connecting wall extends toward the first fixing member to form a first expansion portion, and the second connecting wall extends toward the second fixing member to form a second expansion portion, and the first expansion portion and the outer side surface of the second fixing member form an inwardly concave arc surface at a position opposite to each other, and the second expansion portion and the outer side surface of the first fixing member form an inwardly concave arc surface at a position opposite to each other.

[0010] Optionally, the first fixing member and the second fixing member have arc-shaped outer side surfaces.

[0011] Optionally, the inner diameter of the first electrode hole is 5-30 mm.

[0012] Optionally, the inner diameter of the second electrode hole is 5-30 mm.

[0013] Optionally, the first fixing member and the second fixing member abut against the upper cover.

[0014] Optionally, the first connecting wall and the first fixing member are integrally formed, and the second connecting wall and the second fixing member are integrally formed.

[0015] Optionally, the vertical distance between the center of the water inlet hole and the first connecting wall is 2-8 mm.

[0016] Optionally, the vertical distance between the center of the water outlet hole and the first connecting wall is 2-8 mm.

[0017] Optionally, the first fixing member and the second fixing member are axially symmetrical with respect to the center of the base plate.

[0018] By adopting the above technical scheme, the utility model has the following beneficial effects: the utility model increases the contact area of ​​the water cooling channel as much as possible within the limited space inside the electrode connecting device of the induction coil by setting three water cooling channels separated by the first fixing member and the second fixing member and connected in sequence, thereby improving the heat dissipation and cooling effect of the electrode, and further expands the contact area through the wavy third water cooling channel, thereby achieving a better heat dissipation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the content of the utility model more clearly understood, the utility model is further described in detail below based on specific embodiments and in conjunction with the accompanying drawings.

[0020] Figure 1 This is a schematic structural diagram of an electrode connection device for an induction coil according to an embodiment of the utility model;

[0021] Figure 2 Another structural schematic diagram of an electrode connection device of an induction coil according to an embodiment of the utility model;

[0022] Figure 3 The present invention is a cross-sectional view of an electrode connection device of an induction coil according to an embodiment of the present invention.

[0023] Figure 4 This is a schematic structural diagram of an induction coil heating device according to an embodiment of the utility model;

[0024] The reference numerals in the accompanying drawings are:

[0025] 1. induction coil body; 11. first electrode; 12. second electrode; 21. side wall; 22. bottom plate; 23. upper cover; 32. first water cooling channel; 33. second water cooling channel; 41. first electrode hole; 42. second electrode hole; 31. third water cooling channel; 25. first connecting wall; 26. second connecting wall; 27. water inlet hole; 28. water outlet hole; 43. first fixing member; 44. second fixing member; 45. first through hole; 46. second through hole; 13. water inlet pipe; 14. water outlet pipe; 34. first expansion part; 35. second expansion part. DETAILED DESCRIPTION

[0026] In order to better understand the technical content of the present invention, specific embodiments are described below in conjunction with the accompanying drawings.

[0027] Various aspects of the utility model are described in the present disclosure with reference to the accompanying drawings, in which many illustrative embodiments are shown. The embodiments of the present disclosure are not necessarily intended to include all aspects of the utility model. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed by the utility model are not limited to any implementation. In addition, some aspects disclosed by the utility model can be used alone, or in any appropriate combination with other aspects disclosed by the utility model.

[0028] It should be noted that when an element is referred to as being "connected to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0030] In the description of the present invention, it should be understood that the terms "center", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0032] Reference throughout the specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, when the phrases "in one embodiment," "in some embodiments," or "in some of these embodiments" appear in various places throughout the specification, not all references are to the same embodiment. Furthermore, in one or more embodiments, the particular features, structures, or characteristics may be combined in any suitable manner.

[0033] See also Figure 1-Figure 3 , an electrode connection device for an induction coil, comprising:

[0034] A bottom plate 22, wherein the bottom plate 22 is provided with a first fixing member 43 and a second fixing member 44 protruding upward, and the first fixing member 43 is provided with a first electrode hole 41 penetrating the bottom plate 22, and the second fixing member 44 is provided with a second electrode hole 42 penetrating the bottom plate 22;

[0035] The side wall 21 is fixedly connected to the bottom plate 22. A first water-cooling channel 32 is sandwiched between the side wall 21 and the first fixing member 43. A second water-cooling channel 33 is sandwiched between the side wall 21 and the second fixing member 44. A first connecting wall 25 fixedly connected to the first fixing member 43 and a second connecting wall 26 fixedly connected to the second fixing member 44 extend inward from opposite sides of the side wall 21. The first connecting wall 25 is used to separate the first water-cooling channel 32 from the second water-cooling channel 33. The second connecting wall 26 is used to separate the first water-cooling channel 32 from the second water-cooling channel 33.

[0036] An upper cover 23, which is disposed on the upper end of the side wall 21, and the upper cover 23 is provided with a first through hole correspondingly communicating with the first electrode hole 41, and a second through hole correspondingly communicating with the second electrode hole 42;

[0037] Among them, the first fixing member 43, the second fixing member 44, the first connecting wall 25, and the second connecting wall 26 are all fixedly connected to the upper cover 23, the bottom plate 22 close to the first connecting wall 25 and located on the side of the first water-cooling channel 32 is provided with a water inlet hole 27, and the bottom plate 22 close to the second connecting wall 26 and located on the side of the second water-cooling channel 33 is provided with a water outlet hole 28, the water inlet hole 27 is communicated with the first water-cooling channel 32, and the water outlet hole 28 is communicated with the second water-cooling channel 33, and a wavy third water-cooling channel 31 is sandwiched between the first fixing member 43 and the second fixing member 44, and the two ends of the third water-cooling channel 31 are respectively communicated with the first water-cooling channel 32 and the second water-cooling channel 33.

[0038] In one embodiment, the bottom plate 22 is generally elliptical in shape. It is understandable that the bottom plate 22 may be in other shapes such as rectangular or circular. The bottom plate 22 may be made of insulating materials such as ceramics and plastics.

[0039] In one embodiment, the upper cover 23 is similar in shape to the bottom plate 22 and is generally elliptical. It is understandable that it can be other shapes such as rectangle and circle. The bottom plate 22 can be made of insulating materials such as ceramics and plastics.

[0040] In one embodiment, the side wall 21 is in the shape of an annular strip, and a cavity is formed by the bottom plate 22, the side wall 21, and the upper cover 23. The upper cover 23 is welded to the upper end of the side wall 21, and the bottom plate 22 and the upper cover 23 are welded to the lower end of the side wall 21 opposite to each other.

[0041] In one embodiment, the first fixing member 43 and the second fixing member 44 are substantially cylindrical, the first electrode hole 41 and the second electrode hole 42 are both cylindrical holes, the first electrode hole 41 is used for the first electrode to pass through, and the second electrode hole 42 is used for the second electrode to pass through. The first electrode passes through the bottom plate 22, the first electrode hole 41, and the first through hole 41, and the second electrode passes through the bottom plate 22, the second electrode hole 42, and the second through hole 42.

[0042] In one embodiment, the first fixing member 43 and the second fixing member 44 are axisymmetric with respect to the center of the bottom plate 22 .

[0043] In one embodiment, the inner diameter of the first electrode hole 41 is 5-30 mm, and further, 10-20 mm.

[0044] In one embodiment, the inner diameter of the second electrode hole 42 is 5-30 mm, and further, 10-20 mm.

[0045] In one embodiment, the first water-cooling channel 32 is disposed along the side wall 21 , and the first water-cooling channel 32 includes an arc segment and a straight line segment.

[0046] In one embodiment, the second water-cooling channel 33 is disposed along the side wall 21 , and the second water-cooling channel 33 includes an arc segment and a straight line segment.

[0047] In one embodiment, the first connecting wall 25 and the first fixing member 43 are integrally formed, and the second connecting wall 26 and the second fixing member 44 are integrally formed.

[0048] In one embodiment, the first connecting wall 25 and the side wall 21 are separately provided and then welded together, and the second connecting wall 26 and the side wall 21 are separately provided and then welded together.

[0049] In one embodiment, the first connecting wall 25 is welded to the first fixing member 43 , and the second connecting wall 26 is welded to the second fixing member 44 .

[0050] In one embodiment, except for the first connecting wall 25 and the second connecting wall 26, the entire circle close to the side wall 21 is a water cooling channel. By configuring in this way, the water cooling channel is designed to be maximized, the contact area of ​​the water cooling channel is expanded, and the cooling speed is accelerated.

[0051] In one embodiment, the first fixing member 43 , the second fixing member 44 , the first connecting wall 25 , and the second connecting wall 26 are all welded to the upper cover 23 .

[0052] In one embodiment, the first fixing member 43 and the second fixing member 44 are in contact with the upper cover 23 .

[0053] In one embodiment, both the first connecting wall 25 and the second connecting wall 26 abut against the upper cover 23 .

[0054] In one embodiment, the inner diameter of the water inlet hole 27 is 2-10 mm.

[0055] In one embodiment, the water inlet hole 27 is connected to the water inlet pipe 13 .

[0056] In one embodiment, the inner diameter of the water outlet hole 28 is 2-10 mm.

[0057] In one embodiment, the water outlet hole 28 is communicated with the water outlet pipe 14 .

[0058] In one embodiment, the vertical distance between the center of the water inlet hole 27 and the first connecting wall 25 is 2-8 mm.

[0059] In one embodiment, the vertical distance between the center of the water inlet hole 27 and the side wall 21 is 6-32 mm.

[0060] In one embodiment, the vertical distance between the center of the water inlet hole 27 and the side of the first fixing member 43 is 2-12 mm.

[0061] In one embodiment, the vertical distance between the center of the water outlet hole 28 and the first connecting wall 25 is 2-8 mm.

[0062] In one embodiment, the vertical distance between the center of the water outlet hole 28 and the side wall 21 is 6-32 mm.

[0063] In one embodiment, the vertical distance between the center of the water outlet 28 and the side of the first fixing member 43 is 2-12 mm.

[0064] In one embodiment, the first fixing member 43 and the second fixing member 44 have arc-shaped outer surfaces.

[0065] See also Figure 3 In one embodiment, the first connecting wall 25 extends toward the first fixing member 43 to form a first expansion portion, and the second connecting wall 26 extends toward the second fixing member 44 to form a second expansion portion, and the first expansion portion and the outer side surface of the second fixing member 44 are opposite to each other to form an inwardly concave arc surface, and the second expansion portion and the outer side surface of the first fixing member 43 are opposite to each other to form an inwardly concave arc surface, so that the third water cooling channel 31 sandwiched between the first fixing member 43 and the second fixing member 44 is wavy. The wavy third water cooling channel 31 can increase the contact area between the third water cooling channel 31 and the first fixing member 43 and the second fixing member 44, so that the electrodes in the first fixing member 43 and the second fixing member 44 can dissipate heat more efficiently.

[0066] During cooling operation, the cooling water in the water inlet pipe 13 first flows into the first water cooling channel 32 through the water inlet hole 27, then flows into the second water cooling channel 33 through the third water cooling channel 31, and finally flows into the water outlet pipe 14 through the water outlet hole 28. When flowing in the first water cooling channel 32, the second water cooling channel 33, and the third water cooling channel 31, it will take away the heat transferred by the electrode, thereby dissipating the heat of the electrode.

[0067] Figure 4 A structural schematic diagram of an induction coil is shown, wherein the induction coil comprises an induction coil body 1, a first electrode 11, and a second electrode 12, wherein the induction coil body 1 is located at the top, and the first electrode 11 and the second electrode 12 are electrically connected to the induction coil body 1 from the bottom of the induction coil body 1.

[0068] By adopting the above technical scheme, the utility model has the following beneficial effects: the utility model is provided with three water-cooling channels separated by the first fixing member and the second fixing member and connected in sequence, and the contact area of ​​the water-cooling channel is increased as much as possible within the limited space inside the electrode connecting device, thereby improving the heat dissipation and cooling effect of the electrode, and the contact area is further expanded by the wavy third water-cooling channel, thereby achieving a better heat dissipation effect.

[0069] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An electrode connection device for an induction coil, characterized in that: include: A bottom plate, wherein the bottom plate is provided with a first fixing member and a second fixing member protruding upward, and the first fixing member is provided with a first electrode hole penetrating the bottom plate, and the second fixing member is provided with a second electrode hole penetrating the bottom plate; A side wall fixedly connected to the bottom plate, a first water-cooling channel is sandwiched between the side wall and the first fixing member, a second water-cooling channel is sandwiched between the side wall and the second fixing member, and first connecting walls fixedly connected to the first fixing member and second connecting walls fixedly connected to the second fixing member are respectively extended inwardly from opposite sides of the side wall, the first connecting wall is used to separate the first water-cooling channel from the second water-cooling channel, and the second connecting wall is used to separate the first water-cooling channel from the second water-cooling channel; An upper cover, which is arranged at the upper end of the side wall, and is provided with a first through hole correspondingly connected to the first electrode hole and a second through hole correspondingly connected to the second electrode hole; Among them, the first fixing member, the second fixing member, the first connecting wall, and the second connecting wall are all fixedly connected to the upper cover, the bottom plate close to the first connecting wall and located on the side of the first water-cooling channel is provided with a water inlet hole, and the bottom plate close to the second connecting wall and located on the side of the second water-cooling channel is provided with a water outlet hole, the water inlet hole is communicated with the first water-cooling channel, and the water outlet hole is communicated with the second water-cooling channel, a wavy third water-cooling channel is sandwiched between the first fixing member and the second fixing member, and two ends of the third water-cooling channel are respectively communicated with the first water-cooling channel and the second water-cooling channel.

2. The electrode connection device of the induction coil according to claim 1, characterized in that: The first connecting wall extends toward the first fixing member to form a first expansion portion, the second connecting wall extends toward the second fixing member to form a second expansion portion, the first expansion portion and the outer side surface of the second fixing member are opposite to each other to form an inwardly concave arc surface, and the second expansion portion and the outer side surface of the first fixing member are opposite to each other to form an inwardly concave arc surface.

3. The electrode connection device of the induction coil according to claim 1, characterized in that: The first fixing member and the second fixing member have arc-shaped outer side surfaces.

4. The electrode connection device of the induction coil according to claim 1, characterized in that: The inner diameter of the first electrode hole is 5-30 mm.

5. The electrode connection device of the induction coil according to claim 1, characterized in that: The inner diameter of the second electrode hole is 5-30 mm.

6. The electrode connection device of the induction coil according to claim 1, characterized in that: The first fixing member and the second fixing member are in contact with the upper cover.

7. The electrode connection device of the induction coil according to claim 1, characterized in that: The first connecting wall and the first fixing member are integrally formed, and the second connecting wall and the second fixing member are integrally formed.

8. The electrode connection device of the induction coil according to claim 1, characterized in that: The vertical distance between the center of the water inlet hole and the first connecting wall is 2-8 mm.

9. The electrode connection device of the induction coil according to claim 1, characterized in that: The vertical distance between the center of the water outlet and the first connecting wall is 2-8 mm.

10. The electrode connection device of the induction coil according to claim 1, characterized in that: The first fixing member and the second fixing member are axisymmetric with respect to the center of the bottom plate.

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