Horizontal graphite boat and buffer supporting device for horizontal graphite boat

Abstract

The utility model belongs to the field of photovoltaic cell coating equipment, and discloses a horizontal graphite boat and a buffer supporting device for the horizontal graphite boat, and the horizontal graphite boat comprises a graphite boat body and two supporting assemblies; the two supporting assemblies are arranged at the two ends of the graphite boat body in the first direction, each supporting assembly comprises two supporting units which are symmetrically arranged, the two supporting units are arranged on the two sides of the graphite boat body in the second direction, and each supporting unit comprises a supporting piece and a lower boat handle; a first supporting surface matched with the horizontal supporting paddle is arranged at the upper end of the supporting piece in the third direction, and the first supporting surface is located on the outer side of the graphite boat body in the second direction; the lower boat handle is arranged at the lower end, in the third direction, of the supporting piece and used for being matched with the cache supporting device. According to the horizontal graphite boat disclosed by the utility model, boat corners are reduced, and a larger space can be obtained in the vertical direction of a furnace body space for placing boat pages, so that the number of slide glass in a single furnace body is larger, the space in the furnace body is better utilized, the resource utilization rate is improved, and the productivity is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell coating equipment, in particular to a horizontal graphite boat and a buffer support device for the horizontal graphite boat. Background Art

[0002] Tubular coating equipment is a kind of process equipment widely used in the manufacture of crystalline silicon photovoltaic cells. The horizontal graphite boat provides a horizontal wafer-carrying graphite boat that meets the requirements of crystalline silicon cell tubular coating equipment. It has a reasonable structure and can avoid the occurrence of circumferential coating, flying wafers and fragments.

[0003] Currently, if Figure 1 As shown, most horizontal graphite boats have boat corners 1, which are used to support the horizontal graphite boat sheet by means of the boat corners 1 and stacked graphite connecting blocks. The boat corners 1 are placed at the bottom of the horizontal graphite boat, and one is placed at each of the left and right ends of the boat sheet to facilitate the transportation of the horizontal graphite boat.

[0004] In the prior art, when a horizontal graphite boat is transported to the furnace body 3 of a tubular coating device for coating, the tubular coating device is generally arranged horizontally, and the horizontal support slurry 2 on the push-pull boat cooperates with the boat corner 1 at the bottom of the horizontal graphite boat to lift the horizontal graphite boat, at which time the boat corner is located above the horizontal support slurry 2, and then the horizontal graphite boat is transported to the furnace body 3 of the tubular coating device by the movement of the horizontal support slurry 2 on the push-pull boat, and finally in the furnace body 3 of the tubular coating device, the horizontal support slurry 2 moves downward in the vertical direction to leave the boat corner 1 of the horizontal graphite boat and moves horizontally to exit the tubular coating device. Because the horizontal support slurry 2 needs to move downward first when exiting the furnace body 3 of the tubular coating device, there needs to be space for downward movement in the furnace body 3, so that the boat corner 1 of the horizontal graphite boat is generally located in the upper half of the furnace body, and the lower half of the furnace body is in an empty state, so that the number of wafers carried by the horizontal graphite boat in a single furnace body is small, and the production capacity is low. Utility Model Content

[0005] The utility model aims to provide a horizontal graphite boat and a buffer support device for the horizontal graphite boat, so as to increase the number of carriers in a furnace body and thus improve the production capacity.

[0006] The technical solution provided by the utility model is as follows:

[0007] In one aspect, a horizontal graphite boat is provided, comprising:

[0008] Graphite boat body;

[0009] Two support assemblies are arranged at two ends of the graphite boat body along a first direction, the support assembly comprises two symmetrically arranged support units, the two support units are arranged at two sides of the graphite boat body along a second direction, and the support units comprise support members and a lower boat handle;

[0010] The upper end of the support member along the third direction is provided with a first support surface for cooperating with the horizontal support slurry, and the first support surface is located outside the graphite boat body along the second direction;

[0011] The lower boat handle is arranged at the lower end of the support member along the third direction, and is used to cooperate with the cache support device;

[0012] The first direction is the length direction of the graphite boat body, the second direction is the width direction of the graphite boat body, and the third direction is the height direction of the graphite boat body.

[0013] In some embodiments, the upper end of the support member extends outwardly along the second direction to form a first support portion, and the lower surface of the first support portion along the third direction forms the first support surface.

[0014] In some embodiments, a lower end of the support member along the third direction extends outwardly along the second direction to form a second support portion, and a lower surface of the second support portion along the third direction forms a second support surface.

[0015] In some embodiments, the support unit further includes an upper boat handle, which is disposed at an upper end of the support member along the third direction and is used for cooperating with the robot.

[0016] In some embodiments, the upper boat handle includes a connecting portion and an extending portion, the connecting portion is connected to the support member, one end of the extending portion is connected to the connecting portion, and the other end extends along the second direction to between two symmetrically arranged support members.

[0017] In some embodiments, a distance between two extending portions arranged opposite to each other along the second direction is smaller than a preset value.

[0018] In some embodiments, when the distance between the two upper boat handles relatively arranged along the second direction is greater than or equal to the preset value, a trigger pressure plate cooperating with the micro switch on the manipulator is connected between the two upper boat handles.

[0019] In some embodiments, a platform is provided at the bottom of the lower boat handle along the third direction, and a limiting portion is provided on a side of the platform extending along the second direction and away from the other lower boat handle.

[0020] In some embodiments, a side of the limiting portion close to the platform is an inclined surface inclined toward the platform.

[0021] In some embodiments, the graphite boat body includes a plurality of wafer boat pages and a plurality of connection blocks, the plurality of wafer boat pages are stacked along the third direction, both ends of each wafer boat page are respectively connected to the connection blocks, and the connection blocks are connected to the support member.

[0022] On the other hand, a buffer support device for the horizontal graphite boat described in any of the above embodiments is also provided, comprising:

[0023] Two buffer support assemblies, respectively disposed on two sides of the horizontal graphite boat along the first direction;

[0024] The buffer support assembly comprises a lower boat handle support member matched with the lower boat handle, and the lower boat handle is arranged on the lower boat handle support member to support the horizontal graphite boat.

[0025] In some embodiments, the cache support assembly also includes a mounting seat and two side clamping blocks, the two side clamping blocks are arranged on the mounting seat at intervals along the second direction, the lower boat handle support is arranged between the two side clamping blocks, one end of the lower boat handle support is fixedly connected to one of the side clamping blocks by bolts, and the other end of the lower boat handle support is fixedly connected to the other side clamping block by bolts.

[0026] In some embodiments, the lower boat handle support member includes a first vertical portion, a first inclined portion, a planar portion, a second inclined portion, and a second vertical portion connected in sequence, the first inclined portion and the second inclined portion are arranged opposite to each other, the first vertical portion and the second vertical portion are arranged opposite to each other, the first vertical portion is connected to one of the side clamping blocks, and the second vertical portion is connected to another of the side clamping blocks; the inclination angles of the first inclined portion and the second inclined portion are consistent with the inclination angle of the inclined surface at the bottom of the lower boat handle.

[0027] In some embodiments, the cache support assembly further includes two bearing assemblies, and the two bearing assemblies are spaced apart and arranged on the lower boat handle support along the second direction.

[0028] In some embodiments, two cache detection components are further included. The two cache detection components are respectively disposed on both sides of the horizontal graphite boat along the first direction, and are used to detect whether a horizontal graphite boat is placed on the cache support assembly.

[0029] In some embodiments, the cache detection assembly includes a base, a lever, a sensor, and a trigger screw, wherein the lever is rotatably disposed in the base, the sensor is connected to one end of the lever, and the trigger screw is connected to the other end of the lever and extends out of the base;

[0030] The trigger screw is pressed down when the horizontal graphite boat is placed on the buffer support assembly.

[0031] In some embodiments, the cache detection assembly further includes a heat insulation plate, and the heat insulation plate is disposed between the inner wall of the base and the sensor.

[0032] The technical effect of the utility model is that the first supporting surface of the support member is located at the upper end of the support member and at the outside of the ink boat body, and the horizontal supporting slurry of the push-pull boat can move downward on the outside of the graphite boat body. The horizontal supporting slurry moves downward in the furnace body without occupying the height of the furnace body in the vertical direction, so that more space is obtained in the vertical direction of the furnace body to place the carrier boat pages, thereby increasing the number of carriers in a furnace body, so as to better utilize the space in the furnace body, improve resource utilization, and increase production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The utility model is further described in detail below with reference to the accompanying drawings and specific embodiments:

[0034] Figure 1 It is a schematic cross-sectional view of a horizontal graphite boat with boat angle provided in the prior art in a furnace body;

[0035] Figure 2 It is a structural schematic diagram of a horizontal graphite boat provided in a specific embodiment of the present application;

[0036] Figure 3 is a schematic cross-sectional view of a horizontal graphite boat in a furnace body provided in a specific embodiment of the present application;

[0037] Figure 4 It is a schematic diagram of a planar structure of a support member provided in a specific embodiment of the present application;

[0038] Figure 5 It is a schematic diagram of a planar structure of another support member provided in a specific embodiment of the present application;

[0039] Figure 6 It is a schematic diagram of the planar structure of another lower boat handle provided in a specific embodiment of the present application;

[0040] Figure 7 It is a schematic diagram of the planar structure of another upper boat handle provided in a specific embodiment of the present application;

[0041] Figure 8 It is a structural schematic diagram of a horizontal graphite boat cached on a cache support device provided in a specific embodiment of the present application;

[0042] Fig. 9 yes Figure 8 Enlarged view of point A in the middle;

[0043] Fig.10It is a schematic diagram of the structure of the cache support component and the cache detection component provided in a specific embodiment of the present application;

[0044] Fig.11 It is a structural diagram of a cache support component provided in a specific embodiment of the present application;

[0045] Fig.12 It is a structural diagram of a cache detection component provided in a specific embodiment of the present application;

[0046] Fig.13 It is a cross-sectional view of a cache detection component provided in a specific embodiment of the present application.

[0047] Description of Figure Numbers:

[0048] 1. Boat angle; 2. Horizontal support slurry; 3. Furnace body;

[0049] 10. Graphite boat body; 11. Slide boat page; 12. Connecting block; 13. Electrode block; 14. Ceramic ring; 15. Ceramic rod; 16. Ceramic nut;

[0050] 20. Support unit; 21. Support member; 211. First support surface; 212. First support portion; 213. Second support portion; 214. Second support surface; 22. Lower boat handle; 221. Platform; 222. Limiting portion; 223. Inclined surface; 23. Upper boat handle; 231. Connecting portion; 232. Extending portion; 233. Trigger pressure plate;

[0051] 30. Cache support assembly; 31. Lower boat handle support; 311. First vertical portion; 312. First inclined portion; 313. Planar portion; 314. Second inclined portion; 315. Second vertical portion; 32. Mounting seat; 33. Side clamping block; 34. Bearing assembly;

[0052] 40. Cache detection assembly; 41. Base; 42. Lever; 43. Sensor; 44. Trigger screw; 45. Heat shield. DETAILED DESCRIPTION

[0053] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0054] In order to simplify the drawings, only the parts related to the utility model are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked. In this article, "one" not only means "only one", but also means "more than one".

[0055] It should be further understood that the term “and / or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0056] In this article, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0057] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0058] In one embodiment of the present application, Figure 2As shown, a horizontal graphite boat comprises a graphite boat body 10 and two supporting components; the graphite boat body 10 comprises a plurality of carrier boat pages 11 and a plurality of connecting blocks 12, the plurality of carrier boat pages 11 are stacked in the height direction, the carrier boat pages 11 are used to place battery cells, the thickness of the carrier boat pages 11 is generally between 1.5 and 2.5 mm, both ends of each carrier boat page 11 are respectively connected to the connecting blocks 12, the material of the connecting blocks 12 is graphite, that is, adjacent carrier boat pages 11 are isolated by the connecting blocks 12 arranged at both ends of the carrier boat page 11, ensuring electrical conduction between the carrier boat pages 11 and sufficient space for placing cells, the spacing between adjacent carrier boat pages 11 is generally between 8 and 15 mm, and the connecting blocks 12 are also provided with electrode blocks 13 for coating. In the middle of the slide boat pages 11, ceramic rings 14 made of insulating materials are used to isolate and support each other at a certain distance. The heights of the ceramic rings 14 and the connecting blocks 12 on the same layer are the same, so as to ensure that the distances between the two ends and the middle of the adjacent slide boat pages 11 are equal, thereby ensuring that each slide boat page 11 is kept in a horizontal state. Ceramic rods 15 and ceramic nuts 16 are used to lock each slide boat page 11 and the connecting block 12, and each slide boat page 11 and the ceramic ring 14, that is, a part of the ceramic rods 15 pass through each slide boat page 11 and the connecting block 12 in the height direction to connect each slide boat page 11 and each connecting block 12 together and lock them through the ceramic nuts 16, and another part of the ceramic rods 15 pass through each slide boat page 11 and the ceramic ring 14 to connect each slide boat page 11 and each ceramic ring 14 together and lock them through the ceramic nuts 16.

[0059] When the horizontal graphite boat is transported, it is easy to deform in the horizontal direction. Preferably, the thickness of the upper and lower film boat pages can be increased to 8-15 mm, the purpose of which is to increase the strength and rigidity of the horizontal graphite boat and reduce the deformation. In order to further improve the strength and rigidity of the horizontal graphite boat, reinforcing ribs can be provided on the upper and lower film boat pages. The reinforcing ribs can be integrated with the upper and lower film boat pages, or they can be independent rib plates tightly connected to the film boat pages.

[0060] The horizontal graphite boat of this embodiment has no boat angle. To facilitate the carrying, support and buffering of the horizontal graphite boat, this embodiment provides support components at both ends of the graphite boat body 10. Specifically, the two support components are arranged along the first direction (such as Figure 2 The support assembly includes two symmetrically arranged support units 20, and the two support units 20 are arranged at the two ends of the graphite boat body 10 along the second direction (as shown by the arrow a in the middle). Figure 2 The support unit 20 includes a support member 21 and a lower boat handle 22; the connecting block 12 is connected to the support member 21, and the support member 21 is connected along the third direction (as shown by the arrow b). Figure 2The upper end of the graphite boat body 10 (as shown by the middle arrow c) is provided with a first supporting surface 211 for cooperating with the horizontal supporting slurry 2, and the first supporting surface 211 is located on the outside of the graphite boat body 10 along the second direction; the lower boat handle 22 is arranged at the lower end of the support member 21 along the third direction, for cooperating with the cache supporting device; wherein, the first direction is the length direction of the graphite boat body 10, the second direction is the width direction of the graphite boat body 10, and the third direction is the height direction of the graphite boat body 10.

[0061] The support member 21 and the lower boat handle 22 are specially designed and made of graphite. Different shapes can be designed to meet the strength requirements and the requirements of carrying support and buffer placement. Figure 4 and Figure 5 As shown, the upper end of the support member 21 is provided with a first support surface 211 for cooperating with the horizontal support slurry 2. The main function of the first support surface 211 is to play a dynamic supporting role when the push-pull boat moves the horizontal graphite boat from the workbench to the process furnace body. Figure 3 As shown, the horizontal support slurry 2 of the push-pull boat cooperates with the first support surface 211 on the support member 21 to lift the horizontal graphite boat and carry it horizontally into the furnace body 3. After the horizontal graphite boat is stationary in the furnace body 3, the horizontal support slurry 2 moves downward (moves along the height direction of the horizontal graphite boat) to leave the horizontal graphite boat, and then exits the furnace body 3. Since the first support surface 211 of the support member 21 is located at the upper end of the support member 21 and located outside the graphite boat body 10, the horizontal support slurry 2 can move downward outside the graphite boat body 10. The horizontal support slurry 2 moves downward in the furnace body 3 without occupying the height in the vertical direction (the height direction of the horizontal graphite boat) in the furnace body 3, so that a larger space is obtained in the vertical direction of the furnace body 3 to place the wafer boat page 11, thereby increasing the number of wafers in one furnace body 3, so as to better utilize the space in the furnace body 3, improve resource utilization, and increase production capacity.

[0062] The support member 21 is connected to the connection block 12 stacked on the side of the graphite boat body 10 through a ceramic rod 15 and a ceramic nut 16 to ensure that it can support the weight of the entire horizontal graphite boat and no major deformation, damage or other adverse conditions will occur during transportation and placement.

[0063] In addition, a lower boat handle 22 is also provided at the lower end of the support member 21. When the horizontal graphite boat does not enter the furnace body or comes out of the furnace body and is placed in a temporary storage position (cache position), the lower boat handle 22 cooperates with the cache support device provided at the cache position to support the horizontal graphite boat. The lower boat handle 22 can be designed into a variety of structures, but the strength requirement of the lower boat handle 22 must be met to support the weight of the entire horizontal graphite boat. In this embodiment, the lower boat handle 22 is located above the bottommost film carrier boat page 11 and is located on the side of the support member 21 along the first direction.

[0064] Further, such as Figure 6As shown, a platform 221 is provided at the bottom of the lower boat handle 22 along the third direction, and a stopper 222 is provided on the side of the platform 221 extending along the second direction and away from the other lower boat handle 22. The platform 221 at the bottom of the lower boat handle 22 cooperates with the buffer support device to support the horizontal graphite boat, and the stopper 222 plays a limiting role to prevent the horizontal graphite boat from sliding on the buffer support device. Preferably, the side of the stopper 222 close to the platform 221 is an inclined surface 223 inclined toward the platform 221, which can play a guiding role when the horizontal graphite boat is assembled with the buffer support.

[0065] Further, such as Figure 4 and Figure 5 As shown, the upper end of the support member 21 extends outwardly along the second direction to form a first support portion 212, and the lower surface of the first support portion 212 along the third direction forms a first support surface 211. The first support portion 212 is located below the uppermost film boat page and on the side of the support member 21 along the first direction, and the lower surface of the first support portion 212 forms a first support surface 211, which can be a plane.

[0066] In a specific embodiment, Figure 4 and Figure 5 As shown, the lower end of the support member 21 along the third direction extends outward along the second direction to form a second support portion 213, and the lower surface of the second support portion 213 along the third direction forms a second support surface 214. The second support portion 213 is located below the first support portion 212 and above the bottommost wafer boat page. The second support surface 214 mainly serves to support the horizontal graphite boat when it is placed in the process furnace body 3, that is, the second support surface 214 cooperates with the support components in the furnace body 3 so that the horizontal graphite boat can be placed in the furnace body 3. The second support surface 214 can be a round surface or a flat surface. The support member 21 is connected to the connecting block 12 and the lower boat handle 22 stacked on the side by ceramic screws to ensure that the weight of the entire horizontal graphite boat can be supported, and no major deformation, damage or other adverse conditions will occur during the transportation and placement process.

[0067] In a specific embodiment, Figure 2 As shown, the support unit 20 also includes an upper boat handle 23, which is disposed at the upper end of the support member 21 along the third direction, and is used to cooperate with the manipulator. The main function of the upper boat handle 23 is to provide support when the manipulator transports the horizontal graphite boat. When transporting the horizontal graphite boat, the two manipulators respectively cooperate with the upper boat handles 23 at both ends of the horizontal graphite boat along the first direction to lift the horizontal graphite boat and transport it to the destination. The upper boat handle 23 can be designed into a variety of shapes, but the coordination between the upper boat handle 23 and the manipulator and the strength requirements of the upper boat handle 23 need to be met to support the weight of the entire horizontal graphite boat. Specifically, as Figure 2As shown, the upper boat handle 23 includes a connecting portion 231 and an extending portion 232, the connecting portion 231 is fixedly connected to the support member 21 by bolts, one end of the extending portion 232 is connected to the connecting portion 231, and the other end extends along the second direction to between two symmetrically arranged support members 21. When transporting the horizontal graphite boat, the manipulator cooperates with the extending portion 232 of the upper boat handle 23 to lift and transport the horizontal graphite boat.

[0068] When designing the extension 232, it is necessary to ensure that the distance between the two symmetrically arranged extensions 232 (i.e., the two extensions 232 located at the same end of the horizontal graphite boat) is less than a preset value, so that when the extension 232 cooperates with the manipulator, the extension 232 can trigger the micro switch on the manipulator to trigger the manipulator to perform the next action. In another example, Figure 7 As shown, when the distance between two upper boat handles 23 (i.e., two upper boat handles 23 located at the same end of the horizontal graphite boat) arranged opposite to each other along the second direction is greater than or equal to a preset value, a trigger pressure plate 233 matching with the micro switch on the manipulator is connected between the two upper boat handles 23. The trigger pressure plate 233 is made of a non-conductive material. When the distance between the two upper boat handles 23 is large, the micro switch on the manipulator is triggered by the trigger pressure plate 233 arranged between the two upper boat handles 23.

[0069] The present application also provides an embodiment of a cache support device, such as Figures 8 to 10 As shown, the cache support device is used to support the horizontal graphite boat described in any of the above embodiments, and the cache support device includes two cache support assemblies 30, and the two cache support assemblies 30 are respectively arranged on both sides of the horizontal graphite boat along the first direction; the cache support assembly 30 includes a lower boat handle support member 31 adapted to the lower boat handle 22, and the lower boat handle 22 is arranged on the lower boat handle support member 31 to support the horizontal graphite boat.

[0070] The buffer support assemblies 30 located on the left and right sides of the horizontal graphite boat jointly support the weight of the horizontal graphite boat. When two shorter horizontal graphite boats are placed in a furnace body 3 along the length direction of the furnace body 3 (the length direction of the furnace body is consistent with the length direction of the horizontal graphite boat), a total of four buffer support assemblies are included. The four buffer support assemblies 30 are connected by steel sections, that is, each horizontal graphite boat is supported by a buffer support assembly 30 at both ends. Two shorter horizontal graphite boats are used in the furnace body 3. When the horizontal graphite boats are transported, the deformation of the horizontal graphite boats along the length direction is smaller. Of course, shorter and more numerous horizontal graphite boats can also be used in the furnace body 3 along the length direction. This embodiment does not specifically limit the number of horizontal graphite boats in the furnace body 3.

[0071] like Fig.11As shown, the cache support assembly 30 also includes a mounting seat 32 and two side clamping blocks 33. The two side clamping blocks 33 are arranged on the mounting seat 32 at intervals along the second direction. The side clamping blocks 33 are fixedly connected to the mounting seat 32 by bolts. The lower boat handle support member 31 is arranged between the two side clamping blocks 33. One end of the lower boat handle support member 31 is fixedly connected to one side clamping block 33 by bolts, and the other end of the lower boat handle support member 31 is fixedly connected to the other side clamping block 33 by bolts. The lower boat handle support member 31 is fixed to the mounting seat 32 by the two side clamping blocks 33, and the side clamping blocks 33 can also strengthen the strength of the lower boat handle support member 31 to prevent the lower boat handle support member 31 from being deformed.

[0072] Further, such as Fig.11 As shown, the lower boat handle support 31 includes a first vertical portion 311, a first inclined portion 312, a planar portion 313, a second inclined portion 314 and a second vertical portion 315 which are connected in sequence, the first inclined portion 312 and the second inclined portion 314 are arranged opposite to each other, the first vertical portion 311 and the second vertical portion 315 are arranged opposite to each other, the first vertical portion 311 is connected to a side clamping block 33, and the second vertical portion 315 is connected to another side clamping block 33; the inclination angles of the first inclined portion 312 and the second inclined portion 314 are consistent with the inclination angles of the inclined surface 223 at the bottom of the lower boat handle 22. The lower boat handle support 31 is formed by bending sheet metal, and both sides are folded into an inclined shape. The inclination angle is consistent with the inclination angle of the inclined surface 223 of the limiting portion 222 of the lower boat handle 22, which not only reduces the weight but also increases the supporting strength of the lower boat handle support 31. It also plays a guiding role for the lower boat handle 22 of the horizontal graphite boat, allowing the horizontal graphite boat to slide down onto the lower boat handle support 31 under the action of its own gravity, thereby playing a role in fine-tuning its own position.

[0073] Preferably, Fig.11 As shown, the buffer support assembly 30 further includes two bearing assemblies 34, which are spaced apart along the second direction on the lower boat handle support member 31. The two bearing assemblies 34 are installed above the lower boat handle support member 31, and when the horizontal graphite boat is abnormally offset along the axial direction (length direction) of the furnace body, they play a role of fine-adjusting the direction and guiding in this direction.

[0074] In a specific embodiment, Fig.10 As shown, the cache support device also includes two cache detection components 40, which are respectively arranged on both sides of the horizontal graphite boat along the first direction, and are used to detect whether a horizontal graphite boat is placed on the cache support component 30. When a horizontal ink boat is cached on the cache support component 30, the manipulator can be triggered to perform a handling action. The cache detection component 40 can be a camera detection, a sensor detection, etc. Specifically, as Fig.12 and Fig.13As shown, the cache detection assembly 40 includes a base 41, a lever 42, a sensor 43 and a trigger screw 44. The mounting seat 32 of the cache support assembly 30 can be mounted on the base 41 or on one side of the base 41. The base 41 can be mounted on the ground or on a column to be suspended in the air to achieve the setting of a multi-layer cache support device. The lever 42 is rotatably arranged in the base 41, the sensor 43 is connected to one end of the lever 42, and the trigger screw 44 is connected to the other end of the lever 42 and extends out of the base 41; when the horizontal graphite boat is placed on the cache support assembly 30, the trigger screw 44 is pressed down. The cache detection assembly 40 also includes a heat insulation board 45, which is arranged between the inner wall of the base 41 and the sensor 43.

[0075] When the horizontal graphite boat is placed on the cache support assembly 30, the horizontal graphite boat presses down the trigger screw 44, and the trigger screw 44 moves downward to drive the lever 42 to rotate. The lever 42 rotates to transfer the weight of the horizontal graphite boat to the sensor 43, and then judges whether the manipulator performs the next action. A heat insulation plate 45 is set between the sensor 43 and the inner wall of the base 41 to prevent the heat transferred to the base 41 from being transferred to the sensor 43 when the horizontal graphite boat is placed on the cache support assembly 30 to avoid damaging the sensor 43.

[0076] In order to ensure that the horizontal graphite boat is not damaged by the protruding trigger screws 44 on the cache detection assembly 40 when it falls on the cache detection assembly 40, the lower layer of the carrier boat has a certain hardness requirement and is generally made of materials such as silicon carbide with higher hardness.

[0077] The present application provides a horizontal graphite boat without boat angles. The horizontal graphite boat relies on stacked connection blocks, side supports and cache support devices to carry and support the horizontal graphite boat and place it in a cache. The horizontal graphite boat using this method obtains a larger space in the vertical direction of the furnace body to place the boat pages, so that more sheets can be loaded in a single tube, the space in the tube can be better utilized, resource utilization can be improved, and production capacity can be increased. In addition, the coordination of the cache support device and the support assembly of the present application can facilitate the placement of the horizontal graphite boat on the loading and unloading material transmission platform, the handling of the manipulator, the support of the horizontal support slurry on the push-pull boat, and the stable placement in the cache position.

[0078] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A horizontal graphite boat, characterized in that: include: Graphite boat body; Two support assemblies are arranged at two ends of the graphite boat body along a first direction, the support assembly comprises two symmetrically arranged support units, the two support units are arranged at two sides of the graphite boat body along a second direction, and the support units comprise support members and a lower boat handle; The upper end of the support member along the third direction is provided with a first support surface for cooperating with the horizontal support slurry, and the first support surface is located outside the graphite boat body along the second direction; The lower boat handle is arranged at the lower end of the support member along the third direction, and is used to cooperate with the cache support device; The first direction is the length direction of the graphite boat body, the second direction is the width direction of the graphite boat body, and the third direction is the height direction of the graphite boat body.

2. A horizontal graphite boat according to claim 1, characterized in that: The upper end of the support member extends outwardly along the second direction to form a first support portion, and the lower surface of the first support portion along the third direction forms the first support surface.

3. A horizontal graphite boat according to claim 1, characterized in that: The lower end of the support member along the third direction extends outwardly along the second direction to form a second support portion, and the lower surface of the second support portion along the third direction forms a second support surface.

4. A horizontal graphite boat according to claim 1, characterized in that: The support unit further comprises an upper boat handle, which is arranged at the upper end of the support member along the third direction and is used for cooperating with the manipulator.

5. A horizontal graphite boat according to claim 4, characterized in that: The upper boat handle includes a connecting portion and an extending portion, wherein the connecting portion is connected to the supporting member, one end of the extending portion is connected to the connecting portion, and the other end extends along the second direction to between two symmetrically arranged supporting members.

6. A horizontal graphite boat according to claim 5, characterized in that: The distance between the two extending portions arranged opposite to each other along the second direction is smaller than a preset value.

7. A horizontal graphite boat according to claim 4, characterized in that: When the distance between the two upper boat handles arranged relatively to each other along the second direction is greater than or equal to a preset value, a trigger pressure plate matched with the micro switch on the manipulator is connected between the two upper boat handles.

8. A horizontal graphite boat according to claim 1, characterized in that: A platform is provided at the bottom of the lower boat handle along the third direction, and a limiting portion is provided on a side of the platform extending along the second direction and away from the other lower boat handle.

9. A horizontal graphite boat according to claim 8, characterized in that: A side of the limiting portion close to the platform is an inclined surface inclined toward the platform.

10. The horizontal graphite boat according to claim 1, characterized in that: The graphite boat body comprises a plurality of wafer boat pages and a plurality of connection blocks. The plurality of wafer boat pages are stacked along the third direction. Both ends of each wafer boat page are respectively connected to the connection blocks, and the connection blocks are connected to the support member.

11. A buffer support device for a horizontal graphite boat, wherein the horizontal graphite boat is the horizontal graphite boat according to any one of claims 1 to 10, characterized in that: include: Two buffer support assemblies, respectively disposed on two sides of the horizontal graphite boat along the first direction; The buffer support assembly comprises a lower boat handle support member matched with the lower boat handle, and the lower boat handle is arranged on the lower boat handle support member to support the horizontal graphite boat.

12. A buffer support device for a horizontal graphite boat according to claim 11, characterized in that: The cache support assembly also includes a mounting seat and two side clamping blocks, the two side clamping blocks are arranged on the mounting seat at intervals along the second direction, the lower boat handle support is arranged between the two side clamping blocks, one end of the lower boat handle support is fixedly connected to one of the side clamping blocks by bolts, and the other end of the lower boat handle support is fixedly connected to the other side clamping block by bolts.

13. A buffer support device for a horizontal graphite boat according to claim 12, characterized in that: The lower boat handle support member includes a first vertical portion, a first inclined portion, a planar portion, a second inclined portion and a second vertical portion which are connected in sequence, the first inclined portion and the second inclined portion are arranged opposite to each other, the first vertical portion and the second vertical portion are arranged opposite to each other, the first vertical portion is connected to one of the side clamping blocks, and the second vertical portion is connected to another of the side clamping blocks; the inclination angles of the first inclined portion and the second inclined portion are consistent with the inclination angle of the inclined surface at the bottom of the lower boat handle.

14. The buffer support device for a horizontal graphite boat according to claim 12, characterized in that: The cache support assembly also includes two bearing assemblies, and the two bearing assemblies are arranged on the lower boat handle support member at intervals along the second direction.

15. The buffer support device for a horizontal graphite boat according to claim 11, characterized in that: It also includes two cache detection components, which are respectively arranged on both sides of the horizontal graphite boat along the first direction, and are used to detect whether a horizontal graphite boat is placed on the cache support component.

16. A buffer support device for a horizontal graphite boat according to claim 15, characterized in that: The cache detection assembly includes a base, a lever, a sensor and a trigger screw, wherein the lever is rotatably disposed in the base, the sensor is connected to one end of the lever, and the trigger screw is connected to the other end of the lever and extends out of the base; The trigger screw is pressed down when the horizontal graphite boat is placed on the buffer support assembly.

17. A buffer support device for a horizontal graphite boat according to claim 16, characterized in that: The cache detection assembly also includes a heat insulation plate, which is arranged between the inner wall of the base and the sensor.

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