Sealing structure for vacuum pump
By using a combined sealing structure of gasket and sealing ring between the cylinder block and bearing seat of the vacuum pump, the problem of difficult to control the amount of sealing glue used in the existing vacuum pump is solved, and more efficient sealing performance and a simpler assembly process are achieved.
Patent Information
- Application Number
- CN202421149873.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-05-24
AI Technical Summary
Existing vacuum pumps are prone to problems of difficult to control the amount of glue during the sealing process, resulting in poor sealing effect or overflow of glue, causing operational hazards.
Using a combined seal structure, a sealing gasket and a sealing ring are arranged between the cylinder block and the bearing seat to form a connected sealing groove, thereby achieving a double seal between the cylinder block and the bearing seat.
Improve the sealing performance of the vacuum pump, avoid glue contamination, simplify the assembly and disassembly process, and enhance the stability and reliability of the seal.
Smart Images

Figure CN222558692U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum pumps, in particular to a sealing structure for a vacuum pump. Background Art
[0002] A vacuum pump is a device or equipment that uses mechanical, physical, chemical or physicochemical methods to evacuate the container to obtain a vacuum. It is widely used in metallurgy, chemical industry, food, electronic coating and other industries. There are many types of vacuum pumps. According to different structural principles, they can generally be divided into rotary vane vacuum pumps and reciprocating vacuum pumps, of which reciprocating vacuum pumps are also called piston vacuum pumps. With the development of the economy and the progress of society, the application scope of vacuum pumps in photovoltaic semiconductor, chemical, pharmaceutical and other industries is becoming wider and wider, and the operating environment is becoming more and more harsh. Most media are flammable, explosive and toxic, so higher requirements are put forward for the system leakage rate of vacuum pumps, and the sealing requirements are becoming more and more stringent.
[0003] However, most existing vacuum pumps are sealed with sealant. The amount of glue is difficult to control. Too much glue will cause the glue to overflow into the cylinder body, causing hidden dangers in operation, and too little glue will make it difficult to ensure the sealing effect. Alternatively, two types of sealing rubber pads are used to seal between the cylinder body and between the cylinder body and the bearing seat. Because of the independent sealing, it is difficult to find problems during the assembly stage. Utility Model Content
[0004] The utility model provides a sealing structure for a vacuum pump, which can seal the vacuum pump without using sealing glue, ensures that there is no pollution in the cylinder body, and can improve the sealing performance.
[0005] The embodiments of the present invention can be implemented as follows:
[0006] The embodiment of the utility model provides a sealing structure for a vacuum pump, which comprises:
[0007] An upper cylinder body, a lower cylinder body, a first bearing seat and a second bearing seat, wherein the upper cylinder body and the lower cylinder body are connected to form a pump body; one end of the pump body is connected to the first bearing seat, and the other end of the pump body is connected to the second bearing seat;
[0008] The lower cylinder body is provided with a first sealing groove on the surface connected to the upper cylinder body; the pump body is provided with a second sealing groove on the surface connected to the first bearing seat and the second bearing seat; the first sealing groove is connected to the second sealing groove;
[0009] A sealing gasket, the sealing gasket is located between the upper cylinder body and the lower cylinder body, and the sealing gasket is installed in the first sealing groove;
[0010] Two sealing rings, the two sealing rings are respectively located between the pump body and the first bearing seat and the second bearing seat, and the sealing rings are installed in the second sealing groove.
[0011] In an optional embodiment, the sealing gasket includes a sealing gasket body and a bending portion, wherein the bending portion is connected to the end of the sealing gasket body at an angle; the bending portion is used to enable the sealing gasket body to hook the pump body to prevent the sealing gasket from shrinking due to thermal deformation.
[0012] In an optional embodiment, the bending portion includes a first bending portion and a second bending portion, the first bending portion is connected to one end of the sealing gasket body at an angle, and the second bending portion is connected to the other end of the sealing gasket body at an angle.
[0013] In an optional embodiment, the number of the first bending portion and the number of the second bending portion are both plural, and the plurality of the first bending portions are spaced apart at one end of the sealing gasket body, and the plurality of the second bending portions are spaced apart at the other end of the sealing gasket body.
[0014] In an optional embodiment, both the first bending portion and the second bending portion are bent toward the upper cylinder body or the lower cylinder body.
[0015] In an optional embodiment, both ends of the sealing gasket body are provided with notches, and the notches are used to cooperate with the sealing ring.
[0016] In an optional implementation manner, the sealing pad and the sealing ring are both made of rubber material.
[0017] In an optional embodiment, the sealing gasket is interference fit with the first sealing groove.
[0018] In an optional embodiment, the thickness of the sealing ring is 1-2 mm greater than the groove depth of the second sealing groove.
[0019] In an optional embodiment, the sealing ring is an O-ring.
[0020] The beneficial effects of the sealing structure for the vacuum pump of the utility model embodiment include:
[0021] The sealing structure for the vacuum pump includes an upper cylinder body, a lower cylinder body, a first bearing seat and a second bearing seat. The upper cylinder body and the lower cylinder body are connected to form a pump body; one end of the pump body is connected to the first bearing seat, and the other end of the pump body is connected to the second bearing seat; the lower cylinder body is provided with a first sealing groove on the surface connected to the upper cylinder body; the pump body is provided with a second sealing groove on the surface connected to the first bearing seat and the second bearing seat; the first sealing groove is connected to the second sealing groove. By connecting the first sealing groove with the second sealing groove, the sealing structures between the cylinder bodies and between the cylinder body and the bearing seat can be combined and sealed, thereby improving the sealing effect of the vacuum pump. The sealing structure for the vacuum pump also includes a sealing gasket and two sealing rings. The sealing gasket is located between the upper cylinder body and the lower cylinder body, and the sealing gasket is installed in the first sealing groove; the two sealing rings are respectively located between the pump body and the first bearing seat and the second bearing seat, and the sealing ring is installed in the second sealing groove. The sealing gasket and the sealing ring are used to seal the vacuum pump, and sealant may not be used. It can be ensured that the cylinder body will not be contaminated by glue while ensuring the sealing performance, thereby avoiding the operation hidden dangers of the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0023] Figure 1 A schematic diagram of a sealing structure for a vacuum pump provided in an embodiment of the utility model;
[0024] Figure 2 An exploded schematic diagram of a sealing structure for a vacuum pump provided in an embodiment of the utility model;
[0025] Figure 3 It is a schematic diagram of a sealing gasket provided in an embodiment of the utility model.
[0026] Icon: 1000 - sealing structure for vacuum pump; 100 - pump body; 110 - upper cylinder body; 120 - lower cylinder body; 121 - first sealing groove; 122 - second sealing groove; 200 - first bearing seat; 300 - second bearing seat; 400 - sealing gasket; 410 - sealing gasket body; 411 - notch; 420 - bending part; 421 - first bending part; 422 - second bending part; 500 - sealing ring. DETAILED DESCRIPTION
[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0030] In the description of the present utility model, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the utility model product is usually placed when used. It is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present utility model.
[0031] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.
[0032] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.
[0033] A vacuum pump refers to a device or equipment that uses mechanical, physical, chemical or physicochemical methods to evacuate the container to obtain a vacuum. It is widely used in metallurgy, chemical industry, food, electronic coating and other industries. There are many types of vacuum pumps. According to different structural principles, they can generally be divided into rotary vane vacuum pumps and reciprocating vacuum pumps. Reciprocating vacuum pumps are also called piston vacuum pumps. With the development of the economy and the progress of society, the application scope of vacuum pumps in photovoltaic semiconductors, chemicals, medicine and other industries is becoming wider and wider, and the operating environment is becoming more and more harsh. Most media have flammable, explosive and toxic characteristics. Therefore, higher requirements are put forward for the system leakage rate of vacuum pumps, and the sealing type requirements are becoming more and more stringent. However, most of the existing vacuum pumps are sealed with sealants. The amount of glue is difficult to control. A large amount will cause the glue to overflow into the cylinder body, causing operating hazards. A small amount will make it difficult to ensure the sealing effect. Alternatively, two sealing rubber pads are used to seal between the cylinder body and the cylinder body, and between the cylinder body and the bearing seat. Because they are independent seals, it is difficult to find problems during the assembly stage.
[0034] Based on this, see Figure 1 and Figure 2 The sealing structure 1000 for a vacuum pump provided in the embodiment of the utility model can effectively improve the above-mentioned technical problems. The sealing structure 1000 for a vacuum pump can seal the vacuum pump without using sealant, and adopts a combined seal to improve the sealing performance.
[0035] Figure 1 A schematic diagram of a sealing structure 1000 for a vacuum pump provided in an embodiment of the present utility model; Figure 2 FIG. 1 is an exploded schematic diagram of a sealing structure 1000 for a vacuum pump provided in an embodiment of the present utility model. Figure 1 and Figure 2 As shown, the sealing structure 1000 for the vacuum pump in this embodiment includes an upper cylinder body 110, a lower cylinder body 120, a first bearing seat 200, a second bearing seat 300, a sealing gasket 400 and two sealing rings 500. The upper cylinder body 110 and the lower cylinder body 120 are connected to form a pump body 100; one end of the pump body 100 is connected to the first bearing seat 200, and the other end of the pump body 100 is connected to the second bearing seat 300; the lower cylinder body 120 is provided with a first sealing groove 121 on the surface connected to the upper cylinder body 110; the pump body 100 is provided with a second sealing groove 122 on the surface connected to the first bearing seat 200 and the second bearing seat 300; the first sealing groove 121 is connected to the second sealing groove 122. The sealing gasket 400 is located between the upper cylinder body 110 and the lower cylinder body 120, and the sealing gasket 400 is installed in the first sealing groove 121; the two sealing rings 500 are respectively located between the pump body 100 and the first bearing seat 200 and the second bearing seat 300, and the sealing rings 500 are installed in the second sealing groove 122.
[0036] First, install the sealing gasket 400 into the first sealing groove 121 of the lower cylinder body 120, and then fix the upper cylinder body 110 and the lower cylinder body 120 to form the pump body 100. A second sealing groove 122 is opened on both sides of the pump body 100, and the second sealing groove 122 is connected to the first sealing groove 121. Two sealing rings 500 are respectively installed in the two second sealing grooves 122 opened on both sides of the pump body 100. In addition to achieving the seal between the pump body 100 and the bearing seat, the sealing ring 500 can also seal the end of the first sealing groove 121. Then the first bearing seat 200 and the second bearing seat 300 are respectively connected to the pump body 100 to complete the installation of the entire vacuum pump. The communication between the first sealing groove 121 and the second sealing groove 122 means that the installation position of the sealing ring 500 will cover the end of the first sealing groove 121.
[0037] By connecting the first sealing groove 121 with the second sealing groove 122, the sealing structures between the cylinder bodies and between the cylinder body and the bearing seat can be combined and sealed. The sealing ring 500 can not only realize the sealing between the pump body 100 and the bearing seat, but also seal the end of the first sealing groove 121 to realize double sealing, thereby improving the sealing effect of the vacuum pump. In this embodiment, the sealing gasket 400 and the sealing ring 500 are used to seal the vacuum pump, and sealant is not required. It can be ensured that while ensuring the sealing performance, the cylinder body will not be contaminated by glue, thereby avoiding the operation hidden dangers of the vacuum pump. In addition, assembly and disassembly are also very simple and convenient.
[0038] Please continue reading Figure 1 and Figure 2 In this embodiment, two first sealing grooves 121 are provided at intervals on the surface where the lower cylinder body 120 is connected to the upper cylinder body 110, a "U"-shaped groove is provided on the surface where the lower cylinder body 120 is connected to the first bearing seat 200 and the second bearing seat 300, and a "U"-shaped groove is also provided on the surface where the upper cylinder body 110 is connected to the first bearing seat 200 and the second bearing seat 300. The "U"-shaped grooves of the upper and lower cylinder bodies 120 jointly form a second sealing groove 122. One end of the groove is connected to one of the first sealing grooves 121, and the other end of the groove is connected to another first sealing groove 121. The sealing ring 500 in this embodiment is an O-shaped sealing ring. Of course, the O-shaped sealing ring can also be replaced by a U-shaped sealing ring. The two U-shaped sealing rings 500 jointly seal the connection between the pump body 100 and the first bearing seat 200 or the second bearing seat 300.
[0039] In order to prevent the sealing gasket 400 from shrinking due to thermal deformation and affecting the sealing effect, please refer to Figure 1 and Figure 2 , and combined with Figure 3 , Figure 3The schematic diagram of the sealing gasket 400 provided in the embodiment of the utility model, the sealing gasket 400 in this embodiment includes a sealing gasket body 410 and a bending portion 420, the bending portion 420 is connected to the end of the sealing gasket body 410 at an angle; the bending portion 420 is used to make the sealing gasket body 410 hook the pump body 100 to prevent the sealing gasket 400 from shrinking due to thermal deformation. The bending portion 420 in this embodiment is vertically connected to the sealing gasket body 410. Of course, the bending portion 420 can also be connected to the sealing gasket body 410 at an acute angle or an obtuse angle, which is not limited here. Because the sealing gasket 400 has a certain plasticity, after the cylinder body and the bearing seat are fixedly connected, the sealing gasket 400 will be extruded and shaped to a certain extent. As long as the bending portion 420 is in contact with the connecting surface of the upper and lower cylinder bodies 120 and the bearing seat. The sealing gasket 400 adopts a bending design to ensure that the sealing gasket 400 will not shrink during assembly. Before the vacuum pump is installed and tested, it can be found whether it is sealed well, which improves the installation and sealing efficiency.
[0040] In order to enhance the ability to prevent the bending portion 420 from heating, deforming and shrinking, please continue to refer to Figure 1 and Figure 2 , and combined with Figure 3 The bending portion 420 in this embodiment includes a first bending portion 421 and a second bending portion 422. The first bending portion 421 is connected to one end of the gasket body 410 at an angle, and the second bending portion 422 is connected to the other end of the gasket body 410 at an angle. By providing the bending portions 420 at both ends of the gasket body 410, the gasket 400 can be firmly hooked to the side wall of the cylinder body to enhance the ability to prevent the bending portion 420 from being heated, deformed and retracted. In addition, the bending portion 420 can be provided at one end of the gasket body 410, or at both ends of the gasket body 410, as long as the gasket 400 can be hooked to the upper and lower cylinder bodies 120 and will not retract into the cylinder body due to thermal deformation. The first bending portion 421 and the second bending portion 422 in this embodiment are both bent toward the upper cylinder body 110 or the lower cylinder body 120. Of course, the first bending portion 421 can also be bent toward the upper cylinder body 110, and the second bending portion 422 can be bent toward the lower cylinder body 120. When the vacuum pump is fully installed, the first bending portion 421 hooks the upper cylinder body 110, and the second bending portion 422 hooks the lower cylinder body 120, thereby further enhancing the ability to prevent the bending portion 420 from heating, deforming, and shrinking.
[0041] In this embodiment, the number of the first bending portion 421 and the second bending portion 422 are both multiple, and the multiple first bending portions 421 are spaced apart at one end of the sealing gasket body 410, and the multiple second bending portions 422 are spaced apart at the other end of the sealing gasket body 410. Specifically, in this embodiment, the number of the first bending portion 421 and the second bending portion 422 is two. Of course, the number of the first bending portion 421 and the second bending portion 422 can also be one, three, etc. The number of the bending portions 420 is determined according to actual conditions and is not limited here. The bending portion 420 in this embodiment is rectangular. Of course, the bending portion 420 can also be other shapes such as circular or semicircular, as long as it allows the sealing gasket 400 to hook the cylinder body. The specific shape and structure are not limited here.
[0042] In order to allow the sealing ring 500 to better seal the end of the first sealing groove 121, please refer to Figure 1 and Figure 2 , and combined with Figure 3 In this embodiment, both ends of the sealing gasket body 410 are provided with notches 411, which are used to cooperate with the sealing ring 500. The notches 411 can be used to limit the installation of the sealing ring 500, so as to achieve the sealing of the sealing ring 500 and the end of the first sealing groove 121.
[0043] In order to increase the contact area between the sealing gasket 400 and the sealing ring 500 and the cylinder body, the sealing gasket 400 and the sealing ring 500 in this embodiment are made of rubber material. Rubber has high elasticity and is easily deformed after being squeezed. The sealing gasket 400 is interference fit with the first sealing groove 121. By adopting the interference fit, after the upper and lower cylinder bodies 120 are installed, the upper cylinder body 110 will squeeze the sealing gasket 400, so that it is greatly flattened, and the contact area between the sealing gasket 400 and the upper and lower cylinder bodies 120 is increased to improve the sealing performance. The thickness of the sealing ring 500 is slightly larger than the groove depth of the second sealing groove 122. Specifically, the thickness of the sealing ring 500 in this embodiment is 1-2mm larger than the groove depth of the second sealing groove 122. This design can also squeeze the sealing ring 500 when the bearing seat is installed with the cylinder body, so that it is greatly flattened, and the contact area between the sealing ring 500 and the upper and lower cylinder bodies 120 and the bearing seat is increased to improve the sealing performance. Of course, the sealing gasket 400 and the first sealing groove 121 may also adopt transition fit or clearance fit, which is not limited here. The thickness of the sealing ring 500 may also be the same as the groove depth of the second sealing groove 122 .
[0044] According to a sealing structure 1000 for a vacuum pump provided in this embodiment, its working principle is as follows:
[0045] First, install the sealing gasket 400 into the first sealing groove 121 of the lower cylinder body 120, and then fix the upper cylinder body 110 and the lower cylinder body 120 to form the pump body 100. The sealing gasket 400 seals the connection between the upper and lower cylinder bodies 120. Second sealing grooves 122 are provided on both sides of the pump body 100, and two sealing rings 500 are respectively installed in the two second sealing grooves 122 provided on both sides of the pump body 100. While the sealing ring 500 seals the connection between the upper and lower cylinder bodies 120 and the bearing seat, it also seals the end of the first sealing groove 121, thereby improving the sealing effect. In addition, the end of the sealing gasket 400 in this embodiment is provided with a bending portion 420, and the sealing gasket 400 can hook the upper cylinder body 110 or the lower cylinder body 120 through the bending portion 420, which can prevent the sealing gasket 400 from shrinking into the cylinder body due to thermal deformation, thereby affecting the sealing effect.
[0046] To summarize, the sealing structure 1000 for the vacuum pump in this embodiment includes an upper cylinder body 110, a lower cylinder body 120, a first bearing seat 200, a second bearing seat 300, a sealing gasket 400 and two sealing rings 500. The upper cylinder body 110 and the lower cylinder body 120 are connected to form a pump body 100; one end of the pump body 100 is connected to the first bearing seat 200, and the other end of the pump body 100 is connected to the second bearing seat 300; the lower cylinder body 120 is provided with a first sealing groove 121 on the surface connected to the upper cylinder body 110; the pump body 100 is provided with a second sealing groove 122 on the surface connected to the first bearing seat 200 and the second bearing seat 300; the first sealing groove 121 is connected to the second sealing groove 122. The sealing gasket 400 is located between the upper cylinder body 110 and the lower cylinder body 120, and the sealing gasket 400 is installed in the first sealing groove 121; the two sealing rings 500 are respectively located between the pump body 100 and the first bearing seat 200 and the second bearing seat 300, and the sealing ring 500 is installed in the second sealing groove 122. By connecting the first sealing groove 121 with the second sealing groove 122, the sealing structures between the cylinder bodies and between the cylinder body and the bearing seat can be combined and sealed. The sealing ring 500 can not only realize the sealing between the pump body 100 and the bearing seat, but also seal the end of the first sealing groove 121 to achieve double sealing, thereby improving the sealing effect of the vacuum pump. In this embodiment, the sealing gasket 400 and the sealing ring 500 are used to seal the vacuum pump, and sealant is not used. It can be ensured that while ensuring the sealing performance, the cylinder body will not be contaminated by glue, thereby avoiding the operation hidden dangers of the vacuum pump. In addition, assembly and disassembly are also very simple and convenient.
[0047] The above is only a specific implementation of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be included in the protection scope of the present invention.
Claims
1. A sealing structure for a vacuum pump, characterized in that: include: An upper cylinder body (110), a lower cylinder body (120), a first bearing seat (200) and a second bearing seat (300), wherein the upper cylinder body (110) and the lower cylinder body (120) are connected to form a pump body (100); one end of the pump body (100) is connected to the first bearing seat (200), and the other end of the pump body (100) is connected to the second bearing seat (300); The lower cylinder body (120) is provided with a first sealing groove (121) on a surface connected to the upper cylinder body (110); the pump body (100) is provided with a second sealing groove (122) on a surface connected to the first bearing seat (200) and the second bearing seat (300); the first sealing groove (121) is in communication with the second sealing groove (122); A sealing gasket (400), the sealing gasket (400) is located between the upper cylinder body (110) and the lower cylinder body (120), and the sealing gasket (400) is installed in the first sealing groove (121); Two sealing rings (500), the two sealing rings (500) are respectively located between the pump body (100) and the first bearing seat (200) and the second bearing seat (300), and the sealing rings (500) are installed in the second sealing groove (122).
2. The sealing structure for a vacuum pump according to claim 1, characterized in that: The sealing gasket (400) comprises a sealing gasket body (410) and a bending portion (420), wherein the bending portion (420) is connected to the end of the sealing gasket body (410) at an angle; the bending portion (420) is used to enable the sealing gasket body (410) to hook the pump body (100) to prevent the sealing gasket (400) from shrinking due to thermal deformation.
3. The sealing structure for a vacuum pump according to claim 2, characterized in that: The bending portion (420) comprises a first bending portion (421) and a second bending portion (422), wherein the first bending portion (421) is connected to one end of the sealing gasket body (410) at an angle, and the second bending portion (422) is connected to the other end of the sealing gasket body (410) at an angle.
4. The sealing structure for a vacuum pump according to claim 3, characterized in that: The number of the first bending parts (421) and the number of the second bending parts (422) are both multiple, and the multiple first bending parts (421) are arranged at intervals at one end of the sealing gasket body (410), and the multiple second bending parts (422) are arranged at intervals at the other end of the sealing gasket body (410).
5. The sealing structure for a vacuum pump according to claim 3, characterized in that: The first bending portion (421) and the second bending portion (422) are both bent toward the upper cylinder body (110) or the lower cylinder body (120).
6. The sealing structure for a vacuum pump according to claim 2, characterized in that: Notches (411) are provided at both ends of the sealing gasket body (410), and the notches (411) are used to cooperate with the sealing ring (500).
7. The sealing structure for a vacuum pump according to claim 1, characterized in that: The sealing pad (400) and the sealing ring (500) are both made of rubber material.
8. The sealing structure for a vacuum pump according to claim 7, characterized in that: The sealing gasket (400) is interference fit with the first sealing groove (121).
9. The sealing structure for a vacuum pump according to claim 7, characterized in that: The thickness of the sealing ring (500) is 1-2 mm greater than the groove depth of the second sealing groove (122).
10. The sealing structure for a vacuum pump according to claim 1, characterized in that: The sealing ring (500) is an O-type sealing ring.