Etching disc carrying platform for cleaning silicon carbide

Abstract

The utility model relates to the technical field of cleaning carrying tables, in particular to an etching disc carrying table for cleaning silicon carbide, which comprises a bearing disc, a placing middle hole is formed in the center of the bearing disc, an edge clamping vertical roller is arranged on the surface of the bearing disc, an inner screw cylinder is inserted and assembled in the edge clamping vertical roller in a penetrating manner, and a limiting bottom ring is integrally arranged at the bottom of the inner screw cylinder. The limiting bottom ring is clamped in the upper surface of the bearing disc, an inner lock pin is in threaded connection with the interior of the inner screw barrel, a fastening bottom ring is integrally arranged at the bottom of the inner lock pin and clamped in the center of the interior of the bearing disc, a supporting bottom sleeve is assembled at the bottom of the bearing disc in a supporting mode, and a supporting inner ball is clamped in the lower side of the supporting bottom sleeve. And a supporting middle column is supported at the bottom of the supporting inner ball. According to the utility model, the silicon carbide etching disc can be conveniently and quickly placed and blocked, the clamping side can be conveniently cleaned, and meanwhile, the fine-tuning rotation operation is also convenient, so that the cleaning operation is more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning carriers, in particular to an etching disc carrier for cleaning silicon carbide. Background Art

[0002] Etching technology is a technology commonly used in the semiconductor field. It combines chemical methods with physical methods to remove unnecessary film layers on the wafer surface, so as to complete the correct replication of the mask pattern of the photolithography process. Generally, a silicon carbide carrier is used as an etching disk. During the etching process, due to the physical ion bombardment and gas inductively coupled glow discharge, it is easy to produce a variety of particulate impurities during the etching process. These impurities adhere to the silicon carbide surface, which will contaminate the wafer on the etching disk and affect the cleanliness of the etching chamber. Therefore, after use, it needs to be placed and cleaned with the assistance of a corresponding cleaning stage;

[0003] In this regard, China's patent application number: CN202322156066.7 discloses an etching disk carrier for cleaning silicon carbide, including a base, a through hole is opened on the base and an adjustment component is arranged, a support foot is fixedly arranged at the bottom of the base, a support component is arranged above the adjustment component, and the adjustment component includes a drive motor, a drive motor is fixedly installed on the lower surface of the base, the output end of the drive motor is connected to a rotating shaft, one end of the rotating shaft is fixedly connected to a driving gear, and the driving gear is meshed with a driven gear;

[0004] However, most of the existing etching disk carriers for cleaning silicon carbide are fixed by clamping the side, which easily causes the clamping to be not cleaned thoroughly, and it is inconvenient to assist the side of the silicon carbide etching disk and fine-tune the rotation as needed, which affects the cleaning efficiency;

[0005] Therefore, in order to solve the above problems, a cleaning silicon carbide etching disk carrier is proposed. Utility Model Content

[0006] The purpose of the utility model is to provide an etching disk carrier for cleaning silicon carbide, so as to solve the problem mentioned in the above background technology that most of the existing etching disk carriers for cleaning silicon carbide are placed and fixed by side clamping, which easily leads to poor cleaning at the clamping location, and it is inconvenient to assist the resistance and fine-tune the rotation of the side of the silicon carbide etching disk as needed, thus affecting the cleaning efficiency.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a cleaning silicon carbide etching disk carrier, comprising a carrying disk, a placing center hole is opened in the center of the carrying disk, a clamping edge vertical roller is arranged on the surface of the carrying disk, an inner screw barrel is inserted and installed inside the clamping edge vertical roller, a limiting bottom ring is integrally arranged at the bottom of the inner screw barrel, and the limiting bottom ring is clamped inside the upper surface of the carrying disk, an inner locking pin is threadedly connected to the inner screw barrel, a fastening bottom ring is integrally arranged at the bottom of the inner locking pin, and the fastening bottom ring is clamped in the center of the carrying disk, the bottom support of the carrying disk is equipped with a supporting bottom sleeve, a supporting inner ball is clamped inside the lower side of the supporting bottom sleeve, and the bottom of the supporting inner ball is supported by a supporting middle column.

[0008] Preferably, a collecting dish is installed at the bottom of the supporting middle column, and the supporting middle column is located in the center of the collecting dish. A slag collecting cavity is opened inside the collecting dish, and the inner wall of the slag collecting cavity is arc-shaped.

[0009] Preferably, an inner bearing is arranged between the card edge vertical roller and the inner screw barrel, the inner ring of the inner bearing is fixed to the outer wall of the inner screw barrel, the outer ring of the inner bearing is fixed to the inner wall of the card edge vertical roller, the surface of the carrying plate is provided with a fine-tuning slideway corresponding to the card edge vertical roller and the limiting bottom ring, the top of the inner screw barrel is welded with a limiting upper ring, and the middle part of the limiting upper ring is threadedly sleeved on the surface of the inner locking pin, the surface of the limiting upper ring is glued with an auxiliary sleeve, and the limiting upper ring and the auxiliary sleeve are in an outer octagonal shape.

[0010] Preferably, a fine-tuning slide rail corresponding to the inner screw barrel is opened inside the carrier plate, and the fine-tuning slide rail is located above the fastening bottom ring. An auxiliary inner cavity corresponding to the fastening bottom ring is opened in the middle of the carrier plate, and the auxiliary inner cavity is connected to the fine-tuning slide rail. A frosted pad sleeve is fixed on the outer wall of the fastening bottom ring.

[0011] Preferably, a fastening nut is provided on the upper threaded sleeve of the inner locking pin, an upper hinge seat is integrally provided on the top end of the inner locking pin, and a torsion strip is hinged inside the upper hinge seat via a hinge pin.

[0012] Preferably, the three groups of the edge-carding vertical rollers are arranged on the surface of the carrying plate, and equidistant auxiliary lines are engraved between two adjacent groups of edge-carding vertical rollers, and the auxiliary lines are arc-shaped. An outer cushion sleeve is fixed on the surface of the edge-carding vertical roller, and equidistant scale lines are arranged between the two groups of the auxiliary lines.

[0013] Preferably, an auxiliary rotation groove corresponding to the supporting center column is opened at the bottom of the supporting bottom sleeve, and the auxiliary rotation groove is narrow inside and wide outside, and inner gaskets are fixed between the supporting bottom sleeve and the supporting inner ball and on the inner wall of the auxiliary rotation groove.

[0014] Preferably, an inner abutment plate is disposed on the outer wall of the supporting inner ball, a locking pin rod is mounted on the back of the inner abutment plate, the locking pin rod is inserted through the side wall of the supporting bottom sleeve, and the locking pin rod is threadedly connected to the side wall of the supporting bottom sleeve.

[0015] Compared with the prior art, the utility model has the following beneficial effects: the utility model facilitates the rapid placement of the baffle on the silicon carbide etching disk, facilitates the cleaning operation of the clamping side, and also facilitates the fine-tuning and rotating operation, making the cleaning operation more convenient;

[0016] 1. The utility model is provided with a vertical edge-clamping roller. When the inner screw barrel and the inner locking pin are assembled, the inner locking pin and the inner screw barrel can be tightened to make the tightening bottom ring cooperate with the limiting bottom ring to limit and tighten it, so that the vertical edge-clamping roller blocks the side of the silicon carbide etching disk. With the cooperation of three groups of vertical edge-clamping rollers, it is convenient to place it stably. Furthermore, when cleaning is convenient, the vertical edge-clamping roller and the inner screw barrel can be used for auxiliary fine-tuning rotation, so that the side of the barrier is easy to expose and clean. Through this design, the convenience and practicality of cleaning the silicon carbide etching disk carrier are improved.

[0017] 2. The utility model is provided with a supporting bottom sleeve, which facilitates the multi-directional tilt fine adjustment of the carrier plate under the support assembly of the supporting inner ball and the supporting middle column, making the cleaning operation more convenient. Through this design, the convenience and practicality of cleaning the silicon carbide etching plate carrier are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of a front cross-section of the structure of the utility model;

[0019] Figure 2 It is a schematic top view of the structure of the utility model;

[0020] Figure 3 For this utility model Figure 1 A schematic diagram of the structure enlargement in the middle;

[0021] Figure 4 For this utility model Figure 1 A magnified schematic diagram of the structure at B in the middle;

[0022] Figure 5 For this utility model Figure 2 A magnified schematic diagram of the structure at C in the middle;

[0023] In the figure: 100, carrier plate; 101, fine-tuning slideway; 102, fine-tuning slide rail; 110, placement center hole; 200, card edge vertical roller; 201, inner bearing; 210, inner screw barrel; 211, limiting bottom ring; 212, limiting upper ring; 213, auxiliary outer sleeve; 220, inner locking pin; 221, tightening bottom ring; 222, auxiliary inner cavity; 223, frosted gasket; 224, tightening nut; 225, upper hinge seat; 226, hinge pin; 227, twist bar; 230, outer gasket; 240, auxiliary line; 241, scale line; 300, support bottom sleeve; 310, support inner ball; 311, inner abutment plate; 312, locking pin rod; 313, inner gasket; 320, support center column; 321, auxiliary rotating trough; 330, collecting dish; 331, slag collecting cavity. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-5 , an embodiment provided by the utility model:

[0026] A cleaning silicon carbide etching disk carrier comprises a carrier plate 100, a placement middle hole 110 is opened in the center of the carrier plate 100, a clamping edge vertical roller 200 is arranged on the surface of the carrier plate 100, an inner screw barrel 210 is inserted and installed inside the clamping edge vertical roller 200, a limiting bottom ring 211 is integrally arranged at the bottom of the inner screw barrel 210, and the limiting bottom ring 211 is clamped inside the upper surface of the carrier plate 100, an inner locking pin 220 is threadedly connected inside the inner screw barrel 210, a fastening bottom ring 221 is integrally arranged at the bottom of the inner locking pin 220, and the fastening bottom ring 221 is clamped in the center of the inner part of the carrier plate 100, a supporting bottom sleeve 300 is assembled at the bottom of the carrier plate 100, a supporting inner ball 310 is clamped inside the lower side of the supporting bottom sleeve 300, and a supporting middle column 320 is supported at the bottom of the supporting inner ball 310;

[0027] Furthermore, a collecting dish 330 is installed at the bottom of the supporting middle column 320, and the supporting middle column 320 is located in the middle of the collecting dish 330. A slag collecting cavity 331 is opened inside the collecting dish 330, and the inner wall of the slag collecting cavity 331 is arc-shaped. This design facilitates the centralized collection of the removed waste slag for subsequent processing.

[0028] Furthermore, an inner bearing 201 is arranged between the edge card vertical roller 200 and the inner screw barrel 210, the inner ring of the inner bearing 201 is fixed to the outer wall of the inner screw barrel 210, and the outer ring of the inner bearing 201 is fixed to the inner wall of the edge card vertical roller 200, and a fine-tuning slideway 101 corresponding to the edge card vertical roller 200 and the limiting bottom ring 211 is opened on the surface of the carrier plate 100, a limiting upper ring 212 is welded on the top of the inner screw barrel 210, and the middle part of the limiting upper ring 212 is threadedly sleeved on the surface of the inner lock pin 220, and an auxiliary outer sleeve 213 is glued on the surface of the limiting upper ring 212, and the limiting upper ring 212 and the auxiliary outer sleeve 213 are in an outer octagonal shape. Through this design, it is convenient to assemble the edge card vertical roller 200 and the inner screw barrel 210, and it is also convenient to slide and limit the inner screw barrel 210;

[0029] Furthermore, a fine-tuning slide rail 102 corresponding to the inner screw barrel 210 is provided inside the carrier plate 100, and the fine-tuning slide rail 102 is located above the fastening bottom ring 221. An auxiliary inner cavity 222 corresponding to the fastening bottom ring 221 is provided in the middle of the carrier plate 100, and the auxiliary inner cavity 222 is communicated with the fine-tuning slide rail 102. A frosted gasket sleeve 223 is fixedly sleeved on the outer wall of the fastening bottom ring 221. This design facilitates the limiting and sliding operations of the fastening bottom ring 221, making subsequent use more convenient.

[0030] Furthermore, a fastening nut 224 is provided on the threaded sleeve of the upper part of the inner lock pin 220, and an upper hinge seat 225 is integrally provided on the top of the inner lock pin 220. A twist bar 227 is hinged inside the upper hinge seat 225 through a hinge pin 226. This design facilitates the limited tightening and twisting operation of the inner lock pin 220.

[0031] Furthermore, three groups of edge-carding vertical rollers 200 are arranged on the surface of the carrier plate 100, and equally spaced auxiliary lines 240 are engraved between two adjacent groups of edge-carding vertical rollers 200, and the auxiliary lines 240 are in an arc shape. An outer cushion sleeve 230 is fixed on the surface of the edge-carding vertical roller 200, and equally spaced scale lines 241 are arranged between the two groups of auxiliary lines 240. Through this design, it is convenient to fix the auxiliary limit of the engraved plate and fine-tune the card setting, making the placement operation more convenient;

[0032] Furthermore, an auxiliary rotation groove 321 corresponding to the supporting middle column 320 is opened at the bottom of the supporting bottom sleeve 300, and the auxiliary rotation groove 321 is narrow inside and wide outside. An inner gasket 313 is fixed between the supporting bottom sleeve 300 and the supporting inner ball 310 and on the inner wall of the auxiliary rotation groove 321. Through this design, the relative assembly of the supporting bottom sleeve 300 and the supporting middle column 320 is facilitated, and the auxiliary fine-tuning rotation is facilitated;

[0033] Furthermore, an inner abutment plate 311 is provided on the outer wall of the supporting inner ball 310, and a locking pin rod 312 is assembled on the back of the inner abutment plate 311. The locking pin rod 312 is inserted through the side wall of the supporting bottom sleeve 300, and the locking pin rod 312 is threadedly connected to the side wall of the supporting bottom sleeve 300. Through this design, it is convenient to limit and tighten the supporting inner ball 310 and the supporting bottom sleeve 300, making the operation more convenient.

[0034] Working principle: During assembly and use, the placement of the middle hole 110 facilitates the placement of the bottom of the silicon carbide etching disk. Then, with the assistance of the auxiliary line 240 and the scale line 241, it is convenient to assist the fine adjustment and sliding of the three sets of edge-locking vertical rollers 200. Under the cooperation of the inner screw barrel 210 and the limit bottom ring 211, it slides to a suitable position. By twisting the torsion bar 227, the inner locking pin 220 is driven to rotate under the cooperation of the upper hinge seat 225. During operation, pinch the limit upper ring 212 and the auxiliary outer sleeve 213 with one hand, and The inner locking pin 220 is tightened by twisting the inner screw barrel 210, so that the fastening bottom ring 221 at the bottom of the inner locking pin 220 contacts the top wall of the auxiliary inner cavity 222 with the cooperation of the frosted washer 223, that is, the fastening bottom ring 221 and the limiting bottom ring 211 are fixed to the inside of the carrier plate 100, so as to facilitate the positioning of the card edge vertical roller 200 through the inner screw barrel 210 and the inner locking pin 220, and at the same time, the fastening nut 224 is tightened to facilitate the limiting of the inner screw barrel 210 and the inner locking pin 220, so as to facilitate the positioning of the card edge vertical roller 200. The silicon carbide etching disk is placed in a limited position. Under the isolation of the three sets of edge clamping vertical rollers 200, the silicon carbide etching disk is convenient for relative clamping and tightening. At the same time, it is not easy to cause side pinching and scratching under the protection of the outer cushion sleeve 230. Later, during operation, the support of the inner ball 310 and the support middle column 320 can be used to assist the rotation of the support bottom sleeve 300. After rotating to a suitable position, the inner plate 311 is driven to contact and limit the outer wall of the inner ball 310 by tightening the locking pin rod 312, so as to facilitate the support bottom The locking of the sleeve 300 makes the subsequent cleaning operation more convenient and easy to fine-tune as needed. The waste residue after cleaning can be collected and subsequently processed through the cooperation of the collection dish 330 and the residue collection cavity 331. During the cleaning operation, the assembly of the inner bearing 201 facilitates the relative rotation of the auxiliary edge clamping vertical roller 200 after the positioning clamping, so as to facilitate the slight rotation of the auxiliary engraved plate to expose the side part of the clamping partition, facilitate the cleaning of the side, and make the cleaning operation cleaner and more thorough. The operation ends here.

[0035] The above description is only a preferred embodiment of the utility model and does not limit the utility model in any form. Any ordinary technician in the industry can smoothly implement the utility model as shown in the drawings of the specification and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the utility model using the technical content disclosed above are all equivalent embodiments of the utility model. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the utility model are still within the protection scope of the technical solution of the utility model.

Claims

1. An etching disc carrier for cleaning silicon carbide, comprising a carrier disc (100), wherein a placement hole (110) is provided at the center of the carrier disc (100), characterized in that: The surface of the carrier plate (100) is provided with a vertical roller (200) for clamping the edge, and an inner screw barrel (210) is inserted and installed inside the vertical roller (200), and a limiting bottom ring (211) is integrally provided at the bottom of the inner screw barrel (210), and the limiting bottom ring (211) is clamped inside the upper surface of the carrier plate (100), and an inner locking pin (220) is threadedly connected inside the inner screw barrel (210), and a fastening bottom ring (221) is integrally provided at the bottom of the inner locking pin (220), and the fastening bottom ring (221) is clamped in the center of the carrier plate (100), and the bottom support of the carrier plate (100) is equipped with a supporting bottom sleeve (300), and a supporting inner ball (310) is clamped inside the lower side of the supporting bottom sleeve (300), and the bottom of the supporting inner ball (310) is supported by a supporting middle column (320).

2. The etching disk carrier for cleaning silicon carbide according to claim 1, characterized in that: A collecting dish (330) is mounted at the bottom of the supporting middle column (320), and the supporting middle column (320) is located in the middle of the collecting dish (330). A slag collecting cavity (331) is provided inside the collecting dish (330), and the inner wall of the slag collecting cavity (331) is arc-shaped.

3. The etching disk carrier for cleaning silicon carbide according to claim 1, characterized in that: An inner bearing (201) is arranged between the edge-carding vertical roller (200) and the inner screw barrel (210); the inner ring of the inner bearing (201) is fixed to the outer wall of the inner screw barrel (210); the outer ring of the inner bearing (201) is fixed to the inner wall of the edge-carding vertical roller (200); a fine-tuning slideway (101) corresponding to the edge-carding vertical roller (200) and the limiting bottom ring (211) is provided on the surface of the carrier plate (100); a limiting upper ring (212) is welded to the top of the inner screw barrel (210); a threaded sleeve in the middle of the limiting upper ring (212) is arranged on the surface of the inner lock pin (220); an auxiliary outer sleeve (213) is glued to the surface of the limiting upper ring (212); and the limiting upper ring (212) and the auxiliary outer sleeve (213) are in an outer octagonal shape.

4. The etching disk carrier for cleaning silicon carbide according to claim 1, characterized in that: The interior of the carrier plate (100) is provided with a fine-tuning slide rail (102) corresponding to the inner screw barrel (210), and the fine-tuning slide rail (102) is located above the fastening bottom ring (221). The middle of the carrier plate (100) is provided with an auxiliary inner cavity (222) corresponding to the fastening bottom ring (221), and the auxiliary inner cavity (222) is connected to the fine-tuning slide rail (102), and the outer wall of the fastening bottom ring (221) is sleeved and fixed with a frosted pad sleeve (223).

5. The etching disk carrier for cleaning silicon carbide according to claim 1, characterized in that: A fastening nut (224) is threadedly sleeved on the upper part of the inner locking pin (220), an upper hinge seat (225) is integrally provided at the top end of the inner locking pin (220), and a torsion bar (227) is hinged inside the upper hinge seat (225) via a hinge pin (226).

6. The etching disk carrier for cleaning silicon carbide according to claim 1, characterized in that: Three groups of the edge-carding vertical rollers (200) are arranged on the surface of the carrier plate (100), and equally spaced auxiliary lines (240) are engraved between two adjacent groups of edge-carding vertical rollers (200), and the auxiliary lines (240) are in the shape of an arc. An outer cushion sleeve (230) is fixedly provided on the surface of the edge-carding vertical rollers (200), and equally spaced scale lines (241) are arranged between the two groups of the auxiliary lines (240).

7. The etching disk carrier for cleaning silicon carbide according to claim 1, characterized in that: The bottom of the support bottom sleeve (300) is provided with an auxiliary rotation groove (321) corresponding to the support middle column (320), and the auxiliary rotation groove (321) is narrow inside and wide outside. An inner gasket (313) is fixed between the support bottom sleeve (300) and the support inner ball (310) and on the inner wall of the auxiliary rotation groove (321).

8. The etching disk carrier for cleaning silicon carbide according to claim 1, characterized in that: An inner abutment plate (311) is disposed on the outer wall of the supporting inner ball (310), and a locking pin rod (312) is mounted on the back of the inner abutment plate (311). The locking pin rod (312) penetrates and is inserted into the side wall of the supporting bottom sleeve (300), and the locking pin rod (312) is threadedly connected to the side wall of the supporting bottom sleeve (300).

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