Dopant replenishment device

Abstract

The utility model provides a doping agent supplementing device. The dopant supplementing device comprises a guide cylinder, a dopant supplementing device and a controller, wherein the guide cylinder is provided with a containing cavity and a feeding opening communicated with the containing cavity; at least one part of the feeding rod assembly is arranged in the containing cavity, and one end of the feeding rod assembly extends out of the containing cavity from the feeding opening; and at least one part of the driving assembly is arranged outside the guide cylinder, and at least the other part of the driving assembly extends into the containing cavity and is in driving connection with the feeding rod assembly so as to drive at least one part of the feeding rod assembly to rotate and / or move in the axial direction of the guide cylinder. According to the utility model, the problem of poor dopant supplement effect in the prior art is solved.

Description

Technical Field

[0001] The utility model relates to the field of single crystal silicon production equipment, in particular to a dopant supplement device. Background Art

[0002] In the process of pulling single crystal silicon in the photovoltaic industry, in order to meet the model and resistivity of single crystal silicon, different types and quantities of dopants are usually added. At present, the commonly used doping methods of dopants include direct doping, that is, according to the requirements of the target resistivity, a certain amount of dopant and native polysilicon material are put into the crucible at the same time for melting, and the dopant and native polysilicon material are melted at high temperature at the same time, and are evenly distributed in the melt with the flow of silicon melt. However, this method is suitable for dopants with high melting points and evaporation temperatures, such as boron, arsenic and other elements. When the melting point and evaporation temperature of the dopant are low, such as gallium, phosphorus and other elements, they will gradually evaporate during the heating and crystal pulling process, and the amount of dopant in the silicon liquid is far lower than the expected value. In this way, if the crystal pulling continues, the resistivity of the output crystal rod has deviated from the target value, which will cause the quality of the crystal rod to be unstable and the yield of the crystal rod to be reduced. To address this problem, it is necessary to continuously add dopants during the crystal pulling process. However, the existing method of supplementary doping generally adds the supplementary dopant directly into the barrel, and then adds the dopant into the crucible while continuously adding silicon material. This method of adding limits the scope of doping of the dopant, and it cannot be quickly and evenly dissolved into the silicon melt, which affects the uniformity of the supplementary dopant, and further affects the uniformity of the resistivity of the pulled single crystal silicon rod.

[0003] Therefore, the prior art has the problem of poor dopant supplementation effect. Utility Model Content

[0004] The main purpose of the utility model is to provide a dopant supplement device to solve the problem of poor dopant supplement effect in the prior art.

[0005] In order to achieve the above-mentioned purpose, according to one aspect of the utility model, there is provided a dopant replenishing device, comprising: a guide cylinder, the guide cylinder having a accommodating cavity and a feeding opening connected to the accommodating cavity; a feeding rod assembly, at least a portion of the feeding rod assembly is arranged in the accommodating cavity, and one end of the feeding rod assembly extends out of the accommodating cavity through the feeding opening; a driving assembly, at least a portion of the driving assembly is arranged outside the guide cylinder, at least another portion of the driving assembly extends into the accommodating cavity and is drivingly connected to the feeding rod assembly, so as to drive at least a portion of the feeding rod assembly to rotate and / or move axially along the guide cylinder.

[0006] Furthermore, the driving assembly includes: a push rod, one end of which is arranged outside the guide cylinder, and the other end of the push rod extends into the accommodating cavity from the circumferential side wall of the guide cylinder; a magnetic attraction part, which is arranged in the accommodating cavity and magnetically connected to the feeding rod assembly, and the push rod is connected to the magnetic attraction part and drives the magnetic attraction part to move relative to the guide cylinder.

[0007] Furthermore, a guide groove is provided on the circumferential side wall of the guide cylinder corresponding to the push rod, the push rod can move along the guide groove, and the guide groove includes at least a first section and a second section connected in sequence, the first section extends along the axial direction of the guide cylinder, and the second section extends along the circumferential direction of the guide cylinder.

[0008] Furthermore, the feeding rod assembly includes: an adsorption piece, which is magnetically connected to the magnetic attraction part; a feeding rod body, one end of which is arranged in the accommodating cavity and is provided with the adsorption piece, and the other end of the feeding rod body extends out of the accommodating cavity through the feeding opening; a feeding spoon, which is arranged at one end of the feeding rod body extending out of the accommodating cavity and moves with the feeding rod body.

[0009] Furthermore, the feeding rod assembly also includes: an installation conduit, one end of which is arranged in the accommodating cavity, and the other end of which extends out of the accommodating cavity through the feeding opening; one end of the feeding rod body is arranged inside the installation conduit, and the other end of the feeding rod body extends out of the installation conduit.

[0010] Furthermore, the magnetic attraction part includes: a sleeve, which is mounted on the circumferential outer wall of the mounting conduit and can move relative to the mounting conduit; two fixed end covers, one fixed end cover is respectively provided at both axial ends of the sleeve, and the two fixed end covers are detachably connected; at least one magnetic attraction component, which is arranged on the circumferential outer wall of the sleeve and is magnetically connected to the adsorption component.

[0011] Furthermore, the feeding rod assembly also includes: at least one ball bearing, which is arranged at one end of the feeding rod body away from the feeding spoon, and the feeding rod body is in sliding contact with the circumferential inner wall of the mounting conduit through the ball bearing.

[0012] Furthermore, there are multiple balls, and the end of the feeding rod body away from the feeding spoon has at least two spaced annular protrusions, and the periphery of each annular protrusion is respectively spaced with multiple balls, and the adsorbent is arranged between the two annular protrusions.

[0013] Furthermore, the feeding rod assembly also includes: an extension conduit, which is connected to one end of the installation conduit extending out of the accommodating cavity, and the feeding rod body and the feeding spoon pass through the extension conduit and can extend out of the extension conduit from one end of the extension conduit away from the installation conduit; a bearing seat, the bearing seat is arranged on a side of the extension conduit close to the installation conduit, and the feeding rod body passes through the bearing seat.

[0014] Furthermore, the dopant replenishing device also includes a polytetrafluoroethylene block, which is arranged around the periphery of the feeding opening.

[0015] Applying the technical solution of the utility model, the dopant replenishing device in the present application includes a guide cylinder, a feeding rod assembly and a driving assembly. The guide cylinder has a receiving cavity and a feeding opening connected to the receiving cavity; at least a part of the feeding rod assembly is arranged in the receiving cavity, and one end of the feeding rod assembly extends out of the receiving cavity from the feeding opening; at least a part of the driving assembly is arranged outside the guide cylinder, and at least another part of the driving assembly extends into the receiving cavity and is drivingly connected to the feeding rod assembly to drive at least a part of the feeding rod assembly to rotate and / or move along the axial direction of the guide cylinder.

[0016] When using the dopant replenishing device in the present application, since the dopant replenishing device has a guide cylinder, the operator can operate the dopant replenishing device through the guide cylinder when replenishing the dopant in the single crystal furnace. At the same time, since the driving assembly is connected to the feeding rod assembly and can drive the driving rod to move, after placing the dopant on the end of the feeding rod assembly extending out of the accommodating cavity, the operator can control the movement of the feeding rod assembly through the driving assembly, thereby realizing different dopant replenishing actions. The specific action mode is that the driving assembly controls the axial movement of the feeding rod assembly along the guide cylinder to realize the end of the feeding rod assembly holding the dopant to enter or exit the single crystal furnace, and the driving assembly drives the feeding rod assembly to rotate to realize the input of the dopant and the stop of the input of the dopant. Therefore, by using the dopant replenishing device in the present application, the replenishment of the dopant can be realized more flexibly, and the uniformity of the replenished dopant is improved, thereby improving the quality of the output single crystal silicon rod. Therefore, the dopant replenishing device in the present application effectively solves the problem of poor dopant replenishment effect in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0018] Figure 1 A schematic structural diagram of a dopant supplement device according to a specific embodiment of the utility model is shown;

[0019] Figure 2 Shows Figure 1 A top view of a dopant replenishing device in FIG.

[0020] Figure 3 Shows Figure 1 A schematic diagram of the internal structure of the dopant replenishing device;

[0021] Figure 4 Shows Figure 1A cross-sectional view of a magnetic attraction portion of a dopant replenishing device;

[0022] Figure 5 Shows Figure 1 A cross-sectional view from another angle of the magnetic attraction portion of the dopant replenishing device.

[0023] The above drawings include the following reference numerals:

[0024] 10. Guide cylinder; 11. Accommodating chamber; 12. Feeding opening; 13. Guide groove; 131. First section; 132. Second section; 20. Feeding rod assembly; 21. Adsorbent; 22. Feeding rod body; 221. Annular protrusion; 23. Feeding spoon; 24. Mounting guide tube; 25. Ball bearing; 26. Extension guide tube; 27. Bearing seat; 30. Driving assembly; 31. Push rod; 32. Magnetic part; 321. Sleeve; 322. Fixed end cover; 323. Magnetic member; 324. Mounting seat; 40. Teflon block; 50. Retaining spring. DETAILED DESCRIPTION

[0025] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0026] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0027] In the present invention, unless otherwise specified, the directional words used, such as "up, down, top, bottom", usually refer to the directions shown in the drawings, or to the components themselves in the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directional words are not used to limit the present invention.

[0028] In order to solve the problem of poor dopant replenishment effect in the prior art, the present application provides a dopant replenishment device.

[0029] like Figures 1 to 5As shown, the dopant replenishing device in the present application includes a guide cylinder 10, a feeding rod assembly 20 and a driving assembly 30. The guide cylinder 10 has a receiving chamber 11 and a feeding opening 12 connected to the receiving chamber 11; at least a portion of the feeding rod assembly 20 is disposed in the receiving chamber 11, and one end of the feeding rod assembly 20 extends out of the receiving chamber 11 through the feeding opening 12; at least a portion of the driving assembly 30 is disposed outside the guide cylinder 10, and at least another portion of the driving assembly 30 extends into the receiving chamber 11 and is drivingly connected to the feeding rod assembly 20, so as to drive at least a portion of the feeding rod assembly 20 to rotate and / or move along the axial direction of the guide cylinder 10.

[0030] When using the dopant replenishing device in the present application, since the dopant replenishing device has a guide cylinder 10, the operator can operate the dopant replenishing device through the guide cylinder 10 when replenishing the dopant in the single crystal furnace. At the same time, since the driving assembly 30 is connected to the feeding rod assembly 20 and can drive the driving rod to move, after placing the dopant on the end of the feeding rod assembly 20 extending out of the accommodating cavity 11, the operator can control the movement of the feeding rod assembly 20 through the driving assembly 30, thereby achieving different dopant replenishing actions. The specific action mode is that the driving assembly 30 controls the axial movement of the feeding rod assembly 20 along the guide cylinder 10 to achieve the end of the feeding rod assembly 20 holding the dopant to enter or exit the single crystal furnace, and the driving assembly 30 drives the feeding rod assembly 20 to rotate to achieve the input of the dopant and the stop of the input of the dopant. Therefore, by using the dopant replenishing device in the present application, the replenishment of the dopant can be achieved more flexibly, and the uniformity of the replenished dopant is improved, thereby improving the quality of the output single crystal silicon rod. Therefore, the dopant replenishing device in the present application effectively solves the problem of poor dopant replenishing effect in the prior art.

[0031] In the present application, one end of the feeding rod assembly 20 extending out of the guide tube 10 can be selected to extend into the single crystal furnace through the valve chamber of the single crystal furnace, and of course, other positions can be selected to extend into the single crystal furnace.

[0032] Preferably, the driving assembly 30 in the present application can drive the feeding rod assembly 20 to rotate 180 degrees, so that the end of the feeding rod assembly 20 holding the dopant can achieve a pouring action. Of course, the rotation angle range can also be adaptively adjusted.

[0033] In a specific embodiment of the present application, the driving assembly 30 includes a push rod 31 and a magnetic attraction portion 32. One end of the push rod 31 is arranged outside the guide cylinder 10, and the other end of the push rod 31 extends into the accommodating cavity 11 from the circumferential side wall of the guide cylinder 10; the magnetic attraction portion 32 is arranged in the accommodating cavity 11 and is magnetically connected to the feeding rod assembly 20, and the push rod 31 is connected to the magnetic attraction portion 32 and drives the magnetic attraction portion 32 to move relative to the guide cylinder 10. That is to say, in this embodiment, the driving assembly 30 drives the feeding rod assembly 20 to move by magnetic attraction. Therefore, although the driving assembly 30 is drivingly connected to the feeding rod assembly 20 in the present application, the driving assembly 30 does not have to be in contact with the feeding rod assembly 20, as long as the feeding rod assembly 20 can move with the push rod 31 under the action of magnetic attraction.

[0034] Preferably, the circumferential side wall of the guide cylinder 10 is provided with a guide groove 13 corresponding to the push rod 31, and the push rod 31 can move along the guide groove 13, and the guide groove 13 at least includes a first section 131 and a second section 132 connected in sequence, the first section 131 extends along the axial direction of the guide cylinder 10, and the second section 132 extends along the circumferential direction of the guide cylinder 10. Through such an arrangement, when the push rod 31 moves along the first section 131, the push rod 31 can drive the feeding rod assembly 20 to move along the axial direction of the guide cylinder 10, and when the push rod 31 moves along the second section 132, the push rod 31 can drive the feeding rod assembly 20 to rotate. In addition, in this embodiment, the second section 132 can be arranged at one end of the first section 131 close to the feeding opening 12. Of course, in the present application, the guide groove 13 can also be set to other shapes, or multiple second sections 132 can be set on the path of the first section 131, as long as it can be ensured that the push rod 31 can drive the feeding rod assembly 20 to move and rotate along the axial direction of the guide cylinder 10 through the magnetic attraction part 32.

[0035] Optionally, the arc of the second segment 132 is 180 degrees.

[0036] Specifically, the feeding rod assembly 20 includes an adsorbent 21, a feeding rod body 22, and a feeding spoon 23. The adsorbent 21 is magnetically connected to the magnetic attraction portion 32; one end of the feeding rod body 22 is arranged in the accommodating cavity 11 and is provided with the adsorbent 21, and the other end of the feeding rod body 22 extends out of the accommodating cavity 11 through the feeding opening 12; the feeding spoon 23 is arranged at one end of the feeding rod body 22 extending out of the accommodating cavity 11 and moves with the feeding rod body 22. Such an arrangement allows the dopant to be contained through the feeding spoon 23. Optionally, the adsorbent 21 can be a carbon steel block.

[0037] In a specific embodiment of the present application, the feeding rod assembly 20 further includes a mounting conduit 24, one end of which is disposed in the accommodating cavity 11, and the other end of which extends out of the accommodating cavity 11 through the feeding opening 12, and one end of the feeding rod body 22 is disposed inside the mounting conduit 24, and the other end of the feeding rod body 22 extends out of the mounting conduit 24. At the same time, the feeding rod assembly 20 further includes at least one ball 25, which is disposed at one end of the feeding rod body 22 away from the feeding spoon 23, and the feeding rod body 22 is in sliding contact with the circumferential inner side wall of the mounting conduit 24 through the ball 25. By providing the mounting conduit 24, the movement direction of the feeding rod body 22 can be effectively limited, thereby effectively ensuring that the movement of the feeding rod body 22 and the feeding spoon 23 will not be deflected, and further ensuring that the feeding spoon 23 can more easily enter or exit the single crystal furnace, and it is easier to control the amount of dopant added. By providing the ball 25, the friction between the mounting conduit 24 and the feeding rod body 22 can be effectively reduced.

[0038] Preferably, there are multiple balls 25, and the end of the feeding rod body 22 away from the feeding spoon 23 has at least two spaced annular protrusions 221, and the periphery of each annular protrusion 221 is respectively provided with multiple balls 25 at intervals, and the adsorbent 21 is provided between the two annular protrusions 221. That is to say, in the present application, the feeding rod body 22 only has the diameter of the position of the annular protrusion 221 which is similar to the inner diameter of the installation conduit 24, or the diameter of the annular protrusion 221 is similar to the inner diameter of the installation conduit 24, so as to ensure the limiting effect of the installation conduit 24 on the feeding rod body 22, and the diameter of other positions of the feeding rod body 22 can be smaller than the diameter of the installation conduit 24, so as to effectively reduce the overall weight of the feeding rod body 22, thereby ensuring the driving effect of the push rod 31 on the adsorbent 21 and the feeding rod body 22 through the magnetic attraction portion 32, and improving the sensitivity of the dopant replenishing device.

[0039] Further preferably, a plurality of balls 25 are arranged at equal intervals around the annular protrusion 221 circumferentially, thereby ensuring that the force on the feeding rod body 22 is more stable, and ensuring that the axial direction of the feeding rod body 22 is parallel to the axial direction of the mounting conduit 24 and will not deflect in the mounting conduit 24 .

[0040] Alternatively, if Figure 4 and Figure 5As shown, the magnetic attraction portion 32 includes a sleeve 321, which is sleeved on the circumferential outer wall of the installation conduit 24 and can move relative to the installation conduit 24; two fixed end covers 322, one fixed end cover 322 is respectively provided at both ends of the axial direction of the sleeve 321, and the two fixed end covers 322 are detachably connected; at least one magnetic attraction member 323, the magnetic attraction member 323 is provided on the circumferential outer wall of the sleeve 321 and is magnetically connected to the adsorption member 21. In addition, a mounting seat 324 can be provided between the two fixed end covers 322 corresponding to the magnetic attraction member 323. Further optionally, the two fixed end covers 322 can be connected by a connecting rod, so that the sleeve 321 and the magnetic attraction member 323 can be tightened.

[0041] In a specific embodiment of the present application, there are two magnetic attracting members 323, and the two magnetic attracting members 323 are symmetrically arranged on the sleeve 321 at an interval of 180 degrees around the circumferential side wall of the sleeve 321. By such an arrangement, it can be ensured that the force on the feeding rod body 22 and the adsorption member 21 is more uniform and stable, thereby ensuring that the feeding rod body 22 will not be deflected.

[0042] Alternatively, if Figure 2 and Figure 3 As shown, the feeding rod assembly 20 also includes an extension conduit 26 and a bearing seat 27. The extension conduit 26 is connected to one end of the installation conduit 24 extending out of the accommodating cavity 11. The feeding rod body 22 and the feeding spoon 23 pass through the extension conduit 26 and can extend out of the extension conduit 26 from one end of the extension conduit 26 away from the installation conduit 24; the bearing seat 27 is arranged on the side of the extension conduit 26 close to the installation conduit 24, and the feeding rod body 22 passes through the bearing seat 27. In the present application, the provision of the extension conduit 26 can not only protect the feeding rod body 22 and the feeding spoon 23, but also can further guide the movement of the feeding rod body 22 and the feeding spoon 23 through the mutual cooperation between the extension conduit 26 and the bearing seat 27. In addition, a retaining ring 50 can be provided on the bearing seat 27 to ensure the stability of the bearing seat 27. Preferably, flange plates can also be provided at both ends of the extension conduit 26, and the end of the extension conduit 26 close to the installation conduit 24 can be connected to the installation conduit 24 through the flange plate. At the same time, the end of the extension conduit 26 away from the installation conduit 24 can also be used to connect with the single crystal furnace to ensure sealing performance. Further preferably, both ends of the extension conduit 26 can also be provided with sealing rings to further ensure the sealing effect and separate the single crystal furnace from the external environment.

[0043] Optionally, the dopant replenishing device further comprises a tetrafluoro block 40, which is arranged around the periphery of the feeding opening 12. Such an arrangement can protect the feeding opening 12 through the tetrafluoro block 40 to prevent the feeding opening 12 from being corroded, thereby increasing the service life of the dopant replenishing device.

[0044] From the above description, it can be seen that the above embodiments of the utility model achieve the following technical effects:

[0045] 1. Effectively solve the problem of poor dopant supplementation effect in the prior art;

[0046] 2. Simple structure and stable performance.

[0047] Obviously, the embodiments described above are only some embodiments of the utility model, not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0048] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0049] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0050] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A dopant replenishing device, characterized in that: include: A guide cylinder (10), wherein the guide cylinder (10) has a receiving chamber (11) and a feeding opening (12) communicating with the receiving chamber (11); a feeding rod assembly (20), wherein at least a portion of the feeding rod assembly (20) is disposed in the accommodating cavity (11), and one end of the feeding rod assembly (20) extends out of the accommodating cavity (11) through the feeding opening (12); A drive assembly (30), wherein at least a portion of the drive assembly (30) is disposed outside the guide cylinder (10), and at least another portion of the drive assembly (30) extends into the accommodating cavity (11) and is drivingly connected to the feeding rod assembly (20) to drive at least a portion of the feeding rod assembly (20) to rotate and / or move axially along the guide cylinder (10).

2. The dopant supplement device according to claim 1, characterized in that: The driving assembly (30) comprises: A push rod (31), one end of which is arranged outside the guide cylinder (10), and the other end of which extends from the circumferential side wall of the guide cylinder (10) into the accommodating cavity (11); A magnetic attraction portion (32), wherein the magnetic attraction portion (32) is disposed in the accommodating cavity (11) and is magnetically connected to the feeding rod assembly (20), and the push rod (31) is connected to the magnetic attraction portion (32) and drives the magnetic attraction portion (32) to move relative to the guide cylinder (10).

3. The dopant supplement device according to claim 2, characterized in that: A guide groove (13) is provided on the circumferential side wall of the guide cylinder (10) corresponding to the push rod (31); the push rod (31) is capable of moving along the guide groove (13); and the guide groove (13) comprises at least a first section (131) and a second section (132) connected in sequence; the first section (131) extends along the axial direction of the guide cylinder (10); and the second section (132) extends along the circumferential direction of the guide cylinder (10).

4. The dopant supplement device according to claim 2, characterized in that: The feed rod assembly (20) comprises: An adsorption member (21), wherein the adsorption member (21) is magnetically connected to the magnetic attraction portion (32); a feeding rod body (22), one end of which is disposed in the accommodating cavity (11) and is provided with the adsorbent (21), and the other end of which extends out of the accommodating cavity (11) through the feeding opening (12); A feeding spoon (23) is arranged at one end of the feeding rod body (22) extending out of the accommodating cavity (11) and moves together with the feeding rod body (22).

5. The dopant supplement device according to claim 4, characterized in that: The feed rod assembly (20) further comprises: A mounting conduit (24) is provided, one end of the mounting conduit (24) is arranged in the accommodating cavity (11), and the other end of the mounting conduit (24) extends out of the accommodating cavity (11) through the feeding opening (12); one end of the feeding rod body (22) is arranged inside the mounting conduit (24), and the other end of the feeding rod body (22) extends out of the mounting conduit (24).

6. The dopant supplement device according to claim 5, characterized in that: The magnetic attraction portion (32) comprises: a sleeve (321), the sleeve (321) being sleeved on the circumferential outer side wall of the installation conduit (24) and being capable of moving relative to the installation conduit (24); Two fixed end covers (322), one fixed end cover (322) is respectively provided at two axial ends of the sleeve (321), and the two fixed end covers (322) are detachably connected; At least one magnetic attraction member (323), wherein the magnetic attraction member (323) is arranged on the circumferential outer side wall of the sleeve (321) and is magnetically connected to the adsorption member (21).

7. The dopant supplement device according to claim 5, characterized in that: The feed rod assembly (20) further comprises: At least one ball (25) is provided at one end of the feeding rod body (22) away from the feeding spoon (23), and the feeding rod body (22) is in sliding contact with the circumferential inner wall of the mounting conduit (24) through the ball (25).

8. The dopant supplement device according to claim 7, characterized in that: There are a plurality of balls (25), and one end of the feeding rod body (22) away from the feeding spoon (23) has at least two spaced annular protrusions (221), and a plurality of balls (25) are spaced apart on the periphery of each of the annular protrusions (221), and the adsorbent (21) is arranged between two of the annular protrusions (221).

9. The dopant supplement device according to claim 5, characterized in that: The feed rod assembly (20) further comprises: an extension conduit (26), the extension conduit (26) being connected to one end of the installation conduit (24) extending out of the accommodating chamber (11), the feeding rod body (22) and the feeding spoon (23) passing through the extension conduit (26) and being able to extend out of the extension conduit (26) from one end of the extension conduit (26) away from the installation conduit (24); A bearing seat (27), wherein the bearing seat (27) is arranged on a side of the extension conduit (26) close to the installation conduit (24), and the feeding rod body (22) passes through the bearing seat (27).

10. The dopant supplement device according to any one of claims 1 to 9, characterized in that: The dopant replenishing device further comprises a polytetrafluoroethylene block (40), and the polytetrafluoroethylene block (40) is arranged around the periphery of the feeding opening (12).

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