Plate heater and deposition chamber
By designing a plate heater with multiple guide rails and slidable joints, the problem of inconvenient disassembly of existing heaters is solved, and more efficient maintenance and maintenance efficiency is achieved.
Patent Information
- Application Number
- CN202323351181.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-09
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2033-12-09
AI Technical Summary
The existing plate heaters are not convenient to disassemble during disassembly, especially the disassembly process of radiation modules is complicated, which affects the maintenance efficiency of the equipment.
A plate heater including a base, a heating module, a radiation module and a plurality of guide rails is designed. The radiation module consists of a plurality of radiation covers. The reverse side of each radiation cover is provided with a joint that matches the guide rail. The fastener is combined with the guide rail to achieve a fixed connection between the radiation cover and the guide rail, and the sliding joint is used to achieve convenient disassembly of the radiation cover.
It improves the disassembly convenience and efficiency of the plate heater, simplifies the disassembly process of the radiation module, and reduces maintenance costs.
Smart Images
Figure CN222613446U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of solar cell manufacturing, in particular to a plate heater and a deposition chamber. Background Art
[0002] Vacuum coating equipment such as plasma enhanced chemical vapor deposition (PECVD) equipment and physical vapor deposition (PVD) equipment will be used in the manufacturing process of heterojunction solar cells to form amorphous silicon / microcrystalline silicon layers and transparent conductive layers TCO respectively. The deposition chamber heats the silicon wafer to a certain temperature. The specific temperature should be determined according to the specific process. The appropriate heating temperature can enhance the adhesion between the film layer and the silicon wafer and make the film layer dense. For the ITO film layer formed by the PVD process, the appropriate heating temperature (for example, about 250°C) can reduce the square resistance. At the same time, the deposition chamber is required to heat the silicon wafer evenly to reduce color difference and make the film performance of multiple silicon wafers consistent.
[0003] At present, the heaters in the deposition chambers of most PVD production lines adopt a plate heater structure, which is easy to install and maintain, small in size and occupies little chamber space, and can achieve uniform heating over a large area. Figure 1 As shown, the plate heater 1 in the prior art includes a base 10, a heating module 11, and a radiation module 12 for radiating the heat generated by the heating module 11. The heating module 11 is directly mounted on the base 10 through a first bolt 13, and the radiation module 12 is mounted on the heating module 11 through a second bolt 14 that passes through the heating module 11. The radiation module 12 can be a corrugated plate or an aluminum plate. When the ITO film is sputtered in the reaction chamber of the PVD equipment, sputtering materials will form dust on the surface of the radiation module 12. After a certain period of time, the radiation module 12 needs to be removed for sandblasting. When removing, the second bolt 14 needs to be removed in the deposition chamber. Because it is inconvenient to remove the second bolt 14, it is also inconvenient to remove the radiation module 12.
[0004] Therefore, how to provide a plate heater and a deposition chamber to improve the convenience and efficiency of disassembly has become a technical problem that needs to be solved urgently in the industry. Utility Model Content
[0005] In view of the above-mentioned problems in the prior art, the utility model proposes a plate heater, which includes a base, heating modules stacked on the base in sequence, and a radiation module for radiating the heat generated by the heating modules. The plate heater also includes a plurality of guide rails mounted on the heating modules. The radiation module includes a plurality of radiation covers. The reverse side of each radiation cover is provided with a coupling portion matching the corresponding guide rail, and the side portion of the cover body is provided with a groove matching the protrusion at the end of the guide rail. The cover is combined with the guide rail through the coupling portion and slides along it until the protrusion passes through the groove, and is combined with the protrusion through a matching fastener to fix the radiation cover to the guide rail.
[0006] In one embodiment, each radiation cover includes a top plate and a fixed side plate combined with the top plate, the combining portion is arranged on the bottom side of the top plate, the groove is opened on the fixed side plate, a first protrusion and a second protrusion are arranged at both ends of each guide rail, and the combining portion is combined with the guide rail from an end away from the fixed side plate and slides along the guide rail.
[0007] In one embodiment, the top plate is a corrugated plate, and each radiation shield further includes a shielding side plate located on one side or both sides of the fixed side plate.
[0008] In one embodiment, the cross section of the guide rail is T-shaped or I-shaped, and the coupling portion is a semi-closed U-shaped piece that matches the cross section of the guide rail.
[0009] In one embodiment, a fastening hole is formed on the protrusion at the end of the guide rail, and the fastener passes through the fastening hole to fix the radiation cover on the guide rail.
[0010] In one embodiment, the fastener is a latch or a retaining spring.
[0011] In one embodiment, after the fastener is disengaged from the fastening hole, the coupling portion slides toward the outer side of the fixed side plate along the guide rail until it is disengaged from the guide rail, thereby realizing the removal of the radiation cover from the guide rail.
[0012] In one embodiment, a plurality of coupling parts are disposed on the reverse side of each radiation shield, and the radiation shield is positioned on the base by slidingly coupling the plurality of coupling parts with the corresponding plurality of guide rails.
[0013] In one embodiment, the radiation module includes two side radiation shields located on both sides and a central radiation shield located in the middle, the area of the central radiation shield is larger than that of the side radiation shield, the side radiation shield is provided with two joints, and the central radiation shield is provided with three joints.
[0014] The utility model also provides a deposition chamber, which is used for depositing a thin film on a silicon wafer entering the deposition chamber, and the deposition chamber comprises one or more plate-type heaters as described in any one of the above items.
[0015] Compared with the prior art in which the radiation module of the plate heater needs to be removed from the deposition chamber before it can be disassembled, the plate heater of the utility model includes a base, heating modules stacked on the base in sequence, and a radiation module for radiating the heat generated by the heating modules. The plate heater also includes a plurality of guide rails mounted on the heating modules, and the radiation module includes a plurality of radiation covers, each of which has a coupling portion on the reverse side thereof matching the corresponding guide rail, and a groove matching the protrusion at the end of the guide rail on the side of the cover body, which is coupled to the guide rail through the coupling portion and slides along the guide rail until the protrusion passes through the groove, and is coupled to the protrusion through a matching fastener to fix the radiation cover to the guide rail.
[0016] The utility model can conveniently remove the fasteners and push and pull the radiation plate along the guide rail to remove it, thereby improving the convenience and efficiency of removal. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or features may have the same or similar reference numerals.
[0018] Figure 1 It is a schematic diagram of the composition structure of a plate heater in the prior art.
[0019] Figure 2 It is a schematic cross-sectional structure diagram of the plate heater of the utility model.
[0020] Figure 3 It is a three-dimensional structural schematic diagram of the plate heater of the utility model.
[0021] Figure 4 for Figure 3 Schematic diagram of the three-dimensional structure of the plate heater after removing the radiation module.
[0022] Figure 5 for Figure 3 Schematic diagram of the three-dimensional structure when the radiation shield is facing upwards.
[0023] Figure 6 for Figure 3 Schematic diagram of the three-dimensional structure when the reverse side of the radiation shield is facing upwards.
[0024] Figure 7 for Figure 3 Schematic diagram of the three-dimensional structure of the guide rail.
[0025] Figure 8 for Figure 7 Schematic diagram of the side view structure of the middle guide rail.
[0026] Fig. 9 for Figure 3 An enlarged schematic diagram of the composition structure of region D in FIG. DETAILED DESCRIPTION
[0027] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to more clearly understand the purpose, characteristics and advantages of the present invention. It should be understood that the various aspects described below in conjunction with the accompanying drawings and specific embodiments are merely exemplary and should not be construed as limiting the scope of protection of the present invention in any way. Unless the context clearly indicates otherwise, the singular forms "one" and "the" include plural referents. The words "first", "second" and similar terms used in this specification and the claims do not indicate any order, quantity or importance, but are only used to distinguish different components.
[0028] See also Figures 2 to 4 , Figure 2 and Figure 3 They are respectively a cross-sectional structural schematic diagram and a three-dimensional structural schematic diagram of the plate-type heater of the utility model, Figure 4 for Figure 3 Schematic diagram of the three-dimensional structure of the plate heater after removing the radiation module. Figures 2 to 4 As shown, the plate heater 2 of the utility model includes a base 20, a heating module 21 and a radiation module 22. The heating module 21 and the radiation module 22 are sequentially stacked on the base 20, and the radiation module 22 is used to radiate the heat generated by the heating module 21. The plate heater 2 also includes a plurality of guide rails 23 and a guide rail mounting member 24, and the guide rail mounting member 24 passes through the heating module 21 to mount the plurality of guide rails 23 on the heating module 21. The radiation module 22 includes a plurality of radiation covers 220, 222, 224, and the reverse side of each radiation cover 220, 222, 224 is provided with a coupling portion RJ matching the corresponding guide rail, and the side of the cover body is provided with protrusions 2300, 2302 (such as Figure 7 As shown) matching groove 2204 (as shown Figure 5 As shown), the joint portion RJ is combined with the guide rail 23 and slides along it until the protrusion 2300 or 2302 passes through the groove 2204, and the matching fastener 25 (such as Fig. 9 As shown) is combined with the protrusions 2300 and 2302 to fix the radiation cover 220 to the guide rail 23.
[0029] like Figures 2 to 4As shown, the radiation module 22 includes a first side radiation cover 220, a middle radiation cover 222, and a second side radiation cover 224. The first side radiation cover 220 and the second side radiation cover 224 are located on both sides of the middle radiation cover 222. The area of the middle radiation cover 222 is larger than the areas of the first side radiation cover 220 and the second side radiation cover 224. The areas of the first side radiation cover 220 and the second side radiation cover 224 are equivalent. Two joints RJ are arranged on the reverse sides of the first side radiation cover 220 and the second side radiation cover 224, and three joints RJ are arranged on the middle radiation cover 222.
[0030] See also Figure 5 as well as Figure 6 , both are Figure 3 The schematic diagram of the three-dimensional structure of the first side radiation shield 220 with the front side facing upward and the back side facing upward. The back side of each radiation shield 220, 222, 224 is provided with a plurality of joints RJ, and the radiation shields 220, 222, 224 are positioned on the base 20 by slidingly engaging the plurality of joints RJ with the corresponding plurality of guide rails 23. To simplify the illustration, only the structure of the radiation shield is explained with the first side radiation shield 220, and the structures of the second side radiation shield 224 and the middle radiation shield 222 can be understood by reference. Figure 5 and Figure 6 As shown, the first side radiation shield 220 includes a top plate 2200 and a fixed side plate 2202 combined with the top plate 2200, the joint portion RJ is arranged at the bottom side of the top plate 2200, and the groove 2204 is opened on the fixed side plate 2202. The top plate 2200 is a corrugated plate, and each radiation shield 220, 222, 224 also includes a shielding side plate 2206 located on one side or both sides of the fixed side plate 2202.
[0031] See also Figure 7 as well as Figure 8 , Figure 7 for Figure 3 Schematic diagram of the three-dimensional structure of the guide rail in FIG. Figure 8 Figure 2 is a schematic diagram of the side view of the guide rail. Figure 7 as well as Figure 8 As shown, each guide rail 23 is provided with a first protrusion 2300 and a second protrusion 2302 at both ends. The cross section of the guide rail 23 is T-shaped or I-shaped. A plurality of countersunk holes 2303 may be provided on the guide rail 23. The guide rail mounting member 24 may pass through the countersunk holes 2303 to mount the plurality of guide rails 23 on the heating module 21. The joint RJ is a semi-closed U-shaped member matching the cross section of the guide rail 23. The joint RJ may be combined with the guide rail 23 from the end away from the fixed side plate 2202 and slide along the guide rail 23. Figure 8 In the illustrated embodiment, the cross section of the guide rail 23 is I-shaped.
[0032] Fig. 9 for Figure 3 The first protrusion 2300 or the second protrusion 2302 at the end of the guide rail 23 is provided with a fastening hole (not shown), and the fastener 25 passes through the fastening hole to fix the radiation cover 220, 222, 224 on the guide rail 23. The fastener 25 is a latch or a retaining spring.
[0033] During disassembly, the fastener 25 is disengaged from the fastening hole, and the joint RJ slides toward the outside of the fixed side plate 2202 along the guide rail 23 until it is disengaged from the guide rail 23, thereby realizing the disassembly of the radiation covers 220, 222, 224 from the guide rail 23.
[0034] The utility model also provides a deposition chamber, which is used to deposit a thin film on a silicon wafer entering the deposition chamber, and the deposition chamber includes one or more Figures 2 to 4 The plate heater. The deposition chamber can be a PVD reaction chamber or a PECVD reaction chamber.
[0035] The plate heater of the utility model comprises a base, heating modules stacked on the base in sequence, and a radiation module for radiating the heat generated by the heating module. The plate heater also comprises a plurality of guide rails mounted on the heating module. The radiation module comprises a plurality of radiation covers. The reverse side of each radiation cover is provided with a coupling portion matching the corresponding guide rail. The side of the cover body is provided with a groove matching the protrusion at the end of the guide rail. The coupling portion is combined with the guide rail and slides along the guide rail until the protrusion passes through the groove. The matching fastener is combined with the protrusion to fix the radiation cover to the guide rail. The utility model can conveniently remove the fasteners and push and pull the radiation plate along the guide rail to improve the convenience and efficiency of disassembly.
[0036] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the utility model concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.
Claims
1. A plate heater, comprising a base, heating modules stacked sequentially on the base, and a radiation module for radiating heat generated by the heating modules, characterized in that: The plate heater also includes a plurality of guide rails mounted on the heating module, and the radiation module includes a plurality of radiation covers, each radiation cover is provided with a coupling portion matching the corresponding guide rail on the reverse side, and a groove matching the protrusion at the end of the guide rail is provided on the side of the cover body, the coupling portion is coupled to the guide rail and slides along the guide rail until the protrusion passes through the groove, and the radiation cover is coupled to the protrusion through a matching fastener to fix the radiation cover to the guide rail.
2. The plate heater according to claim 1, characterized in that: Each radiation cover includes a top plate and a fixed side plate combined with the top plate, the combining portion is arranged on the bottom side of the top plate, the groove is opened on the fixed side plate, a first protrusion and a second protrusion are arranged at both ends of each guide rail, and the combining portion is combined with the guide rail from an end away from the fixed side plate and slides along the guide rail.
3. The plate heater according to claim 2, characterized in that: The top plate is a corrugated plate, and each radiation cover also includes a shielding side plate located on one side or both sides of the fixed side plate.
4. The plate heater according to claim 2, characterized in that: The cross section of the guide rail is T-shaped or I-shaped, and the connecting portion is a semi-closed U-shaped piece matching the cross section of the guide rail.
5. The plate heater according to claim 2, characterized in that: A fastening hole is provided on the protrusion at the end of the guide rail, and the fastener passes through the fastening hole to fix the radiation cover on the guide rail.
6. The plate heater according to claim 5, characterized in that: The fastener is a latch or a retaining spring.
7. The plate heater according to claim 5, characterized in that: After the fastener is disengaged from the fastening hole, the coupling portion slides toward the outer side of the fixed side plate along the guide rail until it is disengaged from the guide rail, thereby realizing the removal of the radiation cover from the guide rail.
8. The plate heater according to claim 5, characterized in that A plurality of coupling parts are arranged on the reverse side of each radiation cover, and the radiation cover is positioned on the base by slidingly coupling the plurality of coupling parts with the corresponding plurality of guide rails.
9. The plate heater according to claim 1, characterized in that: The radiation module includes two side radiation covers located on both sides and a central radiation cover located in the middle. The area of the central radiation cover is larger than that of the side radiation covers. The side radiation covers are provided with two joints, and the central radiation cover is provided with three joints.
10. A deposition chamber for depositing a thin film on a silicon wafer entering the chamber, characterized in that: The deposition chamber comprises one or more plate heaters as claimed in any one of claims 1 to 9.