Door structure and feeding device of semiconductor packaging equipment

Abstract

The utility model discloses a door structure and a semiconductor packaging equipment feeding device, the door structure comprises a door body, a door plate and a supporting assembly, and an opening is formed in the door body; the door plate is pivotally connected to the door body and can cover the opening of the door body, and a feeding space is formed by the door plate and the door body; the supporting assembly comprises a supporting rod rotationally arranged on the door plate and a lower end shoulder shaft screw fixed to the door body, a long groove and a fixing groove are formed in the supporting rod, the long groove extends in the length direction of the supporting rod, and the fixing groove is formed in the end, close to the fixed lower end shoulder shaft screw, of the supporting rod. The fixing groove is communicated with the long groove and extends upwards at a certain angle with the long groove, the door structure has a first state and a second state, in the first state, the shoulder shaft screw at the lower end is slidably arranged in the long groove, and the door plate pivots relative to the door body; in the second state, the end shoulder shaft screw is arranged in the fixing groove, and the door plate and the door body are relatively static. A certain angle is kept between the door plate and the door body, two hands are liberated, and efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to a door structure capable of maintaining an open state, and a semiconductor packaging equipment loading device applying the door structure. Background Art

[0002] The semiconductor production process consists of wafer manufacturing, wafer testing, chip packaging and post-packaging testing. After plastic packaging, a series of operations are required, such as post-curing, cutting and molding, electroplating and printing. The typical packaging process is: dicing, loading, bonding, plastic packaging, deburring, electroplating, printing, cutting and molding, appearance inspection, finished product testing, packaging and shipment. In the semiconductor packaging process, the product must go through the process of loading, operation and unloading in each process. During the operation of the loading device, a door structure is required to isolate the working area from the personnel activity area. The opening of the existing equipment needs to be opened and maintained manually, which is inefficient and has low safety.

[0003] Therefore, in view of the above technical problems, it is necessary to provide an improved door structure that can be opened and maintained in a certain state.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The utility model aims to provide a door structure which can be kept in an open state without the need for human maintenance and has high safety.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] The utility model discloses a door structure, which includes a door body, a door panel and a support assembly, wherein the door body is formed with an opening; the door panel is pivotally connected to the door body, and the door panel can cover the door body opening and form a feeding space with the door body; the support assembly includes a support rod rotatably arranged on the door panel, and a lower end shoulder shaft screw fixed to the door body, a long groove and a fixed groove are provided on the support rod, the long groove extends along the length direction of the support rod, and the fixed groove is provided at one end of the support rod close to the lower end shoulder shaft screw, the fixed groove is connected with the long groove and extends upward at a certain angle with the long groove, wherein the door structure has a first state and a second state, in the first state, the lower end shoulder shaft screw can be slidably placed in the long groove, and the door panel pivots relative to the door body; in the second state, the lower end shoulder shaft screw is placed in the fixed groove, and the door panel and the door body are relatively stationary.

[0008] In one or more embodiments of the present invention, the length of the fixing groove is greater than or equal to the diameter of the lower shoulder shaft screw.

[0009] In one or more embodiments of the present invention, a first gasket is sleeved on the lower shoulder shaft screw, and the first gasket is squeezed between the lower shoulder shaft screw and the support rod.

[0010] In one or more embodiments of the present invention, the lower shoulder shaft is screwed to the inner wall of one side of the door body.

[0011] In one or more embodiments of the present invention, a right-angled mounting piece is provided on the door panel, one side of the mounting piece is fixed to the door panel, and the support rod is rotatably provided on the other side of the mounting piece.

[0012] In one or more embodiments of the present invention, the support rod is rotatably connected to the mounting plate via an upper shoulder screw.

[0013] In one or more embodiments of the present invention, a second gasket is provided between the upper shoulder shaft screw and the support rod.

[0014] In one or more embodiments of the present invention, a first stopper is fixed on a side of the door panel facing the door body, and a second stopper is fixed on an inner wall of the door body. When the door panel is covered with the door body, the first stopper abuts against the second stopper.

[0015] In one or more embodiments of the present invention, the door panel is pivotally connected to the door body via a hinge, and / or a transparent observation window is provided on the door panel, and / or a handle is provided on a side of the door panel facing away from the feed space.

[0016] The utility model also provides a loading device for semiconductor packaging equipment, comprising the above-mentioned door structure, and the door structure is arranged at the feeding port of the loading device.

[0017] Compared with the prior art, the door structure of the utility model can be switched between a first state and a second state. The first state is an active state, and the second state is a fixed state. At this time, the door panel and the door body maintain a certain angle and are relatively still. The door panel will not rotate without external force, freeing the hands of the staff and having higher flexibility and safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a schematic diagram of a door structure in one embodiment of the utility model;

[0020] Figure 2 This is a schematic diagram of a support assembly in one embodiment of the utility model;

[0021] Figure 3 It is a schematic diagram of the position of the fixing groove in one embodiment of the utility model.

[0022] Description of main reference numerals:

[0023] 100-door structure, 10-door body, 11-second stopper, 20-door panel, 21-first stopper, 22-observation window, 23-handle, 30-support assembly, 31-support rod, 311-long slot, 312-fixing slot, 32-lower shoulder shaft screw, 33-first gasket, 34-mounting plate, 35-upper shoulder shaft screw, 36-second gasket, 40-hinge. DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0025] like Figure 1-3As shown, the door structure 100 in one embodiment of the utility model includes a door body 10, a door panel 20 and a support assembly 30. The door panel 20 is pivotally connected to the door body 10 and can cover the opening of the door body 10, forming a relatively closed feeding space between the two. The support assembly 30 includes a support rod 31 and a lower shoulder screw 32, one end of the support rod 31 is rotatably set on the door panel 20, and the support rod 31 is provided with a long groove 311 and a fixed groove 312 that are interconnected, wherein the long groove 311 extends along the length direction of the support rod 31, and the fixed groove 312 is provided on the support rod 31 at one end close to the door body 10 and extends upward at a certain angle. The lower shoulder screw 32 is fixed to the door body 10 and is limited in the long groove 311 and the fixed groove 312. The door structure 100 has a first state and a second state, wherein the first state is an active state, in which the lower end shoulder shaft screw 32 slides in the long groove 311, and the door panel 20 pivots on the door body 10 so that the door body can be opened or closed; the second state is a fixed state, in which the lower end shoulder shaft screw 32 is located in the fixed groove 312, and the door panel 20 and the door body 10 are relatively stationary at a certain angle, and the door panel 20 will not rotate without external force.

[0026] In the above embodiment, when the door panel 20 is covered on the door body 10, the lower shoulder screw 32 moves relatively to the end of the long slot 311 close to the door panel 20; when the door panel 20 is rotated to open, the support rod 31 moves with it, and the lower shoulder screw 32 moves toward the side of the fixed slot 312. After the door panel 20 is opened to a certain angle, the lower shoulder screw 32 moves to the connection between the long slot 311 and the fixed slot 312, and the lower shoulder screw 32 can fall into the fixed slot 312 under the action of gravity or manual assistance to fix the door panel 20 in the corresponding position. When it is necessary to release the door panel 20, it is only necessary to lift the support rod 31 upward for a certain distance, so that the lower shoulder screw 32 is separated from the fixed slot 312 and falls into the long slot 311, and then rotate the door panel 20 to close it. Therefore, the door structure 100 can be kept at a certain angle after opening, and the staff does not need to hold the door panel 20, freeing both hands and improving work efficiency.

[0027] In this embodiment, under the action of gravity and due to the extension direction of the long slot 311 , the side wall 3121 of the fixing slot 312 close to the long slot 311 is the force-applying end, and the side wall 3121 presses against the lower shoulder shaft screw 32 .

[0028] Preferably, to prevent the door panel 20 from falling suddenly, the angle between the fixing groove 312 and the long groove 311 is set so that when the lower shoulder shaft screw 32 falls into the fixing groove 312, the fixing groove 312 is in a vertical direction, or is biased toward the side of the long groove 311 compared to the vertical direction, so that the lower shoulder shaft screw 32 can be more firmly fixed in the fixing groove 312.

[0029] Furthermore, in order to ensure the fixing effect and prevent the lower shoulder shaft screw 32 from abnormally detaching from the fixing groove 312 and causing the door panel 20 to suddenly slip off, the length of the fixing groove 312 is set to be greater than or equal to the diameter of the lower shoulder shaft screw 32, so that the lower shoulder shaft screw 32 can stably fall into the fixing groove 312 with higher integrity.

[0030] Preferably, a first gasket 33 is sleeved on the lower shoulder shaft screw 32, which is squeezed between the lower shoulder shaft screw 32 and the support rod 31 to increase the contact area between the two and prevent the lower shoulder shaft screw 32 from falling into the fixing groove 312 or the long groove 311, causing the support rod 31 to detach from the lower shoulder shaft screw 32.

[0031] In one embodiment, the lower shoulder shaft fixing screw 32 is fixed to the inner wall of one side of the door body 10, so that the support rod 31 moves on the inner side of the door body 10, and when the door panel 20 is covered, the support rod 31 falls into the internal feeding space. Through the above arrangement, the support rod 31 is less affected by external interference and has higher stability.

[0032] like Figure 1 and 2 As shown, a right-angled mounting piece 34 is fixed on the door panel 20, one side of which is fixed on the door panel 20, and the support rod 31 is rotatably connected with the other side thereof. Specifically, the support rod 31 is rotatably connected with the mounting piece 34 through an upper shoulder screw 35.

[0033] It is easy to imagine that a second gasket 36 is provided between the upper shoulder shaft screw 35 and the support rod 31 to increase the contact area between the upper shoulder shaft screw 35 and the support rod 31 .

[0034] Preferably, a first stopper 21 is fixed on the side of the door panel 20 facing the door body 10, and a second stopper 11 is arranged on the inner wall of the corresponding side of the door body 10. When the door panel 20 is closed, the two stops come into contact to provide a buffering effect.

[0035] Furthermore, the first stop block 21 and the second stop block 11 can be magnetic blocks that cooperate with each other. When the first stop block 21 and the second stop block 11 are close to each other, they can attract each other to fix the door panel 20 at the opening of the door body 10, and the door panel 20 will not separate from the door body 10 when there is no additional force, so as to improve safety and stability.

[0036] In this embodiment, a support assembly 30 is only provided on one side of the door body 10. To improve the supporting effect, a group of support assemblies 30 can also be provided on the other side to provide support from both sides to improve the fixing effect and prevent the door panel 20 from tilting.

[0037] Preferably, the door panel 20 and the door body 10 are connected by a hinge 40. At the same time, a transparent observation window 22 is provided on the door panel 20 for observing the internal situation without opening the door panel 20. A handle 23 is also provided on the outer side of the door panel 20 for providing a gripping position during operation.

[0038] In this embodiment, the opening of the door body 10 is tilted, and the tilt angle can be set according to the on-site conditions. Of course, the opening of the door body 10 can also be vertically upward, which is not limited in this embodiment.

[0039] The present embodiment further provides a loading device for semiconductor packaging equipment. The door structure 100 in the present embodiment is arranged at the feeding port of the loading device. The working area and personnel are isolated by the door structure 100, and the door panel 20 can be self-locking when opened, freeing the hands of the staff and improving work efficiency and safety.

[0040] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0041] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A door structure, characterized in that: include: A door body, the door body being formed with an opening; A door panel, pivotally connected to the door body, the door panel being able to cover the opening and forming a feeding space with the door body; The support assembly includes a support rod rotatably arranged on the door panel, and a lower shoulder shaft screw fixed on the door body, wherein the support rod is provided with a long slot and a fixed slot, wherein the long slot extends along the length direction of the support rod, and the fixed slot is provided at one end of the support rod close to the lower shoulder shaft screw, and the fixed slot is connected with the long slot and extends upward at a certain angle to the long slot. wherein the door structure has a first state and a second state, In the first state, the lower shoulder screw is slidably disposed in the long slot, and the door panel can pivot relative to the door body; In the second state, the lower shoulder shaft screw is placed in the fixing groove, and the door panel and the door body are relatively stationary.

2. The door structure according to claim 1, characterized in that: The length of the fixing groove is greater than or equal to the diameter of the lower shoulder shaft screw.

3. The door structure according to claim 1, characterized in that: A first gasket is also sleeved on the lower shoulder shaft screw, and the first gasket is squeezed between the lower shoulder shaft screw and the support rod.

4. The door structure according to claim 1, characterized in that: The lower end shoulder shaft is screwed to the inner wall of one side of the door body.

5. The door structure according to claim 1, characterized in that: The door panel is provided with a right-angled mounting piece, one side of which is fixed to the door panel, and the support rod is rotatably disposed on the other side of the mounting piece.

6. The door structure according to claim 5, characterized in that: The support rod is rotatably connected to the mounting plate via an upper end shoulder shaft screw.

7. The door structure according to claim 6, characterized in that: A second gasket is provided between the upper shoulder shaft screw and the support rod.

8. The door structure according to claim 1, characterized in that: A first stopper is fixed on a side of the door panel facing the door body, and a second stopper is fixed on an inner wall of the door body. When the door panel is covered with the door body, the first stopper abuts against the second stopper.

9. The door structure according to claim 1, characterized in that: The door panel is pivotally connected to the door body via a hinge, and / or a transparent observation window is provided on the door panel, and / or a handle is provided on a side of the door panel facing away from the feeding space.

10. A semiconductor packaging equipment loading device, characterized in that: It comprises a door structure as described in any one of claims 1-9, and the door structure is arranged at a feed port of a feeding device of the semiconductor packaging equipment.

Images