Cabin door structure

Abstract

The utility model discloses a cabin door structure which is assembled at the side part of a cabin plate with an opening, the cabin plate is arranged at the side part of a furnace body, and the cabin door structure comprises a sealing plate arranged at the side part of the cabin plate forming the opening, at least two positioning pieces fixedly arranged at the two ends of the cabin plate, and at least two locking rods embedded in the sealing plate, the driving piece is used for driving the locking rod to be movably accommodated in the positioning piece; a wedge-shaped surface is formed on the outer side of the end part of the locking rod, an accommodating hole for movably accommodating the end part of the locking rod is formed in the positioning piece, and a binding surface matched with the wedge-shaped surface is formed on the inner side of the accommodating hole; the locking rod is driven by the driving piece to move outwards in the axial direction and stretch into the containing hole, the wedge-shaped face is guided by the attaching face to be attached, so that the sealing plate is driven to move inwards in the radial direction, and the sealing plate is attached to the side portion of the cabin plate and seals the opening. According to the utility model, the sealing of the opening formed by the cabin plate is realized, so that the sealing effect inside the furnace body is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of heat treatment, in particular to a cabin door structure. Background Art

[0002] In the manufacture of semiconductor devices, the wafer needs to be heat treated to eliminate defects inside the wafer and optimize the grain boundary structure and crystal quality. Annealing is a common wafer heat treatment method. Annealing furnace is a common equipment used for annealing wafers. By heating the wafer and keeping it warm under certain conditions, the lattice structure can be changed, impurities and stress can be eliminated, and the electrical properties and structural integrity of the wafer can be improved.

[0003] The basic structure of a wafer annealing furnace usually consists of a heating chamber, a control system, a feeding device, and a discharging device. The heating chamber is used to uniformly heat and insulate the wafer, and the heating temperature, time, atmosphere and other parameters are controlled by the control system to achieve the desired annealing effect for the wafer. The air pressure during the wafer annealing process needs to be controlled within a certain range to ensure that the wafer is heated evenly and to avoid problems such as oxidation and contamination. Therefore, the wafer annealing furnace itself has relatively high requirements for its sealing. If the sealing effect of the wafer annealing furnace is not good, it is easy to affect the final heat treatment effect of the wafer. However, after the wafer is placed in the existing wafer annealing furnace, the cavity is not tightly sealed due to uneven closing force when the hatch is closed, which affects the vacuum sealing and cleanliness of the cavity.

[0004] In view of this, it is necessary to improve the wafer annealing furnace in the prior art to solve the above problems. Utility Model Content

[0005] The utility model aims to disclose the problem that after the wafer is taken in and out of the existing wafer annealing furnace, the cavity is not tightly sealed due to uneven closing force when the hatch is closed, which affects the vacuum sealing and cleanliness of the cavity.

[0006] To achieve the above object, the utility model provides a hatch structure, which is assembled on the side of a hatch plate with an opening, and the hatch plate is arranged on the side of a furnace body, and the hatch structure includes:

[0007] A sealing plate disposed on the side of the opening formed by the cabin plate, at least two positioning members fixedly disposed at both ends of the cabin plate, at least two locking rods embedded in the sealing plate, and a driving member that drives the locking rods to move and be accommodated in the positioning members;

[0008] The outer side of the end of the locking rod forms a wedge-shaped surface, the interior of the positioning member is provided with a receiving hole for movably accommodating the end of the locking rod, and the inner side of the receiving hole forms a fitting surface adapted to the wedge-shaped surface;

[0009] The locking rod is driven by the driving member to move axially outward and extend into the accommodating hole, and the fitting surface guides the wedge-shaped surfaces to fit each other, thereby driving the sealing plate to move radially inward, so that the sealing plate fits the side of the cabin plate and seals the opening.

[0010] As a further improvement of the present invention, the driving member is configured as one, and the one driving member simultaneously drives multiple locking rods to be movably accommodated in the positioning member;

[0011] or,

[0012] The number of the driving members is at least two, and a single driving member independently drives a single locking rod to move axially.

[0013] As a further improvement of the present invention, the locking rods are configured in four numbers and the driving members are configured in four numbers to respectively fix the four corners of the sealing plate.

[0014] As a further improvement of the present invention, the locking rod includes: a rod body, a rod shaft and a rod head arranged axially in sequence, the driving member is arranged on a side of the rod body away from the rod shaft, and the wedge surface is formed on the outer side of the end of the rod head away from the rod shaft.

[0015] As a further improvement of the present invention, the locking rod also includes: a positioning threaded member and an elastic member sleeved on the outside of the rod shaft, the two ends of the elastic member respectively abut against the positioning threaded member and the rod body, and the positioning threaded member forms a threaded connection with the inside of the sealing plate.

[0016] As a further improvement of the utility model, the locking rod further comprises: a flat key is protrudingly provided on the side of the rod head, and a strip groove is formed inside the sealing plate for the flat key to move axially.

[0017] As a further improvement of the present invention, the driving member is configured as a multi-layer cylinder, and the locking rod further includes: a sealing ring arranged between the rod body and the driving member.

[0018] As a further improvement of the present invention, at least one displacement sensor is embedded in the side of the cabin plate facing the sealing plate.

[0019] As a further improvement of the utility model, the sealing plate is provided with a mounting groove on the side facing away from the cabin plate for partially embedding the locking rod, and the cabin door structure further comprises: a limiting baffle plate arranged on the outside of the mounting groove to restrict the locking rod to the mounting groove.

[0020] As a further improvement of the present invention, the hatch structure further includes: a connecting piece fixed to the side of the sealing plate, a push-pull cylinder driving the connecting piece to move horizontally, and a lifting cylinder driving the connecting piece to move longitudinally.

[0021] Compared with the prior art, the beneficial effects of the utility model are:

[0022] A sealing plate is arranged on the side of the cabin plate where an opening is formed (i.e., on the side of the cabin plate facing away from the furnace body), and at least two positioning members are fixedly arranged at both ends of the cabin plate, at least two locking rods are embedded in the sealing plate, and a wedge-shaped surface is formed on the outer side of the end of the locking rod, and an accommodating hole for movably accommodating the locking rod is provided inside the positioning member, and a fitting surface matched with the wedge-shaped surface is formed on the inner side of the accommodating hole, and a driving member is provided at the same time for driving the locking rod to be movably accommodated in the positioning member. The locking rod is driven by a driving member to move axially outward and extend into the accommodating hole, and the fitting surface guides the wedge-shaped surface to fit together, so as to drive the sealing plate to move radially inward, so that the sealing plate fits against the side of the cabin plate and seals the opening. The fitting surface and the wedge-shaped surface fit together to support the locking rod, thereby ensuring the sealing effect of the sealing plate on the cabin plate, so as to solve the problem that after the wafer is taken in and out of the existing wafer annealing furnace, the cavity is not sealed tightly due to uneven closing force when the cabin door is closed, which affects the vacuum sealing and cleanliness of the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional diagram of an annealing device provided by the utility model at a viewing angle;

[0024] Figure 2 It is a three-dimensional picture of the furnace body and the cabin board at a certain viewing angle;

[0025] Figure 3 A three-dimensional diagram of a sealing plate, a positioning member and a limit baffle at a certain viewing angle;

[0026] Figure 4 for Figure 3 The stereogram shown omits showing a stereogram of a positioning member in another viewing angle;

[0027] Figure 5 A three-dimensional diagram of four locking rods, four positioning members and four driving members at a viewing angle;

[0028] Figure 6 A three-dimensional diagram of a locking rod and a driving member in one viewing angle, with the elastic member and a positioning screw member omitted;

[0029] Figure 7 It is a three-dimensional image of the positioning member at a certain viewing angle. DETAILED DESCRIPTION

[0030] The present invention is described in detail below in conjunction with the various embodiments shown in the accompanying drawings, but it should be noted that these embodiments are not limitations of the present invention, and any equivalent transformations or substitutions in functions, methods, or structures made by ordinary technicians in the field based on these embodiments are all within the scope of protection of the present invention.

[0031] It should be understood that, in the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present technical solution and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present technical solution.

[0032] Ginseng Figures 1 to 7 As shown, the utility model shows a specific implementation of a hatch structure 10, which is configured as a structural member of an annealing device 100, and is specifically assembled on the side of a hatch plate 20 with an opening 21, and the hatch plate 20 is arranged on the side of a furnace body 30, and a wafer is placed inside the furnace body 30 from the opening 21, and the wafer is heat-treated through the furnace body 30, and after the heat treatment, the heat-treated wafer is taken out from the opening 21, thereby realizing the entire heat treatment process of the wafer.

[0033] Ginseng Figure 1 , Figure 2 , Figure 5 and Figure 7 As shown, the hatch structure 10 includes: a sealing plate 11 disposed on the side of the hatch 20 where the opening 21 is formed, at least two positioning members 12 fixedly disposed at both ends of the hatch 20, at least two locking rods 13 embedded in the sealing plate, and a driving member 14 driving the locking rods 13 to be movably accommodated in the positioning members 12. A wedge-shaped surface 131 is formed on the outer side of the end of the locking rod 13, and a receiving hole 121 for movably accommodating the locking rod 13 is provided inside the positioning member 12, and a fitting surface 122 adapted to the wedge-shaped surface 131 is formed on the inner side of the receiving hole 121. The locking rod 13 is driven by the driving member 14 to move axially outward (i.e., move along the axial direction of the locking rod 13 toward the positioning member 12) and extend into the accommodating hole 121, and the fitting surface 122 guides the wedge surface 131 to fit together, so as to drive the sealing plate 11 to move radially inward (i.e., drive the sealing plate 11 to move toward the direction close to the cabin plate 20), so that the sealing plate 11 is tightly fitted to the side of the cabin plate 20 and seals the opening 21.

[0034] Ginseng Figure 1As shown, the hatch structure 10 further includes: a connecting member 15 fixed to the side of the sealing plate 11, a push-pull cylinder 16 for driving the connecting member 15 to move horizontally, and a lifting cylinder 17 for driving the connecting member 15 to move longitudinally. When it is necessary to seal the opening 21 included in the hatch 20, the lifting cylinder 17 drives the connecting member 15 to move longitudinally to drive the sealing plate 11 to move longitudinally, and the push-pull cylinder 16 drives the connecting member 15 to move horizontally to drive the sealing plate 11 to move horizontally, so as to drive the sealing plate 11 to the side of the hatch 20, and then the driving member 14 drives the locking rod 13 to move axially outward and extend into the accommodating hole 121. Since the fitting surface 122 is matched with the wedge surface 131, the wedge surface 131 slides along the contour of the fitting surface 122 (that is, the fitting surface 122 leads to the locking rod 131 to move horizontally). The guide wedge-shaped surface 131 is fitted therewith) to drive the sealing plate 11 to move radially inward, thereby making the sealing plate 11 fit against the side of the cabin plate 20 and seal the opening 21, thereby being received in the accommodating hole 121 through the locking rod 13, and the fitting surface 122 is fitted with the wedge-shaped surface 131 to abut against the locking rod 13, thereby ensuring the sealing effect of the sealing plate 11 on the cabin plate 20, so as to solve the problem that after the wafer is taken in and out of the existing wafer annealing furnace, the cavity is not sealed tightly due to the uneven closing force when the cabin door is closed, which affects the vacuum sealing and cleanliness of the cavity.

[0035] It should be noted that when the axis of the locking rod 13 overlaps with the axis of the receiving hole 121, the sealing plate 11 and the cabin 20 are closely fitted, thereby ensuring the sealing effect. Since the wedge surface 131 is adapted to the fitting surface 122, when there is a certain deviation between the axis of the rod body 132 and the axis of the receiving hole 121, the rod body 132 moves radially into the receiving hole 121, and under the guidance of the fitting surface 122, the wedge surface 131 slides along the contour formed by the fitting surface 122 so that the fitting surface 122 fits with the wedge surface 131, thereby driving the sealing plate 11 to move radially inward, thereby achieving a close fit between the sealing plate 11 and the cabin 20. In other words, the fitting surface 122 and the wedge surface 131 are fully adapted to apply a radially inward force to the sealing plate 11, so that the sealing plate 11 is pressed against the side of the cabin 20, thereby achieving a sealing effect.

[0036] At least one displacement sensor 22 is embedded in the side of the cabin 20 facing the sealing plate 11. When the sealing plate 11 is pressed against the side of the cabin 20 by the locking rod 13, the distance between the sealing plate 11 and the cabin 20 can be detected by the displacement sensor 22. If the preset positions of the sealing plate 11 and the cabin 20 are inconsistent, corresponding adjustments can be made by the push-pull cylinder 16 and the lifting cylinder 17. The preset position can be the corresponding position of the sealing plate 11 when the sealing plate 11 completely covers the opening 21 opened by the cabin 20.

[0037] In one embodiment, the displacement sensor 22 can also be independently set corresponding to the locking rod 13, that is, multiple locking rods 13 correspond to multiple displacement sensors respectively, so as to independently detect the distance between the sealing plate 11 and the cabin plate 20 through the displacement sensor 22, and individually adjust the length of the locking rod 13 axially moving outward and extending into the positioning member 12 to ensure that the sealing plate 11 is evenly sealed at different positions of the opening 21 opened by the cabin plate 20. Specifically, when the locking rod 13 is driven by the driving member 14 to move axially outward, the wedge surface 131 first contacts the fitting surface 122, and the fitting area between the wedge surface 131 and the fitting surface 122 gradually increases during the movement. In the process of gradually increasing fitting area, the locking rod 13 moves radially inward under the guidance of the wedge surface 131. At this time, the distance between the sealing plate 11 and the cabin plate 20 gradually decreases. Therefore, the distance between the sealing plate 11 and the cabin plate 20 can be adjusted by the length of the locking rod 13 extending into the positioning member 12 (which can also be understood as the fitting area between the wedge surface 131 and the fitting surface 122). When the sealing plate 11 is held against the side of the cabin plate 20 by the locking rod 13, if the distances detected by the multiple displacement sensors 22 are inconsistent, the locking rod 13 driven by the driving member 14 can be adjusted to move axially outward and extend into the length of the positioning member 12 to adjust the distance between the sealing plate 11 and the cabin plate 20, thereby ensuring that the distances between the sealing plate 11 and the cabin plate 20 detected by the multiple displacement sensors 22 are consistent, thereby ensuring that the sealing plate 11 fits the cabin plate 20 consistently at different orientations, and ultimately ensuring that the sealing plate 11 seals the opening 21 uniformly at different orientations.

[0038] In the present application, one locking rod 13 corresponds to one positioning member 12, or one locking rod 13 on one side corresponds to one positioning member 12 on one side. Figure 5 The four locking rods 13 shown in FIG. Figure 5 Taking the perspective shown in as an example, one positioning member 12 may correspond to one locking rod 13, and one locking rod 13 may be independently and movably accommodated inside one positioning member; one positioning member 12 may also correspond to two longitudinal locking rods 13, that is, the two longitudinal locking rods 13 may be movably accommodated inside one positioning member 12 at the same time.

[0039] Meanwhile, the driving member 14 may be configured as one, and the one driving member 14 simultaneously drives the multiple locking rods 13 to move axially so as to be movably accommodated in the positioning member 12; or, the driving member 14 may be configured as at least two, and a single driving member 14 independently drives a single locking rod 13 to move axially so as to be movably accommodated in the positioning member 12. Figure 5 The four locking rods 13 shown in FIG. Figure 5 Taking the perspective shown in as an example, each locking rod 13 can be independently configured with a driving member 14, that is, Figure 5Four locking rods 13 and four driving members 14 are arranged in the middle; a plurality of locking rods can also be driven simultaneously by one driving member 14, that is, four locking rods 13 can be driven simultaneously by one driving member 14.

[0040] In addition, in the present application, since the sealing plate 11 is configured as a rectangular parallelepiped structure, preferably, Figure 5 As shown in the figure, four locking rods 13 are configured and four driving members 14 are configured. The four driving members 14 independently drive the four locking rods 13 to move axially so as to be movably accommodated in the positioning member 12 to respectively fix the four corners of the sealing plate 11, thereby achieving the best sealing effect at the premise of minimum cost.

[0041] Ginseng Figure 5 and Figure 6 As shown, the locking rod 13 includes: a rod body 132, a rod shaft 133 and a rod head 134 which are sequentially arranged axially, the driving member 14 is arranged on a side of the rod body 132 away from the rod shaft 133, and a wedge-shaped surface is formed on the outer side of the end of the rod head 134 away from the rod shaft 133. The driving member 14 drives the rod body 132, the rod shaft 133 and the rod head 134 included in the locking rod 13 to move axially, so that the rod head 134 is movably accommodated in the positioning member 12. When the sealing opening 21 needs to be sealed, the driving member 14 applies an axial outward force to the locking rod 13, so that the driving member 14 drives the locking rod 13 to move axially outward (that is, move along the axial direction of the locking rod 13 toward the positioning member 12), so that the rod head 134 extends into the interior of the positioning member 12; and when the sealing opening 21 needs to be opened, the driving member 14 applies an axial inward force to the locking rod 13, so that the driving member 14 drives the locking rod 13 to move axially inward (that is, move along the axial direction of the locking rod 13 away from the positioning member 12), so that the rod head 134 is retracted into the interior of the sealing plate 11, and this can also be achieved by the elastic member 135 described below.

[0042] Specifically, refer to Figure 5As shown, the locking rod 13 also includes: a positioning screw 136 and an elastic member 135 sleeved on the outside of the rod shaft 133, the two ends of the elastic member 135 respectively abut the positioning screw 136 and the rod body 132, and the positioning screw 136 forms a threaded connection with the inside of the sealing plate 11. An external thread (not shown) is formed on the outside of the positioning screw 136, and an internal thread (not shown) adapted to the external thread is formed inside the sealing plate 11. The external thread and the internal thread are adapted to each other to achieve the positioning screw 136 being fixed inside the sealing plate 11. At this time, since the elastic member 135 is sleeved on the outside of the rod shaft 133 and arranged between the rod body 132 and the positioning screw 136, the fixed positioning screw 136 indirectly plays a role in fixing the overall position corresponding to the elastic member 135. When the driving member 14 applies an axial outward force to the locking rod 13, the rod body 132 moves axially outward. Since the positioning screw member 136 is fixed, the elastic member 135 is squeezed by the positioning screw member 136 and the rod body 132 on both sides and deforms and compresses. When the driving member 14 cancels the axial outward force applied to the locking rod 13, the elastic member 135 in the compressed state recovers and applies the force to move the rod body 132 axially inward, thereby realizing the retraction of the locking rod 13 into the sealing plate 11.

[0043] Ginseng Figure 4 As shown, a flat key 138 is protruded from the side of the rod head 134 , and a strip groove 112 is formed inside the sealing plate 11 for the flat key 138 to move axially. The flat key 138 is clamped in the strip groove 112 and can move axially along the contour formed by the strip groove 112 . When the driving member 14 drives the locking rod 13 to move axially, the flat key 138 moves axially with the locking rod 13 in the strip groove 112. Therefore, when the fitting surface 122 guides the wedge surface 131 to fit together, under the abutment of the flat key 138 clamped in the strip groove 112, the wedge surface 131 drives the locking rod 13 to move radially inward to achieve the fitting of the fitting surface 122 and the wedge surface 131, and the wedge surface 131 does not drive the locking rod 13 to rotate axially to achieve the fitting of the fitting surface 122 and the wedge surface 131. This avoids the axial rotation of the locking rod 13 when it extends out of the sealing plate 11 and into the positioning member 12, so as to further ensure the sealing effect of the sealing plate 11 on the opening 21.

[0044] In the present application, the driving member 14 can be configured as a multi-layer cylinder structure to increase the thrust of the driving member 14 on the axial movement of the locking rod 13 formed by the rod body 132, the rod shaft 133 and the rod head 134, so as to further achieve the purpose of increasing the locking force of the sealing plate 11 on the opening 21. The locking rod 13 also includes: a sealing ring 137 disposed between the rod body 132 and the driving member 14.

[0045] Ginseng Figure 3 and Figure 4As shown, a mounting groove 111 for partially embedding the locking rod 13 is provided on the side of the sealing plate 11 facing away from the cabin plate 20, and the cabin door structure 10 further includes: a limiting baffle 18 disposed outside the mounting groove 111 to limit the locking rod 13 to the mounting groove 111. At this time, the locking rod 13 is partially embedded in the mounting groove 111, or it can be understood that the locking rod 13 is entirely accommodated in the mounting groove 111, and the mounting groove 111 partially covers the locking rod 13, and the limiting baffle 18 can be detachably assembled on the outside of the mounting groove 111 through a locking member (for example, a bolt and a nut), thereby protecting the locking rod 13 accommodated in the mounting groove 111, and facilitating replacement when the locking rod 13 and / or the driving member 14 need to be replaced.

[0046] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

[0047] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A hatch structure, mounted on the side of a hatch plate with an opening, and the hatch plate is arranged on the side of a furnace body, characterized in that: The door structure comprises: A sealing plate disposed on the side of the opening formed by the cabin plate, at least two positioning members fixedly disposed at both ends of the cabin plate, at least two locking rods embedded in the sealing plate, and a driving member that drives the locking rods to move and be accommodated in the positioning members; A wedge-shaped surface is formed on the outer side of the end of the locking rod, a receiving hole is provided inside the positioning member for movably accommodating the end of the locking rod, and a fitting surface adapted to the wedge-shaped surface is formed on the inner side of the receiving hole; The locking rod is driven by the driving member to move axially outward and extend into the accommodating hole, and the fitting surface guides the wedge-shaped surfaces to fit each other, thereby driving the sealing plate to move radially inward, so that the sealing plate fits the side of the cabin plate and seals the opening.

2. The door structure according to claim 1, characterized in that: The driving member is configured as one, and the multiple locking rods are simultaneously driven by the one driving member to be movably accommodated in the positioning member; or, The number of the driving members is at least two, and a single driving member independently drives a single locking rod to move axially.

3. The door structure according to claim 2, characterized in that: The locking rods are configured in four numbers and the driving members are configured in four numbers to respectively fix the four corners of the sealing plate.

4. The door structure according to claim 1, characterized in that: The locking rod comprises: a rod body, a rod shaft and a rod head which are arranged axially in sequence; the driving member is arranged on a side of the rod body away from the rod shaft; and the wedge surface is formed on the outer side of the end of the rod head away from the rod shaft.

5. The door structure according to claim 4, characterized in that: The locking rod further comprises: a positioning screw and an elastic member sleeved on the outside of the rod shaft, two ends of the elastic member respectively abut against the positioning screw and the rod body, and the positioning screw is threadedly connected with the inside of the sealing plate.

6. The door structure according to claim 4, characterized in that: A flat key is protrudingly arranged on the side of the rod head, and a strip groove for axial movement of the flat key is formed inside the sealing plate.

7. The door structure according to claim 4, characterized in that: The driving member is configured as a multi-layer cylinder, and the locking rod further includes: a sealing ring arranged between the rod body and the driving member.

8. The door structure according to claim 1, characterized in that: At least one displacement sensor is embedded in the side of the cabin plate facing the sealing plate.

9. The door structure according to claim 1, characterized in that: The sealing plate has a side facing away from the cabin plate to form a mounting groove for partially embedding the locking rod. The cabin door structure also includes a limiting baffle plate arranged outside the mounting groove to limit the locking rod to the mounting groove.

10. The door structure according to claim 1, characterized in that: The door structure further includes: a connecting piece fixed to the side of the sealing plate, a push-pull cylinder for driving the connecting piece to move horizontally, and a lifting cylinder for driving the connecting piece to move longitudinally.

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