Sheet fixing and positioning structure

Abstract

The utility model discloses a sheet fixing and positioning structure which comprises a base, a movable frame, a positioning plate, a linear conveying mechanism, a supporting plate and a lifting driving piece. The supporting plate is fixedly mounted on the base; the movable frame is arranged on the base and can ascend and descend relative to the base, and the lifting driving piece is in driving connection with the movable frame; the positioning plate is arranged on the moving frame and located above the supporting plate, and a plurality of positioning holes are formed in the positioning plate in an array mode; two linear conveying mechanisms are arranged on the movable frame, located below the positioning plate and located on the two sides of the supporting plate correspondingly. The two linear conveying mechanisms of the sheet fixing and positioning structure are used for bearing the two sides of the bottom face of the sheet correspondingly, and after the sheet moves to the linear conveying mechanisms, the lifting driving piece drives the moving frame to descend to the position below the linear conveying mechanism moving supporting plate; the supporting plate lifts the sheet so that the crystal on the sheet can penetrate through the positioning hole in the positioning plate to achieve accurate positioning.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a sheet material fixing and positioning structure. Background Art

[0002] During the production process of semiconductor products, it is necessary to process the crystals on the sheet on the transport platform. However, the semiconductor products on the transport platform are prone to positional displacement, which makes it difficult to accurately locate the processing position. The processing is difficult and is not conducive to reducing production costs. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a sheet material fixing and positioning mechanism which can accurately position crystals on semiconductor sheets.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a sheet material fixing and positioning structure, including a base, a movable frame, a positioning plate, a linear conveying mechanism, a support plate and a lifting drive component; the support plate is fixedly installed on the base; the movable frame is arranged on the base and can be lifted and lowered relative to the base, and the lifting drive component is drivingly connected to the movable frame; the positioning plate is arranged on the movable frame, and the positioning plate is located above the support plate, and a plurality of positioning holes are arranged in an array on the positioning plate; two linear conveying mechanisms are arranged on the movable frame, the two linear conveying mechanisms are located below the positioning plate, and the two linear conveying mechanisms are respectively located on both sides of the support plate.

[0005] Furthermore, it also includes an elastic member, and two ends of the elastic member are respectively connected to the movable frame and the base.

[0006] Furthermore, the elastic member is a spring, a spring sheet or a spring washer.

[0007] Furthermore, the lifting drive member is a linear cylinder.

[0008] Furthermore, the linear conveying mechanism is a rope transmission mechanism or a belt transmission mechanism.

[0009] Furthermore, the positioning plate is connected to the movable frame via screws.

[0010] Furthermore, the positioning plate and the movable frame are respectively provided with positioning holes and positioning columns matched with the positioning holes.

[0011] Furthermore, a detection sensor is provided on the base, and a trigger is provided on the movable frame corresponding to the detection sensor.

[0012] Furthermore, an avoidance groove is provided on the support plate corresponding to the linear conveying mechanism 4 .

[0013] Furthermore, the edges of the positioning holes are chamfered.

[0014] The beneficial effect of the utility model is that the two linear conveying mechanisms of the sheet fixing and positioning structure can rise with the moving frame under the drive of the lifting drive member until they are flush with the external transportation mechanism. The two linear conveying mechanisms respectively support the two sides of the bottom surface of the sheet. After the sheet moves onto the linear conveying mechanism, the lifting drive member drives the moving frame to descend until it is under the moving support plate of the linear conveying mechanism. The support plate will lift the sheet so that the crystals on the sheet can pass through the positioning holes on the positioning plate to achieve precise positioning. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the sheet material fixing and positioning structure of the first embodiment of the utility model.

[0016] Description of labels:

[0017] 1. Base; 11. Detection sensor;

[0018] 2. Mobile frame; 21. Trigger;

[0019] 3. Positioning plate; 31. Positioning hole;

[0020] 4. Linear conveying mechanism;

[0021] 5. Pallet; 51. Avoidance slot;

[0022] 6. Lifting drive parts;

[0023] 7. Elastic parts. DETAILED DESCRIPTION

[0024] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in conjunction with the implementation modes and the accompanying drawings.

[0025] Please refer to Figure 1 , a sheet material fixing and positioning structure, comprising a base 1, a mobile frame 2, a positioning plate 3, a linear conveying mechanism 4, a support plate 5 and a lifting drive member 6; the support plate 5 is fixedly mounted on the base 1; the mobile frame 2 is arranged on the base 1 and can be lifted and lowered relative to the base 1, and the lifting drive member 6 is drivingly connected to the mobile frame 2; the positioning plate 3 is arranged on the mobile frame 2, and the positioning plate 3 is located above the support plate 5, and a plurality of positioning holes 31 are arranged in an array on the positioning plate 3; two linear conveying mechanisms 4 are arranged on the mobile frame 2, the two linear conveying mechanisms 4 are located below the positioning plate 3, and the two linear conveying mechanisms 4 are respectively located on both sides of the support plate 5.

[0026] From the above description, it can be seen that the beneficial effect of the utility model is that the two linear conveying mechanisms 4 of the sheet fixing positioning structure can rise with the moving frame 2 under the drive of the lifting drive 6 until they are flush with the external transportation mechanism. The two linear conveying mechanisms 4 respectively support the two sides of the bottom surface of the sheet. After the sheet moves onto the linear conveying mechanism 4, the lifting drive 6 drives the moving frame 2 to descend until it is under the moving pallet 5 of the linear conveying mechanism 4. The pallet 5 will lift the sheet so that the crystals on the sheet can pass through the positioning holes 31 on the positioning plate 3 to achieve precise positioning.

[0027] Furthermore, it also includes an elastic member 7, two ends of which are respectively connected to the mobile frame 2 and the base 1.

[0028] As can be seen from the above description, the elastic member 7 can make the movable frame 2 always have a tendency to move toward the base 1 , so that the output shaft of the lifting drive member 6 does not need to be fixedly connected to the movable frame 2 .

[0029] Furthermore, the elastic member 7 is a spring, a spring sheet or a spring washer.

[0030] It can be seen from the above description that the type of the elastic member 7 can be selected according to actual use requirements or production conditions.

[0031] Furthermore, the lifting drive member 6 is a linear cylinder.

[0032] It can be seen from the above description that the lifting drive member 6 is easy to obtain and use.

[0033] Furthermore, the linear conveying mechanism 4 is a rope transmission mechanism or a belt transmission mechanism.

[0034] It can be seen from the above description that the type of the linear conveying mechanism 4 can be selected according to actual use requirements or production conditions.

[0035] Furthermore, the positioning plate 3 is connected to the movable frame 2 via screws.

[0036] It can be seen from the above description that the connection structure between the positioning plate 3 and the movable frame 2 is convenient for assembly and disassembly, and the user can install the corresponding type of positioning plate 3 on the movable frame 2 according to the different types of semiconductor products.

[0037] Furthermore, the positioning plate 3 and the movable frame 2 are respectively provided with positioning holes 31 and positioning columns matched with the positioning holes 31 .

[0038] It can be seen from the above description that the cooperation between the positioning holes 31 and the positioning posts can accurately determine the relative position of the positioning plate 3 and the moving frame 2, thereby facilitating more accurate determination of the position of the crystal on the sheet.

[0039] Furthermore, a detection sensor 11 is disposed on the base 1 , and a trigger member 21 is disposed on the mobile frame 2 corresponding to the detection sensor 11 .

[0040] It can be seen from the above description that the detection sensor 11 and the trigger member 21 trigger the detection sensor 11 to accurately determine the relative height between the moving frame 2 and the base 1, thereby determining the time point when some production steps are running.

[0041] Furthermore, an avoidance groove 51 is provided on the support plate 5 corresponding to the linear conveying mechanism 4 .

[0042] As can be seen from the above description, the avoidance groove 51 provided on the pallet 5 allows the lateral direction of the pallet 5 to extend outward without being hindered by the linear conveying mechanism 4, so that the pallet 5 can be lifted to the two side edges of the sheet.

[0043] Furthermore, the edge of the positioning hole 31 is chamfered.

[0044] It can be seen from the above description that the chamfered structure plays a guiding role, making it easier for the crystal on the sheet to extend into the positioning hole 31 .

[0045] Please refer to Figure 1 , Embodiment 1 of the utility model is: a sheet material fixing and positioning structure, comprising a base 1, a mobile frame 2, a positioning plate 3, a linear conveying mechanism 4, a support plate 5 and a lifting drive member 6; the support plate 5 is fixedly mounted on the base 1; the mobile frame 2 is arranged on the base 1 and can be lifted and lowered relative to the base 1, and the lifting drive member 6 is drivingly connected to the mobile frame 2; the positioning plate 3 is arranged on the mobile frame 2, and the positioning plate 3 is located above the support plate 5, and a plurality of positioning holes 31 are arranged in an array on the positioning plate 3; two linear conveying mechanisms 4 are arranged on the mobile frame 2, the two linear conveying mechanisms 4 are located below the positioning plate 3, and the two linear conveying mechanisms 4 are respectively located on both sides of the support plate 5.

[0046] Specifically, the mobile frame 2 includes a connecting plate and two side plates symmetrically arranged on the connecting plate. The two ends of the positioning plate 3 are respectively connected to the top surfaces of the two side plates of the mobile frame 2 by screws. The linear conveying mechanism 4 is a rope transmission mechanism, and the two linear conveying mechanisms 4 are respectively arranged on the inner side surfaces of the two side plates, and the two linear conveying mechanisms 4 move synchronously. The lifting drive member 6 is preferably a linear cylinder. In other embodiments, it is also feasible to set the linear conveying mechanism 4 as a belt transmission mechanism.

[0047] During operation, the lifting drive 6 first drives the mobile frame 2 to rise until the linear conveying mechanism 4 is flush with the external transport mechanism, and then the linear conveying mechanism 4 operates to move the sheet between the linear conveying mechanism 4 and the positioning plate 3. At this time, the two linear conveying mechanisms 4 respectively hold the two sides of the sheet; the lifting drive 6 drives the mobile frame 2 to descend until the two linear conveying mechanisms 4 move under the pallet 5, and the sheet is placed on the pallet 5. The positioning plate 3 gradually approaches the pallet 5 until the crystal on the sheet is stuck in the positioning hole 31 to achieve precise positioning.

[0048] The sheet material fixing and positioning structure further comprises an elastic member 7, and two ends of the elastic member 7 are respectively connected to the movable frame 2 and the base 1. In this embodiment, the elastic member 7 is a spring, and hooks are respectively provided at two ends of the elastic member 7. In other embodiments, the elastic member 7 can be set as a spring sheet or a spring washer.

[0049] A detection sensor 11 is provided on the base 1, and a trigger 21 is provided on the movable frame 2 corresponding to the detection sensor 11. Specifically, the trigger 21 is a baffle with an L-shaped cross section, and the detection sensor 11 is an infrared sensor. When the trigger 21 triggers the detection sensor 11, the movable frame 2 is at the lowest position, and the crystal on the sheet passes through the positioning hole 31. The detection sensor 11 is electrically connected to an external device, and is used to send an electrical signal to the external device to drive it to process the crystal after positioning.

[0050] The support plate 5 is provided with an avoidance groove 51 corresponding to the linear conveying mechanism 4. It is easy to understand that the avoidance groove 51 is provided on the support plate 5 so that the side of the support plate 5 is not hindered by the linear conveying mechanism 4 and extends outward, so that the support plate 5 can be lifted to the two side edges of the sheet.

[0051] The edge of the positioning hole 31 is chamfered. It is easy to understand that the chamfered structure plays a guiding role, making it easier for the crystal on the sheet to extend into the positioning hole 31.

[0052] As a preferred embodiment, the positioning plate 3 and the moving frame 2 are respectively provided with positioning holes 31 and positioning posts that cooperate with the positioning holes 31. It is easy to understand that the positioning holes 31 and the positioning posts cooperate to accurately determine the relative position of the positioning plate 3 and the moving frame 2, thereby facilitating more accurate determination of the position of the crystal on the sheet.

[0053] To sum up, the two linear conveying mechanisms of the sheet fixing positioning structure provided by the utility model can rise as the moving frame is driven by the lifting drive component until they are flush with the external transportation mechanism. The two linear conveying mechanisms respectively support the two sides of the bottom surface of the sheet. After the sheet moves onto the linear conveying mechanism, the lifting drive component drives the moving frame to descend until it is under the moving pallet of the linear conveying mechanism. The pallet will lift the sheet so that the crystals on the sheet can pass through the positioning holes on the positioning plate to achieve precise positioning.

[0054] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent transformations made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in the relevant technical field, are also included in the patent protection scope of the present invention.

Claims

1. A sheet material fixing and positioning structure, characterized in that: It includes a base, a mobile frame, a positioning plate, a linear conveying mechanism, a support plate and a lifting drive member; the support plate is fixedly installed on the base; the mobile frame is arranged on the base and can be lifted and lowered relative to the base, and the lifting drive member is drivingly connected to the mobile frame; the positioning plate is arranged on the mobile frame, and the positioning plate is located above the support plate, and a plurality of positioning holes are arranged in an array on the positioning plate; two linear conveying mechanisms are arranged on the mobile frame, the two linear conveying mechanisms are located below the positioning plate, and the two linear conveying mechanisms are respectively located on both sides of the support plate.

2. A sheet material fixing and positioning structure according to claim 1, characterized in that: It also includes an elastic member, two ends of which are respectively connected to the movable frame and the base.

3. A sheet material fixing and positioning structure according to claim 2, characterized in that: The elastic member is a spring, a spring sheet or an elastic washer.

4. The sheet material fixing and positioning structure according to claim 1, characterized in that: The lifting drive member is a linear cylinder.

5. The sheet material fixing and positioning structure according to claim 1, characterized in that: The linear conveying mechanism is a rope transmission mechanism or a belt transmission mechanism.

6. The sheet material fixing and positioning structure according to claim 1, characterized in that: The positioning plate is connected to the moving frame via screws.

7. The sheet material fixing and positioning structure according to claim 1, characterized in that: The positioning plate and the movable frame are respectively provided with positioning holes and positioning columns matched with the positioning holes.

8. The sheet material fixing and positioning structure according to claim 1, characterized in that: The base is provided with a detection sensor, and the movable frame is provided with a trigger member corresponding to the detection sensor.

9. The sheet material fixing and positioning structure according to claim 1, characterized in that: The support plate is provided with an avoidance groove corresponding to the linear conveying mechanism.

10. The sheet material fixing and positioning structure according to claim 1, characterized in that: The edges of the positioning holes are chamfered.

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