Slide glass box
By designing a slide box including a base, a placement rack, a first limiting member and a protective member, the problem of slide slide falling due to inclination during the transfer process is solved, and higher safety and reliability are achieved.
Patent Information
- Application Number
- CN202420880176.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-25
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-04-25
AI Technical Summary
During the transfer process, traditional slide boxes are prone to accidents of slide falling due to the tilt of the box body.
A slide box is designed including a base, a placing rack, a first limiting member and a protective member. The base supports the placing rack, the placing rack accommodates the slide, the protective member is opened during the transfer process to prevent the slide from sliding off, and the placing rack is raised in conjunction with the first limiting member during the non-blocking process to avoid accidentally triggering the placing command.
It effectively prevents the slide from sliding due to the tilt of the box body, improves the safety of the use of the slide box, reduces production accidents, and improves the safety of the slide transfer operation.
Smart Images
Figure CN222600934U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor device preparation, and in particular to a wafer carrier box. Background Art
[0002] With the rapid development of the semiconductor industry, the demand for wafers is increasing. Wafers refer to silicon chips used in the manufacture of silicon semiconductor integrated circuits, on which various circuit component structures can be processed to obtain IC products with specific electrical functions.
[0003] In the related art, wafer loading and transfer are generally achieved through a wafer transfer box. However, during the transfer of the wafer transfer box, the wafer may easily slip due to the tilt of the box body. Utility Model Content
[0004] The present application provides a wafer carrier box to solve the technical problem that the wafer carriers in the traditional wafer carrier box are prone to slipping due to the tilt of the box body during the transfer process.
[0005] To this end, an embodiment of the present application provides a wafer carrier box, which includes: a base; a placement rack connected to the base, the placement rack being provided with an opening for the wafer to extend into; a first limiting member provided at the base and located in the opening of the placement rack; a protective member movably provided at the opening side of the placement rack, the protective member having an open state and a closed state, in the open state, the protective member is located outside the placement rack, the placement rack abuts against the base, and the opening is completely exposed; in the closed state, the protective member is located inside the placement rack and abuts against the first limiting member, there is a safety sensing distance between the placement rack and the base, and the opening is blocked by the protective member.
[0006] In a possible embodiment, the protective member includes a first connecting rod, a second connecting rod and a third connecting rod connected in sequence, the first connecting rod and the third connecting rod extend in the same direction, one end of the first connecting rod away from the second connecting rod is rotatably connected to one side of the placement rack, and the end of the third connecting rod away from the second connecting rod is rotatably connected to the other side of the placement rack.
[0007] In a possible embodiment, a first rotating hole is provided at the top of the placement rack, a second rotating hole corresponding to the first rotating hole is provided at the bottom of the placement rack, the first connecting rod includes a first cross bar and a first vertical rod, the first vertical rod is connected to the second connecting rod through the first cross bar, and the first vertical rod is rotatably connected to the first rotating hole; the third connecting rod includes a second cross bar and a second vertical rod, the second vertical rod is connected to the second connecting rod through the second cross bar, and the second vertical rod is rotatably connected to the second rotating hole.
[0008] In a possible implementation manner, a receiving groove communicating with the second rotating hole is provided at the bottom of the placement rack, and the receiving groove is used to receive at least a portion of the second cross bar in the open state.
[0009] In a possible implementation manner, the first limiting member is rotatably connected to the base.
[0010] In a possible implementation, the height of the first limiting member is 10 mm to 15 mm.
[0011] In a possible embodiment, the placement rack includes a connecting member and two supporting members, the two supporting members are respectively arranged on opposite sides of the connecting member, and the inner side of the supporting member is provided with a plurality of placement grooves for placing the slides, and the plurality of placement grooves are spaced apart along the height direction of the placement rack.
[0012] In a possible implementation, the placement groove includes an upper inclined surface, a limiting plane, and a lower inclined surface that are connected in sequence, the upper inclined surface is located above the limiting plane, and the limiting plane is located above the lower inclined surface.
[0013] In a possible implementation, the connecting member is located above the supporting member, and the placement rack further includes a second limiting member located at the rear side of the connecting member, the second limiting member is simultaneously connected to the two supporting members and protrudes inwardly from the supporting members.
[0014] In a possible implementation, the base includes a bottom plate, a sensing member and a third limiting member, both of which are arranged on the bottom plate, the sensing member is used to sense the position of the placement rack, and the third limiting member is used to limit the position of the placement rack on the bottom plate.
[0015] According to the embodiment of the present application, the slide box includes: a base; a placement rack connected to the base, the placement rack is provided with an opening for the slide to extend into; a first limiting member is provided at the base and located in the opening of the placement rack; a protective member is movably provided at the opening side of the placement rack, the protective member has an open state and a closed state, in the open state, the protective member is located outside the placement rack, the placement rack abuts against the base, and the opening is completely exposed; in the closed state, the protective member is located inside the placement rack and abuts against the first limiting member, there is a safety sensing distance between the placement rack and the base, and the opening is blocked by the protective member. The technical solution of the present application realizes support and limitation of the placement rack through the base; multiple carriers are accommodated through the placement rack; multiple carriers are protected during the transfer process through the protective member, thereby preventing the carriers from sliding off due to the tilt of the box body, thereby improving the safety of the use of the carrier box; at the same time, the first limiting member is used to abut the protective member in the closed state, so that the placement rack is away from the base, thereby preventing the machine from recognizing the placement rack and controlling the robot to continue to execute the command to transmit the carrier to the placement rack, which causes the carrier to hit the protective member and break. This greatly reduces production accidents and improves the safety of the carrier transfer operation. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The drawings herein are incorporated into the specification and constitute a part of the specification, showing embodiments that conform to the present application, and are used together with the specification to explain the principles of the present application. In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can also be obtained based on these drawings without paying creative labor. One or more embodiments are exemplarily illustrated by the pictures in the corresponding drawings. These exemplified descriptions do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements. Unless otherwise stated, the figures in the drawings do not constitute a proportional limitation.
[0017] Figure 1 A schematic diagram of the three-dimensional structure of a placement rack for a slide box provided in an embodiment of the present application from a first viewing angle;
[0018] Figure 2 A schematic diagram of the three-dimensional structure of the placement rack of the slide box provided in an embodiment of the present application from a second viewing angle;
[0019] Figure 3 A schematic diagram of the three-dimensional structure of the placement rack of the slide box provided in the embodiment of the present application from a third viewing angle;
[0020] Figure 4 A schematic diagram of the three-dimensional structure of a protective member of a wafer carrier box provided in an embodiment of the present application;
[0021] Figure 5 A partial enlarged view of the slide box provided in an embodiment of the present application;
[0022] Figure 6 A front view of a placement rack for a wafer carrier provided in an embodiment of the present application;
[0023] Figure 7 for Figure 6 The enlarged view of point A in the middle;
[0024] Figure 8 A schematic structural diagram of the base of the slide box provided in an embodiment of the present application.
[0025] Description of reference numerals:
[0026] 100, base; 110, bottom plate; 120, sensing element; 130, third limiting element;
[0027] 200, placement rack; 201, receiving slot; 202, placement slot; 2021, upper inclined surface; 2022, limiting plane; 2023, lower inclined surface; 210, connecting member; 220, supporting member; 230, second limiting member; 231, limiting connecting plate; 232, limiting convex strip; 240, mounting member;
[0028] 300, first limiter;
[0029] 400, protective member; 410, first connecting rod; 411, first cross rod; 412, first vertical rod; 420, second connecting rod; 430, third connecting rod; 431, second cross rod; 432, second vertical rod;
[0030] 10. Slide carrier; Z, height direction; Y, length direction; X, width direction. DETAILED DESCRIPTION
[0031] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.
[0032] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or letters in different examples. This repetition is for the purpose of simplification and clarity, and does not indicate the relationship between the various embodiments and / or settings discussed in itself. In addition, the various specific processes and examples of materials provided by the present application, but those of ordinary skill in the art can appreciate the applicability of other processes and / or the use of other materials.
[0033] For ease of description, spatial relative terms may be used herein to describe the relative positional relationship or movement of one element or feature relative to another element or feature as shown in the figure, such as "inside", "outside", "inner side", "outer side", "below", "below", "above", "above", "front", "back", etc. Such spatial relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figure. For example, if the device in the figure undergoes a position flip or a posture change or a motion state change, then these directional indications also change accordingly, for example: an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented as "above other elements or features" or "above other elements or features". Therefore, the example term "below..." may include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions) and the spatial relative descriptors used herein are interpreted accordingly.
[0034] See also Figures 1 to 8 The embodiment of the present application provides a film carrier box, which includes: a base 100; a placement rack 200, which is connected to the base 100, and the placement rack 200 is provided with an opening for the carrier 10 to extend into; a first limiting member 300, which is provided on the base 100 and is located in the opening of the placement rack 200; a protective member 400, which is movably provided on the opening side of the placement rack 200, and the protective member 400 has an open state and a closed state. In the open state, the protective member 400 is located outside the placement rack 200, the placement rack 200 abuts on the base 100, and the opening is completely exposed; in the closed state, the protective member 400 is located in the placement rack 200 and abuts on the first limiting member 300, there is a safety sensing distance between the placement rack 200 and the base 100, and the opening is blocked by the protective member 400.
[0035] In this embodiment, the base 100 is used to support and limit the placement rack 200; the placement rack 200 is used to accommodate multiple wafers 10; the protective member 400 is used to protect multiple wafers 10 during the transfer process, so as to avoid the wafers 10 from sliding off due to the tilt of the box body, thereby improving the safety of the wafer box; at the same time, the first limiting member 300 is used to abut the protective member 400 in the closed state, so as to keep the placement rack 200 away from the base 100, thereby preventing the machine from identifying the placement rack 200 and controlling the robot to continue to execute the command of transmitting the wafer 10 to the placement rack 200, thereby preventing the wafer 10 from scratching / colliding with the protective member 400 and breaking. This greatly reduces production accidents and improves the safety of the transfer operation of the wafer 10.
[0036] Specifically, the wafer carrier box is configured as a composite component including at least a base 100, a placement rack 200, a first stopper 300 and a protective member 400. The base 100 may be a plate-like structure similar to a tower house, used to integrate the first stopper 300 and provide a placement space for the placement rack 200. The placement rack 200 may be a frame-type structure, and its front and rear sides may be open, and the front opening is an opening for the wafer carrier 10 to extend into; for example but not limited to, the wafer carrier 10 may be a product such as a silicon wafer or a quartz wafer. The first stopper 300 may be a stopper block, which may be connected to the base 100 by fasteners such as screws / bolts to achieve the heightening of the protective member 400 in the closed state, so as to prevent the placement rack 200 from abutting against the base 100 in the closed state and being recognized by the machine. The protective member 400 can be a rod-shaped component. On the one hand, the protective member 400 can be used to close the opening of the placement rack 200 during the transfer process to prevent the carrier 10 from slipping off from the opening side, thereby protecting the carrier 10. On the other hand, it is used to close the opening of the placement rack 200 during the non-film transfer process, and cooperate with the first limit member 300 to raise the placement rack 200 to avoid the placement rack 200 being identified and erroneously triggering the film transfer instruction, causing the carrier 10 to hit the protective member 400. Safety accidents.
[0037] From the above, when the protective member 400 is in the closed state, at this time, at least part of the protective member 400 is located on the inner side of the placement rack 200 to cover the opening; if the placement rack 200 is in the transfer process or is not installed on the base 100, the protective member 400 can be used to block the slide 10 on the opening side to prevent the slide 10 from sliding off the opening side and breaking; if the placement rack 200 is temporarily placed on the base 100 but is not involved in the film transfer operation, the protection member 400 can be used in conjunction with the first limit member 300 to raise the placement rack 200 to prevent the placement rack 200 from being identified and erroneously triggering the film transfer operation, thereby playing a fool-proofing role. When the protective member 400 is in the open state, at this time, the protective member 400 is located on the outer side of the placement rack 200 to fully expose the opening for easy film transfer.
[0038] See also Figure 4 In a possible embodiment, the protective member 400 includes a first connecting rod 410, a second connecting rod 420 and a third connecting rod 430 connected in sequence, the first connecting rod 410 and the third connecting rod 430 extend in the same direction, one end of the first connecting rod 410 away from the second connecting rod 420 is rotatably connected to one side of the placement rack 200, and the end of the third connecting rod 430 away from the second connecting rod 420 is rotatably connected to the other side of the placement rack 200.
[0039] In this embodiment, the specific configuration of the protective member 400 is optimized. Specifically, the protective member 400 is configured as a composite member including at least a first connecting rod 410, a second connecting rod 420 and a third connecting rod 430, wherein the first connecting rod 410 and the third connecting rod 430 are respectively vertically connected to the two ends of the second connecting rod 420 to form a U-shaped frame structure; the suspended ends of the first connecting rod 410 and the third connecting rod 430 can be rotatably connected to the placement rack 200 through external components such as hinges or connecting ears, or can be connected to the placement rack 200 through a rotating shaft structure. The radial dimensions of the first connecting rod 410, the second connecting rod 420 and the third connecting rod 430 can be the same to facilitate processing and molding. It should be explained that the second connecting rod 420 extends along the height direction Z of the placement rack 200, and the length of the second connecting rod 420 can be slightly larger than the height of the placement rack 200, so that when the first connecting rod 410 and the third connecting rod 430 are rotated, the second connecting rod 420 can be moved to the inside or outside of the placement rack 200, thereby blocking the opening on the placement rack 200 to protect the carrier 10; or avoiding the opening on the placement rack 200 to facilitate the introduction of the carrier 10.
[0040] In one example, the first connecting rod 410, the second connecting rod 420 and the third connecting rod 430 are integrally formed, so that the assembly process of the protective member 400 can be saved and the assembly efficiency of the wafer carrier box can be improved.
[0041] See also Figure 4 In a possible embodiment, a first rotating hole is provided at the top of the placement rack 200, and a second rotating hole corresponding to the first rotating hole is provided at the bottom of the placement rack 200. The first connecting rod 410 includes a first cross bar 411 and a first vertical rod 412. The first vertical rod 412 is connected to the second connecting rod 420 through the first cross bar 411, and the first vertical rod 412 is rotatably connected to the first rotating hole; the third connecting rod 430 includes a second cross bar 431 and a second vertical rod 432. The second vertical rod 432 is connected to the second connecting rod 420 through the second cross bar 431, and the second vertical rod 432 is rotatably connected to the second rotating hole.
[0042] In this embodiment, the specific configuration of the first connecting rod 410 and the third connecting rod 430 is optimized. Specifically, a first rotation hole extending along the height direction Z of the placing rack 200 is configured at the top of the placing rack 200, and a second rotation hole extending in the same direction as the first rotation hole is provided at the bottom of the placing rack 200; in the height direction Z of the placing rack 200, the projection of the first rotation hole coincides with the projection of the second rotation hole. At the same time, the first connecting rod 410 is configured as a combination member including at least a first crossbar 411 and a first vertical rod 412, the first vertical rod 412 is vertically connected to the side of the first crossbar 411 away from the second connecting rod 420 to form a horizontal L-shaped structure, the first vertical rod 412 is inserted into the first rotating hole from above the first rotating hole, and the first crossbar 411 is located above the placement rack 200; and the third connecting rod 430 is configured as a combination member including at least a second crossbar 431 and a second vertical rod 432, the second vertical rod 432 is vertically connected to the side of the second crossbar 431 away from the second connecting rod 420 to form a horizontal L-shaped structure, the second vertical rod 432 is inserted into the second rotating hole from below the second rotating hole, and the second crossbar 431 is located below the placement rack 200. In this way, the rotation connection between the protective member 400 and the placement rack 200 is realized through the rotating shaft, the structure of the film carrier box is simplified, and it is conducive to the miniaturization and sophisticated layout of the film carrier box.
[0043] In addition, in order to save raw materials to the maximum extent while achieving normal rotation of the protective member 400, the length of the second cross bar 431 can be configured to be equivalent to the length of the first cross bar 411, and the length of the first vertical bar 412 can be configured to be smaller than the length of the first cross bar 411, and the length of the second vertical bar 432 can be configured to be smaller than the length of the second cross bar 431.
[0044] See also Figure 5 In a possible embodiment, the bottom of the rack 200 is provided with a receiving groove 201 connected to the second rotating hole, and the receiving groove 201 is used to receive at least part of the second cross bar 431 in the open state. In this way, in the open state, at least part of the second cross bar 431 can be received in the receiving groove 201, so as to avoid the second cross bar 431 protruding from the bottom of the rack 200 and lifting the rack 200, ensuring that the bottom of the rack 200 can be normally abutted against the base 100, and after being recognized by the machine, the operation of transferring the slide 10 from the opening into the rack 200 is performed to ensure the normal operation of the slide 10 of the slide box. For example, but not limited to, the receiving groove 201 can be an inclined groove, and its size can be slightly larger than the maximum radial size of the second cross bar 431, so as to completely receive the second cross bar 431. In addition, the receiving groove 201 is arranged obliquely, so that the second connecting rod 420 of the protective member 400 in the open state can be ensured to abut against the outer wall of the rack 200, reducing the space occupied by the protective member 400.
[0045] It can be understood that when the second cross bar 431 is received in the receiving groove 201, it will push against the second vertical rod 432 to continue moving into the second rotating hole to compensate for the distance moved by the second cross bar 431 in the height direction Z of the placement rack 200. At this time, the first connecting rod 410 and the second connecting rod 420 will move upward by at least a distance of the depth of the receiving groove 201, and the first vertical rod 412 will be driven to move in the direction away from the first rotating hole by at least a distance of the depth of the receiving groove 201.
[0046] In a possible embodiment, the first stopper 300 is rotatably connected to the base 100. With such a configuration, the position of the first stopper 300 can be adjusted so that the first stopper 300 can be adapted to the placement racks 200 / protective members 400 of different sizes, thereby increasing the adaptability of the base 100 to the placement racks 200 of different models. For example, when the size of the placement rack 200 is large, the first stopper 300 can be rotated forward and outward to expand the foolproof area so that it can correspond to the protective member 400 in the closed state; when the size of the placement rack 200 is small, the first stopper 300 can be rotated backward and inward to reduce the foolproof area so that it can correspond to the protective member 400 in the closed state.
[0047] It needs to be explained that forward here refers to moving away from the rack 200 along the length direction Y of the rack 200, outward refers to moving away from the rack 200 along the width direction X of the rack 200, backward refers to moving closer to the rack 200 along the length direction Y of the rack 200, and inward refers to moving closer to the rack 200 along the width direction X of the rack 200.
[0048] In a possible implementation, the height of the first position limiter 300 is 10 mm to 15 mm. With such an arrangement, the first position limiter 300 can, in the closed state, lift up the protective member 400 and raise the placement rack 200 to a safe sensing height, so that the placement rack 200 is not recognized by the machine, thereby preventing the machine from continuing to recognize and mistakenly triggering the instruction to transmit the wafer carrier 10; at the same time, it can also ensure that in the open state, the robot on the machine or the wafer carrier 10 clamped by the robot will not scratch or collide with the first position limiter 300, thereby avoiding safety accidents on the machine and improving the safety and reliability of the wafer transmission operation. For example, but not limited to, the height of the first position limiter 300 is 13 mm, and the size of the first position limiter 300 can be selected as 35 mm*15 mm*13 mm.
[0049] See also Figures 1 to 3 and Figure 6 , Figure 7In a possible embodiment, the placement rack 200 includes a connecting member 210 and two supporting members 220. The two supporting members 220 are respectively arranged on opposite sides of the connecting member 210. The inner side of the supporting member 220 is provided with a plurality of placement grooves 202 for placing the carrier 10. The plurality of placement grooves 202 are spaced apart along the height direction Z of the placement rack 200.
[0050] In this embodiment, the specific configuration of the placement rack 200 is optimized. Specifically, the placement rack 200 is configured as a combined component including at least a connector 210 and two support members 220. The connector 210 may be a plate-like structure, which is used to connect and integrate the two support members 220; the support member 220 may be a plate-like structure with teeth and grooves, and the teeth and grooves on the two support members 220 are arranged oppositely to form a complete trough for accommodating the slide 10. The two support members 220 and the connector 210 are enclosed to form a frame structure that is approximately U-shaped or C-shaped, forming a frame-shaped member with openings on three sides. For example, the connecting member 210 can be arranged above the two supporting members 220, and connected to the base 100 through the two supporting members 220. In this case, the placement rack 200 can be an inverted U-shaped structure, and the front end of the supporting member 220 extends out of the front end of the connecting member 210 to form an opening for introducing the slide 10 on the front side of the connecting member 210 and the two supporting members 220. The placement groove 202 extends along the direction of the board surface where the connecting member 210 is located, and the protective member 400 is arranged on the supporting member 220 corresponding to the opening, and the first stopper 300 is arranged on the base 100 corresponding to the opening. In addition, in order to facilitate the operator to take the transfer placement rack 200, a handle can be arranged on the top of the connecting member 210 and the outer side of the supporting member 220.
[0051] Of course, the connecting member 210 and the two supporting members 220 can also be installed on the base 100. In this case, the placement rack 200 can be a C-shaped frame structure, the corresponding end of the connecting member 210 is an open end, the placement groove 202 extends in the direction of the plate surface where the connecting member 210 is located, the protective member 400 is arranged on the side of the supporting member 220 away from the connecting member 210, and the first limiting member 300 is arranged on the base 100 close to the protective member 400. The specific position relationship between the placement rack 200 and the base 100 is not limited here, and the operator can freely select and design according to actual needs, as long as it is ensured that the placement rack 200 can be placed on the base 100.
[0052] See also Figure 6 and Figure 7In a possible implementation, the placement groove 202 includes an upper inclined surface 2021, a limiting plane 2022, and a lower inclined surface 2023 connected in sequence, the upper inclined surface 2021 is located above the limiting plane 2022, and the limiting plane 2022 is located above the lower inclined surface 2023. With such an arrangement, the contact position between the carrier 10 received in the placement groove 202 and the support member 220 can be a line contact, which reduces adhesive contamination and improves the quality of the carrier 10. Furthermore, the upper inclined surface 2021 is inclined toward the lower right and connected to the limiting plane 2022, and the lower inclined surface 2023 is inclined toward the upper right and connected to the limiting plane 2022, so as to enclose a flared lateral groove body between the upper inclined surface 2021, the limiting plane 2022 and the lower inclined surface 2023, and the lateral groove body can reduce the scratches and collisions between the carrier 10 and the placement groove 202, thereby reducing the damage rate of the carrier 10; at the same time, the flared groove body facilitates the introduction and removal of the carrier 10, which is conducive to improving the convenience of storing and retrieving the carrier.
[0053] In a possible embodiment, the connecting member 210 is located above the supporting member 220, and the placement rack 200 also includes a second limiting member 230 located on the rear side of the connecting member 210. The second limiting member 230 is simultaneously connected to the two supporting members 220 and protrudes inward from the supporting members 220.
[0054] In this embodiment, the specific configuration of the placement rack 200 is further optimized. Specifically, the placement rack 200 is configured as a composite component including at least a connecting member 210, two supporting members 220 and a second stopper 230. The second stopper 230 can be a long strip structure, which is configured in the rear end space of the connecting member 210 and blocks the placement slot 202 in the height direction Z of the placement rack 200, so as to prevent the slide 10 accommodated in the placement slot 202 from continuing to move backward, thereby limiting the slide 10, preventing the slide 10 from being loosened from the rear of the placement slot 202 and being broken, and improving the safety performance of the slide box.
[0055] In one example, the second limiting member 230 is configured to include at least a limiting connecting plate 231 and two limiting convex strips 232 respectively connected to the two ends of the limiting connecting plate 231. The limiting connecting plate 231 can be arranged on the same plane as the connecting member 210, and its two ends are respectively plugged into the two supporting members 220 to form an inverted U-shaped frame structure. The outer sides of the two limiting convex strips 232 are respectively connected to the inner walls of the two supporting members 220, and separate multiple placement grooves 202 along the height direction Z of the placement rack 200, thereby playing a limiting role for each placement groove 202; at the same time, the top of the limiting convex strip 232 is connected to the bottom of the limiting connecting plate 231, so as to improve the structural stability and reliability of the entire placement rack 200. In addition, in order to reduce the weight of the second limiting member 230, a weight reduction hole can be set on the connecting limiting plate, so that it is convenient for operators to carry and transfer the placement rack 200.
[0056] Of course, in other embodiments, the limiting connecting plate 231 may be disposed at the bottom of the two supporting members 220 to form a U-shaped frame structure, and in this case, the two limiting convex strips 232 are connected above the limiting connecting plate 231. Alternatively, the limiting connecting plates 231 are disposed at both the top and the bottom of the two supporting members 220 to form a frame structure that is approximately in the shape of a U-shaped frame.
[0057] In one example, the placement rack 200 is configured as a composite member including at least a connecting member 210, two supporting members 220, a second stopper 230 and a mounting member 240. The mounting member 240 may be a plate-shaped structure, which is connected to the lower side of the two supporting members 220 corresponding to the connecting member 210, and is used for being detachably connected to the base 100. In this way, it is possible to avoid the situation where the supporting member 220 directly abuts against the base 100, causing the lowermost placement slot 202 thereof to be unable to be used normally, thereby improving the utilization rate of the supporting member 220 and increasing the effective amount of the wafer 10 in the wafer carrier.
[0058] See also Figure 8 In a possible embodiment, the base 100 includes a bottom plate 110, a sensing member 120 and a third limiting member 130. The sensing member 120 and the third limiting member 130 are both arranged on the bottom plate 110. The sensing member 120 is used to sense the position of the placement rack 200, and the third limiting member 130 is used to limit the position of the placement rack 200 on the bottom plate 110.
[0059] In this embodiment, the specific configuration of the base 100 is optimized. Specifically, the base 100 is configured as a composite component including at least a bottom plate 110 , a sensing member 120 and a third stopper 130 . The bottom plate 110 may be a flat plate structure for integrating other components and supporting the placement rack 200 . The sensing element 120 may be a pressure sensor or an infrared sensor, which is used to obtain the position information of the placement rack 200 and transmit the position information to the control software of the machine. After obtaining the position information, the control software of the machine determines whether it is necessary to execute an instruction to control the robot to transfer the carrier 10 into the placement rack 200. For example, after the sensing element 120 on the base 100 senses that a placement rack 200 is arranged thereon, the machine needs to control the robot to grab the carrier 10 and transfer the carrier 10 into the placement rack 200 to achieve stacking and storage of multiple carriers 10. After the sensing element 120 on the base 100 does not sense the placement rack 200 thereon, the machine controls the robot not to operate, and there is no need to transfer the carrier 10 into the placement rack 200. The third limiting member 130 may be a limiting block, which may be connected to the base 100 by fasteners such as screws / bolts, and is used to limit the position of the placement rack 200 to prevent the placement rack 200 from moving on the base 100 and affecting the accuracy of the film transmission. A plurality of third limiting members 130 may be provided, and the specific positions of the plurality of second limiting members 230 may be flexibly selected according to actual needs, so that the base 100 may adapt to the limiting of multiple models of placement racks 200, thereby improving the adaptability of the base 100.
[0060] It should be understood that the terms used herein are only for the purpose of describing specific example embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "one", "an" and "said" as used herein may also be meant to include plural forms. The terms "include", "comprise", "contain", and "have" are inclusive, and therefore specify the existence of stated features, steps, operations, elements and / or parts, but do not exclude the existence or addition of one or more other features, steps, operations, elements, parts, and / or combinations thereof. The method steps, processes, and operations described herein are not interpreted as necessarily requiring them to be performed in the specific order described or illustrated, unless the execution order is clearly indicated. It should also be understood that additional or alternative steps may be used.
[0061] Although the terms first, second, third, etc. can be used in the text to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates, terms such as "first", "second" and other numerical terms do not imply order or sequence when used in the text. Therefore, the first element, component, region, layer or section discussed below can be referred to as the second element, component, region, layer or section without departing from the teaching of the example embodiments.
[0062] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.
Claims
1. A slide box, characterized in that: include: Base (100); A placement rack (200) connected to the base (100), the placement rack (200) being provided with an opening for the slide (10) to extend into; A first limiting member (300) is provided on the base (100) and is located in the opening of the placement rack (200); A protective member (400) is movably arranged on the opening side of the placement rack (200), and the protective member (400) has an open state and a closed state. In the open state, the protective member (400) is located outside the placement rack (200), the placement rack (200) abuts against the base (100), and the opening is completely exposed; in the closed state, the protective member (400) is located inside the placement rack (200) and abuts against the first limiting member (300), a safety sensing distance is provided between the placement rack (200) and the base (100), and the opening is blocked by the protective member (400).
2. The slide box according to claim 1, characterized in that: The protective member (400) includes a first connecting rod (410), a second connecting rod (420) and a third connecting rod (430) which are connected in sequence, wherein the first connecting rod (410) and the third connecting rod (430) extend in the same direction, and one end of the first connecting rod (410) away from the second connecting rod (420) is rotatably connected to one side of the placement rack (200), and one end of the third connecting rod (430) away from the second connecting rod (420) is rotatably connected to the other side of the placement rack (200).
3. The slide box according to claim 2, characterized in that: The top of the placement rack (200) is provided with a first rotating hole, and the bottom of the placement rack (200) is provided with a second rotating hole corresponding to the first rotating hole. The first connecting rod (410) includes a first cross rod (411) and a first vertical rod (412). The first vertical rod (412) is connected to the second connecting rod (420) through the first cross rod (411), and the first vertical rod (412) is rotatably connected to the first rotating hole; the third connecting rod (430) includes a second cross rod (431) and a second vertical rod (432). The second vertical rod (432) is connected to the second connecting rod (420) through the second cross rod (431), and the second vertical rod (432) is rotatably connected to the second rotating hole.
4. The slide box according to claim 3, characterized in that: The bottom of the placement rack (200) is provided with a receiving groove (201) which is in communication with the second rotating hole, and the receiving groove (201) is used to receive at least a portion of the second crossbar (431) in the open state.
5. The slide box according to claim 1, characterized in that: The first limiting member (300) is rotatably connected to the base (100).
6. The slide box according to claim 1, characterized in that: The height of the first limiting member (300) is 10 mm to 15 mm.
7. The slide box according to claim 1, characterized in that: The placement rack (200) comprises a connecting member (210) and two supporting members (220), wherein the two supporting members (220) are respectively arranged on opposite sides of the connecting member (210), and the inner side of the supporting member (220) is provided with a plurality of placement grooves (202) for placing the slides (10), and the plurality of placement grooves (202) are distributed at intervals along the height direction (Z) of the placement rack (200).
8. The slide box according to claim 7, characterized in that: The placement groove (202) comprises an upper inclined surface (2021), a limiting plane (2022) and a lower inclined surface (2023) which are connected in sequence, the upper inclined surface (2021) is located above the limiting plane (2022), and the limiting plane (2022) is located above the lower inclined surface (2023).
9. The slide box according to claim 7, characterized in that: The connecting member (210) is located above the supporting member (220), and the placement rack (200) further comprises a second limiting member (230) located at the rear side of the connecting member (210), wherein the second limiting member (230) is simultaneously connected to the two supporting members (220) and protrudes inwardly from the supporting members (220).
10. The slide box according to claim 1, characterized in that: The base (100) comprises a bottom plate (110), a sensing component (120) and a third limiting component (130); the sensing component (120) and the third limiting component (130) are both arranged on the bottom plate (110); the sensing component (120) is used to sense the position of the placement rack (200); and the third limiting component (130) is used to limit the position of the placement rack (200) on the bottom plate (110).