Vacuum sintering furnace with furnace body maintenance device

Abstract

The utility model relates to the technical field of vacuum sintering furnaces, in particular to a vacuum sintering furnace with a furnace body maintenance device, which comprises an inlet sealing door, at least one preheating station, a welding station, an opening mechanism, a welding station support plate, at least one cooling station, a carrying mechanism and an outlet sealing door. The inlet end of the preheating station is sealed through the inlet sealing door, the preheating station is connected with the welding station, the welding station is connected with the cooling station, the outlet end of the cooling station is sealed through the outlet sealing door, and opening mechanisms are arranged on the two sides of the welding station. The welding station supporting plate is fixedly arranged above the welding station and is matched with the opening mechanism to open the welding station, and the preheating station, the welding station and the cooling station circulate through the carrying mechanism. Maintenance of a welding station area is facilitated, the mechanism is not prone to damage when opened, and supporting force is large.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering furnaces, in particular to a vacuum sintering furnace with a furnace body maintenance device. Background Art

[0002] At present, semiconductor chip packaging equipment in the prior art mostly adopts the form of assembly lines, and the chips need to be welded and packaged. In order to ensure the quality of chip welding, the chip welding needs to be carried out in a vacuum environment or a reducing environment before and during the welding process. In the semiconductor chip packaging equipment in the prior art, the welding station fails and maintenance is inconvenient. Summary of the invention

[0003] The utility model provides a vacuum sintering furnace with a furnace body maintenance device, which is used to solve the problem of inconvenient maintenance of the vacuum sintering furnace in the prior art.

[0004] The utility model provides a vacuum sintering furnace with a furnace body maintenance device, comprising an inlet sealing door, at least one preheating station, a welding station, an opening mechanism, a welding station support plate, at least one cooling station, a conveying mechanism and an outlet sealing door; the inlet end of the preheating station is sealed by the inlet sealing door, the preheating station is connected to the welding station, the welding station is connected to the cooling station, the outlet end of the cooling station is sealed by the outlet sealing door, both sides of the welding station are provided with opening mechanisms, the welding station support plate is fixedly arranged above the welding station and cooperates with the opening mechanism to open the welding station, and the preheating station, the welding station and the cooling station are circulated through the conveying mechanism.

[0005] According to the vacuum sintering furnace with the furnace body maintenance device of the utility model, the transport mechanism performs horizontal movement and vertical movement.

[0006] According to the vacuum sintering furnace with the furnace body maintenance device of the utility model, the preheating station is set to the same temperature or the step-by-step temperature increase.

[0007] According to the vacuum sintering furnace with the furnace body maintenance device of the utility model, the cooling stations are set to the same temperature or to reduce the temperature in steps.

[0008] According to the vacuum sintering furnace with a furnace body maintenance device of the utility model, the inlet sealing door and the outlet sealing door are provided with cylinders and guide columns are provided on both sides of the cylinders.

[0009] According to the vacuum sintering furnace with a furnace body maintenance device of the utility model, the opening mechanism includes a first mounting seat, a second mounting seat, a first supporting structure, a second supporting structure, a first crossbeam, a second crossbeam and at least one longitudinal beam; the first mounting seat and the second mounting seat are arranged on both sides of the welding station, the first supporting structure is arranged on the first mounting seat, the second supporting structure is arranged on the second mounting seat, the first crossbeam is arranged above the first supporting structure, the second crossbeam is arranged above the second supporting structure, the longitudinal beam is arranged above the first crossbeam and the second crossbeam, and the longitudinal beam spans the welding station and is arranged below the welding station support plate.

[0010] According to the vacuum sintering furnace with a furnace body maintenance device of the utility model, it also includes a third support structure and a fourth support structure; the third support structure is arranged inside the first mounting seat to support the first support structure; the fourth support structure is arranged inside the second mounting seat to support the second support structure.

[0011] According to the vacuum sintering furnace with a furnace body maintenance device of the utility model, the first supporting structure, the second supporting structure, the third supporting structure and the fourth supporting structure are jacks.

[0012] Opening mechanisms are arranged on both sides of the welding station area to facilitate maintenance of the welding station area. The opening mechanisms are not easily damaged and have strong supporting force. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 It is a schematic diagram of the three-dimensional structure of a vacuum sintering furnace with a furnace body maintenance device;

[0015] Figure 2 It is a schematic diagram of the front view structure of a vacuum sintering furnace with a furnace body maintenance device;

[0016] Figure 3 It is a schematic diagram of the three-dimensional structure of the opening mechanism;

[0017] Figure numerals: 1. inlet sealing door; 2. preheating station; 3. welding station; 4. cooling station; 5. outlet sealing door; 6. transport mechanism; 7. opening mechanism; 31. welding station support plate; 71. third support structure; 72. first support structure; 73. first mounting seat; 74. first cross beam; 75. longitudinal beam; 76. second mounting seat; 77. fourth support structure; 78. second support structure; 79. second cross beam. DETAILED DESCRIPTION

[0018] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0019] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0020] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0021] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0022] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0023] Combine the following Figure 1-3 A vacuum sintering furnace with a furnace body maintenance device according to an embodiment of the utility model is described, comprising an inlet sealing door 1, at least one preheating station 2, a welding station 3, an opening mechanism 7, a welding station support plate 31, at least one cooling station 4, a conveying mechanism 6 and an outlet sealing door 5; the inlet end of the preheating station 2 is sealed by the inlet sealing door 1, the preheating station 2 is connected to the welding station 3, the welding station 3 is connected to the cooling station 4, the outlet end of the cooling station 4 is sealed by the outlet sealing door 5, opening mechanisms 7 are provided on both sides of the welding station 3, the welding station support plate 31 is fixedly provided above the welding station 3 and cooperates with the opening mechanism 7 to open the welding station 3, and the preheating station 2, the welding station 3 and the cooling station 4 are circulated through the conveying mechanism 6.

[0024] The transport mechanism 6 performs horizontal and vertical movements. The vertical movement is to lift the fixture and the workpiece, and then the horizontal movement is used to transport the workpiece. After reaching the target position, the vertical movement is used to lower the workpiece onto the support column.

[0025] The preheating station 2 is set to the same temperature or a step-by-step temperature increase, that is, the step-by-step temperature increase, that is, the preheating station 2 is provided with a first preheating station, a second preheating station and a third preheating station, the first preheating station preheats to a first preheating temperature T1, the second preheating station preheats to a second preheating temperature T2, and the third preheating station preheats to a third preheating temperature T3. T3>T2>T1.

[0026] The cooling station 4 is set to the same temperature or step-down temperature. That is, the step-down temperature is set to the cooling station 4, i.e., the first cooling station is cooled to the first cooling temperature, and the second cooling station is cooled to the second cooling temperature.

[0027] Reducing gas and inert gas are filled into the preheating station 2, welding station 3 and cooling station 4. The reducing gas includes formic acid and hydrogen. The inert gas includes nitrogen.

[0028] A lifting mechanism is provided below the welding station 3, and the lifting mechanism lifts and lowers the fixture and the workpiece.

[0029] The preheating station 2, the welding station 3 and the cooling station 4 are divided into a lower cavity and an upper cavity.

[0030] In this embodiment, the opening mechanism 7 includes a first mounting seat 73, a second mounting seat 76, a first support structure 72, a second support structure 78, a first crossbeam 74, a second crossbeam 79 and at least one longitudinal beam 75; the first mounting seat 73 and the second mounting seat 76 are arranged on both sides of the welding station 3, the first support structure 72 is arranged on the first mounting seat 73, the second support structure 78 is arranged on the second mounting seat 76, the first crossbeam 74 is arranged above the first support structure 72, the second crossbeam 79 is arranged above the second support structure 78, the longitudinal beam 75 is arranged above the first crossbeam 74 and the second crossbeam 79, and the longitudinal beam 75 spans the welding station 3 and is arranged below the welding station support plate 31. The first support structure 72 and the second support structure 78 are hydraulic support structures, preferably jacks.

[0031] In the above embodiment, a third support structure 71 and a fourth support structure 77 are further included; the third support structure 71 is arranged inside the first mounting seat 73, and is used to support the first support structure 72 and prevent the collapse of the first mounting seat 73. The fourth support structure 77 is arranged inside the second mounting seat 76, and is used to support the second support structure 78 and prevent the collapse of the second mounting seat 76. The third support structure 71 and the fourth support structure 77 are hydraulic support structures, preferably jacks.

[0032] In this embodiment, the inlet sealing door 1 and the outlet sealing door 5 are provided with a cylinder and guide posts are provided on both sides of the cylinder. The sealing is performed by the up and down movement of the cylinder, and the guide posts improve the accuracy of the movement, that is, improve the sealing performance.

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A vacuum sintering furnace with a furnace body maintenance device, characterized in that: It includes an inlet sealing door, at least one preheating station, a welding station, an opening mechanism, a welding station support plate, at least one cooling station, a conveying mechanism and an outlet sealing door; the inlet end of the preheating station is sealed by the inlet sealing door, the preheating station is connected to the welding station, the welding station is connected to the cooling station, the outlet end of the cooling station is sealed by the outlet sealing door, opening mechanisms are provided on both sides of the welding station, the welding station support plate is fixedly provided above the welding station and cooperates with the opening mechanism to open the welding station, and the preheating station, the welding station and the cooling station are circulated through the conveying mechanism.

2. The vacuum sintering furnace with a furnace body maintenance device according to claim 1, characterized in that: The transport mechanism performs horizontal and vertical movements.

3. The vacuum sintering furnace with a furnace body maintenance device according to claim 1, characterized in that: The preheating stations are set to the same temperature or step-by-step temperature increase.

4. The vacuum sintering furnace with a furnace body maintenance device according to claim 1, characterized in that: The cooling stations are set to the same temperature or to reduce the temperature in steps.

5. The vacuum sintering furnace with a furnace body maintenance device according to claim 1, characterized in that: The inlet sealing door and the outlet sealing door are provided with cylinders and guide columns are provided on both sides of the cylinders.

6. The vacuum sintering furnace with a furnace body maintenance device according to claim 1, characterized in that: The opening mechanism includes a first mounting seat, a second mounting seat, a first supporting structure, a second supporting structure, a first cross beam, a second cross beam and at least one longitudinal beam; the first mounting seat and the second mounting seat are arranged on both sides of the welding station, the first supporting structure is arranged on the first mounting seat, the second supporting structure is arranged on the second mounting seat, the first cross beam is arranged above the first supporting structure, the second cross beam is arranged above the second supporting structure, the longitudinal beam is arranged above the first cross beam and the second cross beam, and the longitudinal beam spans the welding station and is arranged below the welding station support plate.

7. The vacuum sintering furnace with a furnace body maintenance device according to claim 6, characterized in that: It also includes a third supporting structure and a fourth supporting structure; the third supporting structure is arranged inside the first mounting seat to support the first supporting structure; the fourth supporting structure is arranged inside the second mounting seat to support the second supporting structure.

8. The vacuum sintering furnace with a furnace body maintenance device according to claim 7, characterized in that: The first supporting structure, the second supporting structure, the third supporting structure and the fourth supporting structure are jacks.

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