Large-caliber quartz tube for high-temperature diffusion furnace

Abstract

The large-diameter quartz tube for the high-temperature diffusion furnace comprises a quartz tube body, one end of the quartz tube body is closed, the other end of the quartz tube body is open, a first air inlet tube and a second air inlet tube are formed at the closed end of the quartz tube body, and the first air inlet tube and the second air inlet tube are connected with an irregular tube. An inner cavity of the quartz tube body is divided into a ventilation chamber and a reaction chamber, the two chambers are separated through a circular partition plate, a cross-shaped groove is formed in the circular partition plate, the cross-shaped groove is matched with a cross-shaped baffle located in the reaction chamber, and the cross-shaped baffle is connected with a telescopic assembly located in the ventilation chamber. According to the design of the utility model, the introduced gas is mixed for multiple times, so that the uniformity of the mixed gas is greatly improved, the problem that the quality of the silicon wafer is influenced by non-uniform mixed gas when the mixed gas reacts with the silicon wafer is avoided, and the yield of the silicon wafer is improved.

Description

Technical field:

[0001] The utility model relates to the field of semiconductors, in particular to a large-diameter quartz tube for a high-temperature diffusion furnace. Background technology:

[0002] Diffusion furnace is one of the important process equipment in the front process of semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. It is divided into horizontal diffusion furnace and vertical diffusion furnace. Quartz tube is a special industrial technical glass made of silicon dioxide, which is a very good basic material. At present, the quartz tube used in the diffusion furnace is easy to form laminar flow due to the difference in gas density entering the quartz tube, resulting in uneven diffusion concentration on the silicon wafer, affecting the quality of the silicon wafer. Utility model content:

[0003] The utility model provides a large-caliber quartz tube for a high-temperature diffusion furnace, which solves the problem in the prior art that uneven gas mixing affects the quality of silicon wafers.

[0004] The technical solution measures of the utility model are as follows: a large-diameter quartz tube for a high-temperature diffusion furnace, comprising a quartz tube body, one end of the quartz tube body is closed, and the other end is open, the closed end of the quartz tube body is formed with a first air inlet pipe and a second air inlet pipe which are parallel to each other, the first air inlet pipe and the second air inlet pipe are connected with an irregular tube, the inner cavity of the quartz tube body is divided into a ventilation chamber and a reaction chamber, the ventilation chamber and the reaction chamber are separated by a circular partition, a cross-shaped groove is provided on the circular partition, the cross-shaped groove is equipped with a cross-shaped baffle located in the reaction chamber, and the end points of the cross-shaped baffle are connected with a telescopic component located in the ventilation chamber;

[0005] The telescopic assembly includes a rectangular fixing plate formed on a quartz tube body, the rectangular fixing plate is provided with irregular grooves facing outward on both sides, a T-shaped groove is formed in the center, and a cylindrical fixing groove is provided at one end of the rectangular fixing plate away from the quartz tube body toward the irregular tube, a rubber pad is installed in the cylindrical fixing groove, the rubber pad is connected to a spring, and the spring is connected to a cross-shaped baffle.

[0006] Preferably, the irregular tube comprises a V-shaped tube connected to the first air inlet pipe and the second air inlet pipe, and a wave tube is formed at the other end of the V-shaped tube.

[0007] Preferably, the quartz tube body is formed with an air outlet near the open end.

[0008] Preferably, the contact surface between the cross-shaped groove and the cross-shaped baffle is a frosted surface.

[0009] The beneficial effects of the utility model are as follows: the irregular tube designed by the utility model can prolong the path for the gas to enter the inner cavity of the quartz tube body, which is beneficial to increase the mixing time of multiple gases entering the inner cavity of the quartz tube body, and make the gas mixing more uniform; in addition, a circular partition and a telescopic component are designed, and the circular partition divides the inner cavity of the quartz tube body into a ventilation chamber and a reaction chamber. When the gas is continuously introduced, the air pressure in the ventilation chamber is enhanced, and a pressure difference is formed with the other chamber. Under the action of the pressure difference, the cross-shaped baffle can be pushed to leave the cross-shaped groove to allow the gas to enter the reaction chamber. When the pressures of the two chambers are consistent, the cross-shaped baffle returns to the cross-shaped groove under the action of the spring. The period of time during which the pressure difference is formed can further mix the gas, and the irregular grooves and T-shaped grooves in the telescopic component can play a role in hindering the movement of the gas, making the diffusion movement path of the gas more complicated, which is beneficial to improving the uniformity of the mixed gas. Description of the drawings:

[0010] Figure 1 It is a schematic diagram of the structure of the utility model.

[0011] Figure 2 This is a schematic diagram of the internal structure of the utility model when viewed from above.

[0012] Figure 3 It is a schematic diagram of the internal structure of the utility model when viewed from above.

[0013] Figure 4 This is a schematic diagram of the irregular tube structure of the utility model.

[0014] Figure 5 This is an AA detail picture.

[0015] In the figure: 1. quartz tube body; 2. first air inlet pipe; 3. second air inlet pipe; 4. air outlet; 5. circular partition; 6. cross groove; 7. irregular tube; 8. telescopic assembly; 8-1. rectangular fixing plate; 8-2. irregular groove; 8-3. cylindrical fixing groove; 8-4. T-shaped groove; 8-5. spring; 9. cross baffle; 10. wave tube; 11. V-shaped tube. Specific implementation method:

[0016] Combined with Figure 1 The utility model of a large-diameter quartz tube for a high-temperature diffusion furnace is further described.

[0017] The utility model provides a large-diameter quartz tube for a high-temperature diffusion furnace, comprising a quartz tube body 1, wherein one end of the quartz tube body 1 is closed and the other end is open, and the closed end of the quartz tube body 1 is formed with a first air inlet pipe 2 and a second air inlet pipe 3 which are parallel to each other, and the first air inlet pipe 2 and the second air inlet pipe 3 are connected with an irregular tube 7, and the inner cavity of the quartz tube body 1 is divided into a ventilation chamber and a reaction chamber, and the ventilation chamber and the reaction chamber are separated by a circular partition 5, and a cross-shaped groove 6 is formed on the circular partition 5, and the cross-shaped groove 6 is matched with a cross-shaped baffle 9 located in the reaction chamber, and the end points of the cross-shaped baffle 9 are connected with a telescopic component 8 located in the ventilation chamber;

[0018] The telescopic assembly 8 includes a rectangular fixing plate 8-1 formed on the quartz tube body 1, and the rectangular fixing plate 8-1 is provided with irregular grooves 8-2 facing outward on both sides, and a T-shaped groove 8-4 is formed in the center. The end of the rectangular fixing plate away from the quartz tube body 1 is provided with a cylindrical fixing groove 8-3 toward the irregular tube 7, and a rubber pad is installed in the cylindrical fixing groove 8-3. The rubber pad is connected to a spring 8-5, and the spring 8-5 is connected to the cross-shaped baffle 9.

[0019] Furthermore, the irregular tube 7 includes a V-shaped tube 11 connected to the first air intake pipe 2 and the second air intake pipe 3 , and a wave tube 10 is formed at the other end of the V-shaped tube.

[0020] Furthermore, the quartz tube body 1 is formed with an air outlet 4 near the open end.

[0021] Furthermore, the contact surface between the cross-shaped groove 6 and the cross-shaped baffle 9 is a frosted surface.

[0022] The working principle of the utility model is as follows: when the quartz tube is used, it is placed in the diffusion furnace, and the circular partition 5 divides the inner cavity of the quartz tube body 1 into a ventilation chamber and a reaction chamber. The gas is introduced from the first air inlet pipe 2 and the second air inlet pipe 3 into the irregular tube 7 connected to the first air inlet pipe 2 and the second air inlet pipe 3. The gas is first mixed in the irregular tube 7 and then enters the ventilation chamber. Due to the existence of the circular partition 5, the mixed gas will not immediately enter the reaction chamber, so the gas continues to mix, and the irregular grooves 8-2 and T-shaped grooves 8-4 in the telescopic component 8 can play a role in hindering the movement of the gas, so that The diffusion movement path of the gas is more complicated, which is conducive to improving the uniformity of the mixed gas; when the mixed gas is stored to a certain extent, the ventilation chamber and the reaction chamber will form a pressure difference sufficient to push the cross-shaped baffle 9. Driven by the pressure difference, the cross-shaped baffle 9 leaves the cross-shaped groove 6 and enters the reaction chamber to react with the silicon wafer under heating conditions. The excess gas will be discharged from the gas outlet 4, and the gas pressure of the two chambers will tend to be consistent. Under the pulling force of the spring 8-7, the cross-shaped baffle 9 returns to the cross-shaped groove 6. During the reaction process, the above process will be repeated until the reaction of the silicon wafer and the mixed gas is completed.

[0023] The above description is only the preferred embodiment of the present utility model. All other embodiments obtained by ordinary technicians in this field without making creative work should fall within the scope of protection of the present utility model.

Claims

1. A large-diameter quartz tube for a high-temperature diffusion furnace, comprising a quartz tube body (1), characterized in that: The quartz tube body (1) has a closed end and an open end. The closed end of the quartz tube body (1) is formed with a first air inlet pipe (2) and a second air inlet pipe (3) which are parallel to each other. The first air inlet pipe (2) and the second air inlet pipe (3) are connected with an irregular tube (7). The inner cavity of the quartz tube body (1) is divided into a ventilation chamber and a reaction chamber. The ventilation chamber and the reaction chamber are separated by a circular partition (5). The circular partition (5) is provided with a cross-shaped groove (6). The cross-shaped groove (6) is matched with a cross-shaped baffle (9) located in the reaction chamber. The end points of the cross-shaped baffle (9) are connected with a telescopic component (8) located in the ventilation chamber. The telescopic assembly (8) comprises a rectangular fixing plate (8-1) formed on a quartz tube body (1), the rectangular fixing plate (8-1) is provided with irregular grooves (8-2) facing outward on both sides, and a T-shaped groove (8-4) is formed in the center, and the end of the rectangular fixing plate away from the quartz tube body (1) is provided with a columnar fixing groove (8-3) in the direction of the irregular tube (7), a rubber pad is installed in the columnar fixing groove (8-3), the rubber pad is connected to a spring (8-5), and the spring (8-5) is connected to a cross-shaped baffle (9).

2. The large-diameter quartz tube for a high-temperature diffusion furnace according to claim 1, characterized in that: The irregular tube (7) comprises a V-shaped tube (11) connected to the first air intake tube (2) and the second air intake tube (3), and the other end of the V-shaped tube is formed with a wave tube (10).

3. The large-diameter quartz tube for a high-temperature diffusion furnace according to claim 1, characterized in that: The quartz tube body (1) is formed with an air outlet (4) near the opening end.

4. The large-diameter quartz tube for a high-temperature diffusion furnace according to claim 1, characterized in that: The contact surface between the cross-shaped groove (6) and the cross-shaped baffle (9) is a frosted surface.

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