Wafer antifouling storage device

Abstract

The utility model relates to the technical field of wafer storage devices, in particular to a wafer antifouling storage device which comprises a table body and a wafer frame arranged on the table body, one end of the table body is attached to the ground, the table body extends from the end attached to the ground to the direction away from the ground, an included angle of 30 degrees is formed between the extending direction of the table body and the ground, and the wafer frame is arranged on the table body. According to the utility model, through the inclined arrangement of the table body and the cooperation of the table body and the wafer rack, one side of the wafer filled with the ink can be arranged back to the wafer rack, and the side of the wafer filled with the ink is not contacted with the wafer rack under the action of gravity, thereby preventing pollution caused by the ink on the wafer.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer storage devices, in particular to a wafer anti-fouling storage device. Background Art

[0002] Existing wafer storage devices generally use separate wafer boxes for storage, or use wafer bins to store a batch of wafers closely together in the bin. The use of wafer boxes for storage greatly reduces work efficiency. When wafers need to be taken out, each wafer box needs to be opened in turn and the wafers therein need to be taken out, which is cumbersome. At the same time, for wafers to be dried with ink, it is easy to contaminate the wafer box. Although the wafer bin has a large storage capacity, the wafers are closely attached to each other. For wafers to be dried with ink in the ink curing process, it is easy for the tension of the ink to cause the wafers to be further attached, making it difficult to separate the wafers and very easy to cause wafer damage.

[0003] The Chinese patent with the document number CN216270544U discloses a wafer box storage device, which introduces a mechanical arm to complete the intelligent access action of the wafer box, greatly improving the accuracy of the access action, avoiding collisions during the access process of the wafer box, and preventing the wafer from being damaged. However, the working efficiency of the mechanical arm is low, which is not practical for occasions where wafers are frequently accessed, and is not conducive to the drying operation of wafers to be dried ink;

[0004] The Chinese patent with the document number CN213620948U discloses a storage device for wafer processing. Under the elastic force generated by the sleeve, the sleeve rod and the first spring, the pushing mechanism will squeeze and push the wafer body forward and make it stably stuck in the box body. This method is easy to cause the wafer to be further pressed together due to the tension of the ink, making it difficult to separate the wafer and easily causing the wafer to be damaged.

[0005] Therefore, how to design a wafer anti-fouling storage device to solve the problem that wafers with ink to be dried are easily contaminated by the container, the ink may cause tension and make it difficult to separate the wafers, causing damage to the wafers, and ensure work efficiency has become a problem to be solved. Utility Model Content

[0006] The purpose of the utility model is to provide a wafer anti-fouling storage device to solve the above problems.

[0007] In order to achieve the above objectives, the following technical solutions are provided:

[0008] A wafer anti-fouling storage device is used to place wafers, comprising: a table and a wafer rack arranged on the table, one end of the table is in contact with the ground, the table extends from the end in contact with the ground in a direction away from the ground, and the extension direction of the table forms an angle of 30 degrees with the ground, so that the wafer is in contact with the wafer rack under the action of gravity, the table also includes a protruding portion and a recessed portion, the structure of the recessed portion matches the structure of the bottom surface of the wafer rack, the wafer rack can be limitedly set in the recessed portion, and the wafer rack can also leave the recessed portion along the outer normal direction of the recessed portion, when the wafer rack is limited in the recessed portion, the protruding portion and the recessed portion respectively contact different end faces of the wafer rack, and the wafer rack includes parts arranged in an array along its inner wall at fixed intervals, and a receiving cavity is formed between adjacent array parts for receiving wafers.

[0009] Preferably, the wafer rack includes a top plate, a bottom plate and two symmetrically arranged connectors, the top plate and the bottom plate are fixedly connected between the two symmetrical connectors, and are respectively located at the front and rear ends of the wafer rack, the top plate is an overall H-shaped structure, including a web portion and flange portions arranged at its two ends, the upper and lower ends of the top plate are semi-closed openings, the opening at the upper end extends symmetrically from the edge of the top plate into the top plate at a fixed angle and is closed, and then the top end of the flange portion is configured to be inclined, the opening cross-section of the lower end of the top plate is configured to be a rectangular structure, and trapezoidal openings are also provided at the outer corners of the lower ends of the two flange portions, and the inclination direction of the lower end of the flange portion is the same as the inclination direction of the top end thereof, so as to match the structure of the wafer.

[0010] Preferably, the web portion is provided with reinforcing ribs protruding outward from its surface, and the reinforcing ribs extend in the direction of the two flange portions to the edges of the flange portions respectively. The lower ends of the flange portions are also provided to protrude outward, and the lower ends of the flange portions can be just limited in the recessed portion of the table body. The bottom plate cooperates with the connector to close one end of the wafer rack, and an air pressure hole is also opened in the middle of the bottom plate for balancing the air pressure between the bottom plate and the outside world.

[0011] Preferably, the connector includes a closing piece, a partition, a side panel and an outer eave panel, the closing piece is symmetrically arranged at both ends of the side panel, the closing piece is extended outward in the direction close to the flange portion and in the protruding direction of the reinforcing rib, the partition is linearly arranged on the side panel at a fixed interval and fixedly connected thereto, the top end of the closing piece protrudes outward, the two ends of the outer eave panel are fixedly connected to the outwardly protruding portion of the closing piece, and the outer eave panel is also fixedly connected to the top end of the side panel in a closed manner.

[0012] Preferably, the protruding portion at the top of the closure member and the edge of the outer eaves plate are both provided with through circular holes, which are used for bolt connection and balancing air pressure respectively.

[0013] Preferably, the bottom of the side panel extends from the lower end of the top panel toward the bottom panel and fits with the two. The side panel also extends from the lower end of the top panel toward the closure and its side wall fits with the side wall of the closure.

[0014] Preferably, when the wafer rack is limitedly disposed in the recessed portion, the bottom plate is in contact with the protruding portion.

[0015] The beneficial effects of the utility model are:

[0016] 1. The utility model can arrange the side of the wafer filled with ink facing away from the wafer rack by tilting the table and cooperating with the table and the wafer rack. Under the action of gravity, the side of the wafer filled with ink will not contact the wafer rack, thus preventing the ink on the wafer from causing contamination;

[0017] 2. The utility model adopts a specific design of the wafer rack, where one end of the wafer flat head is arranged toward the outside of the wafer rack, and one end of the circular arc is arranged toward the inside of the wafer rack. The wafer rack is tilted inwardly to effectively prevent damage to the wafer;

[0018] 3. The utility model connects the top plate and the bottom plate through the side plate, and makes one end surface of the wafer rack hollow, which matches the wafer structure while reducing the weight of the wafer rack, and ensures that the wafer rack can be limited in the table body through the protruding part of the flange. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 It is a structural schematic diagram of the platform;

[0021] Figure 3 Schematic diagram of the wafer rack structure Figure 1 ;

[0022] Figure 4 Schematic diagram of the wafer rack structure Figure 2 ;

[0023] Figure 5 is a schematic diagram of the main view of a wafer rack;

[0024] Figure 6 is a top view schematic diagram of a wafer rack;

[0025] Figure 7 Schematic diagram of the wafer rack structure Figure 3 ;

[0026] In the figure:

[0027] 1- platform, 11- protruding part, 12- recessed part;

[0028] 2- Wafer rack;

[0029] 21-top plate, 211-web portion, 212-flange portion, 213-trapezoidal opening, 214-reinforcement ribs;

[0030] 22-bottom plate, 221-air pressure hole;

[0031] 23-connecting body, 231-closing piece, 232-partitioning piece, 233-side plate, 234-exterior eaves plate, 235-round hole. DETAILED DESCRIPTION

[0032] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions of the structural schematic diagram in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] like Figure 1-7 As shown, a wafer anti-fouling storage device is used to place wafers, including: a table 1 and a wafer rack 2 arranged on the table 1, one end of the table 1 is in contact with the ground, the table 1 extends from the end in contact with the ground in a direction away from the ground, and the extension direction of the table 1 forms an angle of 30 degrees with the ground, so that the wafer is in contact with the wafer rack 2 under the action of gravity, the table 1 also includes a protrusion 11 and a recessed portion 12, the structure of the recessed portion 12 matches the structure of the bottom surface of the wafer rack 2, the wafer rack 2 can be limitedly arranged in the recessed portion 12, and the wafer rack 2 can also be moved along the recessed portion 12. When the outer normal direction of the protruding portion 12 leaves the recessed portion 12 and the wafer rack 2 is limited in the recessed portion 12, the protruding portion 11 and the recessed portion 12 are in contact with different end faces of the wafer rack 2 respectively. The wafer rack 2 includes portions arranged in an array along its inner wall at fixed intervals, and a receiving cavity is formed between adjacent array portions for receiving wafers. By the inclined arrangement of the table 1 and the cooperation between the table 1 and the wafer rack 2, the side of the wafer filled with ink can be arranged facing away from the wafer rack 2. Under the action of gravity, the side of the wafer filled with ink will not contact the wafer rack 2, thereby preventing the ink on the wafer from causing contamination.

[0034] In some embodiments, the wafer rack 2 includes a top plate 21, a bottom plate 22, and two symmetrically arranged connectors 23. The top plate 21 and the bottom plate 22 are fixedly connected between the two symmetrical connectors 23 and are respectively located at the front and rear ends of the wafer rack 2. The top plate 21 is an H-shaped structure as a whole, including a web portion 211 and flange portions 212 arranged at both ends thereof. The upper and lower ends of the top plate 21 are semi-enclosed openings, and the opening at the upper end thereof extends symmetrically from the edge of the top plate 21 into the top plate 21 at a fixed angle and is closed. , and then the top end of the flange 212 is configured to be inclined, the opening cross section of the lower end of the top plate 21 is configured to be a rectangular structure, and trapezoidal openings 213 are also provided at the outer corners of the lower ends of the two flanges 212. The inclination direction of the lower end of the flange 212 is the same as the inclination direction of the top end thereof, which is used to match the structure of the wafer; through the specific design of the wafer rack 2, one end of the flat head of the wafer is arranged toward the outside of the wafer rack 2, and one end of the arc thereof is arranged toward the inside of the wafer rack 2. By setting the wafer rack 2 to be inclined inward, the wafer can be effectively prevented from being damaged;

[0035] In some embodiments, the web portion 211 is provided with reinforcing ribs 214 protruding outward from its surface, and the reinforcing ribs 214 extend toward the two flange portions 212 to the edges of the flange portions 212 respectively. The lower ends of the flange portions 212 are also provided protruding outward, and the lower ends of the flange portions 212 can be just limited in the recessed portion 12 of the platform 1. The bottom plate 22 and the connector 23 cooperate to close one end of the wafer rack 2, and an air pressure hole 221 is also provided in the middle of the bottom plate 22 for balancing the air pressure between the bottom plate 22 and the outside world.

[0036] In some embodiments, the connector 23 includes a closing member 231, a partition 232, a side plate 233, and an outer eaves plate 234. The closing member 231 is symmetrically arranged at both ends of the side plate 233. The closing member 231 is extended outward in the direction close to the flange portion 212 and in the protruding direction of the reinforcing rib 214. The partition 232 is linearly arranged on the side plate 233 at a fixed interval and fixedly connected thereto. The top end of the closing member 231 protrudes outward. Both ends of the outer eaves plate 234 are fixedly connected to the outwardly protruding portion of the closing member 231. The outer eaves plate 234 is also fixedly connected to the top end of the side plate 233 in a closed manner.

[0037] In some embodiments, the protruding portion of the top of the closing member 231 and the edge of the outer eaves plate 234 are provided with through holes 235, which are used for bolt connection and balancing air pressure respectively;

[0038] In some embodiments, the bottom of the side plate 233 extends from the lower end of the top plate 21 toward the bottom plate 22 and fits with the two. The side plate 233 also extends from the lower end of the top plate 21 toward the closing member 231, and its side wall fits with the side wall of the closing member 231. The top plate 21 and the bottom plate 22 are connected by the side plate 233, and one end surface of the wafer rack 2 is made hollow, which matches the wafer structure and reduces the weight of the wafer rack 2. The protruding portion of the flange 212 ensures that the wafer rack 2 can be limited in the table 1.

[0039] In some embodiments, when the wafer rack 2 is limitedly disposed in the recessed portion 12, the bottom plate 22 fits the protruding portion 11;

[0040] In this embodiment, the bottom plate 22 of the wafer rack 2 is first directed toward the side of the bottom of the slope of the table 1, and the protruding portion of the flange 212 of the wafer rack 2 is aligned with the recessed portion 12 of the table 1, so that the wafer rack 2 is firmly placed in the recessed portion 12, and then the side of the wafer containing ink to be dried is arranged with its back to the partition 232, and each wafer containing ink to be dried is placed in the space between the two partitions 232 in turn, thereby realizing the storage operation of the wafer containing ink to be dried.

Claims

1. A wafer anti-fouling storage device for placing wafers, characterized in that: include: A table body and a wafer rack arranged on the table body, one end of the table body is in contact with the ground, the table body extends from the end thereof in contact with the ground in a direction away from the ground, and an angle of 30 degrees is formed between the extension direction of the table body and the ground, so as to make the wafer fit with the wafer rack under the action of gravity, the table body also includes a protruding portion and a recessed portion, the structure of the recessed portion matches the structure of the bottom surface of the wafer rack, the wafer rack can be limitedly arranged in the recessed portion, and the wafer rack can also leave the recessed portion along the outer normal direction of the recessed portion, when the wafer rack is limited in the recessed portion, the protruding portion and the recessed portion respectively contact different end faces of the wafer rack, and the wafer rack includes parts arranged in an array along its inner wall at fixed intervals, and a receiving cavity is formed between adjacent array parts for receiving the wafer.

2. The wafer anti-contamination storage device according to claim 1, characterized in that: The wafer rack includes a top plate, a bottom plate and two symmetrically arranged connectors, the top plate and the bottom plate are fixedly connected between the two symmetrical connectors, and are respectively located at the front and rear ends of the wafer rack, the top plate is an overall H-shaped structure, including a web portion and flange portions arranged at its two ends, the upper and lower ends of the top plate are semi-closed openings, the opening at the upper end extends symmetrically from the edge of the top plate into the top plate at a fixed angle and is closed, and then the top end of the flange portion is configured to be inclined, the opening cross-section of the lower end of the top plate is configured to be a rectangular structure, and trapezoidal openings are also provided at the outer corners of the lower ends of the two flange portions, and the inclination direction of the lower end of the flange portion is the same as the inclination direction of its top end, which is used to match the structure of the wafer.

3. The wafer anti-contamination storage device according to claim 2, characterized in that: The web portion is provided with reinforcing ribs protruding outward from its surface, and the reinforcing ribs extend toward the two flange portions to the edges of the flange portions respectively. The lower ends of the flange portions are also provided with protruding outwards, and the lower ends of the flange portions can be just limited in the recessed portion of the platform body. The bottom plate cooperates with the connector to close one end of the wafer rack, and an air pressure hole is also provided in the middle of the bottom plate for balancing the air pressure between the bottom plate and the outside world.

4. The wafer anti-contamination storage device according to claim 3, characterized in that: The connector includes a closing piece, a partition, a side panel and an outer eave panel. The closing piece is symmetrically arranged at both ends of the side panel. The closing piece is extended outward in the direction close to the flange portion and in the protruding direction of the reinforcing rib. The partition is linearly arranged on the side panel at a fixed interval and fixedly connected thereto. The top end of the closing piece protrudes outward, and the two ends of the outer eave panel are fixedly connected to the outwardly protruding portion of the closing piece. The outer eave panel is also fixedly connected to the top end of the side panel in a closed manner.

5. The wafer anti-contamination storage device according to claim 4, characterized in that: The protruding portion of the top of the closure member and the edge of the outer eaves plate are both provided with through circular holes, which are respectively used for bolt connection and balancing air pressure.

6. The wafer anti-contamination storage device according to claim 5, characterized in that: The bottom of the side plate extends from the lower end of the top plate toward the bottom plate and fits with the two. The side plate also extends from the lower end of the top plate toward the closure, and its side wall fits with the side wall of the closure.

7. The wafer anti-contamination storage device according to claim 6, characterized in that: When the wafer rack is limitedly disposed in the recessed portion, the bottom plate is fitted with the protruding portion.

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