Laser beam expanding device and carbon dioxide laser processing equipment
By using curved surface reflecting surfaces with different bending directions in the laser beam expansion device to reflect laser light twice, the problem of high-energy laser beam diameter adjustment cost is solved, and the effect of simple structure and low-cost operation is achieved.
Patent Information
- Application Number
- CN202421446530.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-24
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-06-24
AI Technical Summary
The structure required for adjusting the diameter of high-energy laser beam in the prior art is complex, resulting in high cost and difficult operation.
A laser beam expansion device is designed, and the laser beam is reflected twice through curved surface reflecting surfaces with different bending directions to adjust the diameter of the laser beam.
It realizes flexible adjustment of laser beam diameter, reducing structural complexity and cost, and is simple to operate.
Smart Images
Figure CN222620382U_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the field of high-energy laser technology, and in particular relates to a laser beam expansion device and a carbon dioxide laser processing equipment. Background Art
[0002] In the field of laser technology, laser generators, as a core device, are widely used in cutting, welding, marking, medical treatment, scientific research and other fields. The power of the laser generator directly determines the intensity and energy of its output laser, and has a vital impact on the effect and efficiency of laser applications.
[0003] However, for high-energy lasers, a relatively complex structure needs to be set up to achieve the change of the laser beam diameter, and the structural cost and operating cost are high.
[0004] Therefore, how to reduce the cost of adjusting the laser beam diameter is a problem that technicians in this field currently need to solve. Utility Model Content
[0005] The purpose of the present application is to provide a laser beam expansion device and a carbon dioxide laser processing equipment, aiming to solve the problem of high cost of adjusting the laser beam diameter.
[0006] A first aspect of an embodiment of the present application provides a laser beam expansion device, comprising:
[0007] An optical path chamber, wherein a light inlet is provided on one side of the optical path chamber, and a light outlet is provided on the other side opposite thereto;
[0008] A first reflector is arranged on the incident light path of the laser along the light entrance, and the first reflector is arranged at an angle with the incident light path; the first reflector is used to reflect the laser;
[0009] A second reflector is disposed on a reflection light path of the laser after the laser is reflected by the first reflector, and the second reflector is disposed at an angle to the reflection light path, and the second reflector is used to reflect the laser incident on the second reflector to the light outlet;
[0010] The first reflector has a first reflective surface for reflecting laser light, the second reflector has a second reflective surface for reflecting laser light, the first reflective surface and the second reflective surface are both curved surfaces, and the curvature directions of the first reflective surface and the second reflective surface are opposite.
[0011] In some embodiments of the present application, the first reflecting surface is a concave surface, and the second reflecting surface is a convex surface.
[0012] In some embodiments of the present application, the curvature of the first reflecting surface is opposite to that of the second reflecting surface.
[0013] In some embodiments of the present application, both the first reflecting surface and the second reflecting surface are curved surfaces.
[0014] In some embodiments of the present application, a first transparent window is provided on the light entrance, and a first anti-reflection film layer is provided on the first transparent window;
[0015] And / or, a second transparent window is arranged on the light outlet, and a second anti-reflection film layer is arranged on the second transparent window.
[0016] In some embodiments of the present application, the laser beam expansion device includes a first angle adjustment component, and the first angle adjustment component is used to adjust the angle between the first reflector and the incident laser;
[0017] And / or, the laser beam expansion device includes a second angle adjustment component, and the second angle adjustment component is used to adjust the angle between the second reflector and the laser.
[0018] In some embodiments of the present application, the laser beam expansion device includes a first cooling water path, which extends to one side of the first reflector and is used to cool the first reflector;
[0019] And / or, the laser beam expansion device includes a second cooling water path, the second cooling water path extends to one side of the second reflector and is used to cool the second reflector.
[0020] In some embodiments of the present application, the laser beam expansion device further includes a first temperature sensor, and the first temperature sensor is used to detect the temperature of the first reflector;
[0021] The laser beam expansion device also includes a second temperature sensor, which is used to detect the temperature of the second reflecting mirror.
[0022] In some embodiments of the present application, the optical path chamber is a sealed structure, and an air inlet is provided on the optical path chamber, and the air inlet is used to introduce nitrogen to increase the pressure in the optical path chamber.
[0023] In a second aspect, the present application also provides a carbon dioxide laser processing equipment, including the above-mentioned laser beam expansion device.
[0024] Compared with the prior art, the embodiments of the utility model have the following beneficial effects: the above-mentioned laser beam expansion device and carbon dioxide laser processing equipment, the laser beam expansion device includes an optical path chamber, a first reflector and a second reflector; a light inlet is provided on one side of the optical path chamber, and a light outlet is provided on the other side opposite thereto; the first reflector is provided on the incident optical path of the laser along the light inlet, and the first reflector is provided at an angle to the incident optical path; the first reflector is used to reflect the laser; the second reflector is provided on the reflected optical path of the laser after being reflected by the first reflector, and the second reflector is provided at an angle to the reflected optical path, and the second reflector is used to reflect the laser incident on the second reflector to the light outlet; the first reflector is provided with a first reflective surface for reflecting the laser, and the second reflector has a second reflective surface for reflecting the laser, the first reflective surface and the second reflective surface are both curved surfaces, and the bending directions of the first reflective surface and the second reflective surface are opposite; the laser can be reflected twice by the first reflective surface and the second reflective surface having different bending directions to adjust the diameter of the laser beam, and the structure is simple and the operation cost is low. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 A schematic diagram of the structure of a laser beam expansion device provided in one embodiment of the present application;
[0026] Figure 2 A schematic structural diagram of another laser beam expansion device provided in one embodiment of the present application;
[0027] Figure 3 A schematic structural diagram of a laser beam expansion device provided in another embodiment of the present application.
[0028] Specific element symbol description: 100 - optical path chamber, 110 - light inlet, 120 - first transparent window, 130 - light outlet, 140 - air inlet, 200 - laser, 300 - first reflector, 400 - second reflector, 500 - first angle adjustment component, 600 - second angle adjustment component. DETAILED DESCRIPTION
[0029] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0030] It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0031] It should be understood that the terms "length", "width", "up", "down", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0033] It is important to know that in the field of laser technology, the laser generator undoubtedly plays the role of core equipment. With its unique characteristics of high brightness, high directivity and high monochromaticity, it is widely used in cutting, welding, marking, medical treatment, scientific research and other fields, greatly promoting the scientific and technological progress and industrial development in these fields. In these applications, the power of the laser generator is a crucial parameter because it directly determines the intensity and energy of the output laser.
[0034] The size of the laser power not only affects the efficiency of laser processing, but also determines the processing quality and processing depth. For example, in cutting and welding applications, high-power lasers can quickly melt materials and achieve fast and high-quality cutting or welding. In marking applications, high-power lasers can form clear marks in a short time and improve production efficiency. In the medical field, high-power lasers can be used for various treatments and surgeries, such as ophthalmic surgery, dermatological treatment, etc.
[0035] However, it is not easy to change the diameter of a laser beam for high-energy lasers. Since high-energy lasers have extremely high energy density and power, relatively complex structures are required to control and adjust the beam diameter. These complex structures not only increase the manufacturing cost of the laser generator, but also increase the difficulty of operation and maintenance. At the same time, due to the particularity of high-energy lasers, these structures also need to have a high degree of stability and reliability to ensure that the laser generator can operate stably for a long time.
[0036] Therefore, based on this, the present application improves the relevant laser beam expansion device and carbon dioxide laser processing equipment.
[0037] See also Figure 1 and Figure 2 , Figure 1 FIG. 2 shows a schematic diagram of the structure of the laser beam expansion device 200 provided in this embodiment. Figure 2Another structural schematic diagram of the laser beam expander 200 provided in this embodiment is shown. A laser beam expander 200 in this embodiment includes an optical path chamber 100, a first reflector and a second reflector; a light inlet 110 is provided on one side of the optical path chamber 100, and a light outlet 130 is provided on the other side opposite thereto; the first reflector is provided on the incident optical path of the laser beam 200 along the light inlet 110, and the first reflector is provided at an angle to the incident optical path; the first reflector is used to reflect the laser beam 200; the second reflector is provided on the reflected optical path of the laser beam 200 after being reflected by the first reflector, and the second reflector is provided at an angle to the reflected optical path, and the second reflector is used to reflect the laser beam 200 incident on the second reflector to the light outlet 130; the first reflector has a first reflective surface for reflecting the laser beam 200, and the second reflector has a second reflective surface for reflecting the laser beam 200, and the first reflective surface and the second reflective surface are both curved surfaces, and the curvature directions of the first reflective surface and the second reflective surface are opposite.
[0038] It should be explained that after the laser 200 is emitted into the optical path chamber 100 along the light inlet 110, it is reflected and expanded by the first reflector and the second reflector, and then emitted along the light outlet 130 of the optical path chamber 100. The structure of the current laser 200 beam expansion device is very complicated, but the present application can adjust the diameter of the laser 200 beam by reflecting the laser 200 twice through the first reflective surface and the second reflective surface with different bending directions, and its structure is simple and the operation cost is low.
[0039] In some embodiments of the present application, the first reflective surface is a concave surface, and the second reflective surface is a convex surface. The incident laser 200 first enters a convex mirror (first reflector) with a certain curvature, then is reflected and incident on a concave mirror (second reflector) with a certain curvature, and finally is reflected and emitted from the light outlet 130. The convex mirror can diverge the laser 200, and the concave mirror can converge the divergent laser 200, and the diameter of the laser 200 beam changes in the process.
[0040] In some embodiments of the present application, the curvatures of the first reflective surface and the second reflective surface are opposite.
[0041] In some embodiments of the present application, both the first reflecting surface and the second reflecting surface are arc surfaces, that is, the first reflecting mirror is a convex spherical mirror, and the second reflecting mirror is a concave spherical mirror.
[0042] In some embodiments of this application, please continue to refer to Figure 1 and Figure 2In this embodiment, a first transparent window 120 is provided on the light inlet 110, and a first anti-reflection film layer is provided on the first transparent window 120; and / or, a second transparent window is provided on the light outlet 130, and a second anti-reflection film layer is provided on the second transparent window. It should be explained that the first transparent window 120 and the second transparent window can prevent external dust and particles from entering the optical path chamber 100 along the light inlet 110 and the light outlet 130, and avoid external dust and particles from contaminating the internal copper mirror. The first anti-reflection film layer can enhance the transmittance of the first transparent window 120 to improve the energy transmission efficiency of the laser 200. The second anti-reflection film layer can enhance the transmittance of the second transparent window to improve the energy transmission efficiency of the laser 200.
[0043] In some embodiments of this application, please continue to refer to Figure 2 Also see Figure 3 , Figure 3 A schematic structural diagram of the laser 200 beam expanding device provided in this embodiment is shown; the laser 200 beam expanding device in this embodiment includes a first angle adjustment component 500, and the first angle adjustment component 500 is used to adjust the angle between the first reflector and the incident laser 200; and / or, the laser 200 beam expanding device includes a second angle adjustment component 600, and the second angle adjustment component 600 is used to adjust the angle between the second reflector and the laser 200.
[0044] It is understandable that the first angle adjustment component 500 and the second angle adjustment component 600 can be used to perform pitch adjustment on the first reflector and the second reflector, so as to facilitate aligning the centers of the first reflector and the second reflector with the laser 200 beam.
[0045] In some embodiments, the first angle assembly 500 includes a first fixing plate and a second fixing plate arranged at intervals, a first through hole is arranged on the first fixing plate, a first reflector is arranged in the first through hole and connected to the second fixing plate; a threaded hole is arranged on the second fixing plate, a threaded member is passed through the threaded hole, one end of the threaded member abuts against the first fixing plate, and the other end extends out of the second fixing plate; the distance between the first fixing plate and the second fixing plate can be adjusted by rotating the threaded member. There are multiple threaded members, and they are arranged at intervals on the second fixing plate. By adjusting the extension lengths of the multiple threaded members to different parameters, the second fixing plate is arranged at an angle with the first fixing plate, thereby realizing the angle of the first reflector.
[0046] In some embodiments, the second angle assembly 500 has the same structure as the first angle assembly 600 .
[0047] In some embodiments of the present application, the laser 200 beam expansion device includes a first cooling water circuit, which extends to one side of the first reflector and is used to cool the first reflector; and / or, the laser 200 beam expansion device includes a second cooling water circuit, which extends to one side of the second reflector and is used to cool the second reflector.
[0048] It is understandable that cooling water paths are added to the first reflector and the second reflector, and the first reflector and the second reflector are cooled by passing cooling water to prevent the first reflector and the second reflector from heating up after absorbing part of the laser 200 and causing deformation of the first reflector and the second reflector.
[0049] In some embodiments of the present application, the laser 200 beam expansion device also includes a first temperature sensor, which is used to detect the temperature of the first reflector; the laser 200 beam expansion device also includes a second temperature sensor, which is used to detect the temperature of the second reflector.
[0050] It is understandable that temperature sensors are added to the first reflector and the second reflector to monitor the temperature of the first reflector and the second reflector at any time to prevent the first reflector and the second reflector from deforming due to high temperature and affecting the stability of the laser 200 .
[0051] In some embodiments of the present application, the optical path chamber 100 is a sealed structure, and an air inlet 140 is provided on the optical path chamber 100, and the air inlet 140 is used to introduce nitrogen to increase the pressure in the optical path chamber 100. It should be explained that the entire optical path chamber 100 is filled with nitrogen, which can, on the one hand, generate positive pressure in the chamber to prevent unclean gas outside the chamber from entering, and on the other hand, slow down the oxidation speed of the first reflector and the second reflector in the chamber, thereby increasing the service life of the first reflector and the second reflector.
[0052] Furthermore, in order to better implement the laser 200 beam expanding device in any of the above embodiments, based on the above laser 200 beam expanding device, the present application also provides a laser 200 processing equipment, including the above laser 200 beam expanding device.
[0053] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0054] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of the present application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements and amendments to the present application. Such modifications, improvements and amendments are suggested in the present application, so such modifications, improvements and amendments still belong to the spirit and scope of the exemplary embodiments of the present application.
[0055] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.
[0056] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more utility model embodiments, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.
[0057] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.
Claims
1. A laser beam expansion device, characterized in that: include: An optical path chamber, wherein a light inlet is provided on one side of the optical path chamber, and a light outlet is provided on the other side opposite thereto; A first reflector is arranged on the incident light path of the laser along the light entrance, and the first reflector is arranged at an angle with the incident light path; the first reflector is used to reflect the laser; A second reflector is disposed on a reflection light path of the laser after the laser is reflected by the first reflector, and the second reflector is disposed at an angle to the reflection light path, and the second reflector is used to reflect the laser incident on the second reflector to the light outlet; The first reflector has a first reflective surface for reflecting laser light, the second reflector has a second reflective surface for reflecting laser light, the first reflective surface and the second reflective surface are both curved surfaces, and the curvature directions of the first reflective surface and the second reflective surface are opposite.
2. The laser beam expansion device according to claim 1, characterized in that: The first reflecting surface is a concave surface, and the second reflecting surface is a convex surface.
3. The laser beam expansion device according to claim 1 or 2, characterized in that: The first reflecting surface and the second reflecting surface have opposite curvatures.
4. The laser beam expansion device according to claim 1 or 2, characterized in that: The first reflecting surface and the second reflecting surface are both arc surfaces.
5. The laser beam expansion device according to claim 1, characterized in that: A first transparent window is disposed on the light entrance, and a first anti-reflection film layer is disposed on the first transparent window; And / or, a second transparent window is arranged on the light outlet, and a second anti-reflection film layer is arranged on the second transparent window.
6. The laser beam expansion device according to claim 1, characterized in that: The laser beam expansion device comprises a first angle adjustment component, and the first angle adjustment component is used to adjust the angle between the first reflector and the incident laser; And / or, the laser beam expansion device includes a second angle adjustment component, and the second angle adjustment component is used to adjust the angle between the second reflector and the laser.
7. The laser beam expansion device according to claim 1, characterized in that: The laser beam expansion device comprises a first cooling water path, the first cooling water path extends to one side of the first reflector and is used to cool the first reflector; And / or, the laser beam expansion device includes a second cooling water path, the second cooling water path extends to one side of the second reflector and is used to cool the second reflector.
8. The laser beam expansion device according to claim 1, characterized in that: The laser beam expansion device further includes a first temperature sensor, which is used to detect the temperature of the first reflector; The laser beam expansion device also includes a second temperature sensor, which is used to detect the temperature of the second reflecting mirror.
9. The laser beam expansion device according to claim 1, characterized in that: The optical path chamber is a sealed structure, and an air inlet is provided on the optical path chamber, and the air inlet is used to introduce nitrogen to increase the pressure in the optical path chamber.
10. A carbon dioxide laser processing device, characterized in that: A laser beam expansion device comprising any one of claims 1 to 9.