Vertical developing spray tray device

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By designing a vertical development spray disc device in the spray structure and controlling the spray disc position with a swing mechanism with high precision, the problem that the spray structure in the prior art cannot quickly erode the fine lines, and achieve a higher precision etching effect.

CN222582675UActive Publication Date: 2025-03-07SUZHOU XUAN MINGSHI SEMICON EQUIP TECH CO LTD

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Patent Information

Application Number: CN202420916010.9
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-04-29
Publication Date: 2025-03-07
Estimated Expiration: 2034-04-29

AI Technical Summary

Technical Problem

The existing spray structure cannot achieve rapid erosion of the circuit in the production of fine circuit boards, resulting in the inability to produce the circuit, and the adjustment accuracy of the spray plate is not high, making it not suitable for the production of fine circuit boards.

Method used

A vertical development spray disc device is designed, adopting two oppositely arranged spray discs, each spray disc is provided with a swing mechanism above it, and the up and down swing of the spray disc is controlled with high precision through the servo cylinder to ensure the precise adjustment of the spray position and the start and stop position.

Benefits of technology

A more uniform local etching rate is achieved, the consistency of the entire etching is ensured, and the etching accuracy is improved. It is suitable for high-demand and fine circuit board etching, development and film removal.

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Abstract

The utility model provides a vertical developing spray tray device which comprises two spray trays which are oppositely arranged, a swing mechanism is arranged above each spray tray, and a clamp for loading a circuit tray moves and passes between the two spray trays during spraying; the swing mechanism is used for driving the corresponding spraying disc to move up and down and comprises a bottom plate, a servo electric cylinder, a driving plate and pull rods, the servo electric cylinder is fixed to the upper portion of the bottom plate, the output end of the servo electric cylinder is connected with the driving plate, the two pull rods are symmetrically arranged on the two sides of the driving plate, and the lower ends of the pull rods are connected with the spraying disc. The circuit board etching device is high in etching precision, good in etching effect, wide in application range and suitable for etching, developing and film removing of high-requirement and fine circuit boards.

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Description

Technical Field

[0001] The utility model relates to the technical field of circuit board manufacturing, in particular to a vertical developing spray disc device. Background Art

[0002] The production of circuit boards usually adopts the process of substrate dry film → exposure → development → etching → film stripping. Among them, development is one of the core processes of the circuit board wet process. Its working principle is to spray the etching solution evenly onto the surface of the copper foil through the nozzle, and produce an oxidation-reduction reaction with the copper without etching resist protection, and react the unnecessary copper to expose the substrate. After the film stripping treatment, the circuit is formed.

[0003] During the development process, a spray structure is usually set in the developing equipment to realize the developer spraying operation to show the circuit part on the circuit board. Most of the existing spray structures adopt a fluid spray, and the particle size of the sprayed liquid particles is above 100um. For fine circuit boards (line width and line spacing less than 10um), the particle size is relatively large, and the circuit cannot be quickly etched, resulting in the inability to produce the circuit. Therefore, in the production process of fine circuit boards, it is necessary to etch the circuit by secondary immersion after a fluid spray etching. The circuit etching factor is very poor, and the produced circuit has many burrs and cannot achieve the impedance and line shape desired by customers. In addition, the spray discs on both sides of the existing fluid spray device can generally only swing synchronously. Although the spray position and start and stop position can be adjusted, the adjustment accuracy is not high, which is not suitable for the production of fine circuit boards. Utility Model Content

[0004] The utility model aims to provide a vertical developing spray plate device to overcome the shortcomings in the prior art.

[0005] In order to solve the above technical problems, the technical solution of the utility model is: a vertical developing spray disc device, comprising two oppositely arranged spray discs, each of which is provided with a swing mechanism above, and the clamp loaded with the circuit disc moves through between the two spray discs during spraying; the swing mechanism is used to drive its corresponding spray disc to move up and down, and comprises a base plate, a servo electric cylinder, a drive plate, and a pull rod. The servo electric cylinder is fixed above the base plate, and its output end is connected to the drive plate. Two symmetrically arranged pull rods are provided on both sides of the drive plate, and the lower end of the pull rod is connected to the spray disc.

[0006] Furthermore, in the above-mentioned vertical developing spray disc device, the swing mechanism also includes an upper guide assembly, which is arranged on the base plate and includes a column and a limit plate. The columns are provided with two and are symmetrically arranged on both sides of the servo electric cylinder. The bottoms of the two columns are connected to the base plate, and the upper ends pass through the linear bearings arranged on the driving plate and are connected to the limit plate.

[0007] Furthermore, in the above-mentioned vertical developing spray disc device, the swing mechanism also includes a lower guide assembly, and the lower guide assembly includes a guide wheel seat and a sliding rod. The upper and lower ends of the two side surfaces of the spray disc are provided with guide wheel seats, and the guide wheel seats are provided with two guide wheels arranged in parallel. The sliding rod is fixedly connected to the bottom plate and passes through between the two guide wheels to be slidably connected to the guide wheels.

[0008] Furthermore, in the above-mentioned vertical developing spray plate device, the spray plate includes an outer frame and a plurality of spray pipes arranged inside the outer frame, the plurality of spray pipes are evenly arranged along the moving direction of the clamp, the spray pipes are vertically arranged, and a plurality of evenly arranged nozzles are provided along the vertical direction.

[0009] Furthermore, in the vertical developing spray plate device, the nozzles on adjacent spray pipes are arranged in a staggered manner.

[0010] Furthermore, in the above-mentioned vertical developing spray disc device, the spray pipe is provided with a liquid inlet channel and an air inlet channel, the liquid inlet of the liquid inlet channel is connected to the liquid inlet pipeline of the developing device, the air inlet of the air inlet channel is connected to the air inlet pipeline of the developing device, the liquid inlet channel is provided with a plurality of liquid outlets connected to each nozzle, the air inlet channel is provided with a plurality of air outlets connected to each nozzle, the liquid in the liquid inlet channel and the gas in the air inlet channel enter the nozzle from the liquid outlet and the air outlet respectively and are mixed at the nozzle end of the nozzle and then sprayed out from the nozzle in the form of mist.

[0011] Furthermore, in the above-mentioned vertical developing spray plate device, the end face where the spray pipe is connected to the nozzle is provided with an annular air groove connected to the air outlet, the inside of the nozzle is provided with a plurality of air flow channels connected to the annular air groove, the middle part of the nozzle is provided with a liquid flow channel connected to the liquid outlet, and the plurality of air flow channels are evenly distributed with the liquid flow channel as the center.

[0012] Furthermore, in the vertical developing spray plate device, the particle size of the liquid medicine particles sprayed from the nozzles on the spray plate is 5-40 um.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] (1) Two swing mechanisms are used to drive each spray disc separately, and the up and down swing amplitude of each spray disc can be controlled with high precision through the servo electric cylinder, which can better control the start and stop position and spray position of the spray disc, make the local etching rate more uniform, ensure the consistency of the whole surface etching, improve the etching accuracy, and provide a larger adjustment space for matching different swing amplitudes for different products, and is widely used;

[0015] (2) It can ensure the uniformity of etching of the circuit board and the good etching effect; and the particle size of the sprayed liquid medicine particles is small, which can allow the liquid medicine particles to directly reach the fine circuit gap, ensuring that the etching liquid medicine always keeps in contact with the circuit board, and there is no need to etch the circuit through secondary immersion. It is suitable for etching, developing and film removal of high-demand and fine circuit boards. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 The structure diagram of the vertical developing spray plate device of the utility model is shown in FIG. Figure 1 ;

[0018] Figure 2 The structure diagram of the vertical developing spray plate device of the utility model is shown in FIG. Figure 2 ;

[0019] Figure 3 It is a top view of two spray discs of the vertical developing spray disc device of the utility model;

[0020] Figure 4 This is a schematic diagram of the spray plate structure of the vertical developing spray plate device of the utility model;

[0021] Figure 5 This is a schematic diagram of the nozzle structure of the vertical developing spray disc device of the utility model;

[0022] Figure 6 for Figure 5 A cross-sectional schematic diagram;

[0023] In the figure: 1. fixture;

[0024] 2. spray plate; 21. outer frame; 22. spray pipe; 221. liquid inlet channel; 222. air inlet channel; 223. liquid inlet; 224. air inlet; 225. liquid outlet; 226. air outlet; 227. annular air groove; 23. nozzle; 231. air flow channel; 232. liquid flow channel;

[0025] 3. Swing mechanism; 31. Bottom plate; 32. Servo electric cylinder; 33. Drive plate; 34. Pull rod; 35. Upper guide assembly; 351. Column; 352. Limit plate; 36. Lower guide assembly; 361. Guide wheel seat; 362. Slide rod; 363. Guide wheel. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] Example 1

[0028] like Figure 1-6 As shown, a vertical developing spray disc device comprises two spray discs 2 arranged opposite to each other, and a swing mechanism 3 is arranged above each of the spray discs 2. When spraying, the clamp 1 loaded with the circuit disc moves through the two spray discs 2; the swing mechanism 3 is used to drive the corresponding spray disc 2 to move up and down, and comprises a bottom plate 31, a servo electric cylinder 32, a driving plate 33, and a pull rod 34. The swing mechanism 3 is installed on the developing device through the bottom plate 31. The servo electric cylinder 32 is fixed above the bottom plate 31, and its output end is connected to the driving plate 33. Two symmetrically arranged pull rods 34 are arranged on both sides of the driving plate 33, and the lower end of the pull rod 34 is connected to the spray disc 2. Compared with the cam swing structure, this embodiment adopts two swing mechanisms 3 to drive each spray disc 2 separately, and the servo electric cylinder 32 can control the up and down swing amplitude of each spray disc 2 with high precision, which can better control the start and stop position and the spray position of the spray disc 2, make the local etching rate more uniform, ensure the consistency of the whole surface etching, improve the etching accuracy, and provide a larger adjustment space for matching different swing amplitudes for different products, and is widely used.

[0029] In the above structure, if Figure 1-2 As shown, the swing mechanism 3 further includes an upper guide assembly 35, which is arranged on the bottom plate 31 and includes a column 351 and a limit plate 352. Two columns 351 are provided, which are symmetrically arranged on both sides of the servo electric cylinder 32. The bottoms of the two columns 351 are connected to the bottom plate 31, and the upper ends are connected to the limit plate 352 through the linear bearings arranged on the driving plate 33. The upper guide assembly 35 is arranged to ensure the stability of the up and down movement of the spray disc 2.

[0030] In addition, if Figure 1-2 As shown, the swing mechanism 3 further includes a lower guide assembly 36, which includes a guide wheel seat 361 and a slide bar 362. The upper and lower ends of the two sides of the spray disc 2 are provided with guide wheel seats 361, and the guide wheel seats 361 are provided with two guide wheels 363 arranged in parallel. The slide bar 362 is fixedly connected to the bottom plate 31. Specifically, the slide bar 362 is fixed to the developing device and passes through between the two guide wheels 363 to be slidably connected to the guide wheels 363. The arrangement of the lower guide assembly 36 further ensures the stability of the spray disc 2 moving up and down.

[0031] Example 2

[0032] Based on the structure of the first embodiment, Figure 1 , 3 -5, the spray plate 2 includes an outer frame 21 and a plurality of spray pipes 22 arranged inside the outer frame 21, the plurality of spray pipes 22 are evenly arranged along the moving direction of the fixture 1, the spray pipes 22 are vertically arranged, and a plurality of evenly arranged nozzles 23 are arranged along the vertical direction. The nozzles 23 on adjacent spray pipes 22 are staggered. This arrangement can ensure the etching uniformity of the circuit board, and the two sides of the circuit board are evenly stressed, and will not shake back and forth during spraying.

[0033] In addition, if Figure 5-6 As shown, the nozzle 22 is provided with a liquid inlet channel 221 and an air inlet channel 222. The liquid inlet 223 of the liquid inlet channel 221 is connected to the liquid inlet pipeline (not shown in the figure) of the developing device, and the air inlet 224 of the air inlet channel 222 is connected to the air inlet pipeline (not shown in the figure) of the developing device. The liquid inlet channel 221 is provided with a plurality of liquid outlets 225 connected to each nozzle 23, and the air inlet channel 222 is provided with a plurality of air outlets 226 connected to each nozzle 23. The liquid in the liquid inlet channel 221 and the gas in the air inlet channel 222 enter the nozzle 23 from the liquid outlet 225 and the air outlet 226 respectively, and are mixed at the nozzle end of the nozzle 23 and then sprayed out from the nozzle in a mist form. A control valve is provided for each nozzle 22. According to the process requirements, the particle size of the sprayed liquid can be controlled by controlling the pressure and flow rate of the liquid and gas in each nozzle 22, so as to better control the spraying effect.

[0034] To ensure that the liquid medicine sprayed from the nozzle 23 is sprayed in a mist form, Figure 6 As shown, the end surface where the spray pipe 22 is connected to the nozzle 23 is provided with an annular air groove 227 connected to the air outlet 226, the nozzle 23 is provided with a plurality of air flow channels 231 connected to the annular air groove 227, the middle of the nozzle 23 is provided with a liquid flow channel 232 connected to the liquid outlet 225, and the plurality of air flow channels 231 are evenly distributed with the liquid flow channel 232 as the center.

[0035] The particle size of the sprayed liquid can be controlled by adjusting the pressure and flow rate of the liquid and gas in the nozzle 22. The particle size of the liquid sprayed by the nozzle 23 is 5-40um. The liquid particles can reach the fine circuit gap directly, ensuring that the etching liquid always keeps in contact with the circuit board, and there is no need to etch the circuit by secondary immersion. It is suitable for high-demand, fine circuit etching, development, and film removal.

[0036] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0037] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A vertical developing spray plate device, characterized in that: It includes two spray discs arranged opposite to each other, each of which has a swing mechanism above it. During spraying, the fixture carrying the circuit disc moves through between the two spray discs. The swing mechanism is used to drive the corresponding spray disc to move up and down, and includes a base plate, a servo electric cylinder, a drive plate, and a pull rod. The servo electric cylinder is fixed above the base plate, and its output end is connected to the drive plate. Two symmetrical pull rods are provided on both sides of the drive plate, and the lower ends of the pull rods are connected to the spray disc.

2. The vertical developing spray plate device according to claim 1, characterized in that: The swing mechanism also includes an upper guide assembly, which is arranged on the base plate and includes a column and a limit plate. Two columns are provided and are symmetrically arranged on both sides of the servo electric cylinder. The bottoms of the two columns are connected to the base plate, and the upper ends pass through the linear bearings arranged on the driving plate and are connected to the limit plate.

3. The vertical developing spray plate device according to claim 2, characterized in that: The swing mechanism also includes a lower guide assembly, which includes a guide wheel seat and a slide rod. The upper and lower ends of the two sides of the spray disc are provided with guide wheel seats, and the guide wheel seat is provided with two guide wheels arranged in parallel. The slide rod is fixedly connected to the bottom plate and passes through between the two guide wheels to be slidably connected to the guide wheels.

4. The vertical developing spray plate device according to claim 1, characterized in that: The spray plate includes an outer frame and a plurality of spray pipes arranged inside the outer frame. The plurality of spray pipes are evenly arranged along the moving direction of the fixture. The spray pipes are vertically arranged and a plurality of evenly arranged nozzles are provided along the vertical direction.

5. The vertical developing spray plate device according to claim 4, characterized in that: The nozzles on adjacent nozzles are arranged in a staggered manner.

6. The vertical developing spray plate device according to claim 4, characterized in that: The nozzle is provided with a liquid inlet channel and an air inlet channel. The liquid inlet of the liquid inlet channel is connected to the liquid inlet pipeline of the developing device, and the air inlet of the air inlet channel is connected to the air inlet pipeline of the developing device. The liquid inlet channel is provided with a plurality of liquid outlets connected to each nozzle, and the air inlet channel is provided with a plurality of air outlets connected to each nozzle. The liquid in the liquid inlet channel and the gas in the air inlet channel enter the nozzle from the liquid outlet and the air outlet respectively and are mixed at the nozzle end of the nozzle and then sprayed out from the nozzle in the form of mist.

7. The vertical developing spray plate device according to claim 6, characterized in that: The end surface where the spray pipe is connected to the nozzle is provided with an annular air groove connected to the air outlet, the inside of the nozzle is provided with a plurality of air flow channels connected to the annular air groove, the middle of the nozzle is provided with a liquid flow channel connected to the liquid outlet, and the plurality of air flow channels are evenly distributed with the liquid flow channel as the center.

8. The vertical developing spray plate device according to claim 1 or 6, characterized in that: The particle size of the liquid medicine particles sprayed from the nozzles on the spray plate is 5-40um.