Cleaning tool for single crystal furnace auxiliary chamber and single crystal furnace auxiliary chamber structure
By designing a cleaning tool for the sub-room of a single crystal furnace, the problem of difficult cleaning of silicon powder and volatile impurities generated by the re-investment step is solved, and efficient cleaning of the inner wall of the sub-room and the quality improvement of single crystal silicon are achieved.
Patent Information
- Application Number
- CN202421317656.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-11
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2034-06-11
AI Technical Summary
During the preparation of single crystal silicon, the silicon powder and volatile impurities generated by the re-injection step are difficult to completely clean up, resulting in adhering to the wall of the sub-room, affecting the quality of the single crystal and the cleanliness of the equipment.
A cleaning tool for a single crystal furnace sub-room is designed, including a cylindrical body and a plurality of auxiliary parts close to the outside of the main body. The auxiliary parts are embedded in the grooves of the inner wall of the sub-room, and the main body and auxiliary parts are structured to facilitate cleaning of the sub-room. Wall attachment.
The cleaning tool can effectively clean up silicon powder and impurities on the inner wall of the secondary room, ensure the cleanliness of the equipment, and improve the quality and production efficiency of single crystal silicon.
Smart Images
Figure CN222524748U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a cleaning tool for a sub-chamber of a single crystal furnace and a sub-chamber structure of the single crystal furnace. Background Art
[0002] With the rapid development of the photovoltaic industry, silicon single crystals are developing in the direction of large size, high quality and low cost. As a semiconductor material with excellent performance, silicon single crystals are widely used in integrated circuits, solar cells and other products. The quality of single crystals is particularly important. Usually, silicon single crystals are pulled by continuous crystal pulling process. The re-throwing step in the direct pulling process of single crystal silicon preparation will produce a large amount of silicon powder and impurities and oxides volatilized from the silicon liquid. The argon gas in the crystal pulling and re-throwing process cannot take away all the silicon powder and volatile impurities generated. Due to the influence of the radiant heat of the heater, part of the silicon powder and volatile impurities float to the sub-chamber, and finally form oxides attached to the inner wall of the sub-chamber. The oxides attached during the single crystal pulling process will be blown into the furnace by the argon gas, resulting in single crystal breakage and reduced single crystal product quality.
[0003] At present, the silicon powder attached to the inner wall of the auxiliary chamber after re-investment is mainly cleaned manually by using a long rod, which has the following problems: first, the long rod is bulky and not convenient for operation; second, the long rod has a small cleaning area, and when cleaning the auxiliary chamber, it cleans from the lower mouth of the auxiliary chamber to the upper part (there is still a certain distance from the top of the auxiliary chamber), which causes the attachments to be pushed to the upper part of the auxiliary chamber, and the top of the auxiliary chamber cannot be cleaned, and the cleanliness cannot be guaranteed; third, the fiber paper needs to be replaced before each cleaning with the long rod, which is inconvenient to operate, and the fiber paper is easy to fall off, resulting in low utilization rate of the fiber paper. Utility Model Content
[0004] In view of this, one object of the utility model is to provide a cleaning tool for a single crystal furnace auxiliary chamber, which can clean the auxiliary chamber to ensure the cleanliness of the auxiliary chamber. Another object is to provide a single crystal furnace auxiliary chamber structure.
[0005] The utility model adopts the following technical solutions to achieve the above-mentioned purpose.
[0006] On the one hand, the utility model provides a cleaning tool for a single crystal furnace auxiliary chamber, comprising a main body and an auxiliary part;
[0007] The main body is arranged as a cylindrical structure, and a plurality of auxiliary parts are arranged, and the plurality of auxiliary parts are arranged closely to the outside of the main body; the auxiliary parts are arranged to be embedded in the inner wall of the single crystal furnace auxiliary chamber; the outer diameter of the main body is substantially consistent with the inner diameter of the single crystal furnace auxiliary chamber.
[0008] In the utility model, the cleaning tool for the auxiliary chamber of the single crystal furnace is mainly composed of a main body and an auxiliary part. The main body is set as a cylindrical structure, and a plurality of auxiliary parts can be arranged along the outer circumference of the main body. The auxiliary parts cooperate with the inner wall of the auxiliary chamber of the single crystal furnace, and the entire cleaning tool can move in the auxiliary chamber. Compared with the existing technology, it is more convenient to clean and can clean more thoroughly.
[0009] According to the cleaning tool for the single crystal furnace sub-chamber of the utility model, preferably, the main body includes a first main body and a second main body connected to each other; the first main body is cylindrical, and the second main body is located on the top of the first main body.
[0010] According to the cleaning tool for the single crystal furnace sub-chamber of the utility model, preferably, the second main body is configured as a curved surface structure, and an angle is formed between the top surface of the second main body and the inner wall of the first main body.
[0011] According to the cleaning tool for the single crystal furnace sub-chamber of the utility model, preferably, the second main body is configured as an inclined arc surface structure formed along the top surface of the first main body and inwardly and downwardly with the center line of the main body as the axis.
[0012] In the present invention, the top surface of the second body is set as an arc surface, which can form a height difference between the top and the bottom, so that an angle is formed between the top surface of the second body and the inner wall of the first body, thereby preventing the attached objects on the inner wall of the auxiliary chamber from falling back again during cleaning.
[0013] According to the cleaning tool for the single crystal furnace sub-chamber of the utility model, preferably, the outer diameter of the second body is equal to the outer diameter of the first body, and the inner diameter of the second body is smaller than the inner diameter of the first body.
[0014] According to the cleaning tool for the single crystal furnace sub-chamber described in the utility model, preferably, the auxiliary part is arranged as a columnar structure, the cross-section of the columnar structure is an isosceles trapezoid, and the short upper base of the isosceles trapezoid is arranged close to the outer wall of the main body, and the long lower base of the isosceles trapezoid is far away from the main body; the height of the auxiliary part is equal to the height of the first main body.
[0015] In the present invention, the auxiliary part can be designed, but not limited to, in a cross-section of an isosceles trapezoid, a triangle, a square, etc. Preferably, it is set to a columnar structure with an isosceles trapezoidal cross-section, which is more convenient for cleaning.
[0016] According to the cleaning tool for the single crystal furnace sub-chamber of the utility model, preferably, the auxiliary parts are provided in 2n numbers, wherein n is a natural number ≥1.
[0017] According to the cleaning tool for the sub-chamber of a single crystal furnace of the utility model, preferably, the auxiliary part is symmetrically arranged around the first main body.
[0018] In the present invention, the number of auxiliary parts can be set according to actual conditions, preferably an even number, and the even number of auxiliary parts are symmetrically arranged along the outer circumference of the first body. According to a specific embodiment of the present invention, two auxiliary parts are arranged, which are symmetrically arranged at the two ends of the body (that is, they can be the two ends along the diameter direction).
[0019] On the other hand, the utility model also provides a single crystal furnace sub-chamber structure, which includes the cleaning tool for the single crystal furnace sub-chamber and the sub-chamber as described above; wherein,
[0020] The auxiliary chamber is set in a cylindrical shape, and its inner wall is provided with a plurality of grooves along its height direction, and the plurality of grooves are symmetrically arranged around the inner wall of the auxiliary chamber; the auxiliary part is embedded in the groove, and the two match each other.
[0021] According to the auxiliary chamber structure of the present invention, preferably, the number of the grooves is the same as the number of the auxiliary parts.
[0022] In the present invention, the number of the grooves can be the same as the number of the auxiliary parts, for example, both can be set to an even number, which is more convenient for cleaning.
[0023] The cleaning tool for the auxiliary chamber of the single crystal furnace of the utility model can clean the auxiliary chamber, thereby ensuring the cleanliness of the auxiliary chamber. Meanwhile, the structure is simple and easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Figure 1 It is a partial structural schematic diagram of the cleaning tool for the auxiliary chamber of a single crystal furnace of the present utility model.
[0025] Figure 2 It is a top view schematic diagram of the cleaning tool for the auxiliary chamber of a single crystal furnace of the present invention.
[0026] Figure 3 It is a left view schematic diagram of the cleaning tool for the auxiliary chamber of a single crystal furnace of the present utility model.
[0027] Figure 4 for Figure 3 A partial cross-sectional view of .
[0028] Figure 5 The utility model is a cleaning tool for a sub-chamber of a single crystal furnace and an assembly drawing of the single crystal furnace.
[0029] Description of reference numerals:
[0030] 100- Cleaning tool for single crystal furnace auxiliary chamber,
[0031] 1-main body, 11-first main body, 12-first main body;
[0032] 2- Auxiliary department;
[0033] 200-sub-chamber, 210-groove. DETAILED DESCRIPTION
[0034] Hereinafter, preferred embodiments of the present utility model will be described in detail with reference to the accompanying drawings. Before the description, it should be understood that the terms used in this specification and the appended claims should not be interpreted as limited to the general and dictionary meanings, but are interpreted based on the meanings and concepts corresponding to the technical aspects of the present utility model, which are based on the principle of allowing the inventor to appropriately define the terms for the best explanation.
[0035] In addition, the descriptions presented here are only preferred examples for illustrative purposes and are not intended to limit the scope of the present disclosure. Therefore, it should be understood that other equivalents and modifications may be made thereto without departing from the spirit and scope of the present invention when the present application was filed.
[0036] Example 1
[0037] Figure 1 It is a partial structural schematic diagram of the cleaning tool for the auxiliary chamber of a single crystal furnace of the present utility model. Figure 2 It is a top view schematic diagram of the cleaning tool for the auxiliary chamber of a single crystal furnace of the present invention. Figure 3 It is a left view schematic diagram of the cleaning tool for the auxiliary chamber of a single crystal furnace of the present utility model. Figure 4 for Figure 3 A partial cross-sectional view of . Figure 5 The utility model is a cleaning tool for a sub-chamber of a single crystal furnace and an assembly drawing of the single crystal furnace.
[0038] like Figure 1 As shown, the cleaning tool 100 for the auxiliary chamber of a single crystal furnace of the present invention comprises a main body 1 and an auxiliary part 2. The main body 1 is configured as a cylindrical structure.
[0039] like Figure 4 , Figure 1 As shown, the main body 1 includes a first main body 11 and a second main body 12. The first main body 11 is set as a cylindrical structure, and its outer diameter is basically the same as the inner diameter of the single crystal furnace sub-chamber. The second main body 12 is located on the top of the first main body 11, and is an inclined arc surface structure formed along the top surface of the first main body 11 and inwardly and downwardly with the center line of the main body 1 as the axis. The outer diameter of the second main body 12 is equal to the outer diameter of the first main body 11, and the inner diameter of the second main body 12 is smaller than the inner diameter of the first main body 11. An angle is formed between the top surface of the second main body 12 and the inner wall of the first main body 11, and the angle is Figure 4 From a cross-sectional perspective, the end of the second body 12 is formed into a barb-like shape, which can prevent the attached objects on the inner wall of the auxiliary chamber from falling back during cleaning.
[0040] like Figures 1 to 3As shown, multiple auxiliary parts 2 are provided, and multiple auxiliary parts 2 are provided close to the outside of the main body 1; the auxiliary parts 2 cooperate with the inner wall of the single crystal furnace sub-chamber. For example, two auxiliary parts 2 are provided, and they are symmetrically arranged on both sides of the main body 1 (that is, they can be both ends along the diameter direction). The auxiliary part 2 is set to have a columnar structure in cross section, and the cross section of the columnar structure is an isosceles trapezoid, and the short upper base of the isosceles trapezoid is provided close to the outer wall of the main body 1, and the long lower base of the isosceles trapezoid is away from the main body 1. The height of the auxiliary part 2 is equal to the height of the first main body 11.
[0041] The following is an introduction to the use of the cleaning tool for the auxiliary chamber of a single crystal furnace of the utility model:
[0042] After the single crystal furnace is closed, when the single crystal furnace is charged for the first time, the auxiliary chamber 200 is opened, and the cleaning tool 100 for the auxiliary chamber of the single crystal furnace is loaded into the auxiliary chamber 200, and the auxiliary part 2 is contained in the groove 210 of the inner wall of the auxiliary chamber of the single crystal furnace, and the upper edge of the cleaning tool 100 of the auxiliary chamber is flush with the top of the auxiliary chamber 200, and then the auxiliary chamber 200 is rotated back to perform the charging and recharging process. After the recharging and recharging are completed, the auxiliary chamber 200 is opened again, and when the seed crystal wiping process is performed, the cleaning tool 100 of the auxiliary chamber is pulled out of the auxiliary chamber 200, and the auxiliary chamber 200 can be cleaned once in this process. After the cleaning is completed, the cleaning tool 100 of the auxiliary chamber is wiped clean and re-installed in the auxiliary chamber 200, and then the subsequent process is carried out.
[0043] Example 2
[0044] like Figure 1 and 5 As shown, this embodiment provides a single crystal furnace sub-chamber structure, which includes the cleaning tool 100 for the single crystal furnace sub-chamber and the sub-chamber 200 described in Embodiment 1.
[0045] The auxiliary chamber 200 is set to be cylindrical, and its inner wall is provided with two grooves 210 along the height direction, and the two grooves 210 are symmetrically arranged, and the grooves 210 match the auxiliary part 2. In this way, the auxiliary part 2 can move in the grooves 210, and then clean the silicon powder or other impurities on the inner wall of the auxiliary chamber 200.
[0046] The present invention is not limited to the above-mentioned embodiments. Without departing from the essential content of the present invention, any deformation, improvement, and substitution that can be thought of by those skilled in the art shall fall within the scope of the present invention.
Claims
1. A cleaning tool for a single crystal furnace auxiliary chamber, characterized in that: It includes the main body and auxiliary parts; The main body is arranged as a cylindrical structure, and a plurality of auxiliary parts are arranged, and the plurality of auxiliary parts are arranged closely to the outside of the main body; the auxiliary parts are arranged to be embedded in the inner wall of the single crystal furnace auxiliary chamber; the outer diameter of the main body is substantially consistent with the inner diameter of the single crystal furnace auxiliary chamber.
2. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: The main body comprises a first main body and a second main body connected to each other; the first main body is cylindrical, and the second main body is located on the top of the first main body.
3. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 2, characterized in that: The second body is configured as a curved surface structure, and an angle is formed between the top surface of the second body and the inner wall of the first body.
4. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 3, characterized in that: The second body is configured as an inclined arc surface structure formed along the top surface of the first body and inwardly and downwardly with the center line of the body as the axis.
5. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 4, characterized in that: The outer diameter of the second body is equal to the outer diameter of the first body, and the inner diameter of the second body is smaller than the inner diameter of the first body.
6. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 2, characterized in that: The auxiliary part is configured as a columnar structure, the cross-section of which is an isosceles trapezoid, and the short upper base of the isosceles trapezoid is configured closely to the outer wall of the main body, while the long lower base of the isosceles trapezoid is away from the main body; the height of the auxiliary part is equal to the height of the first main body.
7. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 6, characterized in that: The number of the auxiliary parts is 2n, wherein n is a natural number ≥1.
8. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 7, characterized in that: The auxiliary parts are symmetrically arranged around the first body.
9. A single crystal furnace sub-chamber structure, characterized in that: It comprises a sub-chamber and a cleaning tool for a sub-chamber of a single crystal furnace as claimed in any one of claims 1 to 8; wherein: The auxiliary chamber is set in a cylindrical shape, and its inner wall is provided with a plurality of grooves along its height direction, and the plurality of grooves are symmetrically arranged around the inner wall of the auxiliary chamber; the auxiliary part is embedded in the groove, and the two match each other.
10. The sub-chamber structure according to claim 9, characterized in that: The number of the grooves is the same as the number of the auxiliary parts.