Static sealing magnetic push rod device with low friction force

Abstract

The utility model belongs to the technical field of vacuum coating, and relates to a low-friction static sealing magnetic push rod device which comprises a magnetic permeable sleeve, a push rod unit and a linear driving unit, the linear driving unit comprises a magnetic group sleeving an outer ring and a linear driving mechanism; the push rod unit penetrates through the interior of the magnetic-permeable sleeve and comprises a push rod coaxially arranged in the magnetic-permeable sleeve, and an inner-ring magnetic group which is attracted with the outer-ring magnetic group inside and outside through the magnetic-permeable sleeve is arranged at the tail part of the push rod unit; the two ends of the inner ring magnetic group are clamped by a pair of limiting blocks, the limiting blocks are fixed on the push rod, three rollers are uniformly distributed on each limiting block around a shaft, the axes of the three rollers are positioned in the vertical plane of the axis of the push rod, the included angles between the axes of the three rollers are 60 degrees, and the outer sides of all the rollers are tightly attached to the inner wall of the magnetic permeable sleeve. According to the device, the inner ring magnetic group is in contact with the inner wall of the magnetic permeable sleeve through the roller, so that the stability of the axis of the push rod is ensured, the push rod unit and the magnetic permeable sleeve are ensured to slide under low friction resistance, and the push-pull action of the device is more sensitive and accurate.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a low-friction static sealing magnetic push rod device. Background Art

[0002] In evaporation equipment, push rod type robotic arms are mainly used to transfer workpieces horizontally to fixed positions. They have the advantages of simple structure and convenient operation. However, the magnetic fluid sealing method used in vacuum equipment is expensive on the one hand, and dynamic seals have a greater risk of leakage than static seals on the other hand. In addition, the general push rod structure is prone to rotation in the tangential direction of the axis due to the lack of position limitation.

[0003] Chinese patent CN210596235U discloses a vacuum evaporation device, which includes a driving mechanism using vacuum magnetic coupling transmission, and the driving mechanism includes a sealing sleeve and a push rod arranged in the sealing sleeve, an inner magnetic sleeve is arranged at one end of the push rod, and an outer magnetic sleeve is arranged at the position corresponding to the inner magnetic sleeve on the outer periphery of the sealing sleeve, and the inner magnetic sleeve and the outer magnetic sleeve cooperate to realize vacuum magnetic coupling transmission. The inner magnetic sleeve moves axially in the sealing sleeve, and there is generally a gap between the inner magnetic sleeve and the sealing sleeve, while the push rod and the outer shell are in close contact, but the magnetic coupling transmission will make the axis of the inner magnetic sleeve unstable, which will cause the contact position between the push rod and the outer shell to generate excess radial pressure, which will cause greater resistance, and the movement of the push rod will become insensitive after a long time of use.

[0004] Therefore need to improve the push rod device to solve the above problems. Summary of the invention

[0005] The main purpose of the utility model is to provide a low-friction static sealed magnetic push rod device, which can utilize multiple rollers of the inner ring magnetic group to contact the inner wall of the magnetic permeable sleeve, so that the axis of the inner ring magnetic group remains in a colinear relationship with the axis of the magnetic permeable sleeve when the push rod is extended and retracted, so that the push rod can move in a straight line under low friction resistance and reduce wear.

[0006] The utility model achieves the above-mentioned purpose through the following technical solutions: a low-friction static sealed magnetic push rod device, comprising a magnetically permeable sleeve, a push rod unit and a linear drive unit;

[0007] The linear drive unit comprises an outer ring magnetic group sleeved outside the magnetic permeable sleeve and a linear drive mechanism driving the outer ring magnetic group to move along the axis of the magnetic permeable sleeve;

[0008] The push rod unit passes through the interior of the magnetically permeable sleeve, and comprises a push rod coaxially arranged in the magnetically permeable sleeve, and an inner ring magnetic group is arranged at the tail end thereof, which attracts the outer ring magnetic group through the magnetically permeable sleeve;

[0009] The two ends of the inner ring magnetic group are clamped by a pair of limit blocks, and the limit blocks are fixed on the push rod. Three rollers are evenly distributed around the axis on each limit block. The axes of the three rollers are located in the vertical plane of the push rod axis and the angles between them are 60°. The outer sides of all rollers are close to the inner wall of the magnetically permeable sleeve.

[0010] Specifically, it also includes a bracket, which includes a base and a first end plate and a second end plate fixed parallel to both sides of the base; the magnetically permeable sleeve is fixed between the first end plate and the second end plate, the head of the push rod passes through the first end plate and is fixed with a support plate, the magnetically permeable sleeve is provided with a flange surface at one end close to the first end plate, and the other end is closed, and the flange surface is sealed with the first end plate.

[0011] Furthermore, it also includes an adjustment component, which includes a positioning ring and a pressure wheel, the positioning ring is connected to the first end plate and is passed through by the push rod, the pressure wheel is connected to the positioning ring and rotates around a rotating shaft perpendicular to the axis of the push rod, the upper part of the push rod is provided with a cutting plane, and the lower part of the pressure wheel is in line contact with the cutting plane.

[0012] Furthermore, the outer ring magnetic group includes a sliding seat, and a plurality of linear bearings whose axes are parallel to the axis of the magnetically permeable sleeve are arranged on both sides of the sliding seat, and guide rods for guiding the linear movement of the linear bearings are arranged on both sides of the base.

[0013] Furthermore, a sensing sheet is provided on a side of the sliding seat, and a plurality of position sensors for sensing the position of the sensing sheet are provided on one side of the base.

[0014] The beneficial effects of the technical solution of the utility model are:

[0015] The device first drives the outer ring magnetic group through the linear drive mechanism, and then the magnetic force of the outer ring magnetic group drives the inner ring magnetic group to move through the magnetic permeable sleeve, thereby realizing the linear motion of the push rod, and at the same time allowing the inner ring magnetic group to contact the inner wall of the magnetic permeable sleeve through the roller, which not only ensures the stability of the push rod axis, but also ensures that the push rod unit and the magnetic permeable sleeve slide under low friction resistance, making the push and pull action of the device more sensitive and accurate, and reducing wear. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A three-dimensional diagram of a static sealing magnetic push rod device according to an embodiment;

[0017] Figure 2 for Figure 1 A partial enlarged view of position A in the middle;

[0018] Figure 3 It is a front view of the static sealing magnetic push rod device of the embodiment;

[0019] Figure 4 for Figure 3 BB enlarged cross-sectional view in;

[0020] Figure 5 It is a perspective view of the inner part of the push rod unit.

[0021] The numbers in the figure represent:

[0022] 1- bracket, 11- base, 12- first end plate, 13- second end plate, 14- position sensor, 15- guide rod;

[0023] 2-magnetic permeable sleeve, 21-flange surface;

[0024] 3-push rod unit, 31-push rod, 311-cutting plane, 32-inner ring magnetic group, 33-limiting block, 34-roller, 35-support plate;

[0025] 4- linear drive unit, 41- outer ring magnetic group, 411- sliding seat, 412- linear bearing, 413- induction sheet, 42- linear drive mechanism;

[0026] 5-adjusting assembly, 51-positioning ring, 52-pressure wheel. DETAILED DESCRIPTION

[0027] The utility model is further described in detail below in conjunction with specific embodiments.

[0028] Example:

[0029] like Figure 1 As shown, a low-friction static sealed magnetic push rod device of the utility model comprises a bracket 1, a magnetically permeable sleeve 2, a push rod unit 3, a linear drive unit 4 and an adjustment component 5.

[0030] like Figure 2 and Figure 3 As shown, the bracket 1 includes a base 11 and a first end plate 12 and a second end plate 13 fixed parallel to both sides of the base 11. The magnetically permeable sleeve 2 is fixed between the first end plate 12 and the second end plate 13. The magnetically permeable sleeve 2 is provided with a flange surface 21 at one end close to the first end plate 12, and the flange surface 21 is sealed with the first end plate 12.

[0031] The bracket 1 is the fixed foundation of the whole device, the magnetic sleeve 2 and the bracket 1 are kept in a fixed relative position, and the push rod unit 3 and the linear drive unit 4 have parts that can move. The magnetic sleeve 2 isolates the inner and outer spaces of the evaporation equipment, and the sealing position is a static sealing method, which is lower in cost than the application of magnetic fluid bearings and has higher vacuum stability.

[0032] like Figures 1 to 5As shown, the linear drive unit 4 is arranged on the base 11, including an outer ring magnetic group 41 sleeved outside the magnetic permeable sleeve 2 and a linear drive mechanism 42 for driving the outer ring magnetic group 41 to move along the axis of the magnetic permeable sleeve; the push rod unit 3 passes through the interior of the magnetic permeable sleeve 2, including a push rod 31 coaxially arranged in the magnetic permeable sleeve 2, the head of the push rod 31 passes through the first end plate 12 and is fixed with a support plate 33, and the tail is provided with an inner ring magnetic group 32 which is attracted to the outer ring magnetic group 41 through the magnetic permeable sleeve 2.

[0033] The support plate 33 is used to support the vapor deposition substrate and is driven to extend and retract by the push rod 31. The magnetically permeable sleeve 2 will not hinder the penetration of magnetic force, so the device first drives the outer ring magnetic group 41 through the linear drive mechanism 42, and then the magnetic force of the outer ring magnetic group 41 drives the inner ring magnetic group 32 to move through the magnetically permeable sleeve 2, thereby realizing the linear motion of the push rod 31.

[0034] like Figure 4 and Figure 5 As shown, the two ends of the inner ring magnetic group 32 are clamped by a pair of limit blocks 33, and the limit blocks 33 are fixed on the push rod 31. Three rollers 34 are evenly distributed around the axis on each limit block 33. The axes of the three rollers 34 are located in the vertical plane of the axis of the push rod 31 and the angles are 60° to each other. The outer sides of all rollers 34 are close to the inner wall of the magnetically transparent sleeve 2.

[0035] In this device, the inner ring magnetic group 32 contacts the inner wall of the magnetic permeable sleeve 2 through the roller 34, which not only ensures the stability of the axis of the push rod 31, but also ensures that the push rod unit 3 and the magnetic permeable sleeve 2 slide under low friction resistance, making the push and pull action of the device more sensitive and accurate, and reducing wear.

[0036] like Figure 4 As shown, the outer ring magnetic group 41 includes a sliding seat 411, and a plurality of linear bearings 412 whose axes are parallel to the axis of the magnetic permeable sleeve 2 are provided on both sides of the sliding seat 411, and guide rods 15 are provided on both sides of the base 11 to guide the linear movement of the linear bearings 412. A sensing sheet 413 is provided on the side of the sliding seat 411, and a plurality of position sensors 14 for sensing the position of the sensing sheet 413 are provided on one side of the base 11.

[0037] The linear drive mechanism 42 in this embodiment uses a drive motor to linearly drive the outer ring magnetic group 41. In actual applications, it can be replaced by components with linear drive functions such as air cylinders, oil cylinders, and linear motion modules. The linear bearing 412 cooperates with the guide rod 15 to enable the outer ring magnetic group 41 to move accurately along the extension direction of the push rod 31 (that is, the axial direction of the magnetic permeable sleeve 2). The induction sheet 413 can represent the position of the push rod 31. Whenever the induction sheet 413 is sensed by the position sensor 14, the linear drive mechanism 42 is paused, so that the push rod 31 will stop at the appropriate position.

[0038] like Figure 1 and Figure 2 As shown, the adjustment assembly 5 includes a positioning ring 51 and a pressure wheel 52. The positioning ring 51 is connected to the first end plate 12 and is passed through by the push rod 31. The pressure wheel 52 is connected to the positioning ring 51 and rotates around a rotating shaft perpendicular to the axis of the push rod 31. A cutting plane 311 is provided on the upper part of the push rod 31, and the lower part of the pressure wheel 52 is in line contact with the cutting plane 311.

[0039] In this embodiment, the cross section of the push rod 31 is not circular but arcuate, so the pressing wheel 52 can press the cutting plane 311, so that the push rod 31 can only move along the axial direction, which can prevent the support plate 33 from rotating and causing the supported objects to fall. When the pressing wheel 52 presses the push rod 31 without causing much resistance, the push and pull of the push rod 31 is also smoother.

[0040] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A low-friction static sealing magnetic push rod device, characterized in that: It includes a magnetically permeable sleeve, a push rod unit and a linear drive unit; The linear drive unit comprises an outer ring magnetic group sleeved outside the magnetic permeable sleeve and a linear drive mechanism driving the outer ring magnetic group to move along the axis of the magnetic permeable sleeve; The push rod unit passes through the interior of the magnetically permeable sleeve, and comprises a push rod coaxially arranged in the magnetically permeable sleeve, and an inner ring magnetic group is arranged at the tail end thereof, which attracts the outer ring magnetic group through the magnetically permeable sleeve; The two ends of the inner ring magnetic group are clamped by a pair of limit blocks, and the limit blocks are fixed on the push rod. Three rollers are evenly distributed around the axis on each limit block. The axes of the three rollers are located in the vertical plane of the push rod axis and the angles between them are 60°. The outer sides of all rollers are close to the inner wall of the magnetically permeable sleeve.

2. The low-friction static seal magnetic push rod device according to claim 1, characterized in that: It also includes a bracket, which includes a base and a first end plate and a second end plate fixed parallel to both sides of the base; the magnetically permeable sleeve is fixed between the first end plate and the second end plate, the head of the push rod passes through the first end plate and is fixed with a support plate, the magnetically permeable sleeve is provided with a flange surface at one end close to the first end plate, and the other end is closed, and the flange surface is sealed with the first end plate.

3. The low-friction static seal magnetic push rod device according to claim 2, characterized in that: It also includes an adjustment component, which includes a positioning ring and a pressure wheel. The positioning ring is connected to the first end plate and is passed through by the push rod. The pressure wheel is connected to the positioning ring and rotates around a rotating shaft perpendicular to the axis of the push rod. A cutting plane is provided on the upper part of the push rod, and the lower part of the pressure wheel is in line contact with the cutting plane.

4. The low-friction static seal magnetic push rod device according to claim 2, characterized in that: The outer ring magnetic group includes a sliding seat, and a plurality of linear bearings whose axes are parallel to the axis of the magnetically permeable sleeve are arranged on both sides of the sliding seat, and guide rods for guiding the linear movement of the linear bearings are arranged on both sides of the base.

5. The low-friction static seal magnetic push rod device according to claim 4, characterized in that: A sensing sheet is arranged on the side of the sliding seat, and a plurality of position sensors for sensing the position of the sensing sheet are arranged on one side of the base.

Images