Water-cooled dome for evaporator

Abstract

The utility model discloses a water cooling dome for an evaporator, which comprises a mounting plate, the upper end of the mounting plate is fixedly connected with a mounting seat, the upper end of the mounting plate is rotatably connected with a rotating cylinder, the upper end of the mounting seat is fixedly connected with an exchange assembly matched with the rotating cylinder, the inner wall of the exchange assembly is provided with a plurality of grooves, and the grooves are communicated with the rotating cylinder. The groove and the rotating cylinder form an exchange cavity, a plurality of liquid conveying pipes matched with the exchange cavity are arranged in the rotating cylinder, the exchange assembly comprises a first annular block, a first screw rod, a second annular block and a plurality of third annular blocks, the first annular block is fixedly connected to the upper end of the mounting base, and the second annular block is fixedly connected to the lower end of the mounting base. The first screw rod is fixedly connected between the first annular block and the second annular block, and a third annular block is installed at the upper end of the second annular block. Compared with the prior art, the water-cooling dome for the evaporator is convenient to disassemble, a sealing structure in the water-cooling dome is convenient to replace, and the use cost of the evaporator is convenient to reduce.

Description

Technical Field

[0001] The utility model belongs to the technical field of evaporation machines, and in particular relates to a water-cooled dome for an evaporation machine. Background Art

[0002] The evaporation machine needs to be used with water cooling during use. Water cooling is used to cool the plating pot where the substrate is placed to avoid the plating pot being too hot, causing the plating pot to deform or affecting the substrate.

[0003] In the prior art, a water-cooling circulation pipe with a rotating joint is generally provided to connect the water inlet pipe and the water outlet pipe of the plating pot. The plating pot rotates, and the water-cooling circulation pipe rotates, thereby realizing water-cooling circulation. The rotating joint needs to be maintained frequently, and after the rotating joint has been used for a period of time, its internal sealing structure ages, which easily leads to leakage of the rotating joint, thereby affecting the normal use of the evaporation machine, and the rotating joint needs to be replaced, which increases the cost of using the evaporation machine.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The purpose of the utility model is to provide a water-cooled dome for a vapor deposition machine, which can solve the problems raised in the above-mentioned background technology.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] The evaporation machine uses a water-cooled dome, which includes a mounting plate, the upper end of which is fixedly connected to a mounting seat, the upper end of which is rotatably connected to a rotating cylinder, the upper end of which is fixedly connected to an exchange component matching the rotating cylinder, the inner wall of the exchange component is provided with a plurality of grooves, the grooves and the rotating cylinder form an exchange cavity, and the rotating cylinder is provided with a plurality of infusion tubes matching the exchange cavity.

[0008] In one or more embodiments of the present utility model, the exchange assembly includes a first annular block, a first screw, a second annular block and a plurality of third annular blocks, the first annular block is fixedly connected to the upper end of the mounting seat, the first screw is fixedly connected between the first annular block and the second annular block, a third annular block is installed at the upper end of the second annular block, a fourth annular block is arranged between adjacent third annular blocks, and a fifth annular block is installed on the top of the third annular block at the uppermost end.

[0009] In one or more embodiments of the utility model, a plurality of threaded holes are provided on the second annular block, and the threaded holes penetrate the third annular block, the fourth annular block and the fifth annular block in sequence. A second screw is provided in the threaded holes and fastens the third annular block, the fourth annular block and the fifth annular block together.

[0010] In one or more embodiments of the present invention, the groove is provided in the middle of the third annular block, and first grooves are provided at both ends of the third annular block, and a first sealing ring is placed in the first groove.

[0011] In one or more embodiments of the utility model, a second sealing ring is fixedly connected to both end surfaces of the exchange component, a third groove matching the second sealing ring is formed on the fifth annular block, a fourth groove matching the second sealing ring is formed on the second annular block, and second grooves matching the second sealing ring are formed on both end surfaces of the fourth annular block.

[0012] In one or more embodiments of the present invention, the height of the first sealing ring is greater than the depth of the second groove.

[0013] In one or more embodiments of the present invention, the height of the second sealing ring is greater than the depth of the second slot, the third slot and the fourth slot.

[0014] In one or more embodiments of the utility model, a plurality of indicating components are sleeved on the exchange component, and the plurality of indicating components are respectively located at two ends of the third annular block, and are used to absorb and indicate water flowing out through the two ends of the third annular block.

[0015] In one or more embodiments of the present invention, the indicator assembly includes an indicator ring, the interior of the indicator ring is filled with a color-changing layer and a water-absorbing layer, and the color-changing layer is located between the indicator ring and the water-absorbing layer.

[0016] In one or more embodiments of the present invention, the thickness of the water absorbing layer is greater than the thickness of the indicator ring.

[0017] Compared with the prior art, the water-cooled dome of the evaporation machine of the utility model is easy to disassemble, and the sealing structure inside the water-cooled dome is easy to replace, so as to reduce the use cost of the evaporation machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 The structure of the water-cooled dome of the vapor deposition machine in one embodiment of the utility model is schematically shown. Figure 1 ;

[0020] Figure 2 The structure of the water-cooled dome of the vapor deposition machine in one embodiment of the utility model is schematically shown. Figure 2 ;

[0021] Figure 3 It is a cross-sectional view of a water-cooled dome of a vapor deposition machine in one embodiment of the utility model;

[0022] Figure 4 A three-dimensional cross-sectional view of an exchange assembly in an embodiment of the utility model;

[0023] Figure 5 An exploded view of a switching assembly in an embodiment of the utility model;

[0024] Figure 6 This is a schematic diagram of the installation of an indicator assembly in one embodiment of the utility model;

[0025] Figure 7 It is a partial cross-sectional view of an indicator assembly in one embodiment of the utility model.

[0026] Description of main reference numerals:

[0027] 1. Mounting plate; 11. Mounting seat; 2. Driving assembly; 3. Rotating cylinder; 31. Output pipe; 32. Return pipe; 33. Gear; 4. Exchange assembly; 41. First annular block; 42. First screw; 43. Second annular block; 431. Threaded hole; 44. Third annular block; 441. Water pipe connector; 442. Groove; 443. First slot; 45. Fourth annular block; 451. Second slot; 46. Fifth annular block; 5. First sealing ring; 6. Second sealing ring; 7. Indicator assembly; 71. Indicator ring; 72. Color-changing layer; 73. Water-absorbing layer; 8. Second screw. DETAILED DESCRIPTION

[0028] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0029] like Figure 1 to Figure 7As shown, the evaporation machine in one embodiment of the utility model uses a water-cooled dome, including a mounting plate 1, the upper end of the mounting plate 1 is fixedly connected to a mounting seat 11, the upper end of the mounting plate 1 is rotatably connected to a rotating cylinder 3, the top of the rotating cylinder 3 is fixedly connected to a gear 33, one side of the mounting plate 1 is fixedly connected to a driving component 2 matching the gear 33, the driving component 2 forces the gear 33 to rotate, and ensures that the gear 33 can rotate with the center of the mounting seat 11 as the axis, the rotating cylinder 3 rotates with the plating pot, and the plating pot rotates with the substrate, so that the substrate can be more uniform during evaporation. The end of the rotating cylinder 3 away from the gear 33 is fixedly connected to a plurality of infusion tubes, one end of the infusion tubes extends outward from the middle of the rotating cylinder 3, and the mounting seat 11 is also fixedly connected to an exchange component 4 matching the rotating cylinder 3, and the inner wall of the exchange component 4 is provided with a plurality of grooves 442, the grooves 442 are arranged from top to bottom, and the grooves 442 and the rotating cylinder 3 form an exchange cavity, and a single infusion tube matches a single exchange cavity.

[0030] like Figure 1 to Figure 3 As shown, the third annular block 44 is provided with a water pipe connector 441 matching the exchange chamber, and the water pipe connector 441 is used to connect the exchange chamber, and the delivery pipe and the output pipe are connected through the water pipe connector 441, so that liquid can be delivered to the exchange chamber. The liquid in the exchange chamber is delivered through the infusion pipe provided on the rotating cylinder 3, or the liquid is delivered to the exchange chamber through the infusion pipe.

[0031] Specifically, Figure 2 As shown, there are two third annular blocks 44 and two exchange chambers. An output pipe 31 and a return pipe 32 are provided in the rotating cylinder 3. The output pipe 31 transports the liquid in the exchange chamber, and the return pipe 32 transports the liquid back into the exchange chamber. The liquid transported by the output pipe 31 exchanges heat with the plating pot and is then transported back to the exchange chamber through the return pipe 32 to realize the circulation of the cold liquid.

[0032] like Figure 1 to Figure 5 As shown, the exchange assembly 4 includes a first annular block 41, a first screw 42, a second annular block 43 and a plurality of third annular blocks 44. The first annular block 41 is fixedly connected to the upper end of the mounting seat 11, and the first screw 42 is fixedly connected between the first annular block 41 and the second annular block 43, that is, the exchange assembly 4 is fixedly connected to the upper end of the mounting seat 11. A third annular block 44 is installed at the upper end of the second annular block 43, a fourth annular block 45 is arranged between adjacent third annular blocks 44, and a fifth annular block 46 is installed on the top of the third annular block 44 at the uppermost end. The second annular block 43 blocks the third annular block 44 at the lowermost end so that the third annular block 44 at the lowermost end will not leak water outward, the fourth annular block 45 is used to block the water leakage of the adjacent third annular block 44, and the fifth annular block 46 is used to block the top of the third annular block 44 at the uppermost end so that water will not flow out from the top of the third annular block 44 at the uppermost end.

[0033] Specifically, the second annular block 43 is provided with a plurality of threaded holes 431, and the threaded holes 431 penetrate the third annular block 44, the fourth annular block 45 and the fifth annular block 46 in sequence. The threaded holes 431 are penetrated by a second screw 8 and fasten the third annular block 44, the fourth annular block 45 and the fifth annular block 46 together. The second screw 8 is used to fix the plurality of second annular blocks 43, the plurality of third annular blocks 44, the plurality of fourth annular blocks 45 and the fifth annular block 46 together. When the number of the third annular blocks 44 needs to be changed, the second screw 8 can be disassembled to increase or decrease the number of the third annular blocks 44, thereby changing the number of exchange chambers. The number of infusion tubes increases, and the number of exchange chambers increases at the same time, so that the third annular block 44 can cool more plating pots at the same time.

[0034] like Figure 4-5 As shown, the groove 442 is opened in the middle of the third annular block 44, and the first grooves 443 are opened at both ends of the third annular block 44. The first sealing ring 5 is placed in the first groove 443, and the height of the first sealing ring 5 is slightly greater than the depth of the first groove 443. When the second screw 8 is used to seal the third annular block 44 and the fourth annular block 45, the first sealing ring 5 is squeezed and deformed by tightening the second screw 8, thereby reducing the gap between the third annular block 44 and the fourth annular block 45. The first sealing ring 5 always has the force to release the deformation, which can increase the friction between the second screw 8 and the thread of the threaded hole 431 while ensuring the sealing, thereby reducing the loosening of the second screw 8 during operation.

[0035] like Figure 5 As shown, the second sealing ring 6 is fixedly connected to both end faces of the exchange component 4, the third slot matching the second sealing ring 6 is provided on the fifth annular block 46, the fourth slot matching the second sealing ring 6 is provided on the second annular block 43, and the second slot 451 matching the second sealing ring 6 is provided on both end faces of the fourth annular block 45. Similarly, the height of the second sealing ring 6 is greater than the depth of the second slot 451, the third slot and the fourth slot. The sealing between the second annular block 43 and the third annular block 44, the fourth annular block 45 and the third annular block 44, and the fifth annular block 46 and the third annular block 44 is increased. At the same time, the friction between the second screw 8 and the thread of the threaded hole 431 is increased to reduce the loosening of the second screw 8. The second screw 8 can also increase the concentricity of the exchange component 4 to avoid vibration, noise and the like caused by poor concentricity during operation.

[0036] Preferably, the upper and lower end surfaces of the third annular block 44 are provided with card slots, and the second sealing ring 6 is card-connected in the third annular block 44. Or the second sealing ring 6 is installed by bonding or other detachable connection methods, which facilitates the replacement of the second sealing ring 6.

[0037] By assembling the exchange assembly 4 composed of the first annular block 41, the first screw rod 42, the second annular block 43, the third annular block 44, the fourth annular block 45 and the fifth annular block 46, it is possible to increase or decrease the number of the third annular blocks 44, thereby changing the number of exchange chambers, and the first annular block 41, the first screw rod 42, the second annular block 43, the third annular block 44, the fourth annular block 45 and the fifth annular block 46 are fixed by the second screw rod 8. When one of the components of the first annular block 41, the first screw rod 42, the second annular block 43, the third annular block 44, the fourth annular block 45 and the fifth annular block 46 is damaged, it is easy to replace, thereby reducing the cost of use.

[0038] The water pipe connector 441 is fixedly connected to the third annular block 44, and the infusion tube is fixedly connected to the inside of the rotating cylinder 3. The third annular block 44 and the infusion tube do not contact each other. The coolant of the third annular block 44 is transported to the infusion tube through the exchange chamber. When the rotating cylinder 3 rotates, it also rotates with the infusion tube, and the third annular block 44 and the infusion tube will not be rolled together.

[0039] It is worth noting that when leakage occurs at the joints between the third annular block 44 and other components during the use of the exchange component 4, it cannot be discovered immediately. During evaporation, the coolant flows downward from the outside of the exchange component 4, and eventually drips onto the substrate or into the evaporation machine, affecting the evaporation effect and quality of the substrate.

[0040] Therefore, if Figure 6-7 As shown, multiple indicator components 7 are sleeved on the exchange component 4, and the multiple indicator components 7 are respectively located at the two ends of the third annular block 44, and are used to absorb water flowing out from the two ends of the third annular block 44 and give color indications. The indicator components 7 can absorb the coolant. After the indicator components 7 absorb the coolant, their color can change, and the changes in the indicator components 7 can be easily observed from the outside, so as to judge whether a part of the exchange component 4 is damaged. And the indicator component 7 is installed on the leaking part of the exchange component 4. Through the changes in the indicator components 7 at different positions, the specific leaking area can be simply judged, which is convenient for maintenance.

[0041] Specifically, the indicator assembly 7 includes an indicator ring 71, the inside of which is filled with a color-changing layer 72 and a water-absorbing layer 73, and the color-changing layer 72 is located between the indicator ring 71 and the water-absorbing layer 73. The indicator ring 71 is transparent, and the color-changing layer 72 can be observed through the indicator ring 71. The color-changing layer 72 is made of absorbent cotton with water-sensitive materials, and the water-sensitive materials are anhydrous copper sulfate, anhydrous cobalt chloride, sodium peroxide, etc. By adding water-sensitive materials to the absorbent cotton, the color of the color-changing layer 72 changes after absorbing water. The water-absorbing layer 73 is used to absorb water leaking from the gap between the third annular block 44 and other components.

[0042] like Figure 7 As shown, the thickness of the water-absorbing layer 73 is greater than the thickness of the indicator ring 71. The water-absorbing capacity of the water-absorbing layer 73 is greater than that of the indicator ring 71, and the water-absorbing layer 73 can absorb more water. When the water-absorbing amount of the water-absorbing layer 73 is too much, the color-changing layer 72 will absorb the water of the water-absorbing layer 73, and the color-changing layer 72 will change color after absorbing water. That is, if the amount of water leakage is small, it can be absorbed by the water-absorbing layer 73, and the exchange component 4 can continue to be used, while avoiding the situation where the leaked water drops in the evaporation machine or on the substrate as much as possible. When the amount of water leakage is large, the water-absorbing layer 73 is saturated with water, and a part of the water in the water-absorbing layer 73 is absorbed by the color-changing layer 72, and the color changes, which serves as a reminder. At the same time, the amount of water in the water-absorbing layer 73 is reduced, so that the water-absorbing layer 73 can still play a role in absorbing water.

[0043] By setting the indicating component 7, a reminder can be given when the exchange component 4 leaks. After the staff sees the change of the indicating component 7, it is convenient to repair or replace the exchange component 4.

[0044] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0045] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A water-cooled dome for a vapor deposition machine includes a mounting plate, the upper end of which is fixedly connected to a mounting seat, characterized in that: The upper end of the mounting plate is rotatably connected to a rotating cylinder, the upper end of the mounting seat is fixedly connected to an exchange component matching the rotating cylinder, the inner wall of the exchange component is provided with a plurality of grooves, the grooves and the rotating cylinder form an exchange cavity, and a plurality of infusion tubes matching the exchange cavity are provided in the rotating cylinder.

2. The water-cooled dome for the vapor deposition machine according to claim 1, characterized in that: The exchange assembly includes a first annular block, a first screw, a second annular block and a plurality of third annular blocks, wherein the first annular block is fixedly connected to the upper end of the mounting seat, the first screw is fixedly connected between the first annular block and the second annular block, a third annular block is installed at the upper end of the second annular block, a fourth annular block is arranged between adjacent third annular blocks, and a fifth annular block is installed on the top of the third annular block at the uppermost end.

3. The water-cooled dome of the vapor deposition machine according to claim 2, characterized in that: The second annular block is provided with a plurality of threaded holes, which penetrate the third annular block, the fourth annular block and the fifth annular block in sequence. A second screw is provided in the threaded hole to fasten the third annular block, the fourth annular block and the fifth annular block together.

4. The water-cooled dome of the vapor deposition machine according to claim 2 or 3, characterized in that: The groove is formed in the middle of the third annular block, and first clamping grooves are formed at both ends of the third annular block, wherein a first sealing ring is placed in the first clamping groove.

5. The water-cooled dome for the vapor deposition machine according to claim 4, characterized in that: A second sealing ring is fixedly connected to both end surfaces of the exchange component, a third groove matching the second sealing ring is formed on the fifth annular block, a fourth groove matching the second sealing ring is formed on the second annular block, and second grooves matching the second sealing ring are formed on both end surfaces of the fourth annular block.

6. The water-cooled dome for the vapor deposition machine according to claim 4, characterized in that: The height of the first sealing ring is greater than the depth of the second slot.

7. The water-cooled dome for the vapor deposition machine according to claim 5, characterized in that: The height of the second sealing ring is greater than the depths of the second slot, the third slot and the fourth slot.

8. The water-cooled dome for the vapor deposition machine according to claim 5, characterized in that: A plurality of indicating components are sleeved on the exchange component. The plurality of indicating components are respectively located at two ends of the third annular block and are used for absorbing water flowing out through the two ends of the third annular block and indicating.

9. The water-cooled dome for the vapor deposition machine according to claim 8, characterized in that: The indicating assembly comprises an indicating ring, the interior of which is filled with a color-changing layer and a water-absorbing layer, and the color-changing layer is located between the indicating ring and the water-absorbing layer.

10. The water-cooled dome for the vapor deposition machine according to claim 9, characterized in that: The thickness of the water absorbing layer is greater than the thickness of the indicator ring.

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