Mechanical arm tail end paw, tail end tool and carrying robot

Abstract

The utility model provides a mechanical arm tail end paw, a tail end tool and a transfer robot, the mechanical arm tail end paw comprises a rotating mechanism and an executing mechanism which are connected with each other, and the rotating mechanism is used for driving the executing mechanism to rotate; and the executing mechanism is used for clamping workpieces. The mechanical arm tail end tool comprises a mechanical arm tail end gripper, a visual device and a workpiece detection device. The end, opposite to the end connected with the executing mechanism, of the mechanical arm tail end gripper is connected with the mechanical arm through a mounting plate. The visual device is arranged on the mounting plate, and the workpiece detection device is arranged on a side plate of a gripper at the tail end of the mechanical arm. The carrying robot comprises a mechanical arm tail end tool, a mechanical arm, an automatic guided vehicle and a storage bin. The mechanical arm tail end tool is fixedly connected to the tail end of the mechanical arm, the mechanical arm is fixedly arranged on the automated guided vehicle, and a storage bin is arranged on the automated guided vehicle and used for storing workpieces to be carried; and the mechanical arm is matched with the mechanical arm tail end tool to put the workpiece into the storage bin or take the workpiece out of the storage bin. The material taking and placing device can meet the requirements of taking and placing materials on various machine tables, the working efficiency and the operation frequency are remarkably improved, and the comprehensive cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a mechanical arm end gripper, an end tooling and a handling robot. Background Art

[0002] With the rapid development of science and technology, semiconductor chips have become one of the core components of modern electronic products. In semiconductor manufacturing plants, wafers, as the basis for manufacturing chips and integrated circuits, usually need to be efficiently and accurately transferred between different process modules of each production line. In the prior art, a combination of AGV and robots is usually used to achieve the transmission and handling of wafers. However, due to the complexity and variety of machines that can be docked with the combination of AGV and robots, it is urgent to develop a robot arm end gripper and end tooling that can flexibly adapt to various machines. Summary of the invention

[0003] The utility model provides a mechanical arm end gripper, end tooling and a handling robot, which are used to solve the defect that the mechanical arm end tooling in the prior art cannot adapt to various docking machines, and realize flexible application of different posture positioning methods for various machines.

[0004] The utility model provides a mechanical arm end gripper, which is installed at the end of the mechanical arm and comprises a rotating mechanism and an executing mechanism. The rotating mechanism is connected with the executing mechanism and is used for driving the executing mechanism to rotate; the executing mechanism is used for clamping a workpiece.

[0005] According to the robotic arm end gripper provided by the utility model, the robotic arm end gripper also includes a gripper body, the rotating mechanism is arranged on the gripper body, the actuator is arranged at the end of the gripper body, and the opposite end of the gripper body is connected to the robotic arm.

[0006] According to the robotic arm end gripper provided by the utility model, the rotating mechanism includes a rotating motor, a first gear and a second gear, the output shaft of the rotating motor is connected to the first gear, the first gear is connected to the second gear, and the second gear is connected to the actuator; the rotating motor drives the actuator to rotate through the first gear and the second gear.

[0007] Furthermore, the first gear and the second gear are connected via a synchronous belt.

[0008] Furthermore, one or more driven wheels are arranged between the first gear and the second gear, the first gear is meshed with the driven wheels, and the driven wheels are meshed with the second gear.

[0009] According to the end gripper of the robotic arm provided by the utility model, the actuator includes an electric gripper, a left-hand component and a right-hand component; the first slider of the electric gripper is connected to the left-hand component, and the second slider of the electric gripper is connected to the right-hand component; the first slider and the second slider are arranged in parallel, and the first slider and the second slider can move towards each other or in the opposite direction.

[0010] Further, the left-hand component includes a left connecting rod, a left connecting block and a left finger, wherein one end of the left connecting rod is connected to the first slider of the electric claw, and the other end thereof is connected to the left finger through the left connecting block; the right-hand component includes a right connecting rod, a right connecting block and a right finger, wherein one end of the right connecting rod is connected to the second slider of the electric claw, and the other end thereof is connected to the right finger through the right connecting block.

[0011] The utility model also provides a tooling at the end of a robot arm, which includes the robot arm end gripper, visual device and workpiece detection device as described in any of the above items, wherein the end of the robot arm gripper connected to the opposite end of one end of the actuator is connected to the robot arm through a mounting plate; the visual device is arranged on the mounting plate, and the workpiece detection device is close to the end of the robot arm gripper connected to the opposite end of one end of the actuator and is arranged on the side plate of the robot arm gripper.

[0012] The utility model also provides a handling robot, which includes the above-mentioned mechanical arm end tooling, a mechanical arm, an automatic guided vehicle and a storage bin; the mechanical arm end tooling is fixedly connected to the end of the mechanical arm, the mechanical arm is fixedly arranged on the automatic guided vehicle, the automatic guided vehicle is provided with the storage bin, and the storage bin is used to store workpieces to be handled; the mechanical arm cooperates with the mechanical arm end tooling to put the workpiece into the storage bin, or take it out from the storage bin.

[0013] According to the transport robot provided by the utility model, an air filter is arranged on the top of the storage bin, the air outlet of the air filter is connected with the internal space of the storage bin, and the air filter is used to pass the filtered clean air into the storage bin so as to blow the polluted air out of the storage bin.

[0014] The utility model provides a manipulator end gripper, which is provided with a rotating mechanism and an actuator. The rotating mechanism drives the actuator to rotate, and the actuator can flexibly clamp the workpiece to meet the needs of taking and placing materials on the machine in various complex working conditions, and can significantly improve work efficiency and operation frequency, and reduce comprehensive costs. The utility model provides a manipulator end tooling in which a manipulator end gripper is provided at the end of the manipulator, which can flexibly clamp the workpiece, improve work efficiency, and reduce comprehensive costs. The utility model provides a handling robot in which a manipulator end tooling, a manipulator arm, an automatic guided vehicle, and a storage bin are provided, and the manipulator end tooling is connected to the manipulator arm, which can conveniently transport workpieces, improve work efficiency, and reduce comprehensive costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technical workers in this field, other drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 This is a schematic diagram of the overall structure of the gripper at the end of the mechanical arm provided by the utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of the gripper at the end of the mechanical arm provided by the utility model;

[0018] Figure 3 It is a structural schematic diagram of the left finger in the end gripper of the mechanical arm provided by the utility model;

[0019] Figure 4 It is a schematic diagram of the overall structure of the end tooling of the mechanical arm provided by the utility model;

[0020] Figure 5 It is a schematic diagram of the overall structure of the transport robot provided by the utility model.

[0021] Reference numerals:

[0022] 1. Rotating mechanism; 11. Rotating motor; 12. First gear; 13. Second gear; 14. Driven wheel;

[0023] 2. Executive body;

[0024] 21. Electric claws;

[0025] 22, left hand assembly; 221, left connecting rod; 222, left connecting block; 223, left finger; 2231, base; 2232, first side plate; 2233, second side plate; 2234, third side plate; 2235, fourth side plate; 2236, first through slot; 2237, second through slot; 2238, third through slot; 2239, U-shaped slot;

[0026] 23. right hand assembly; 231. right connecting rod; 232. right connecting block; 233. right finger;

[0027] 3. Claw body;

[0028] 10. Gripper at the end of the robot arm; 20. Visual device; 30. Workpiece detection device;

[0029] 100. End tooling of the robotic arm; 200. Robotic arm; 300. Storage bin; 400. Automatic guided vehicle. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] In the prior art, a combination of AGV and robots is usually used to transport wafers, and after transporting them to the target location, they need to be docked with the corresponding machine. Generally, one machine corresponds to one robot. Since the posture of the traditional end tooling of the robot arm is fixed and single, it cannot meet the different posture positioning requirements of various machines. This leads to a high waste of comprehensive costs and reduced work efficiency during the wafer transfer and transportation process. Therefore, the development of a robot end tooling that can flexibly dock with various machines has become a problem that needs to be overcome urgently.

[0032] Combine the following Figure 1-Figure 5 The utility model describes a mechanical arm end gripper, an end tooling and a handling robot.

[0033] like Figure 1 As shown, the end gripper of the robot arm provided by the utility model includes a rotating mechanism 1 and an actuator 2, wherein the rotating mechanism 1 is connected to the actuator 2 to drive the actuator 2 to rotate; the actuator 2 is used to clamp the workpiece. The actuator 2 can rotate 0° to 360° under the drive of the rotating mechanism 1 to flexibly pick up and place the clamped workpiece, meeting the requirements of various machine positioning methods with different postures.

[0034] In this embodiment, the robotic arm end gripper provided by the utility model also includes a gripper body 3, wherein a rotating mechanism 1 is arranged on the gripper body 3, an actuator 2 is arranged at the end of the gripper body 3, and the rotating mechanism 1 is connected to the actuator 2 to drive the actuator 2 to rotate 0° to 360° in a plane parallel to the end face of the gripper body 3 connected to the driving actuator 2.

[0035] Among them, the rotating mechanism 1 and the actuator 2 can be arranged on the same end surface of the gripper body 3, specifically on the bottom surface of the gripper body 3, which can greatly save the space required for the end gripper to occupy, thereby facilitating the end gripper to enter and exit the machine to clamp the workpiece.

[0036] In a specific embodiment, Figure 2 As shown, the rotating mechanism 1 includes a rotating motor 11, a first gear 12 and a second gear 13. The output shaft of the rotating motor 11 is connected to the first gear 12, the first gear 12 is connected to the second gear 13, and the second gear 13 is connected to the actuator 2. The rotating motor 11 drives the actuator 2 to rotate through the first gear 12 and the second gear 13.

[0037] Specifically, the first gear 12 and the second gear 13 can be connected by a synchronous belt. The first gear 12 and the second gear 13 can also be connected by a screw, a worm or a transmission shaft. Of course, more than one driven wheel 14 can be set according to the distance requirement between the rotating motor 11 and the actuator 2. The first gear 12 is meshed with the driven wheel 14, and the driven wheel 14 is meshed with the second gear 13. Compared with the synchronous belt, the driven wheel 14 has the characteristics of thin thickness and small space occupation.

[0038] It should be noted that the rotating mechanism 1 can also directly drive the actuator 2 via the first gear 12 .

[0039] In another specific embodiment, the actuator 2 includes an electric claw 21, a left-hand component 22, and a right-hand component 23. The first slider of the electric claw 21 is connected to the left-hand component 22, and the second slider is connected to the right-hand component 23; the first slider and the second slider are arranged in parallel, and the two can move toward each other or move in the opposite direction. When the two move toward each other, the left-hand component 22 and the right-hand component 23 are closed, and the workpiece can be grasped; when the two move in the opposite direction, the left-hand component 22 and the right-hand component 23 are opened, and the workpiece can be placed.

[0040] It should be noted that the electric claw 21 adopts an existing device. After power is turned on, the first slider and the second slider on the electric claw 21 can move toward each other or move in the opposite direction. When moving toward each other, if the torque applied to the first slider and the second slider is within a preset torque range, the movement stops.

[0041] Specifically, the left hand assembly 22 and the right hand assembly adopt the same structure. The left hand assembly 22 includes a left connecting rod 221, a left connecting block 222 and a left finger 223, wherein one end of the left connecting rod 221 is connected to the first slider of the electric claw 21, and the other end thereof is connected to the left finger 223 through the left connecting block 222. The right hand assembly 23 includes a right connecting rod 231, a right connecting block 232 and a right finger 233, wherein one end of the right connecting rod 231 is connected to the second slider of the electric claw 21, and the other end thereof is connected to the right finger 233 through the right connecting block 232.

[0042] In this embodiment, both the left connecting block 222 and the right connecting block 232 can be L-shaped blocks, one end of the L-shaped block is connected to one end of the left connecting rod 221 or the right connecting rod 231, and the other end and the corner end are connected to the left finger 223 or the right finger 233, so that the left finger 223 is parallel to the left connecting rod 221, and the right finger 233 is parallel to the right connecting rod 231.

[0043] The left finger 223 and the right finger 233 have the same structure, and the left finger 223 is taken as an example for detailed description below.

[0044] Among them, Figure 3 As shown, the left finger 223 includes a base 2231 and a first side plate 2232, a second side plate 2233, a third side plate 2234 and a fourth side plate 2235 arranged on the base 2231. The first side plate 2232, the second side plate 2233, the third side plate 2234 and the fourth side plate 2235 are arranged in parallel and extend in a direction away from the base 2231. Along the length direction of the first side plate 2232, a first through slot 2236 is provided between the first side plate 2232 and the second side plate 2233, a second through slot 2237 is provided between the second side plate 2233 and the third side plate 2234, and a third through slot 2238 is provided between the third side plate 2234 and the fourth side plate 2235. Along the direction away from the base 2231 , a height difference is set between the first through groove 2236 and the second through groove 2237 , and a height difference is set between the second through groove 2237 and the third through groove 2238 , so that a stepped structure is formed among the first through groove 2236 , the second through groove 2237 and the third through groove 2238 .

[0045] Along the direction from the second side plate 2233 to the fourth side plate 2235, a fourth through slot 2239 is formed on the second side plate 2233, the third side plate 2234 and the fourth side plate 2235. The fourth through slot 2239 may be a U-shaped slot.

[0046] When the left finger 223 and the right finger 233 cooperate to clamp the wafer holding basket, assuming that the distance between the first through slot 2236 in the left finger 223 and the first through slot 2236 in the right finger 233 is the first distance, the distance between the second through slot 2237 in the left finger 223 and the second through slot 2237 in the right finger 233 is the second distance, and the distance between the third through slot 2238 in the left finger 223 and the third through slot 2238 in the right finger 233 is the third distance, then the first distance is greater than the second distance, and the second distance is greater than the third distance. The structural setting of the left finger 223 and the right finger 233 can make up for the problem that the stroke of the left connecting rod 221 and the right connecting rod 231 is not long enough, so as to facilitate the grasping of the workpiece.

[0047] In the above embodiment, the left finger 223 and the right finger 233 may be made of non-slip rubber to achieve the purpose of flexible contact to prevent damage to the workpiece.

[0048] like Figure 4 As shown, based on the robot arm end gripper 10 provided by the utility model, the utility model also provides a robot arm end tooling, which includes the robot arm end gripper 10, a visual device 20 and a workpiece detection device 30, wherein the end of the robot arm end gripper 10 connected to the actuator 2 is connected to the robot arm through a mounting plate. Specifically, the robot arm can be a six-axis robot arm. The visual device 20 can be set on the mounting plate to assist the robot arm in finding the docking machine. The workpiece detection device 30 can be set on the side panel of the robot arm end gripper 10 near the end of the robot arm end gripper 10 connected to the actuator 2, and is used to assist the robot arm in detecting whether there is a workpiece to be clamped on the machine.

[0049] Specifically, the visual device 20 can be a 3D camera or a binocular camera, which has an infrared function and can be seen at night, so that the operator can see whether the target object is caught. The workpiece detection device 30 can be a laser, which uses the laser to detect whether there is a workpiece to be clamped on the machine.

[0050] like Figure 5 As shown, based on the robot arm end tooling 100 provided by the utility model, the utility model also provides a handling robot, which includes the robot arm end tooling 100, the robot arm 200, the storage bin 300 and the automatic guided vehicle 400. Among them, the robot arm end tooling 100 is fixedly connected to the end of the robot arm 200, the robot arm 200 is fixedly set on the automatic guided vehicle 400, the storage bin 300 is set on the automatic guided vehicle 400, and the storage bin 300 is used to store the workpiece to be transported. The workpiece to be transported can be a wafer placed in a wafer holding basket. The robot arm 200 cooperates with the robot arm end tooling 100 to conveniently put the wafer holding basket into the storage bin 300, and also to conveniently take out the wafer holding basket from the storage bin 300.

[0051] In this embodiment, an air filter can also be set on the top of the storage bin 300. The air filter is used to pass filtered clean air into the storage bin 300 and blow out polluted air from the storage bin 300, so that the storage bin 300 becomes a clean bin to prevent the wafers in the storage bin 300 from being contaminated during transportation or static placement.

[0052] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technical workers in this field can understand and implement it without paying creative labor.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technical workers in the field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A gripper at the end of a robotic arm, characterized in that: Installed at the end of the mechanical arm, it includes a rotating mechanism and an actuator, the rotating mechanism is connected to the actuator and is used to drive the actuator to rotate; the actuator is used to clamp the workpiece; The rotating mechanism includes a rotating motor, a first gear and a second gear. The output shaft of the rotating motor is connected to the first gear, the first gear is connected to the second gear, and the second gear is connected to the actuator. The rotating motor drives the actuator to rotate through the first gear and the second gear.

2. The end gripper of the robot arm according to claim 1, characterized in that: The gripper at the end of the robotic arm also includes a gripper body, the rotating mechanism is arranged on the gripper body, the actuator is arranged at the end of the gripper body, and the opposite end of the end of the gripper body is connected to the robotic arm.

3. The end gripper of the robot arm according to claim 1, characterized in that: The first gear and the second gear are connected by a synchronous belt.

4. The robot arm end gripper according to claim 1, characterized in that: One or more driven wheels are arranged between the first gear and the second gear, the first gear is meshed with the driven wheels, and the driven wheels are meshed with the second gear.

5. The robot arm end gripper according to claim 1 or 2, characterized in that: The actuator includes an electric claw, a left-hand component and a right-hand component; the first slider of the electric claw is connected to the left-hand component, and the second slider of the electric claw is connected to the right-hand component; the first slider and the second slider are arranged in parallel, and the first slider and the second slider can move towards each other or in the opposite direction.

6. The end gripper of the robot arm according to claim 5, characterized in that: The left-hand component includes a left connecting rod, a left connecting block and a left finger, wherein one end of the left connecting rod is connected to the first slider of the electric claw, and the other end thereof is connected to the left finger through the left connecting block; the right-hand component includes a right connecting rod, a right connecting block and a right finger, wherein one end of the right connecting rod is connected to the second slider of the electric claw, and the other end thereof is connected to the right finger through the right connecting block.

7. A tooling at the end of a robot arm, characterized in that: It comprises a robot arm end gripper, a visual device and a workpiece detection device as described in any one of claims 1 to 6, wherein the end of the robot arm end gripper connected to the actuator is connected to the robot arm through a mounting plate; the visual device is arranged on the mounting plate, and the workpiece detection device is close to the end of the robot arm end gripper connected to the actuator end and is arranged on the side plate of the robot arm end gripper.

8. A transport robot, characterized in that: It comprises the robot arm end tooling, robot arm, automatic guided vehicle and storage bin as described in claim 7; the robot arm end tooling is fixedly connected to the end of the robot arm, the robot arm is fixedly arranged on the automatic guided vehicle, the automatic guided vehicle is provided with the storage bin, and the storage bin is used to store workpieces to be transported; the robot arm cooperates with the robot arm end tooling to put the workpiece into the storage bin, or take it out from the storage bin.

9. The handling robot according to claim 8, characterized in that: An air filter is arranged on the top of the storage bin, and an air outlet of the air filter is connected to the internal space of the storage bin. The air filter is used to pass filtered clean air into the storage bin so that polluted air is blown out of the storage bin.

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