Cover plate of microwave plasma chemical vapor deposition equipment

Abstract

The utility model discloses a cover plate of microwave plasma chemical vapor deposition equipment, which solves the problem that the cover plate is inconvenient to disassemble when the microwave plasma chemical vapor deposition equipment is maintained. The cover plate comprises a cover plate body and locking assemblies arranged on the two sides of the cover plate body. The locking assembly comprises a shell arranged in the cover plate body, a lifting piece rotationally arranged in the shell, a connecting piece arranged in the shell, a lock cylinder arranged in the connecting piece in a sliding mode and connected with the lifting piece in an abutting mode, a reset spring arranged between the lock cylinder and the connecting piece, and a fixing base arranged on the connecting piece and connected with the shell. According to the utility model, the cover plate is embedded in one side of the vapor deposition equipment and is abutted against and fixed with the two sides of the vapor deposition equipment through the locking assemblies, so that the cover plate can be conveniently separated from the vapor deposition equipment, and the vapor deposition equipment can be conveniently maintained.

Description

Technical Field

[0001] The utility model belongs to the technical field of artificial diamond equipment, in particular to a cover plate of microwave plasma chemical vapor deposition equipment. Background Art

[0002] Chemical vapor deposition is a chemical technology that mainly uses one or more gas phase compounds or single substances containing thin film elements to form thin films through chemical reactions on the substrate surface. Chemical vapor deposition is a new technology for preparing inorganic materials developed in recent decades. The latest chemical vapor deposition is prepared using microwave plasma equipment.

[0003] Microwave plasma chemical vapor deposition (MPCVD) is a method for preparing high-quality diamonds. In the MPCVD growth furnace, raw gases such as methane, hydrogen, and nitrogen form plasma under microwave excitation, and the plasma is deposited on the diamond substrate to form a diamond film. After a long period of production operation, the microwave plasma chemical vapor deposition (MPCVD) equipment needs to be maintained and repaired. Most of the covers on the existing microwave plasma chemical vapor deposition (MPCVD) equipment are installed on the side by hinges. When performing maintenance and repair, one side of the cover is removed and the other side of the cover is rotated along the hinge to open a maintenance and inspection port. The operation is complicated. During the maintenance and inspection process, the cover will rotate by itself due to its own weight to open and close the maintenance and inspection port, which is inconvenient for maintenance personnel to perform maintenance and repairs on the equipment. Utility Model Content

[0004] The utility model provides a microwave plasma chemical vapor deposition equipment cover plate to at least solve some of the above technical problems.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0006] A microwave plasma chemical vapor deposition equipment cover plate comprises a cover plate body and a pair of locking components arranged on both sides of the cover plate body;

[0007] The locking assembly includes a shell arranged in the cover body, a fixing seat installed in the shell, a connecting piece arranged on the fixing seat, a lifting piece rotatably arranged in the shell, a lock core slidably passed through the connecting piece and abutted against the lifting piece, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core; a reset mechanism is provided between the lock core and the connecting piece.

[0008] Furthermore, the lock core includes a lock tongue which is slidably inserted into the connecting piece and matched with the locking limit hole, and the lock tongue is provided with a limit guide column which is movably inserted into the connecting piece.

[0009] Furthermore, the locking tongue includes a clamping portion arranged in the connecting piece, and a sliding portion which is an integrally formed structure with the clamping portion, the limiting guide column is arranged on the sliding portion, the sliding portion is provided with an abutment hole, and the pulling piece is passed through the abutment hole and abuts against the abutment hole.

[0010] Furthermore, the reset mechanism includes a reset spring which is sleeved on the limiting guide column, one end of which is connected to the sliding part and the other end of which is abutted against the connecting piece.

[0011] Furthermore, the connecting member includes a pair of connecting blocks respectively connected to the fixing seats, and a limiting member arranged between the two connecting blocks and slidably connected to the lock core.

[0012] Furthermore, a giving way slot matched with the lock core is opened on the limiting member, the lock core is slidably inserted into the giving way slot, a limiting plate is arranged in the giving way slot, a limiting hole matched with the lock core is opened on the limiting plate, and the lock core is slidably inserted into the limiting hole.

[0013] Furthermore, the connection block is provided with a rib plate and a clearance groove adapted to the pulling member, and the connection block is fixedly connected to the fixing seat by screws.

[0014] Furthermore, a rotating shaft is provided in the shell, and the lifting member includes a pair of rotating members rotatably mounted on the rotating shaft, a pulling plate provided between the two rotating members, and an abutting member provided on the pulling plate and rotatably mounted on the rotating shaft and abutting against the lock core.

[0015] Furthermore, the shell is provided with three lifting holes respectively matched with the rotating member and the abutting member, and the pulling plate is provided with a lifting opening, and the rotating member and the abutting member can rotate synchronously around the rotating shaft.

[0016] Furthermore, the abutment member includes a bending portion arranged on the pull plate, and an abutment portion integrally formed with the bending portion and abutting against the lock core, and a fitting hole adapted to the rotating shaft is provided on the abutment portion, and the rotating shaft is movably fitted into the fitting hole.

[0017] Compared with the prior art, the utility model has the following beneficial effects:

[0018] The utility model has a simple structure, a scientific and reasonable design, and is easy to use. When the cover body and the MPCVD equipment are separated, the lifting piece is pulled, the lifting piece contacts the lock core, and the lock core is pushed to slide in the connecting piece, so that the lock core is separated from the locking limit hole on the MPCVD equipment, thereby separating the cover body from the MPCVD equipment. At the same time, after the separation, the lock core returns to the initial position under the action of the reset mechanism, and when the lock core returns to the initial position, it can push the lifting piece to return, thereby facilitating the separation of the cover body and the MPCVD equipment and facilitating the maintenance of the MPCVD equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the utility model.

[0020] Figure 2 It is a schematic diagram of the cover body of the utility model.

[0021] Figure 3 It is a schematic diagram of the locking assembly of the utility model.

[0022] Figure 4 It is a schematic diagram of the housing of the utility model.

[0023] Figure 5 It is a schematic diagram of the pull plate of the utility model.

[0024] Figure 6 It is a schematic diagram of the connecting piece of the utility model.

[0025] Figure 7 It is the front view of the abutment member of the utility model.

[0026] Figure 8 It is a schematic diagram of the lifting member of the utility model.

[0027] Fig. 9 It is a schematic diagram of the fixing seat of the utility model.

[0028] Fig.10 It is a schematic diagram of the lock core of the utility model.

[0029] Fig.11 It is a schematic diagram of the lock tongue of the utility model.

[0030] Fig.12 It is a front view of the lifting member of the utility model.

[0031] The names corresponding to the reference numerals are:

[0032] 1. Cover body; 2. Locking assembly; 3. Shell; 4. Lifting member; 5. Connecting member; 6. Lock core; 7. Reset spring; 8. Fixed seat; 11. Assembly hole; 12. Heat dissipation hole; 31. Lifting hole; 32. Rotating shaft; 41. Pull plate; 42. Lifting mouth; 43. Rotating member; 44. Abutment member; 45. Bending part; 46. Abutment part; 47. Fitting hole; 51. Connecting block; 52. Limiting member; 53. Make way groove; 54. Make way groove mouth; 55. Limiting plate; 56. Rib plate; 57. Connecting hole; 58. Limiting hole; 59. Screw hole; 61. Lock tongue; 62. Limiting guide column; 63. Clamping part; 64. Sliding part; 65. Abutment hole. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0034] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore they cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0035] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; of course, it can also be a mechanical connection or an electrical connection; in addition, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0037] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole opened on the MPCVD equipment and compatible with the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0038] The cover body 1 of the utility model is embedded in the MPCVD equipment, and the locking components 2 on both sides of the cover body 1 are inserted into the locking limit holes on the MPCVD equipment, so as to fix the cover body 1 on the MPCVD equipment. Specifically, the shell 3 is arranged in the cover body 1, and a fixing seat 8 is arranged on one side of the shell 3, and a lifting member 4 is arranged on the other side of one side of the shell 3. A connecting member 5 is arranged on the fixing seat 8, and a lock core 6 is slidably inserted in the connecting member 5 and abutted against the lifting member 4, and a reset mechanism is arranged between the lock core 6 and the connecting member 5. When the cover body 1 and the MPCVD device are separated, the lifting member 4 is pulled, the lifting member 4 contacts the lock core 6, and pushes the lock core 6 to slide in the connecting member 5, so that the lock core 6 is separated from the locking limit hole on the MPCVD device, thereby separating the cover body 1 from the MPCVD device. At the same time, after the separation, the lock core 6 returns to the initial position under the action of the reset mechanism, and when the lock core 6 returns to the initial position, it can push the lifting member 4 to return, thereby facilitating the separation of the cover body 1 and the MPCVD device.

[0039] Example 2.

[0040] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0041] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole opened on the MPCVD equipment and compatible with the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0042] The lock core 6 comprises a lock tongue 61 which is slidably inserted into the connecting member 5 and matched with the locking limit hole. The lock tongue 61 is provided with a limit guide column 62 which is movably inserted into the connecting member 5 .

[0043] Based on Example 1, this Example 2 provides a more preferred structure of the lock core 6, specifically: the lock core 6 includes a lock tongue 61 that is slidably inserted into the connecting member 5 and adapted to the locking limit hole, and the lock tongue 61 is provided with a limit guide column 62 that is movably inserted into the connecting member 5.

[0044] The lock tongue 61 of the utility model is slidably inserted into the connecting piece 5, and the lock tongue 61 is adapted to the locking limit hole. The lock tongue 61 is provided with a limit guide column 62 movably inserted into the connecting piece 5. The limit guide column 62 can guide the moving direction of the lock tongue 61, so that the lock tongue 61 can be accurately engaged with the locking limit hole, thereby facilitating the disassembly and assembly of the cover body 1 and the MPCVD equipment.

[0045] Example 3.

[0046] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0047] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0048] The lock core 6 comprises a lock tongue 61 which is slidably inserted into the connecting member 5 and matched with the locking limit hole. The lock tongue 61 is provided with a limit guide column 62 which is movably inserted into the connecting member 5 .

[0049] The locking tongue 61 includes a clamping portion 63 arranged in the connecting member 5, and a sliding portion 64 which is an integrally formed structure with the clamping portion 63. The limiting guide column 62 is arranged on the sliding portion 64. The sliding portion 64 is provided with an abutment hole 65. The lifting member 4 is passed through the abutment hole 65 and abuts against the abutment hole 65.

[0050] Based on Example 2, this Example 3 provides a more preferred structure of the lock core 6, specifically: the lock tongue 61 includes a clamping portion 63 arranged in the connecting member 5, and a sliding portion 64 which is an integrally formed structure with the clamping portion 63, a limiting guide column 62 is arranged on the sliding portion 64, an abutment hole 65 is opened on the sliding portion 64, and the pulling member 4 is inserted into the abutment hole 65 and abuts against the abutment hole 65.

[0051] The clamping portion 63 of the utility model is slidably arranged in the connecting member 5 and is engaged with the locking limit hole. A sliding portion 64 is provided on one side of the clamping portion 63 as an integrally formed structure with the clamping portion 63. The sliding portion 64 is slidably arranged in the connecting member 5, and the sliding portion 64 has an upper limit guide column 62. An abutment hole 65 is opened on the sliding portion 64. The lifting member 4 is penetrated in the abutment hole 65 and abuts against the abutment hole 65. When the lifting member 4 is pulled, the lifting member 4 can push the locking tongue 61 to move in the connecting member 5 through the abutment hole 65, thereby facilitating the disassembly and assembly of the cover body 1 and the MPCVD equipment.

[0052] Example 4.

[0053] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0054] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0055] The lock core 6 comprises a lock tongue 61 which is slidably inserted into the connecting member 5 and matched with the locking limit hole. The lock tongue 61 is provided with a limit guide column 62 which is movably inserted into the connecting member 5 .

[0056] The locking tongue 61 includes a clamping portion 63 arranged in the connecting member 5, and a sliding portion 64 which is an integrally formed structure with the clamping portion 63. The limiting guide column 62 is arranged on the sliding portion 64. The sliding portion 64 is provided with an abutment hole 65. The lifting member 4 is passed through the abutment hole 65 and abuts against the abutment hole 65.

[0057] The reset mechanism includes a reset spring 7 which is sleeved on the limiting guide column 62 , one end of which is connected to the sliding portion 64 and the other end of which is in contact with the connecting member 5 .

[0058] This embodiment 4 provides a more preferred structure of the reset mechanism based on the embodiment 3, specifically: the reset mechanism includes a reset spring 7 which is sleeved on the limiting guide column 62, one end of which is connected to the sliding part 64 and the other end of which is abutted against the connecting member 5.

[0059] The reset spring 7 of the utility model is sleeved on the limit guide column 62, and one end of the reset spring 7 is connected to the sliding part 64, and the other end is abutted against the connecting member 5. Specifically, when the lifting member 4 is rotated, the lifting member 4 pushes the limit guide column 62 to move along the connecting member 5 through the abutment hole 65, and squeezes the reset spring 7, so that the clamping part 63 is separated from the locking limit hole, thereby separating the cover body 1 and the MPCVD equipment. When the lifting member 4 is released, the reset spring 7 pushes the limit guide column 62 to move in the connecting member 5, so that the locking tongue 61 can push the lifting member 4 to reset, thereby facilitating the disassembly and assembly of the cover body 1 and the MPCVD equipment.

[0060] Example 5.

[0061] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0062] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0063] The connecting member 5 includes a pair of connecting blocks 51 respectively connected to the fixing seat 8 , and a limiting member 52 disposed between the two connecting blocks 51 and slidably connected to the lock cylinder 6 .

[0064] Based on Example 1, this Example 5 provides a more preferred structure of the connecting member 5, specifically: the connecting member 5 includes a pair of connecting blocks 51 respectively connected to the fixing seat 8, and a limiting member 52 arranged between the two connecting blocks 51 and slidably connected to the lock cylinder 6.

[0065] The connecting member 5 of the utility model includes a pair of connecting blocks 51 respectively connected to the fixing seat 8, a limiting member 52 is arranged between the two connecting blocks 51, a sliding part 64 is slidably arranged between the two connecting blocks 51 and a limiting guide column 62 is slidably arranged in the limiting member 52, so that the lock core 6 can be driven by the lifting member 4 to move in the connecting member 5, so as to facilitate the disassembly and assembly of the cover body 1 and the MPCVD equipment.

[0066] Example 6.

[0067] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0068] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0069] The connecting member 5 includes a pair of connecting blocks 51 respectively connected to the fixing seat 8 , and a limiting member 52 disposed between the two connecting blocks 51 and slidably connected to the lock cylinder 6 .

[0070] The limiting member 52 is provided with a giving way slot 54 which is matched with the lock core 6. The lock core 6 is slidably inserted into the giving way slot 54. A limiting plate 55 is provided in the giving way slot 54. The limiting plate 55 is provided with a limiting hole 58 which is matched with the lock core 6. The lock core 6 is slidably inserted into the limiting hole 58.

[0071] Based on Example 5, this Example 6 provides a more preferred structure of the limit member 52, specifically: a makeshift groove 54 adapted to the lock core 6 is opened on the limit member 52, the lock core 6 is slidably inserted into the makeshift groove 54, a limit plate 55 is provided in the makeshift groove 54, a limit hole 58 adapted to the lock core 6 is opened on the limit plate 55, and the lock core 6 is slidably inserted into the limit hole 58.

[0072] The limit member 52 of the utility model is adapted to the give way slot 54 of the lock core 6, and the lock core 6 is slidably inserted into the give way slot 54. The give way slot 54 can facilitate limiting the lock core 6. A limit plate 55 is provided in the give way slot 54, and a limit hole 58 adapted to the lock core 6 is opened on the limit plate 55. Specifically, the sliding part 64 is slidably inserted into the give way slot 54, and the limit guide column 62 is movably inserted into the limit hole 58. The outer size of the sliding part 64 is larger than the inner diameter of the limit hole 58.

[0073] Example 7.

[0074] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0075] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0076] The connecting member 5 includes a pair of connecting blocks 51 respectively connected to the fixing seat 8 , and a limiting member 52 disposed between the two connecting blocks 51 and slidably connected to the lock cylinder 6 .

[0077] The connection block 51 is provided with a rib plate 56 and a clearance groove 53 adapted to the lifting member 4 , and the connection block 51 is fixedly connected to the fixing seat 8 by screws.

[0078] This embodiment 7 provides a more preferred structure of the connecting block 51 based on the embodiment 5. Specifically, the connecting block 51 is provided with a rib plate 56 and a clearance groove 53 adapted to the pulling member 4, and the connecting block 51 is fixedly connected to the fixing seat 8 by screws.

[0079] The rib plate 56 of the utility model can enhance the strength of the connecting block 51, and a clearance groove 53 is provided on the connecting block 51, which can prevent the lifting member 4 from interfering with the connecting block 51 when pulling, and the connecting block 51 is fixedly connected to the fixing seat 8 by screws. Specifically, a connecting hole 57 is provided on the connecting block 51, and a screw hole 59 matched with the connecting hole 57 is provided on the fixing seat 8, and screws are assembled in the connecting hole 57 and the corresponding screw hole 59.

[0080] Example 8.

[0081] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0082] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0083] A rotating shaft 32 is provided in the housing 3, and the lifting member 4 includes a pair of rotating members 43 rotatably mounted on the rotating shaft 32, a pulling plate 41 provided between the two rotating members 43, and an abutting member 44 provided on the pulling plate 41 and rotatably mounted on the rotating shaft 32 and abutting against the lock cylinder 6.

[0084] This embodiment 8 provides a more preferred structure of the shell 3 on the basis of embodiment 1, specifically: a rotating shaft 32 is provided in the shell 3, the lifting member 4 includes a pair of rotating members 43 rotatably installed on the rotating shaft 32, a pulling plate 41 provided between the two rotating members 43, and an abutting member 44 provided on the pulling plate 41 and rotatably mounted on the rotating shaft 32 and abutting against the lock cylinder 6.

[0085] The utility model has a rotating shaft 32 arranged in the shell 3, two rotating members 43 are rotatably mounted on the rotating shaft 32, and a pull plate 41 is arranged between the two rotating members 43, an abutment member 44 is arranged on the pull plate 41, the abutment member 44 is rotatably fitted on the rotating shaft 32, and a sliding portion 64 located in the abutment hole 65 abuts against each other, so that when the pull plate 41 is pulled, the two rotating members 43 and the abutment member 44 can rotate along the axis of the rotating shaft 32, and when the abutment member 44 rotates, it contacts with the inner wall of the abutment hole 65, thereby pushing the sliding portion 64 to slide in the connecting member 5.

[0086] Example 8.

[0087] like Figure 1-12As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0088] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0089] A rotating shaft 32 is provided in the housing 3, and the lifting member 4 includes a pair of rotating members 43 rotatably mounted on the rotating shaft 32, a pulling plate 41 provided between the two rotating members 43, and an abutting member 44 provided on the pulling plate 41 and rotatably mounted on the rotating shaft 32 and abutting against the lock cylinder 6.

[0090] The housing 3 is provided with three lifting holes 31 respectively matched with the rotating member 43 and the abutting member 44 . The pulling plate 41 is provided with a lifting opening 42 . The rotating member 43 and the abutting member 44 can rotate synchronously around the rotating shaft 32 .

[0091] This embodiment 9 provides a more preferred structure of the shell 3 based on the embodiment 8, specifically: the shell 3 is provided with three lifting holes 31 respectively adapted to the rotating member 43 and the abutment member 44, the pulling plate 41 is provided with a lifting mouth 42, and the rotating member 43 and the abutment member 44 can rotate synchronously around the rotating shaft 32.

[0092] The three lifting holes 31 of the utility model are provided on the housing 3, and the lifting holes 31 are respectively adapted to the rotating member 43 and the abutting member 44, and the lifting holes 31 can facilitate the connection between the rotating member 43 and the abutting member 44 and the rotating shaft 32, so that the rotating member 43 and the abutting member 44 can synchronously rotate around the rotating shaft 32. Thus, it is convenient for the abutting member 44 to push the lock cylinder 6 to move.

[0093] The pull plate 41 of the utility model is provided with a lifting opening 42 , and the lifting opening 42 can facilitate the rotation of the pull plate 41 , thereby facilitating the movement of the lock core 6 .

[0094] Example 10.

[0095] like Figure 1-12 As shown, the utility model provides a microwave plasma chemical vapor deposition equipment cover, comprising a cover body 1, and a pair of locking components 2 arranged on both sides of the cover body 1;

[0096] The locking assembly 2 includes a shell 3 arranged in the cover body 1, a fixed seat 8 installed in the shell 3, a connecting member 5 arranged on the fixed seat 8, a lifting member 4 rotatably arranged in the shell 3, a lock core 6 slidably passed through the connecting member 5 and abutted against the lifting member 4, and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core 6; a reset mechanism is provided between the lock core 6 and the connecting member 5.

[0097] A rotating shaft 32 is provided in the housing 3, and the lifting member 4 includes a pair of rotating members 43 rotatably mounted on the rotating shaft 32, a pulling plate 41 provided between the two rotating members 43, and an abutting member 44 provided on the pulling plate 41 and rotatably mounted on the rotating shaft 32 and abutting against the lock cylinder 6.

[0098] The abutment member 44 includes a bending portion 45 provided on the pull plate 41 , and an abutment portion 46 integrally formed with the bending portion 45 and abutting against the lock core 6 . The abutment portion 46 is provided with a fitting hole 47 adapted to the rotating shaft 32 , and the rotating shaft 32 is movably fitted into the fitting hole 47 .

[0099] Based on Example 8, this Example 10 provides a more preferred structure of the abutment 44, specifically: the abutment 44 includes a bending portion 45 arranged on the pull plate 41, and an abutment portion 46 integrally formed with the bending portion 45 and abutting against the lock core 6, and the abutment portion 46 is provided with a fitting hole 47 adapted to the rotating shaft 32, and the rotating shaft 32 is movably fitted in the fitting hole 47.

[0100] A bending portion 45 and an abutting portion 46 integrally formed with the bending portion 45 and located in the abutting hole 65 are provided at the bottom of the pull plate 41 of the utility model. A fitting hole 47 adapted to the rotating shaft 32 is provided on the abutting portion 46. The rotating shaft 32 is movably fitted in the fitting hole 47, so that when the abutting portion 46 rotates along the rotating shaft 32, the abutting portion 46 contacts the inner wall of the abutting hole 65, thereby pushing the lock core 6 to move, thereby facilitating the disassembly and assembly of the cover body 1 and the MPCVD equipment.

[0101] The cover body 1 of the utility model is provided with an assembly hole 11 adapted to the locking assembly 2 , the locking assembly 2 is embedded in the assembly hole 11 , and the cover body 1 is provided with a heat dissipation hole 12 . Specifically, the housing 3 is embedded in the assembly hole 11 .

[0102] The working principle of this utility model:

[0103] When it is necessary to separate the cover body 1 and the MPCVD equipment, the pulling plate 41 is pulled through the lifting port 42, and the rotating member 43 and the abutment member 44 on the pulling plate 41 rotate synchronously around the rotating shaft 32. The abutment member 44 contacts the inner wall of the abutment hole during rotation, thereby pushing the sliding part 64 to move in the connecting part and squeezing the reset spring at the same time, so that the lock core 6 is separated from the locking limit hole, thereby separating the cover body 1 and the MPCVD equipment.

[0104] Finally, it should be noted that the above embodiments are only preferred embodiments of the present invention to illustrate the technical solution of the present invention, rather than limiting it, and certainly not limiting the patent scope of the present invention; although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention; that is to say, any changes or embellishments made to the main design concept and spirit of the present invention that have no substantive significance, and the technical problems they solve are still consistent with the present invention, should be included in the protection scope of the present invention; in addition, the direct or indirect application of the technical solution of the present invention in other related technical fields is also included in the patent protection scope of the present invention.

Claims

1. A cover plate for a microwave plasma chemical vapor deposition device, characterized in that: It comprises a cover body (1) and a pair of locking components (2) arranged on both sides of the cover body (1); The locking assembly (2) includes a shell (3) arranged in the cover body (1), a fixing seat (8) installed in the shell (3), a connecting member (5) arranged on the fixing seat (8), a lifting member (4) rotatably arranged in the shell (3), a lock core (6) slidably inserted in the connecting member (5) and abutting against the lifting member (4), and a locking limit hole arranged on the MPCVD equipment and adapted to the lock core (6); a reset mechanism is provided between the lock core (6) and the connecting member (5).

2. A microwave plasma chemical vapor deposition equipment cover plate according to claim 1, characterized in that: The lock core (6) comprises a lock tongue (61) which is slidably inserted into the connecting piece (5) and matched with the locking limit hole. The lock tongue (61) is provided with a limit guide column (62) which is movably inserted into the connecting piece (5).

3. A microwave plasma chemical vapor deposition equipment cover plate according to claim 2, characterized in that: The locking tongue (61) comprises a clamping portion (63) arranged in the connecting member (5), and a sliding portion (64) which is an integrally formed structure with the clamping portion (63); a limiting guide column (62) is arranged on the sliding portion (64); a contact hole (65) is provided on the sliding portion (64); and a lifting member (4) is passed through the contact hole (65) and contacts the contact hole (65).

4. The cover plate of microwave plasma chemical vapor deposition equipment according to claim 3, characterized in that: The reset mechanism comprises a reset spring (7) which is sleeved on the limiting guide column (62), one end of which is connected to the sliding part (64) and the other end of which is in contact with the connecting piece (5).

5. The cover plate of microwave plasma chemical vapor deposition equipment according to claim 1, characterized in that: The connecting member (5) comprises a pair of connecting blocks (51) respectively connected to the fixing seat (8), and a limiting member (52) arranged between the two connecting blocks (51) and slidably connected to the lock core (6).

6. The cover plate of microwave plasma chemical vapor deposition equipment according to claim 5, characterized in that: The limiting member (52) is provided with a clearance slot (54) matched with the lock core (6), the lock core (6) is slidably inserted into the clearance slot (54), a limiting plate (55) is provided in the clearance slot (54), a limiting hole (58) matched with the lock core (6) is provided on the limiting plate (55), and the lock core (6) is slidably inserted into the limiting hole (58).

7. The cover plate of microwave plasma chemical vapor deposition equipment according to claim 5, characterized in that: The connection block (51) is provided with a rib plate (56) and a clearance groove (53) adapted to the lifting member (4), and the connection block (51) is fixedly connected to the fixing seat (8) by means of screws.

8. The cover plate of microwave plasma chemical vapor deposition equipment according to claim 1, characterized in that: A rotating shaft (32) is provided in the housing (3), and the lifting member (4) includes a pair of rotating members (43) rotatably mounted on the rotating shaft (32), a pulling plate (41) provided between the two rotating members (43), and an abutting member (44) provided on the pulling plate (41) and rotatably mounted on the rotating shaft (32) and abutting against the lock core (6).

9. The cover plate of microwave plasma chemical vapor deposition equipment according to claim 8, characterized in that: The housing (3) is provided with three lifting holes (31) respectively matched with the rotating member (43) and the abutting member (44); the pulling plate (41) is provided with a lifting opening (42); the rotating member (43) and the abutting member (44) can rotate synchronously around the rotating shaft (32).

10. The cover plate of microwave plasma chemical vapor deposition equipment according to claim 8, characterized in that: The abutment member (44) comprises a bent portion (45) provided on the pull plate (41), and an abutment portion (46) formed integrally with the bent portion (45) and abutting against the lock core (6); the abutment portion (46) is provided with a sleeve hole (47) matched with the rotating shaft (32), and the rotating shaft (32) is movably sleeved in the sleeve hole (47).

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