Flowmeter error detection device

Abstract

The utility model discloses a flowmeter error detection device which comprises a first pipeline, a flowmeter to be detected, a container, a first switch piece, a first detection piece and a control piece, the flowmeter to be detected is arranged on the first pipeline, a first inlet of the container is communicated with the first pipeline, the first switch piece is arranged at the first inlet, and the first detection piece is arranged at the second inlet. The first switch piece is used for controlling on-off of the first inlet, the first detection piece is arranged on the container and used for obtaining liquid level information of the container, and the control piece is used for obtaining time information from the time when the first switch piece is turned on to the time when the liquid level information is equal to a first threshold value. The ratio of the volume of the container at the first threshold height to the time information and the cross section area of the first pipeline is the actual flow of the first pipeline, the reading of the flowmeter to be measured is the measured flow, and the difference between the measured flow and the actual flow is the actual error. The flowmeter error detection device can accurately obtain the error value of the to-be-detected flowmeter, so that whether the error of the to-be-detected flowmeter is within a set range or not can be accurately judged.

Description

Technical Field

[0001] The utility model relates to the technical field of flow meters, in particular to a flow meter error detection device. Background Art

[0002] Flowmeter is an instrument used to measure the flow of fluid in a pipeline or open channel. Flowmeter is one of the components of metrology science and technology, and is widely used in industrial and agricultural production, national defense construction, scientific research, foreign trade, and all areas of people's lives. In the semiconductor preparation process, flowmeters play an important role in measuring and regulating the flow of liquids, gases, steam and other media. The accuracy of flow measurement not only affects the stability of the semiconductor preparation process, but also affects the rate and quality of the semiconductor preparation process.

[0003] The existing method for detecting whether there is an error in a flow meter is to connect the flow meter to be tested in series with a standard flow meter, and then flow the fluid through the flow meter to be tested and the standard flow meter in turn, and by comparing the readings of the flow meter to be tested with the standard flow meter, it is possible to detect whether there is an error in the flow meter to be tested. However, both the standard flow meter and the flow meter to be tested have errors, so it is impossible to accurately determine whether the error of the flow meter to be tested is within the set range. Utility Model Content

[0004] In view of this, the utility model provides a flow meter error detection device to solve the problem that both the existing standard flow meter and the flow meter to be tested have errors and it is impossible to accurately determine whether the error of the flow meter to be tested is within a set range.

[0005] The utility model provides a flow meter error detection device, comprising:

[0006] First pipeline;

[0007] A flow meter to be measured, wherein the flow meter to be measured is arranged on the first pipeline;

[0008] a container, wherein a first inlet of the container is in communication with the first pipeline;

[0009] a first switch element, the first switch element being arranged at the first inlet, and the first switch element being used to control the on and off of the first inlet;

[0010] a first detection member, the first detection member being used to obtain liquid level information of the container;

[0011] A control component, wherein the control component is used to obtain time information from when the first switch component is turned on to when the liquid level information is equal to the first threshold value.

[0012] Optionally, the above-mentioned flow meter error detection device also includes a drainage pipeline, the container has a first outlet, the first outlet is located at the top of the container, the drainage pipeline is connected to the first outlet, and the first detection member is arranged at the first outlet.

[0013] Optionally, the above-mentioned flow meter error detection device further includes:

[0014] The second switch component, the container has a second outlet, the second outlet is located at the bottom of the container, the second switch component is arranged at the second outlet, the second switch component is used to control the on and off of the second outlet, and the second outlet is connected to the drainage pipeline.

[0015] Optionally, the above-mentioned flow meter error detection device further includes:

[0016] a second pipeline, wherein one end of the second pipeline is connected to the first outlet, and the other end of the second pipeline is connected to the drainage pipeline;

[0017] A third pipeline, one end of the third pipeline is connected to the second outlet, and the other end of the third pipeline is connected to the drainage pipeline.

[0018] Optionally, in the above-mentioned flow meter error detection device, the flow meter to be measured and the container are arranged in sequence along the extension direction of the first pipeline.

[0019] Optionally, the above-mentioned flow meter error detection device further includes a fourth pipeline, one end of the fourth pipeline is connected to the first pipeline, and the other end of the fourth pipeline is connected to the first inlet.

[0020] Optionally, the above-mentioned flow meter error detection device further includes a third switch element, which is arranged on the first pipeline, and the flow meter to be measured, the container and the third switch element are arranged in sequence along the extension direction of the first pipeline.

[0021] Optionally, the above-mentioned flow meter error detection device further includes a nozzle, which is arranged on the first pipeline, and the flow meter to be measured, the container, the third switch element and the nozzle are arranged in sequence along the extension direction of the first pipeline.

[0022] Optionally, in the above-mentioned flow meter error detection device, the container is a quantitative container, the first detection component is a liquid level sensor, and the first switch component is a pneumatic valve.

[0023] The technical solution provided by the utility model has the following advantages:

[0024] 1. The flow meter error detection device provided by the utility model comprises a first pipeline, a flow meter to be measured, a container, a first switch, a first detection component and a control component, the flow meter to be measured is arranged on the first pipeline, the first inlet of the container is connected to the first pipeline, the first switch is arranged at the first inlet, the first switch is used to control the on and off of the first inlet, the first detection component is arranged on the container, the first detection component is used to obtain the liquid level information of the container, and the control component is used to obtain the time information from the opening of the first switch to the time when the liquid level information is equal to the first threshold value. Fluid is transported into the first pipeline, when the fluid fills the first pipeline, the first switch is turned on, the fluid in the first pipeline is transported into the container after passing through the flow meter to be measured, the first switch, and the first inlet in sequence, when the liquid level information detected by the first detection component is equal to the first threshold value, the control component obtains the time information from the opening of the first switch to the time when the liquid level information is equal to the first threshold value, the volume of the container at the first threshold height, the time information, and the cross-sectional area of ​​the first pipeline are the actual flow of the first pipeline, the reading of the flow meter to be measured is the measured flow, and the difference between the measured flow and the actual flow is the actual error. By means of the flow meter error detection device of the utility model, the error value of the flow meter to be measured can be accurately obtained, thereby accurately determining whether the error of the flow meter to be measured is within a set range.

[0025] 2. The flow meter error detection device provided by the utility model can accurately determine whether the error of the flow meter to be measured is within the set range, thereby improving the accuracy of flow regulation in the first pipeline, thereby improving the stability, speed and quality of the semiconductor preparation process.

[0026] 3. The flow meter error detection device provided by the utility model closes the first switch and opens the second switch, so that the fluid in the container can be transported to the drainage pipeline, so that the fluid in the container is completely discharged and can be reused next time. Therefore, the flow meter error detection device can be reused to regularly detect whether the error of the flow meter to be tested is within the set range.

[0027] 4. The flow error detection device provided by the utility model has a simple structure and does not require complicated measuring instruments, thereby reducing costs and improving degradation benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1It is a schematic diagram of a flow meter error detection device according to an embodiment of the utility model.

[0030] Description of reference numerals:

[0031] 11. First pipeline; 12. Drainage pipeline; 13. Second pipeline; 14. Third pipeline; 15. Fourth pipeline;

[0032] 2. Flow meter to be tested;

[0033] 3. Container;

[0034] 41. a first switch element; 42. a second switch element; 43. a third switch element;

[0035] 5. The first test piece;

[0036] 6. Nozzle. DETAILED DESCRIPTION

[0037] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0041] Example 1

[0042] The flow meter error detection device provided in this embodiment is as follows: Figure 1 As shown, it includes a first pipeline 11, a flow meter 2 to be measured, a container 3, a first switch 41, a first detection component 5 and a control component. The flow meter 2 to be measured is arranged on the first pipeline 11, the first inlet of the container 3 is connected to the first pipeline 11, the first switch 41 is arranged at the first inlet, the first switch 41 is used to control the on and off of the first inlet, the first detection component 5 is arranged on the container 3, the first detection component 5 is used to obtain the liquid level information of the container 3, and the control component is used to obtain the time information from the opening of the first switch 41 to the time when the liquid level information is equal to the first threshold.

[0043] The flowmeter error detection device provided in this embodiment delivers fluid into the first pipeline 11. When the fluid fills the first pipeline 11, the first switch is turned on. The fluid in the first pipeline 11 passes through the flowmeter 2 to be measured, the first switch 41, and the first inlet in sequence and is then delivered to the container 3. When the liquid level information detected by the first detection component 5 is equal to the first threshold, the control component obtains the time information from the opening of the first switch 41 to the time when the liquid level information is equal to the first threshold. The volume of the container 3 at the first threshold height and the time information, and the ratio of the cross-sectional area of ​​the first pipeline 11 are the actual flow of the first pipeline 11. The reading of the flowmeter 2 to be measured is the measured flow, and the difference between the measured flow and the actual flow is the actual error. Through the flowmeter error detection device of the utility model, the error value of the flowmeter 2 to be measured can be accurately obtained, so that it can be accurately determined whether the error of the flowmeter 2 to be measured is within the set range.

[0044] Specifically, the container 3 can be a cube, a rectangular parallelepiped, a cylinder, a cone or other common shapes that are convenient for calculating the volume. Of course, the container 3 can also be other vessels for measuring volume, such as a measuring cup. Preferably, the container 3 in the present application is a square shell; the first inlet can be opened on any side of the container 3. Preferably, the first inlet in the present application is opened on the top surface of the container 3; the first switch element 41 can be a pneumatic valve, a solenoid valve or other common valves. Preferably, the first switch element 41 in the present application is a pneumatic valve; the control element is a microcontroller, which can be a single-chip microcomputer, a Raspberry Pi, or a PLC. The control element is electrically connected to the first detection element 5 and the first switch element 41 through a communication interface or a cable, and the communication interface supports multiple communication protocols, including but not limited to Modbus, PROFI BUS and OP; the first detection element 5 is a liquid level sensor, which can be a capacitive liquid level sensor.

[0045] like Figure 1As shown, the flow meter error detection device provided in this embodiment also includes a drainage pipe. The container 3 has a first outlet, and the first outlet is located at the top of the container 3. The drainage pipe 12 is connected to the first outlet. The first detection component 5 is arranged at the first outlet. When the fluid in the container 3 overflows, the first detection component 5 detects and obtains the liquid level information. At the same time, the overflowed fluid is discharged through the drainage pipe. The container 3 can be quantified, that is, the volume of the fluid contained in the container 3 is a fixed value.

[0046] like Figure 1 As shown, the flow meter error detection device provided in this embodiment also includes a second switch, and the second switch can also be a pneumatic valve, a solenoid valve or other valves. In this embodiment, the second switch element 42 is a pneumatic valve, and the second switch element 42 is connected to the control element through a cable or a communication interface. The second switch element 42 is arranged at the second outlet to control the on and off of the second outlet. The second outlet is connected to the drainage pipeline 12, and the height of the container 3 is higher than the height of the drainage pipeline. When the error detection is completed, the first switch element 41 is closed and the second switch element 42 is opened. The fluid in the container 3 is transported to the drainage pipeline after passing through the second outlet and the second switch element 42 under the action of gravity, so that the fluid in the container 3 is discharged, which is convenient for the next use.

[0047] like Figure 1 As shown, the flow meter error detection device provided in this embodiment further includes a second pipeline 13 and a third pipeline 14, one end of the second pipeline 13 is connected to the first outlet, and the other end of the second pipeline 13 is connected to the drainage pipeline 12; one end of the third pipeline 14 is connected to the second outlet, and the other end of the third pipeline 14 is connected to the drainage pipeline 12. The container 3 is connected to the drainage pipeline 12 through the second pipeline 13 and the third pipeline 14, respectively, so that the fluid in the container 3 is transported to the drainage pipe. In addition, the distribution of the container 3 and the drainage pipeline 12 can be conveniently adjusted.

[0048] like Figure 1 As shown, in the flow meter error device provided in this embodiment, the flow meter 2 to be measured and the container 3 are respectively located upstream and downstream of the first pipeline 11, that is, the fluid in the first pipeline 11 flows through the flow meter 2 to be measured and the container 3 in sequence.

[0049] like Figure 1As shown, the flow meter error device provided in this embodiment further includes a fourth pipeline 15 and a third switch 43. One end of the fourth pipeline 15 is connected to the first pipeline 11, and the other end of the fourth pipeline 15 is connected to the first inlet. The third switch 43 is arranged on the first pipeline 11. The flow meter 2 to be measured, the container 3 and the third switch 43 are arranged in sequence along the extension direction of the first pipeline 11, that is, the container 3 is located between the third switch 43 and the flow meter 2 to be measured. The first pipeline 11 can be a liquid supply pipeline in the semiconductor preparation process. When the first switch 41 is closed and the third switch 43 is opened, the first pipeline 11 is in a working state, and the fluid in the first pipeline 11 passes through the flow meter 2 to be measured and the third switch 43 in sequence and is then transported to the working end. When the first switch 41 is opened and the third switch 43 is closed, the fluid in the first pipeline 11 passes through the flow meter 2 to be measured, the fourth pipeline 15, the first switch 41, and the first inlet in sequence and is then transported to the container 3, which is an error detection state. The flow meter error device can perform error detection on the first pipeline 11 in the working state, thereby improving the detection efficiency.

[0050] like Figure 1 As shown, the flow meter error detection device provided in this embodiment also includes a nozzle 6, which is arranged at the end of the first pipeline 11. The flow meter 2 to be measured, the container 3, the third switch component 43 and the nozzle 6 are arranged in sequence along the extension direction of the first pipeline 11. When the first pipeline 11 is in a working state, the fluid in the first pipeline 11 passes through the flow meter 2 to be measured and the third switch component 43 in sequence and then is ejected from the nozzle 6.

[0051] The flowmeter error detection device, the first switch 41, the second switch 42 and the third switch 43 provided in this embodiment are all pneumatic valves, solenoid valves or other valves. The first switch 41, the second switch 42 and the third switch 43 are connected to the control unit through cables or communication interfaces respectively, and the control unit can control the opening and closing of the first switch, the second switch and the third switch respectively. The fluid in the first pipeline 11 is a chemical solution in the semiconductor preparation process. Of course, the flowmeter error detection device can also be used in the working field of other flowmeters.

[0052] In an alternative embodiment, the container 3, the third switch 43, the flow meter to be measured 2 and the nozzle 6 are sequentially arranged along the extension direction of the first pipeline 11. When the first pipeline 11 is in the working state, the first switch is closed, the third switch is opened, and the fluid in the first pipeline 11 passes through the third switch and the flow meter to be measured 2 in sequence and then is ejected from the nozzle 6. When the first pipeline 11 is in the error detection state, the third switch is closed, the first switch is opened, and the fluid in the first pipeline passes through the fourth pipeline 15, the first switch 41, and the first inlet in sequence and then is delivered to the container 3.

[0053] When it is necessary to determine whether the error of the flow meter 2 to be measured is within the set range, the control component controls the third switch component 43 to be closed, the first switch component 41 to be opened, and the second switch component 42 to be closed. The fluid in the first pipeline 11 flows through the fourth pipeline 15, the first switch component 41, and the first inlet in sequence and is then transported to the container 3. When the liquid level information detected by the first detection component 5 is equal to the first threshold, the control component obtains the time information from the opening of the first switch component 41 to the time when the liquid level information is equal to the first threshold. The ratio of the volume of the container 3 at the first threshold height to the time information and the cross-sectional area of ​​the first pipeline 11 is the actual flow of the first pipeline 11. The reading of the flow meter 2 to be measured is the measured flow. The difference between the measured flow and the actual flow is the actual error, and it can be determined whether the actual error is within the set range. At the same time, the fluid in the container 3 overflows, and the overflowed fluid is transported to the drainage pipe 12 through the first outlet and the second pipe 13. After the detection is completed, the first switch 41 is closed, the third switch 43 is opened, and the second switch 42 is opened. The fluid in the container 3 is transported to the drainage pipe 12 through the second outlet, the second switch 42, and the third pipe 14 in turn until the fluid in the container 3 is completely discharged, and then the second switch 42 is closed for the next error detection.

[0054] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A flow meter error detection device, characterized in that: include: A first pipeline (11); A flow meter to be measured (2), wherein the flow meter to be measured (2) is arranged on the first pipeline (11); A container (3), wherein a first inlet of the container (3) is in communication with the first pipeline (11); A first switch element (41), the first switch element (41) being arranged at the first inlet, and the first switch element (41) being used to control the on and off of the first inlet; A first detection member (5), the first detection member (5) being arranged on the container (3), and the first detection member (5) being used to obtain liquid level information of the container (3); A control component is used to obtain time information from when the first switch component (41) is turned on to when the liquid level information is equal to a first threshold value.

2. The flow meter error detection device according to claim 1, characterized in that: It also comprises a drainage pipeline (12), the container (3) has a first outlet, the first outlet is located at the top of the container (3), the drainage pipeline (12) is connected to the first outlet, and the first detection member (5) is arranged at the first outlet.

3. The flow meter error detection device according to claim 2, characterized in that: Also includes: A second switch component (42), the container (3) has a second outlet, the second outlet is located at the bottom of the container (3), the second switch component (42) is arranged at the second outlet, the second switch component (42) is used to control the on and off of the second outlet, and the second outlet is connected to the drainage pipeline (12).

4. The flow meter error detection device according to claim 3, characterized in that: Also includes: a second pipeline (13), one end of the second pipeline (13) being connected to the first outlet, and the other end of the second pipeline (13) being connected to the drainage pipeline (12); A third pipeline (14), one end of the third pipeline (14) is connected to the second outlet, and the other end of the third pipeline (14) is connected to the drainage pipeline (12).

5. The flow meter error detection device according to any one of claims 1 to 4, characterized in that: The flow meter (2) to be measured and the container (3) are arranged in sequence along the extension direction of the first pipeline (11).

6. The flow meter error detection device according to claim 5, characterized in that: It also comprises a fourth pipeline (15), one end of the fourth pipeline (15) is connected to the first pipeline (11), and the other end of the fourth pipeline (15) is connected to the first inlet.

7. The flow meter error detection device according to claim 1 or 6, characterized in that: It also comprises a third switch element (43), the third switch element (43) being arranged on the first pipeline (11), and the flow meter (2) to be measured, the container (3) and the third switch element (43) being arranged in sequence along the extension direction of the first pipeline (11).

8. The flow meter error detection device according to claim 7, characterized in that: It also comprises a nozzle (6), wherein the nozzle (6) is arranged on the first pipeline (11), and the flow meter (2) to be measured, the container (3), the third switch element (43) and the nozzle (6) are arranged in sequence along the extension direction of the first pipeline (11).

9. The flow meter error detection device according to claim 1 or 8, characterized in that: The container (3) is a quantitative container (3), the first detection component (5) is a liquid level sensor, and the first switch component (41) is a pneumatic valve.

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