Deformation detection assembly of tubular furnace

Abstract

The embodiment of the utility model discloses a deformation detection assembly of a tubular furnace, which comprises a light emitting device, the light emitting device is configured to perform pitching adjustment and rotate along the circumferential direction of the tubular furnace, and meanwhile, irradiation light emitted by the light emitting device is configured to enter an inner cavity of the tubular furnace from a first end of the tubular furnace, the light spots are reflected to the second end of the tube furnace at the inner cavity wall of the tube furnace, so that whether the tube furnace deforms or not can be determined by judging whether the light spots reflected to the second end of the tube furnace deviate or not, the accuracy of detecting whether the tube furnace deforms or not is improved, and the phenomenon that the wafer cannot be smoothly taken out of the tube can be avoided.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a deformation detection component for a tube furnace. Background Technology

[0002] Quartz tubes are a special industrial glass made of silicon dioxide. They have a series of excellent physical and chemical properties. Quartz tubes have excellent high-temperature resistance, with a softening point of 1730℃. They can be used for a long time at temperatures below 1100℃, and the maximum short-term operating temperature can reach 1450℃.

[0003] In related technologies, wafers need to be placed inside a quartz tube for heat treatment to perform alloying, diffusion, or annealing processes. In actual semiconductor manufacturing, the quartz tube needs to operate 24 hours a day and is typically heated continuously for several hours, often reaching temperatures above 1100°C. Prolonged high-temperature operation can cause deformation of the quartz tube, potentially preventing the wafer from being easily removed. Furthermore, the wafer may mechanically collide with the inner wall of the furnace tube during handling, increasing the risk of furnace tube breakage. Additionally, tube deformation can alter the wafer's position within the tube, affecting the consistency of the wafer's processing.

[0004] However, once the quartz tube is placed in the heating chamber, only its two ends are visible, and the walls of the heating chamber are relatively thick. If the inside of the quartz tube deforms due to high temperature, it is difficult to determine whether the quartz tube is deformed without removing it. Utility Model Content

[0005] To address the shortcomings of existing technologies, this application provides a deformation detection component for a tube furnace, which can accurately detect whether the quartz tube has deformed, thereby preventing the wafer from being unable to be successfully removed from the tube.

[0006] This application provides a deformation detection component for a tube furnace, comprising:

[0007] The light-emitting device is configured to perform pitch adjustment and rotation along the circumference of the tube furnace;

[0008] The irradiation light emitted by the light-emitting device is configured to enter the inner cavity of the tube furnace from the first end of the tube furnace, and be reflected at the inner wall of the tube furnace to the second end of the tube furnace. The first end and the second end are the corresponding two ends of the tube furnace.

[0009] Furthermore, in the deformation detection assembly for the tube furnace provided in this application, the deformation detection assembly also includes a rotating assembly;

[0010] The rotating component is connected to the light-emitting device and is configured to rotate in a circumferential direction to drive the light-emitting device to rotate in a circumferential direction.

[0011] Furthermore, in the deformation detection assembly for the tube furnace provided in this application, the rotating assembly includes a slide rail;

[0012] The light-emitting device is configured to slide on a slide rail to rotate in the radial direction of the tube furnace.

[0013] Furthermore, in the deformation detection assembly for the tube furnace provided in this application, the deformation detection assembly also includes a fixing member;

[0014] The rotating component is configured to be mounted on a fixed part and rotate along the circumference of the tubular furnace.

[0015] Furthermore, in the deformation detection assembly for the tube furnace provided in this application, the rotating assembly includes a rotating arm;

[0016] The rotating arm is configured to be mounted on a fixed component and rotate along the circumference of the tubular furnace.

[0017] Furthermore, in the deformation detection assembly for the tubular furnace provided in this application, the fastener is fixedly connected to the tubular furnace.

[0018] Furthermore, in the deformation detection assembly for the tubular furnace provided in this application, the fixing component is a floor-mounted bracket.

[0019] Furthermore, in the deformation detection assembly for the tubular furnace provided in this application, the tubular furnace includes a furnace body and furnace tubes;

[0020] The furnace tube is placed inside the cavity of the furnace body from the first end of the furnace body. The irradiation light is configured to enter the inner cavity of the furnace tube from the first end of the furnace tube and be reflected at the inner wall of the furnace tube to the second end of the furnace tube.

[0021] Furthermore, in the deformation detection assembly for the tubular furnace provided in this application, the tubular furnace includes a high-temperature horizontal furnace.

[0022] Furthermore, in the deformation detection assembly for the tube furnace provided in this application, the light-emitting device includes a laser pointer.

[0023] The deformation detection assembly for a tube furnace provided in this application includes a light-emitting device configured to perform pitch adjustment and rotate along the circumference of the tube furnace. Simultaneously, the irradiation light emitted by the light-emitting device is configured to enter the inner cavity of the tube furnace from the first end of the tube furnace and be reflected at the inner wall of the tube furnace to the second end of the tube furnace. By observing whether the light spot reflected to the second end of the tube furnace has shifted, it can be determined whether the tube furnace has been deformed, thereby improving the accuracy of detecting whether the tube furnace is deformed and thus avoiding the situation where wafers cannot be smoothly removed from the tube. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 A first schematic block diagram of a deformation detection assembly for a tubular furnace provided in an embodiment of this application;

[0026] Figure 2 This is a second schematic block diagram of a deformation detection assembly for a tubular furnace provided in an embodiment of this application.

[0027] Figure label:

[0028] 10. Tube furnace; 11. First end; 12. Second end; 100. Light-emitting device; 201. Rotating arm; 300. Fixture. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0031] It should also be understood that the terms used in this specification are for the purpose of describing specific embodiments only and are not intended to limit the present application. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly indicates otherwise.

[0032] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0033] Furthermore, in this application, unless otherwise explicitly specified or limited in the embodiments, the terms "installation," "connection," "joining," and "fixing" appearing in the embodiments should be interpreted broadly. For example, a connection can be a fixed connection, a detachable connection, or an integral part; it can also be a mechanical connection, an electrical connection, etc. Of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication between two components, or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific implementation.

[0034] Please see Figure 1 , Figure 1 This is a schematic block diagram of the deformation detection assembly of the tubular furnace 10 provided in an embodiment of this application. Figure 1 As shown, this application provides a deformation detection component for a tube furnace 10, which includes:

[0035] The light-emitting device 100 is configured to perform pitch adjustment and rotation along the circumferential direction of the tube furnace 10;

[0036] The irradiation light emitted by the light-emitting device 100 is configured to enter the inner cavity of the tube furnace 10 from the first end 11, and be reflected at the inner wall of the tube furnace 10 to the second end 12 of the tube furnace 10. The first end 11 and the second end 12 are the corresponding two ends of the tube furnace 10.

[0037] In this embodiment, the inner wall of the tube furnace 10 has a reflective function, which can reflect the irradiation light incident from the first end 11 of the tube furnace 10 to the second end 12 of the tube furnace 10. Then, the position of the light spot at the second end 12 of the tube furnace 10 can be observed to determine whether the tube furnace 10 is deformed.

[0038] The tube furnace 10 can be a high-temperature horizontal furnace, and the light-emitting device 100 can be a laser pointer, which can emit laser light and reflect it on the inner wall of the tube furnace 10.

[0039] Specifically, when deformation detection of the tubular furnace 10 is required, it is only necessary to adjust the light-emitting device 100 at the first end 11 of the tubular furnace 10, that is, to adjust the pitch angle of the light-emitting device 100 so that the irradiation light can enter the inner cavity of the tubular furnace 10 from the first end 11 of the tubular furnace 10 and be reflected at the inner cavity wall of the tubular furnace 10 to the second end 12 of the tubular furnace 10. At the same time, the light-emitting device 100 is controlled to rotate along the circumferential direction of the tubular furnace 10 to determine whether the light spot at the second end 12 of the tubular furnace 10 has shifted, thereby determining whether the tubular furnace 10 is deformed.

[0040] At the same time, in order to improve the accuracy of detection, such as Figure 2 As shown, this application can also predetermine two reflection points on the inner wall of the tubular furnace 10, namely reflection point a and reflection point b.

[0041] For example, the light-emitting device 100 can be first tilted so that the irradiated light can be reflected at the reflection point a to the preset position of the second end 12 (such as the center point of the second end). Then, the light-emitting device 100 can be rotated along the circumferential direction of the tube furnace 10 to determine whether the light spot at the second end 12 has shifted. If no shift has occurred, the light-emitting device 100 can be tilted a second time so that the irradiated light can be reflected at the reflection point b to the preset position of the second end 12 (such as the center point of the second end 12). Then, the light-emitting device 100 can be rotated along the circumferential direction of the tube furnace 10 to determine whether the light spot at the second end 12 has shifted. Thus, it can be determined whether the tube furnace 10 is deformed.

[0042] It should be noted that, when determining the number of reflection points, this application is not limited to one or two reflection points. This application can also predetermine more than three reflection points, thereby more accurately determining whether the tubular furnace 10 is deformed.

[0043] Furthermore, after determining that the tubular furnace 10 has deformed, this application can calculate the deformation amount of the tubular furnace 10 by determining the position of the reflection point, the distance between the light-emitting device 100 and the inner wall of the tubular furnace 10, the radius of the inner cavity of the tubular furnace 10, the length of the tubular furnace 10 before deformation (the dimension along the axial direction), and the offset of the light spot between the second end 12 and the center position of the second end 12. The deformation amount of the tubular furnace 10 can be characterized by the bending amount of the inner cavity wall.

[0044] Specifically, such as Figure 1 As shown, according to the principle of reflection, the irradiated light enters from the first end 11 of the tube furnace 10 and is reflected on the inner wall of the tube furnace 10 to the second end 12 of the tube furnace 10. It satisfies the following formula: h1 / h2=x1 / x2, where h1 is the vertical distance between the light emitting point of the light emitting device 100 and the inner wall of the tube furnace 10, h2 is the inner radius of the tube furnace 10, x1 is the distance between the reflection point and the first end 11 of the tube furnace 10, and x2 is the distance between the reflection point and the second end 12 of the tube furnace 10.

[0045] Wherein, h1 can be calculated from the inner radius of the tube furnace 10 and the position of the rotating arm 201, h2 is known, and x1+x2 is the length of the tube furnace 10. After transforming the above formula, we can get x1=x*h1 / (h1+h2), where x is the length of the tube furnace 10. Then we can calculate the distance between the reflection point and the first end of the tube furnace 10, and thus determine the position of the reflection point.

[0046] After determining the position of the reflection point, the light-emitting device 100 can be controlled to rotate along the circumference of the tube furnace 10. During the rotation, if the light spot is not at the center of the second end 12, since h1, x1, and x2 are known, the distance between the light spot and the center position can be calculated using the above calculation formula. Based on this distance, it can be determined whether the tube furnace 10 is deformed.

[0047] The deformation detection assembly for a tube furnace 10 provided in this application includes a light-emitting device 100, which is configured to rotate along the circumferential direction of the tube furnace 10. Simultaneously, the irradiation light emitted by the light-emitting device is configured to enter the inner cavity of the tube furnace 10 from the first end 11 of the tube furnace 10, and be reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. By observing whether the light spot reflected to the second end 12 of the tube furnace 10 has shifted, it can be determined whether the tube furnace 10 has been deformed, thereby improving the accuracy of detecting whether the tube furnace 10 is deformed and thus avoiding the situation where the wafer cannot be smoothly removed from the tube.

[0048] In some embodiments, the deformation detection assembly further includes a rotating assembly; wherein the rotating assembly is connected to the light-emitting device 100 and is configured to rotate along the circumferential direction of the tube furnace 10 to drive the light-emitting device 100 to rotate along the circumferential direction of the tube furnace 10.

[0049] In this embodiment, the light-emitting device 100 can be disposed on the rotating assembly, that is, the rotating assembly is connected to the light-emitting device 100. After the rotating assembly is configured to rotate along the circumferential direction of the tube furnace 10, the light-emitting device 100 can rotate along the circumferential direction of the tube furnace 10 with the rotating assembly.

[0050] In some embodiments, such as Figure 1 As shown, the rotating assembly includes a slide rail; wherein the light-emitting device 100 is configured to slide on the slide rail to move in the radial direction of the tube furnace 10.

[0051] In this embodiment, the rotating assembly is provided with a slide rail, and the light-emitting device 100 can be disposed on the slide rail and can move along the radial direction of the tube furnace 10 on the slide rail. At the same time, the light-emitting device 100 can be tilted, so that the irradiation light can be injected from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. Thus, the position of the light spot at the second end 12 of the tube furnace 10 can be observed to determine whether the tube furnace 10 is deformed.

[0052] In some embodiments, such as Figure 1As shown, the deformation detection assembly also includes a fixture 300; wherein the rotating assembly is configured to rotate on the fixture 300 along the circumferential direction of the tube furnace 10.

[0053] In this embodiment, the fixing member 300 can support the rotating component and the light-emitting device 100, so that the irradiation light can be injected into the inner cavity of the tube furnace 10 from the first end 11 at different positions, and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. Thus, the position of the light spot at the second end 12 of the tube furnace 10 can be observed to determine whether the tube furnace 10 is deformed.

[0054] In some embodiments, such as Figure 1 As shown, the rotating assembly includes a rotating arm 201; wherein the rotating arm 201 is configured to rotate on the fixture 300 along the circumferential direction of the tube furnace 10.

[0055] In this embodiment, the rotating arm 201 can be mounted on the fixing member 300 and can rotate on the fixing member 300 along the circumferential direction of the tube furnace 10. At the same time, a slide rail can be provided on the rotating arm 201, and the light emitting device 100 can move along the radial direction of the tube furnace 10 on the slide rail. The light emitting device 100 can be tilted, so that the irradiation light can be injected from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10 and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10. Then, the position of the light spot at the second end 12 of the tube furnace 10 can be observed to determine whether the tube furnace 10 is deformed.

[0056] In some embodiments, the fastener 300 is fixedly connected to the tubular furnace 10.

[0057] Specifically, the fixing member 300 is located at the first end 11 of the tube furnace 10 and can be fixedly connected to the tube furnace 10. The rotating component is configured to rotate on the fixing member 300 in a circumferential direction, so that the light-emitting device 100 can rotate in a circumferential direction of the tube furnace 10, while the tube furnace 10 moves in a radial direction and can be pitched. Thus, the irradiation light can be injected from the first end 11 of the tube furnace 10 into the inner cavity of the tube furnace 10 and reflected at the inner cavity wall of the tube furnace 10 to the second end 12 of the tube furnace 10, so as to determine whether the tube furnace 10 is deformed by observing the position of the light spot at the second end 12 of the tube furnace 10.

[0058] Alternatively, the fixing component 300 can be separately installed from the tubular furnace 10, that is, the fixing component 300 can be a floor support, and the rotating arm 201 can be directly installed on the floor support.

[0059] In some embodiments, such as Figure 1As shown, the tubular furnace 10 includes a furnace body and a furnace tube; wherein, the furnace tube is placed in the cavity of the furnace body from the first end 11 of the furnace body, and the irradiation light is configured to enter the inner cavity of the furnace tube from the first end 11 of the furnace tube, and be reflected at the inner wall of the furnace tube to the second end 12 of the furnace tube.

[0060] In this embodiment, the tubular furnace 10 can be a high-temperature horizontal furnace, which is provided with a furnace body and a furnace tube. The furnace body is provided with a first cavity, and the furnace tube is provided with a second cavity. The furnace tube can be arranged in the first cavity along a preset axial direction. The second cavity can be understood as the inner cavity of the tubular furnace 10 mentioned in this application.

[0061] Specifically, the furnace tubes are placed horizontally on the furnace body to form a high-temperature horizontal furnace. High-temperature horizontal furnaces are used for heat treatment, sintering and annealing, which are crucial for the development and testing of new materials. The electronics manufacturing industry can use tube furnaces to perform processes such as carburizing, carbonitriding and cleaning to ensure precise heat treatment.

[0062] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A deformation detection assembly for a tubular furnace, characterized in that, include: The light-emitting device is configured to perform pitch adjustment and rotation along the circumferential direction of the tubular furnace; The irradiation light emitted by the light-emitting device is configured to enter the inner cavity of the tubular furnace from the first end of the tubular furnace, and be reflected at the inner wall of the tubular furnace to the second end of the tubular furnace, wherein the first end and the second end are the corresponding two ends of the tubular furnace.

2. The deformation detection assembly for a tubular furnace according to claim 1, characterized in that, The deformation detection component also includes a rotation component; The rotating component is connected to the light-emitting device, and the rotating component is configured to rotate along the circumferential direction to drive the light-emitting device to rotate along the circumferential direction.

3. The deformation detection assembly for a tubular furnace according to claim 2, characterized in that, The rotating assembly includes a slide rail; The light-emitting device is configured to slide on the slide rail to move in the radial direction of the tubular furnace.

4. The deformation detection assembly for a tubular furnace according to claim 2, characterized in that, The deformation detection component also includes a fixing element; The rotating component is configured to rotate on the fixed member and along the circumferential direction of the tubular furnace.

5. The deformation detection assembly for a tubular furnace according to claim 4, characterized in that, The rotating assembly includes a rotating arm; The rotating arm is configured on the fixed member and rotates along the circumferential direction of the tubular furnace.

6. The deformation detection assembly for a tubular furnace according to claim 4, characterized in that, The fastener is fixedly connected to the tubular furnace.

7. The deformation detection assembly for a tubular furnace according to claim 4, characterized in that, The fixing component is a floor-mounted bracket.

8. The deformation detection assembly for a tubular furnace according to any one of claims 1-7, characterized in that, The tubular furnace includes a furnace body and furnace tubes; The furnace tube is placed inside the cavity of the furnace body from the first end of the furnace body, and the irradiation light is configured to enter the inner cavity of the furnace tube from the first end of the furnace tube, and be reflected at the inner wall of the furnace tube to the second end of the furnace tube.

9. The deformation detection assembly for a tubular furnace according to any one of claims 1-7, characterized in that, The tubular furnace includes a high-temperature horizontal furnace.

10. The deformation detection assembly for a tubular furnace according to any one of claims 1-7, characterized in that, The light-emitting device includes a laser pointer.

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