Laser energy adjusting device and carbon dioxide laser processing equipment
By designing a rotatable optical path channel and a laser energy adjustment device for a half-wave plate, the problem of high-energy laser power adjustment is solved, and flexible adjustment and high-precision control of laser power are achieved.
Patent Information
- Application Number
- CN202421446531.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-24
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-06-24
AI Technical Summary
The power regulation cost of high-energy lasers is high, and the prior art requires the installation of complex power regulation modules, resulting in high structural and operation costs.
A laser energy adjustment device is designed to adjust the ratio of the first polarized light and the second polarized light in the laser light by setting a rotatable optical path channel and a half-wave plate, thereby realizing the adjustment of laser power.
It realizes flexible adjustment of laser power, reduces the structure and operation cost of the power adjustment module, and also has the advantages of high precision.
Smart Images
Figure CN222620383U_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the field of high-energy laser technology, and in particular relates to a laser energy regulating device and a carbon dioxide laser processing equipment. Background Art
[0002] In the field of laser technology, laser generators, as a core device, are widely used in cutting, welding, marking, medical treatment, scientific research and other fields. The power of the laser generator directly determines the intensity and energy of its output laser, and has a vital impact on the effect and efficiency of laser applications.
[0003] However, for high-energy lasers, a relatively complex power regulation module is required to achieve the regulation of laser power, which has high structural and operating costs.
[0004] Therefore, how to reduce the power regulation cost of high-energy lasers is a problem that technicians in this field currently need to solve. Utility Model Content
[0005] The purpose of this application is to provide a laser energy regulation device and a carbon dioxide laser processing equipment, aiming to solve the problem of high power regulation cost of high energy lasers.
[0006] A first aspect of an embodiment of the present application provides a laser energy adjustment device, comprising:
[0007] A first fixing member, wherein the first fixing member is provided with a light entrance for injecting laser light;
[0008] An optical path channel, rotatably connected to the first fixing member, the optical path channel being in communication with the light entrance;
[0009] a second fixing member, wherein a light outlet for emitting laser light is provided on the second fixing member, the second fixing member is rotatably connected to an end of the optical path away from the light entrance, and the light outlet is in communication with the optical path;
[0010] Among them, a half-wave plate is arranged on the optical path channel, and the half-wave plate is used to adjust the ratio of the first polarized light to the second polarized light in the laser, and the polarization direction of the first polarized light is perpendicular to the polarization direction of the second polarized light; the optical path channel is configured to be rotatable and drive the half-wave plate to rotate to adjust the ratio of the first polarized light to the second polarized light in the laser in the light outlet.
[0011] In some embodiments of the present application, the laser energy adjustment device includes a rotating mechanism, which is connected to a side of the optical path channel close to the first fixing member and / or the second fixing member, and is used to drive the optical path channel to rotate relative to the first fixing member and / or the second fixing member.
[0012] In some embodiments of the present application, the rotating mechanism is arranged on a side of the optical path channel close to the second fixing member; the rotating mechanism includes a rotating bearing, the rotating bearing is embedded in the light outlet, and the optical path channel is connected to the inner ring of the rotating bearing.
[0013] In some embodiments of the present application, the rotating mechanism also includes a rotating scale ring, which is provided with a scale, and the rotating scale ring is sleeved on the optical path channel; a scale reference mark is provided on the second fixing member, and the scale reference mark points to the scale to indicate the rotation angle of the rotating scale ring.
[0014] In some embodiments of the present application, the half-wave plate includes a first phase mirror and a second phase mirror arranged relatively to each other, and the normal of the first phase mirror is perpendicular to the normal of the second phase mirror; wherein there is a phase delay between the first phase mirror and the second phase mirror.
[0015] In some embodiments of the present application, the phase delay is 90 degrees.
[0016] In some embodiments of the present application, a first reflector and a second reflector are further provided on the optical path channel. Along the optical path direction of the laser, the first reflector is provided before the first phase mirror, and the second reflector is provided after the second phase mirror;
[0017] A first angle is formed between the mirror surface of the first reflector and the laser light entering from the light entrance, and a second angle is formed between the mirror surface of the second reflector and the laser light exiting from the light exit.
[0018] In some embodiments of the present application, the first angle is equal to the second angle.
[0019] In some embodiments of the present application, the laser energy adjustment device further includes:
[0020] An air inlet chamber, the air inlet chamber is communicated with the light outlet, and the air inlet chamber is provided with an air inlet;
[0021] a polarization channel connected to a side of the air inlet chamber away from the light outlet; a polarizer is arranged in the polarization channel, and the polarizer is used to transmit the first polarized light and to reflect the second polarized light;
[0022] An energy meter is arranged on one side of the polarizer, and is used for receiving the first polarized light and detecting the power of the first polarized light.
[0023] In some embodiments of the present application, an angle adjustment component is provided on the polarization channel, and the angle adjustment component is used to adjust the angle between the polarizer and the laser at the light outlet.
[0024] In a second aspect, the present application also provides a carbon dioxide laser processing equipment, including the above-mentioned laser energy regulating device.
[0025] Compared with the prior art, the embodiments of the utility model have the following beneficial effects: the above-mentioned laser energy regulating device and carbon dioxide laser processing equipment, the laser energy regulating device comprises a first fixing member, an optical path channel and a second fixing member; the first fixing member is provided with a light inlet for injecting laser light; the optical path channel is rotatably connected to the first fixing member, and the optical path channel is communicated with the light inlet; the second fixing member is provided with a light outlet for emitting laser light, the second fixing member is rotatably connected to an end of the optical path channel away from the light inlet, and the light outlet is communicated with the optical path channel; a half-wave plate is provided on the optical path channel, and the half-wave plate is used to The ratio of the first polarized light to the second polarized light in the laser is adjusted, and the polarization direction of the first polarized light is perpendicular to the polarization direction of the second polarized light; the optical path channel is configured to be rotatable and drive the half-wave plate to rotate to adjust the ratio of the first polarized light to the second polarized light in the laser in the light outlet; the application sets the optical path channel to be rotatable, so as to adjust the angle between the fast axis of the half-wave plate and the polarization direction of the laser, thereby changing the ratio of the first polarized light to the second polarized light, which is beneficial to realize the adjustment of the laser power. The power adjustment module in the application has a simple structure, low operating cost, and also has the advantages of high precision. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 A schematic diagram of the structure of a laser energy regulating device provided in one embodiment of the present application;
[0027] Figure 2 A schematic diagram of the structure of another laser energy regulating device provided in one embodiment of the present application;
[0028] Figure 3 For this application Figure 1 Schematic diagram of the enlarged structure of local A.
[0029] Explanation of specific element symbols: 100-first fixing part, 110-light inlet, 200-optical path channel, 210-half-wave plate, 211-first phase mirror, 212-second phase mirror, 220-first reflecting part, 230-second reflecting part, 300-second fixing part, 400-rotating mechanism, 500-air inlet chamber, 600-polarization channel, 610-polarizer, 620-angle adjustment assembly, 700-energy meter. DETAILED DESCRIPTION
[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0031] It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0032] It should be understood that the terms "length", "width", "up", "down", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0034] It is important to know that in the field of laser technology, laser generators, as a core device, are widely used in cutting, welding, marking, medical treatment, scientific research and other fields. The power of the laser generator directly determines the intensity and energy of its output laser, and has a vital impact on the effect and efficiency of laser applications.
[0035] However, for high-energy lasers, especially lasers with a power of 50W-5000W, a relatively complex power regulation module is required to achieve the regulation of laser power, which has high structural and operating costs.
[0036] Therefore, the present application improves the relevant laser energy regulation device and method based on this.
[0037] See also Figure 1 and Figure 2 , Figure 1 FIG. 4 shows a schematic diagram of the structure of the laser energy regulating device provided in this embodiment. Figure 2Another structural schematic diagram of the laser energy regulating device provided in this embodiment is shown. A laser energy regulating device and a carbon dioxide laser processing device according to the present embodiment include a first fixing member 100, an optical path channel 200 and a second fixing member 300; a light inlet 110 for injecting laser light is provided on the first fixing member 100; the optical path channel 200 is rotatably connected to the first fixing member 100, and the optical path channel 200 is communicated with the light inlet 110; a light outlet for emitting laser light is provided on the second fixing member 300, the second fixing member 300 is rotatably connected to an end of the optical path channel 200 away from the light inlet 110, and the light outlet is communicated with the optical path channel 200; a half-wave plate 210 is provided on the optical path channel 200, and the half-wave plate 210 is used to adjust the ratio of the first polarized light to the second polarized light in the laser light, and the polarization direction of the first polarized light is perpendicular to the polarization direction of the second polarized light; the optical path channel 200 is configured to be rotatable and drive the half-wave plate to rotate, so as to adjust the ratio of the first polarized light to the second polarized light in the laser light in the light outlet.
[0038] It should be explained that the optical path of the laser is arranged along the light inlet 110, the optical path channel 200, and the light outlet, and the polarization direction of the laser changes on the half-wave plate 210 in the optical path channel 200. The half-wave plate 210 (Half-wave plate) is a special optical device, also known as a λ / 2 wave plate. Its function is to rotate the polarization direction of the incident light by a certain angle, usually 90 degrees. The main feature of the half-wave plate 210 is that the direction of its optical axis is at a 45-degree angle to the polarization direction of the incident light. When the incident light passes through the half-wave plate 210, its polarization direction rotates, and the angle of rotation is related to the distance the light propagates in the wave plate and the thickness of the wave plate.
[0039] The current high-energy laser power regulation requires an extremely complex structure, which has high operating and manufacturing costs. However, the present application sets the optical path channel 200 to be rotatable, so as to adjust the angle between the fast axis of the half-wave plate 210 and the polarization direction of the laser, thereby changing the ratio of the first polarized light to the second polarized light, which is conducive to adjusting the laser power. The power regulation module in the present application has a simple structure, low operating cost, and high precision.
[0040] In some embodiments, the laser is CO 2 Laser, CO 2 Laser uses electrical energy to excite carbon dioxide molecules, causing them to undergo energy level transitions and emit laser light. This type of laser has the characteristics of high energy density, high directivity, and high monochromaticity.
[0041] In some embodiments, the first polarized light is P-polarized (P-Polarization, longitudinal wave) light, and the second polarized light is S-polarized (S-Polarization, transverse wave) light.
[0042] In some embodiments of this application, please continue to refer to Figure 1 and Figure 2 Also see Figure 3 , Figure 3 This embodiment provides Figure 1 The laser energy regulating device of this embodiment includes a rotating mechanism 400, which is connected to a side of the optical path channel 200 close to the first fixing member 100 and / or the second fixing member 300, and is used to drive the optical path channel 200 to rotate relative to the first fixing member 100 and / or the second fixing member 300. In this way, it is helpful to simplify the difficulty of rotating the optical path channel 200 and to improve the accuracy of rotating the optical path channel 200.
[0043] In some embodiments of the present application, the rotating mechanism 400 is arranged on a side of the optical path channel 200 close to the second fixing member 300; the rotating mechanism 400 includes a rotating bearing, which is embedded in the light outlet, and the optical path channel 200 is connected to the inner ring of the rotating bearing.
[0044] In some embodiments of the present application, the rotating mechanism 400 further includes a rotating scale ring, on which scales are provided, and the rotating scale ring is sleeved on the optical path channel 200; a scale reference mark is provided on the second fixing member 300, and the scale reference mark points to the scales to show the rotation angle of the rotating scale ring. In other words, the rotation angle of the optical path channel 200 can be read by rotating the scale ring, so as to improve the rotation accuracy of the optical path channel 200.
[0045] In some embodiments of this application, please continue to refer to Figures 1 to 3 The half-wave plate 210 of this embodiment includes a first phase mirror 211 and a second phase mirror 212 which are arranged relatively to each other, and the normal line of the first phase mirror 211 is perpendicular to the normal line of the second phase mirror 212; wherein there is a phase delay between the first phase mirror 211 and the second phase mirror 212.
[0046] In some embodiments of the present application, the phase delay is 90 degrees. In this embodiment, two phase mirrors with a phase delay of 90 degrees form a half-wave plate 210 to achieve the change of CO 2 function of the laser polarization direction.
[0047] In some embodiments of this application, please continue to refer to Figure 3In this embodiment, the optical path channel 200 is also provided with a first reflector 220 and a second reflector 230. Along the optical path direction of the laser, the first reflector 220 is provided before the first phase mirror 211, and the second reflector 230 is provided after the second phase mirror 212; the mirror surface of the first reflector 220 and the laser entering from the light inlet 110 have a first angle, and the mirror surface of the second reflector 230 and the laser emitted from the light outlet have a second angle. The two reflectors are mainly used to change the direction of the laser, so as to facilitate the rotary motor module to adjust the phase mirror.
[0048] In some embodiments of the present application, the first angle is equal to the second angle. In some embodiments, the first angle and the second angle are 45 degrees.
[0049] In some embodiments of this application, please continue to refer to Figure 1 and Figure 2 The laser energy regulating device of this embodiment also includes: an air inlet chamber 500, which is connected to the light outlet and is provided with an air inlet; a polarization channel 600, which is connected to a side of the air inlet chamber 500 away from the light outlet; a polarizer 610 is provided in the polarization channel 600, and the polarizer 610 is used to transmit the first polarized light and to reflect the second polarized light; an energy meter 700, which is provided on one side of the polarizer 610, and is used to receive the first polarized light and detect the power of the first polarized light.
[0050] That is to say, the laser energy regulation device of this embodiment can use two phase mirrors with 90-degree phase delay to form a half-wave plate 210, and then be incident on the polarizer 610 at 45°, which has the characteristics of P polarization transmission and S polarization reflection. The transmitted P polarized laser is incident on the energy meter 700 for power measurement, and the phase mirror is driven to rotate by the rotating mechanism 400 to adjust the angle between its fast axis and the polarization direction of the CO2 laser, thereby changing the ratio of P polarized light and S polarized light to achieve laser power regulation. At the same time, the power reading of the energy meter 700 is used to indirectly measure the power of the output port in real time.
[0051] It should be explained that the air inlet chamber 500 can be fed with N 2 On the one hand, the gas can create positive pressure in the chamber to prevent unclean gas outside the chamber from entering. On the other hand, it can slow down the oxidation rate of the copper mirror in the chamber and increase the service life of the copper mirror.
[0052] In some embodiments of this application, please continue to refer to Figure 2 In this embodiment, the polarization channel 600 is provided with an angle adjustment component 620, which is used to adjust the angle between the polarizer 610 and the laser at the light outlet. The angle adjustment component 620 is used to adjust the pitch of the polarizer 610 to facilitate alignment of the polarizer 610 with the laser.
[0053] In some embodiments, a cooling water path is provided on the side of the first reflector 220, the second reflector 230, the first phase mirror 211, and the second phase mirror 212 facing away from the laser, and the copper mirror is cooled by passing cooling water to prevent the copper mirror from heating up and deforming after absorbing part of the laser. The interior of the mounting plate on which the polarizer 610 is mounted is also cooled by passing cooling water, and then the polarizer 610 is cooled indirectly to prevent the polarizer 610 from deforming due to heat. Cooling water is also passed through the energy meter 700 to prevent the energy meter 700 from overheating and being damaged. A cooling plate is added in front of the energy meter 700 to prevent heat from overflowing and damaging other parts.
[0054] In some embodiments, a temperature sensor is provided on the side of the first reflector 220, the second reflector 230, the first phase mirror 211, and the second phase mirror 212 facing away from the laser to monitor the temperature of the copper mirror at any time to prevent the copper mirror from deforming due to high temperature and affecting the stability of the laser. A temperature sensor is also installed on the mounting plate on which the polarizer 610 is mounted to monitor its temperature at any time.
[0055] Furthermore, in order to better implement the laser energy regulating device in any of the above embodiments, based on the above laser energy regulating device, the present application also provides a carbon dioxide laser processing equipment, including the above laser energy regulating device.
[0056] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0057] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of the present application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements and amendments to the present application. Such modifications, improvements and amendments are suggested in the present application, so such modifications, improvements and amendments still belong to the spirit and scope of the exemplary embodiments of the present application.
[0058] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.
[0059] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more utility model embodiments, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.
[0060] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.
Claims
1. A laser energy regulating device, characterized in that: include: A first fixing member, wherein the first fixing member is provided with a light entrance for injecting laser light; An optical path channel, rotatably connected to the first fixing member, the optical path channel being in communication with the light entrance; a second fixing member, wherein a light outlet for emitting laser light is provided on the second fixing member, the second fixing member is rotatably connected to an end of the optical path away from the light entrance, and the light outlet is in communication with the optical path; Among them, a half-wave plate is arranged on the optical path channel, and the half-wave plate is used to adjust the ratio of the first polarized light to the second polarized light in the laser, and the polarization direction of the first polarized light is perpendicular to the polarization direction of the second polarized light; the optical path channel is configured to be rotatable and drive the half-wave plate to rotate to adjust the ratio of the first polarized light to the second polarized light in the laser in the light outlet.
2. The laser energy adjustment device according to claim 1, characterized in that: The laser energy regulating device comprises a rotating mechanism, which is connected to a side of the optical path close to the first fixing member and / or the second fixing member, and is used to drive the optical path to rotate relative to the first fixing member and / or the second fixing member.
3. The laser energy adjustment device according to claim 2, characterized in that: The rotating mechanism is arranged on a side of the optical path close to the second fixing member; the rotating mechanism comprises a rotating bearing, the rotating bearing is embedded in the light outlet, and the optical path is connected to the inner ring of the rotating bearing.
4. The laser energy adjustment device according to claim 3, characterized in that: The rotating mechanism also includes a rotating scale ring, which is provided with scales and is sleeved on the optical path; a scale reference mark is provided on the second fixing member, and the scale reference mark points to the scale to show the rotation angle of the rotating scale ring.
5. The laser energy adjustment device according to claim 1, characterized in that: The half-wave plate comprises a first phase mirror and a second phase mirror which are arranged opposite to each other, wherein a normal line of the first phase mirror is perpendicular to a normal line of the second phase mirror; wherein a phase delay is provided between the first phase mirror and the second phase mirror, and the phase delay is 90 degrees.
6. The laser energy adjustment device according to claim 5, characterized in that: The optical path is further provided with a first reflector and a second reflector. Along the optical path direction of the laser, the first reflector is provided before the first phase mirror, and the second reflector is provided after the second phase mirror. A first angle is formed between the mirror surface of the first reflector and the laser light entering from the light entrance, and a second angle is formed between the mirror surface of the second reflector and the laser light exiting from the light exit.
7. The laser energy adjustment device according to claim 6, characterized in that: The first angle is equal to the second angle.
8. The laser energy adjustment device according to claim 6, characterized in that: The laser energy regulating device also includes: An air inlet chamber, the air inlet chamber is communicated with the light outlet, and the air inlet chamber is provided with an air inlet; a polarization channel connected to a side of the air inlet chamber away from the light outlet; a polarizer is arranged in the polarization channel, and the polarizer is used to transmit the first polarized light and to reflect the second polarized light; An energy meter is arranged on one side of the polarizer, and is used for receiving the first polarized light and detecting the power of the first polarized light.
9. The laser energy adjustment device according to claim 8, characterized in that: An angle adjustment component is provided on the polarization channel, and the angle adjustment component is used to adjust the angle between the polarizer and the laser at the light outlet.
10. A carbon dioxide laser processing device, characterized in that: A laser energy regulating device comprising the laser energy regulating device according to any one of claims 1 to 9.