Multipurpose scanning electron microscope sample table

Abstract

The utility model discloses a multipurpose scanning electron microscope sample table which comprises a supporting table and a supporting column fixedly connected to the bottom end of the supporting table, an auxiliary fixing structure used for assisting in fixing a sample is arranged on one side of the top end of the supporting table, a protection structure used for protecting the supporting table is arranged on the outer wall of the supporting table, and the protection structure comprises a protection coating. According to the utility model, the corresponding auxiliary fixing structure is arranged on one side of the top end of the supporting table, so that the contact area between a sample and the supporting table is increased, and the sample can be stably fixed on the sample table; a clamping structure is arranged on the auxiliary fixing structure, so that the whole sample table is convenient to clamp, meanwhile, a corresponding protection structure is arranged on the whole sample table, a protection coating arranged in the protection structure is used for preventing the sample table from reacting with external substances or being abraded, the integrity of the whole sample table is guaranteed, and the situation that normal detection is affected due to damage of the sample table is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning electron microscopes, in particular to a multi-purpose scanning electron microscope sample stage. Background Art

[0002] Scanning electron microscope is an instrument used to understand the microstructure. It is suitable for observing and analyzing various solid samples, providing information on the surface morphology, form, crystal structure and chemical composition of the samples. Because the shapes of the samples are different, the samples usually need to be fixed on the sample stage through carbon conductive glue. The sample stage structure is usually composed of a round cake platform and a columnar support, and the whole is made of aluminum or copper. However, in actual use, the sample stage needs to be washed with alcohol after each use. Due to the lack of corresponding protection structure, alcohol will react with the sample stage in different environments to produce aluminum oxide, resulting in loss of the sample stage and surface flatness. The surface is uneven, which makes the charging phenomenon serious during the test. At the same time, due to the variety of test samples, which are usually irregular objects, when the sample is fixed on the disc-shaped sample stage by carbon conductive glue, the sample can only be fixed by bonding the bottom of the sample and the sample stage, resulting in a small contact area and the inability to fix the sample in multiple dimensions, so that the sample is difficult to be stably fixed. At the same time, the disc-shaped sample stage has no stable clamping force point when it needs to be clamped, and it is difficult to clamp it stably. It is very easy to slip and cause the surface of the sample to be observed to be contaminated and damaged, affecting the normal detection of the sample. Utility Model Content

[0003] The utility model aims to provide a multi-purpose scanning electron microscope sample stage to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a multi-purpose scanning electron microscope sample stage, comprising a support table and a support column fixedly connected to the bottom end of the support table, an auxiliary fixing structure for assisting in fixing the sample is arranged on one side of the top end of the support table, a protective structure for protecting the support table is arranged on the outer wall of the support table, the protective structure comprises a protective coating, and a clamping structure for stably clamping the sample stage is arranged on the top of the auxiliary fixing structure and the top of the support table.

[0005] Preferably, the auxiliary fixing structure includes a side boss, the bottom end of the side boss is fixedly connected to one side of the top end of the support platform, and the outer wall of the side boss is fixedly connected to the bottom end of the protective coating.

[0006] Preferably, the side boss is configured as a cuboid.

[0007] Preferably, the clamping structure comprises a first boss inner hole and a second boss inner hole which are arranged horizontally and longitudinally symmetrically.

[0008] Preferably, the first boss inner hole and the second boss inner hole are arranged at the top of the side boss, the first boss inner hole is arranged at the top of the side boss and close to the back side, and the second boss inner hole is arranged at the top of the side boss and close to the front side.

[0009] Preferably, a first inner hole and a second inner hole are symmetrically opened horizontally and longitudinally on the other side of the top of the support platform.

[0010] Preferably, the first inner hole is arranged at the top of the support platform and close to the front side, and the second inner hole is arranged at the top of the support platform and close to the back side.

[0011] Technical effects and advantages of the utility model:

[0012] The utility model sets the support table in a square shape and sets a corresponding auxiliary fixing structure on one side of the top thereof, so as to increase the contact area between the sample and the support table, so that the sample can be stably fixed on the sample table, and a clamping structure is set on the auxiliary fixing structure to facilitate the clamping of the sample table as a whole. At the same time, a corresponding protective structure is set on the overall sample table, and the protective coating set therein is used to prevent the sample table from reacting or wearing with external substances, thereby ensuring the integrity of the sample table as a whole and preventing damage to the sample table from affecting normal detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0014] Figure 2 It is a sectional view of the overall structure of the utility model.

[0015] Figure 3 For this utility model Figure 2 A magnified view of the structure in the middle.

[0016] Figure 4 It is a top view of the overall structure of the utility model.

[0017] In the figure: 1. support platform; 2. support column; 3. side boss; 4. protective coating; 5. inner hole of the first boss; 6. inner hole of the second boss; 7. first inner hole; 8. second inner hole. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] The utility model provides Figure 1-4 A multi-purpose scanning electron microscope sample stage shown in the figure includes a support table 1 and a support column 2 fixedly connected to the bottom end of the support table 1, an auxiliary fixing structure for assisting in fixing the sample is arranged on one side of the top end of the support table 1, a protective structure for protecting the support table 1 is arranged on the outer wall of the support table 1, the protective structure includes a protective coating 4, and a clamping structure for stably clamping the sample stage is arranged on the top of the auxiliary fixing structure and the top of the support table 1.

[0020] The auxiliary fixing structure comprises a side boss 3, the bottom end of the side boss 3 is fixedly connected to one side of the top end of the support platform 1, and the outer wall of the side boss 3 is fixedly connected to the bottom end of the protective coating 4.

[0021] It should be noted that the support platform 1 and the side boss 3 are made of an aluminum alloy material that is light, high-strength, has good electrical and thermal conductivity, and is easy to process and form, making the operation more convenient when the sample stage is moved. At the same time, the protective coating 4 refers to a titanium diboride coating, which is prepared by PVD physical vapor deposition, and the thickness of the protective coating 4 is set to 0-5μm. Since titanium diboride has a high melting point and melts above 3225°C, and has a low density of only 4.53g / cm 3 At the same time, it has high hardness and can withstand pressure greater than 30GPa. It also has low resistivity, with a resistance of 8.5μm / cm, as well as excellent high temperature stability, thermal shock resistance and chemical stability, high wear resistance, and especially has excellent electrical and thermal conductivity at high temperatures. The wear resistance of the sample stage is improved, and it is not easy to have scratches, dents, and residual dirt. A good dispersion effect is achieved when the powder sample is dispersed with alcohol. At the same time, the side cross-section of the overall sample stage is also similar to a nail shape, and the overall cross-section of the support platform 1 and the side boss 3 is in an "inverted L" shape. The overall sample stage is suitable for fixing irregularly shaped block solids, large-volume, complex groove block solids, and cut and polished samples with height differences. At the same time, the setting of the side boss 3 increases the available contact area with the top of the square support platform 1 and the side of the side boss 3 when the sample is placed on the sample stage. A small amount of conductive glue can be used to stick the side and bottom of the blade at the same time, and both can be bonded and fixed with carbon conductive glue. The contact area is large and the fixation is firm, which can effectively avoid image drift caused by unstable sample fixation during high-magnification electron microscope photography.

[0022] The side boss 3 is configured as a cuboid.

[0023] Furthermore, the side boss 3 is configured as a rectangular parallelepiped as a whole, and the support platform 1 is also configured as a rectangular parallelepiped. It should be noted that the support platform 1 is a rectangular parallelepiped with a length of 20 mm, a width of 20 mm, and a height of 4 mm, while the side boss 3 is 6.5 mm thick and 6 mm high, and the horizontal longitudinal length of the side boss 3 is the same as that of the support platform 1, and the diameter of the support column 2 is 3.09 mm and the height is 6 mm.

[0024] The clamping structure comprises a first boss inner hole 5 and a second boss inner hole 6 which are arranged horizontally and longitudinally symmetrically.

[0025] The first boss inner hole 5 and the second boss inner hole 6 are arranged at the top of the side boss 3. The first boss inner hole 5 is arranged at the top of the side boss 3 and close to the back side, and the second boss inner hole 6 is arranged at the top of the side boss 3 and close to the front side.

[0026] Furthermore, the first boss inner hole 5 and the second boss inner hole 6 set on the side boss 3 have a hole depth of 6mm, a hole diameter of 4.5mm, and a distance between the two holes of 8mm. Since the traditional round nail type sample table uses an oil pen to write on the bottom of the platform of the round sample table when marking the sample number, the sample table must often be clamped and turned over for confirmation when writing the digital number, and the sample cannot be quickly distinguished on the front of the sample table. Therefore, there are engraved alphabetic Arabic numerals A1, B1 and C1 between the two holes, A1 is engraved next to the second boss inner hole 6, C1 is engraved next to the first boss inner hole 5, and B1 is engraved between the first boss inner hole 5 and the second boss inner hole 6. The two holes of the side boss 3 can be conveniently used to clamp the sample table with tweezers and it is not easy to slip. It can also be used to place round or square small volume samples with a diameter of 0-4.5mm. The alphanumeric numbering can facilitate the positioning of samples and specific observation areas of samples to avoid flipping of the sample table during retrieval, which may cause accidental falling, contamination or damage to the observed surface of the sample.

[0027] A first inner hole 7 and a second inner hole 8 are symmetrically opened horizontally and longitudinally on the other side of the top of the support platform 1 .

[0028] The first inner hole 7 is disposed at the top of the support platform 1 and close to the front side, and the second inner hole 8 is disposed at the top of the support platform 1 and close to the back side.

[0029] Furthermore, the first inner hole 7 and the second inner hole 8 are arranged at the top of the support platform 1 and on the side away from the side boss 3, and the diameter of the two holes is 3.5 mm, the distance between the two holes is 14 mm, and the hole depth is 3.8 mm. The two holes can also be used to prevent the sample stage from slipping when the bottom surface of the sample is smaller than the bottom surface of the sample stage.

[0030] In actual use, the side boss 3 of the sample table can be used to fix cross-sectional samples with angle difference or height difference. The sample is pasted on the side of the side boss 3 close to the support table 1 with a small amount of conductive glue to ensure that the cross section is at the same horizontal height, with the side boss 3 as a reference, slightly higher than the plane at the top of the side boss 3. If the pasting surface has a complex groove or the bottom surface and the other side surface are uneven due to the broken edge of the sample, and it cannot be fixed on the support table 1, conductive glue can be used to paste the sample from the side to both sides of the side boss 3, thereby increasing the contact area between the sample and the sample table and avoiding the disadvantage that the circular sample table has only one bottom surface that can be used for pasting and fixing.

[0031] Furthermore, the first boss inner hole 5 and the second boss inner hole 6 on the side boss 3 and the first inner hole 7 and the second inner hole 8 on the support platform 1 can be used for tweezers to clamp the sample stage, and can also be used to place cylindrical small samples with a diameter smaller than the aperture or other small samples. For example, a cylindrical bending-resistant bar with a diameter less than 4.5 mm for failure analysis is placed in the inner hole of the side boss 3 and fixed to the side boss 3 with a small amount of carbon conductive glue. The first inner hole 7 and the second inner hole 8 on the support platform 1 can be used for tweezers to clamp the sample stage, and other samples of different heights and shapes can also be placed on the sample stage plane, so that multiple different samples can be observed on one sample stage at the same time. This improves work efficiency.

[0032] Furthermore, there are alphanumeric characters between the first boss inner hole 5 and the second boss inner hole 6 on the side boss 3, which can be used to locate the four cutting edges of the front cutting edge or specify the observation area on the back cutting edge of the blade when performing cutting failure analysis. For example, the observation area with color difference on the back cutting edge is pasted near the alphanumeric character A1. When navigating in the sample chamber, you only need to find A1 to quickly find the observation area with color difference, without having to search for the color difference area on the back cutting edge of the entire sample. The mechanical wear of the sample stage can be artificially controlled, the frequent use of the sample stage navigation function can be avoided, and the frequency of rotating the sample stage is reduced, so that the initial position of the sample stage does not produce a large deviation.

[0033] Furthermore, the side boss 3 has a certain applicability to irregular samples. Blade products of different shapes, groove types and angles can be fixed to the side wall or the support table 1 with carbon conductive glue. For the solid hard tool spiral rod, conductive glue can be used to stick the two sides of the side boss 3 to the cross section of the solid hard tool spiral rod, which is convenient for observing the blade band, front blade surface, groove bottom and other positions. The side boss 3 can also, to a certain extent, allow us to only touch the other side of the side boss 3 when preparing samples while wearing gloves, without touching the samples fixed on the side and bottom of the sample table, thereby avoiding contamination of the sample surface.

[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A multi-purpose scanning electron microscope sample stage, characterized in that: The invention comprises a support platform (1) and a support column (2) fixedly connected to the bottom end of the support platform (1); an auxiliary fixing structure for assisting in fixing a sample is arranged on one side of the top end of the support platform (1); a protective structure for protecting the support platform (1) is arranged on the outer wall of the support platform (1); the protective structure comprises a protective coating (4); and a clamping structure for stably clamping the sample platform is arranged on the top end of the auxiliary fixing structure and the top end of the support platform (1).

2. The multi-purpose scanning electron microscope sample stage according to claim 1, characterized in that: The auxiliary fixing structure comprises a side boss (3), the bottom end of the side boss (3) is fixedly connected to one side of the top end of the support platform (1), and the outer wall of the side boss (3) is fixedly connected to the bottom end of the protective coating (4).

3. The multi-purpose scanning electron microscope sample stage according to claim 2, characterized in that: The side boss (3) is configured as a cuboid.

4. The multi-purpose scanning electron microscope sample stage according to claim 1, characterized in that: The clamping structure comprises a first boss inner hole (5) and a second boss inner hole (6) which are arranged horizontally and longitudinally symmetrically.

5. The multi-purpose scanning electron microscope sample stage according to claim 4, characterized in that: The first boss inner hole (5) and the second boss inner hole (6) are arranged at the top of the side boss (3), the first boss inner hole (5) is arranged at the top of the side boss (3) and close to the back side, and the second boss inner hole (6) is arranged at the top of the side boss (3) and close to the front side.

6. The multi-purpose scanning electron microscope sample stage according to claim 1, characterized in that: A first inner hole (7) and a second inner hole (8) are symmetrically provided horizontally and longitudinally on the other side of the top end of the support platform (1).

7. The multi-purpose scanning electron microscope sample stage according to claim 6, characterized in that: The first inner hole (7) is arranged at the top of the support platform (1) and close to the front side, and the second inner hole (8) is arranged at the top of the support platform (1) and close to the back side.

Images