Jig for assisting in mounting cover ring

Abstract

The utility model provides a jig for assisting in installing a cover ring. The jig used for assisting in mounting the cover ring comprises a supporting column, a first clamping piece and a second clamping piece, wherein the supporting column is provided with a first end part and a second end part which are opposite; the at least two supporting rods are oppositely arranged, each supporting rod is provided with a first end part and a second end part which are opposite, the first end parts of the supporting rods are connected to the first end parts of the supporting columns, the second end parts of the supporting rods are provided with positioning blocks, and the positioning blocks and the second end parts of the supporting columns are located on the same sides of the supporting rods; the supporting rod can be unfolded under stress so that the supporting rod can be perpendicular to the axial direction of the supporting column, the positioning block can be clamped into a gap between the cover ring and a blocking piece for bearing the cover ring, and the installation position of the cover ring is positioned. The supporting rod can be stressed to rotate and retract in the direction close to the supporting column with the joint of the supporting rod and the supporting column as the fulcrum.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a fixture for assisting the installation of a cover ring. Background Art

[0002] The thin film deposition equipment mainly includes a chamber and a base, wherein the base is arranged in the chamber, and the base is used to carry the wafer on which the thin film is to be deposited. Taking physical vapor deposition as an example, a target material needs to be arranged in the chamber, wherein the target material faces the wafer on which the thin film is to be deposited on the surface of the base. When performing physical vapor deposition, the wafer on which the thin film is to be deposited will be fixed on the base by a fixing device, and an inert gas and / or a reaction gas will be transported into the chamber. A bias voltage is applied to the target material and the base respectively, and the inert gas in the chamber forms an ionized inert gas under the action of a high-voltage electric field. The ionized inert gas will be attracted by the bias voltage on the target material and bombard the target material. The target material atoms or molecules splashed from the target material will be attracted by the bias voltage on the base and deposited on the surface of the wafer on which the thin film is to be deposited, so as to form a thin film on the surface of the wafer on which the thin film is to be deposited.

[0003] like Figure 1A to Figure 1B As shown, it is a schematic diagram of a thin film deposition device in the prior art. Figure 1A This is a schematic diagram of the thin film deposition equipment in the loading and unloading state. Figure 1B It is a schematic diagram of a thin film deposition device in a deposition state. The thin film deposition device includes: a chamber 10, a base 11, a cover ring 12, a stopper 13 and a carrying ring 14. The chamber 10 provides a process environment for a wafer 15 on which a thin film is to be deposited; the base 11 is arranged at the bottom of the chamber 10, and the base 11 is used to carry the wafer 15 on which a thin film is to be deposited; the cover ring 12 is arranged above the base 11, and the cover ring 12 can prevent adhesion to the chamber 10 during thin film deposition; the stopper 13 is arranged in the chamber 10, and the stopper 13 is used to carry the cover ring 12; the carrying ring 14 is arranged on the surface of the base 11, and the carrying ring 14 is used to further carry the cover ring 12.

[0004] During deposition, the cover ring 12 covers the carrier ring 14 to prevent the base 11 and the chamber 10 from being affected by metal deposition and causing adhesion. During maintenance, the cover ring 12 needs to be replaced and the inner distance between the cover ring 12 and the stopper 13 needs to be adjusted. Only when the inner distance between the cover ring 12 as a whole and the stopper 13 is consistent can the carrier ring 14 be accurately covered. If the cover ring 12 and the carrier ring 14 cannot be accurately covered, on the one hand, the cover ring 12 will be pressed against the wafer 15 on which the thin film is to be deposited when in the process position, and on the other hand, the cover ring 12 will be suspended and tilted due to inadequate coverage, thereby affecting product quality. At present, there is no corresponding tool to assist in the installation of the cover ring, and it takes a long time to adjust the inner distance between the cover ring and the protective cover, affecting production efficiency and quality. Summary of the invention

[0005] The technical problem to be solved by the utility model is to provide a jig for assisting the installation of a cover ring, which can reduce the time for installing the cover ring, achieve the purpose of accurately installing the cover ring position, and improve production efficiency and quality.

[0006] In order to solve the above problems, the utility model provides a jig for assisting the installation of a cover ring, the jig for assisting the installation of a cover ring comprising: a support column, the support column having a first end and a second end relative to each other; at least two oppositely arranged support rods, the support rod having a first end and a second end relative to each other, the first end of the support rod being connected to the first end of the support column, the second end of the support rod being provided with a positioning block, the positioning block and the second end of the support column being located on the same side of the support rod, the support rod being able to be stressed so that the second end of the support rod is expanded in a direction away from the support column so that the positioning block can be stuck in the gap between the cover ring and the stopper supporting the cover ring to position the installation position of the cover ring, and the support rod can also be stressed so that the second end of the support rod is retracted in a direction close to the support column so that the positioning block can withdraw from the gap between the cover ring and the stopper supporting the cover ring.

[0007] In some embodiments, the support rod can be subjected to force so that the second end of the support rod expands in a direction away from the support column until the support rod is perpendicular to the axial direction of the support column, so that the positioning block can be stuck in the gap between the cover ring and the stopper supporting the cover ring; the support rod can also be subjected to force to rotate with the connection between the support rod and the support column as a fulcrum, so that the second end of the support rod is retracted in a direction close to the support column, so that the positioning block can withdraw from the gap between the cover ring and the stopper supporting the cover ring.

[0008] In some embodiments, the plurality of support rods are evenly arranged in a circumferential direction with the support column as the center.

[0009] In some embodiments, it also includes a ring sleeved on the outer surface of the support column, the ring can slide on the outer surface of the support column along the axial direction of the support column, the first end of the support rod is connected to the ring, and the support rod can be subjected to force with the connection between the support rod and the ring as a fulcrum, so that the second end of the support rod rotates in a direction close to the support column.

[0010] In some embodiments, a limit block is further included, wherein the limit block is disposed at the first end of the support column, and the collar is disposed at a side of the limit block away from the first end of the support column.

[0011] In some embodiments, it also includes a retractable limit pin arranged on the support column. When the retractable limit pin is retracted into the support column, the ring can slide on the outer surface of the support column toward the second end of the support column. When the retractable limit pin is extended, the ring can be fixed on the support column.

[0012] In some embodiments, the first end of the support rod is connected to the support column via a rotating shaft.

[0013] In some embodiments, a handle is further included, wherein the handle is disposed at the second end of the support column, and grasping the handle can drive the support column to move.

[0014] In some embodiments, the number of the struts is four.

[0015] In some embodiments, the positioning block and the support rod are integrally formed.

[0016] In the above technical solution, the first end of the support rod is connected to the first end of the support column, and a positioning block is arranged at the second end of the support rod, and the positioning block and the second end of the support column are located on the same side of the support rod; when installing the positioning cover ring, the support rod can be stressed so that the second end of the support rod is expanded in the direction away from the support column, so that the positioning block can be stuck in the gap between the cover ring and the stopper bearing the cover ring, thereby positioning the installation position of the cover ring; after the cover ring is installed, the support rod can be stressed so that the second end of the support rod is retracted in the direction close to the support column, so that the positioning block can be withdrawn from the gap between the cover ring and the stopper bearing the cover ring. This jig can be used to lift the cover ring from the inside of the cover ring, and the inner distance between the cover ring and the stopper can be adjusted by the positioning block, which reduces the time spent on installing and adjusting the cover ring, achieves the purpose of accurately installing the cover ring position, and improves the production efficiency and quality of the equipment.

[0017] It should be understood that the above general description and the detailed description below are only exemplary and explanatory and cannot limit the present invention. The techniques, methods and devices known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the techniques, methods and devices should be considered as part of the authorization specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the specific embodiment of the present invention, the following briefly introduces the drawings required for use in the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Attached Figure 1A ~Attached Figure 1B Shown is a schematic diagram of a thin film deposition device in the prior art;

[0020] Attached Figure 2A ~Attached Figure 2B FIG. 1 is a schematic diagram of a first embodiment of a jig for assisting the installation of a cover ring according to the utility model;

[0021] Attached Figure 3A ~Attached Figure 3B Shown is a schematic diagram of a second embodiment of the jig for assisting the installation of a cover ring according to the utility model;

[0022] Attached Figure 4 The figure shows a stereoscopic view of an embodiment of a jig for assisting the installation of a cover ring according to the utility model. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the implementation methods of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Embodiment 1

[0025] Please also refer to the following Figure 2A ~Attached Figure 2B ,in, Figure 2A This is a schematic diagram of the first embodiment of the jig for assisting the installation of the cover ring according to the utility model in use. Figure 2B This is a schematic diagram of a first embodiment of the jig for assisting the installation of a cover ring according to the utility model in a retracted state.

[0026] like Figure 2A to Figure 2BAs shown, the jig for assisting the installation of the cover ring includes: a support column 20 and two support rods 21 arranged opposite to each other. The support column 20 has a first end 201 and a second end 202 relative to each other; the support rod 21 has a first end and a second end relative to each other, the first end of the support rod 21 is connected to the first end 201 of the support column 20, and the second end of the support rod 21 is provided with a positioning block 211, and the positioning block 211 and the second end 202 of the support column 20 are located on the same side of the support rod 21, the support rod 21 can be subjected to force so that the second end of the support rod 21 is expanded in a direction away from the support column 20, so that the positioning block 211 can be stuck in the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12, and the installation position of the cover ring 12 is positioned, and the support rod 21 can also be subjected to force so that the second end of the support rod 21 is retracted in a direction close to the support column 20, so that the positioning block 211 can withdraw from the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12.

[0027] In this embodiment, the support rod 21 can be stressed so that the second end of the support rod 21 is expanded in a direction away from the support column 20 until the support rod 21 is perpendicular to the axial direction of the support column 20, so that the positioning block 211 can be inserted into the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12. Figure 2A The support rod 21 can also be subjected to force to rotate with the connection between the support rod 21 and the support column 20 as a fulcrum, so that the second end of the support rod 21 is retracted toward the support column 20, so that the positioning block 211 can be withdrawn from the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12, as shown in FIG. Figure 2B shown.

[0028] The jig provided in this embodiment sets the first end of the support rod 21 to be connected with the first end 201 of the support column 20, and a positioning block 211 is set at the second end of the support rod 21, and the positioning block 211 and the second end 202 of the support column 20 are located on the same side of the support rod 21; when installing the positioning cover ring 12, the support rod 21 can be subjected to force so that the second end of the support rod 21 is expanded in the direction away from the support column 20, so that the positioning block 211 can be stuck in the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12, thereby positioning the installation position of the cover ring 12; after the cover ring 12 is installed, the support rod 21 can be subjected to force so that the second end of the support rod 21 is retracted in the direction close to the support column 20, so that the positioning block 211 can withdraw from the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12. This jig can be used to lift the cover ring 12 from the inside of the cover ring 12, and the inner distance between the cover ring 12 and the stopper 13 can be adjusted through the positioning block 211, thereby reducing the time consumed in installing and adjusting the cover ring 12, achieving the purpose of accurately installing the position of the cover ring 12, thereby improving the production efficiency and quality of the equipment.

[0029] In this embodiment, the support column 20 is a cylinder. In other embodiments, the support column 20 may also be a prism or other shapes.

[0030] In this embodiment, the number of the support rods 21 is two, and the two support rods 21 are arranged opposite to each other with the support column 20 as the axis of symmetry. In other embodiments, the number of the support rods 21 may be three, four or more, and the plurality of support rods 21 are evenly arranged in a circumferential direction with the support column 20 as the center. Figure 4 As shown, it is a three-dimensional diagram of an embodiment of the jig for assisting the installation of the cover ring of the utility model, and the four support rods 21 are evenly arranged in a circumferential direction with the support column 20 as the center. Furthermore, the positioning block 211 and the support rod 21 are integrally formed to improve the firmness of the jig.

[0031] In this embodiment, it also includes a ring 22 sleeved on the surface of the support column 20, and the ring 22 can slide on the outer surface of the support column 20 along the axial direction of the support column 20; the first end of the support rod 21 is connected to the ring 22, and the support rod 21 can be subjected to force with the connection between the support rod 21 and the ring 22 as a fulcrum, so that the second end of the support rod 21 rotates in a direction close to the support column 20.

[0032] In this embodiment, a stop block 23 is further included, and the stop block 23 is disposed at the first end 201 of the support column 20; the collar 22 is disposed at a side of the stop block 23 away from the first end 201 of the support column 20. By providing the stop block 23, the collar 22 does not need to worry about sliding out of the first end 201 of the support column 20 when sliding up and down, and the collar 22 can also provide support force for the support rod 21 when the cover ring 12 is installed using the support rod 21.

[0033] In this embodiment, a retractable stop pin 24 is also included on the support column 20; when the retractable stop pin 24 is retracted into the support column 20, the collar 22 can slide from the outer surface of the support column 20 to the second end 202 of the support column 20; when the retractable stop pin 24 is extended, the collar 22 can be fixed on the support column 20. When installing the cover ring 12, the collar 22 slides to the first end 201 of the support column 20, and the retractable stop pin 24 is extended to protrude from the outer surface of the support column 20, and can be stuck above the collar 22 to fix the collar 22 on the support column 20; after the cover ring 12 is installed, the retractable stop pin 24 is retracted into the support column 20, the collar 22 slides upward, and the support rod 21 is retracted, so that the jig is taken out from the inside of the cover ring 12.

[0034] In this embodiment, a handle 25 is also included, and the handle 25 is provided at the second end 202 of the support column 20. Grasping the handle 25 can drive the support column 20 to move. Specifically, the handle 25 is in the shape of a strip extending from the second end 202 of the support column 20 to both sides perpendicular to the axial direction of the support column 20, so as to facilitate grasping and prevent the collar 22 from sliding out of the second end 202 of the support column 20 when sliding up and down. In other embodiments, the handle 25 can also be set to be a circle extending outward from the second end 202 of the support column 20 or other shapes that are convenient for grasping.

[0035] Embodiment 2

[0036] See below Figure 3A ~Attached Figure 3B ,in, Figure 3A This is a schematic diagram of the second embodiment of the jig for assisting the installation of the cover ring according to the utility model in use. Figure 3B This is a schematic diagram of the second embodiment of the jig for assisting the installation of the cover ring according to the present invention in a retracted state.

[0037] like Figure 3A to Figure 3B As shown, Figure 2A to Figure 2BThe difference of the illustrated embodiment is that, in this embodiment, the support rod 21 is connected to the support column 20 via a rotating shaft 30. The rotating shaft 30 is fixed to the support column 20. When installing the cover ring 12, the support rod 21 can be stressed so that the second end of the support rod 21 is expanded in a direction away from the support column 20, so that the positioning block 211 can be inserted into the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12, thereby positioning the installation position of the cover ring 12; after the cover ring 12 is installed, the support rod 21 can be stressed so that the second end of the support rod 21 is retracted in a direction close to the support column 20, so that the positioning block 211 can be withdrawn from the gap between the cover ring 12 and the stopper 13 supporting the cover ring 12. By providing the rotating shaft 30, the setting of the collar 22, the limit block 23 and the retractable limit pin 24 can be omitted, thereby simplifying the fixture structure.

[0038] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or equipment. In the absence of more restrictions, there are elements limited by the sentence "also includes one...", and it is not excluded that there are other identical elements in the process, method, article or equipment including the elements. In addition, in the absence of conflict, the embodiments in the utility model and the features in the embodiments can be combined with each other. In addition, in the above description, the description of known components and technologies is omitted to avoid unnecessary confusion of the concept of the utility model.

[0039] The various embodiments of the present invention are described in a related manner, and the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments.

[0040] The above is only a preferred embodiment of the utility model, and is not intended to limit the protection scope of the utility model. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the principle of the utility model, and these improvements and modifications should also be regarded as the protection scope of the utility model.

Claims

1. A jig for assisting the installation of a cover ring, characterized in that: include: A support column having a first end and a second end opposite to each other; At least two relatively arranged support rods, the support rod having a relatively first end and a second end, the first end of the support rod being connected to the first end of the support column, the second end of the support rod being provided with a positioning block, the positioning block and the second end of the support column being located on the same side of the support rod, the support rod being able to be subjected to force so that the second end of the support rod is expanded in a direction away from the support column so that the positioning block can be stuck in the gap between the cover ring and the stopper supporting the cover ring to position the installation position of the cover ring, and the support rod being able to be subjected to force so that the second end of the support rod is retracted in a direction close to the support column so that the positioning block can withdraw from the gap between the cover ring and the stopper supporting the cover ring.

2. The jig for assisting the installation of the cover ring according to claim 1, characterized in that: The support rod can be stressed so that the second end of the support rod is expanded in a direction away from the support column until the support rod is perpendicular to the axial direction of the support column, so that the positioning block can be inserted into the gap between the cover ring and the stopper that supports the cover ring; The support rod can also be subjected to force to rotate with the connection between the support rod and the support column as a fulcrum, so that the second end of the support rod is retracted toward the support column, so that the positioning block can withdraw from the gap between the cover ring and the stopper supporting the cover ring.

3. The jig for assisting the installation of the cover ring according to claim 1, characterized in that: The plurality of support rods are evenly arranged in a circumferential direction with the support column as the center.

4. The jig for assisting the installation of the cover ring according to claim 1, characterized in that: It also includes a ring sleeved on the outer surface of the support column, the ring can slide on the outer surface of the support column along the axial direction of the support column, the first end of the support rod is connected to the ring, and the support rod can be subjected to force with the connection between the support rod and the ring as a fulcrum, so that the second end of the support rod rotates in a direction close to the support column.

5. The jig for assisting the installation of the cover ring according to claim 4, characterized in that: It also includes a limit block, which is arranged at the first end of the support column, and the collar is arranged at a side of the limit block away from the first end of the support column.

6. The jig for assisting the installation of the cover ring according to claim 4, characterized in that: It also includes a retractable limit pin arranged on the support column. When the retractable limit pin is retracted into the support column, the ring can slide on the outer surface of the support column toward the second end of the support column. When the retractable limit pin is extended, the ring can be fixed on the support column.

7. The jig for assisting the installation of the cover ring according to claim 1, characterized in that: The first end of the support rod is connected to the support column through a rotating shaft.

8. The jig for assisting the installation of the cover ring according to claim 1, characterized in that: It also includes a handle, which is arranged on the second end of the support column. Grasping the handle can drive the support column to move.

9. The jig for assisting the installation of the cover ring according to claim 1, characterized in that: The number of the supporting rods is four.

10. The jig for assisting the installation of the cover ring according to claim 1, characterized in that: The positioning block and the support rod are integrally formed.

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