The invention discloses a spin-
coating chamber device with a synchronous cover lifting function in a spin-
coating process. The spin-
coating chamber device comprises a turntable and a synchronous cover, a
metal ring is embedded in the bottom face of the synchronous cover, and electromagnets are evenly fixed to the bottom face of the synchronous cover along the circumference. The
electromagnet can reduce
suction force in the rotating process, at the moment, through upward movement of the linear module, the synchronous cover and the
rotating disc can be separated in the rotating process, the cavity is opened, then the solution volatilization speed is increased, and it is not needed to wait for rotation to stop. The
centrifugal force effect exists in the rotating process, at the moment, the solution volatilization and curing speed is increased, substrate edge fluid
backflow is avoided, the edge effect influence area is reduced, and the substrate
utilization rate is increased. After the cavity is opened, the permanent
magnet can generate induction current in the
metal ring, the induction current can generate torque between the synchronous cover and the
rotating disc, rotating speed fluctuation of the
rotating disc can be avoided, high rotating stability is achieved, and film forming uniformity can be kept.