Magnetron sputtering coating device

Abstract

The utility model is suitable for the technical field of workpiece processing, and provides a magnetron sputtering coating device which comprises a box body, a magnet and a sputtering device, wherein the magnet and the sputtering device are arranged at the bottom of the inner wall of the box body; the vacuum pipe is mounted on one side of the box body; the target material frame is arranged in the box body and is used for placing a target material; the target material frame is positioned above the sputtering device; the group of connecting blocks are arranged above the target material frame; the clamping blocks are rotationally mounted on the connecting blocks respectively and used for fixing the machined parts; and the turn-over mechanism is arranged on any clamping block and used for turning over the machined part. According to the magnetron sputtering coating device provided by the scheme, through the design of the turn-over mechanism, the coating efficiency and the operation convenience are effectively improved, meanwhile, the coating quality is kept, and the application range of the device is widened.

Description

Technical Field

[0001] This utility model belongs to the field of workpiece processing technology, and in particular relates to a magnetron sputtering coating device. Background Technology

[0002] Magnetron sputtering is a type of physical vapor deposition. General sputtering methods can be used to prepare various materials such as metals, semiconductors, and insulators, and have advantages such as simple equipment, easy control, large coating area, and strong adhesion.

[0003] When using existing magnetron sputtering coating equipment to coat the surface of a workpiece, the operator directly places the workpiece on the coating stage for coating. This means that only one side of the workpiece can be coated at a time. When it is necessary to coat both sides or the entire workpiece, the equipment must be turned off, the workpiece flipped over, and then a second coating process must be performed, which is quite cumbersome. Utility Model Content

[0004] This invention provides a magnetron sputtering coating apparatus, which aims to solve the problem mentioned in the background art that the currently used magnetron sputtering coating apparatus cannot flip the workpiece.

[0005] To solve the above problems, this utility model is implemented as follows: a magnetron sputtering coating device includes: a housing and a magnet and a sputterer installed on the bottom of the inner wall of the housing; a vacuum tube installed on one side of the housing; a target holder disposed in the housing for placing the target material, the target holder being located above the sputterer; a set of connecting blocks disposed above the target holder; a set of clamping blocks rotatably mounted on the set of connecting blocks for fixing the workpiece; and a flipping mechanism disposed on any of the clamping blocks for flipping the workpiece.

[0006] Preferably, the flipping mechanism includes: a connecting frame disposed inside the housing, the connecting frame being rotatably connected to the output rod of any of the clamping blocks; a first motor fixedly installed on the top of the connecting frame; and a set of bevel gears respectively fixedly sleeved on the output shaft of the first motor and the output rod of the clamping block, the set of bevel gears meshing with each other.

[0007] Preferably, a set of connecting boxes is fixedly installed on one side of the box body, and a threaded cylinder is rotatably installed on one side of the connecting box. A threaded rod is threadedly installed inside the threaded cylinder, and the threaded rod is fixedly connected to the connecting block.

[0008] Preferably, a guide cylinder is fixedly installed on one side of the inner wall of each of the connecting boxes, a guide plate is slidably installed on each of the guide cylinders, and the guide plates are fixedly connected to the clamping block and the connecting frame respectively.

[0009] Preferably, a rotating rod is rotatably mounted on one side of the housing, and a sprocket is fixedly sleeved on one end of the rotating rod and on the threaded cylinder. A chain is sleeved on the two sprockets and meshes with the two sprockets. A second motor is fixedly mounted on one side of the housing, and a connecting gear is fixedly sleeved on the output shaft of the second motor and on the rotating rod. The two connecting gears mesh with each other.

[0010] Preferably, an operating port is provided on one side of the box body, and a cover plate is hinged inside the operating port. Both the cover plate and the operating port are equipped with sealing rings, and the two sealing rings are in close contact. A locking rod is rotatably installed on one side of the box body, and the arc-shaped piece of the locking rod is in rotatable contact with one side of the cover plate.

[0011] Preferably, a glass observation window is installed on the cover plate, the glass observation window is located on one side of the clamping block, and an electric telescopic rod for adjusting the height of the target frame is fixedly installed inside the box.

[0012] Compared with related technologies, the magnetron sputtering coating apparatus provided by this utility model has the following advantages:

[0013] Compared with existing technologies, the magnetron sputtering coating apparatus provided in this solution, through the setting of the flipping mechanism, eliminates the need to shut down the equipment and remove the workpiece for flipping. Instead, the workpiece is flipped directly inside the chamber, thereby continuously completing double-sided or full-body coating. This greatly reduces the total time and operation steps required for coating, improves coating efficiency, and reduces the risk of contamination and damage to the workpiece during the coating process by avoiding the process of removing and repositioning the workpiece, thus helping to maintain the quality and consistency of the coating.

[0014] In summary, the magnetron sputtering coating device of this invention, through its flipping mechanism design, effectively improves coating efficiency and ease of operation, while maintaining coating quality and expanding the applicability of the device. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the main cross-sectional structure of a magnetron sputtering coating device provided by this utility model;

[0016] Figure 2 This is a schematic diagram of the main structure of a magnetron sputtering coating device provided by this utility model;

[0017] Figure 3 This is a rear view structural schematic diagram of a magnetron sputtering coating device provided by this utility model;

[0018] Figure 4 for Figure 1 The diagram shows an enlarged view of part A.

[0019] Reference numerals: 1. Housing; 2. Magnet; 3. Sputter; 4. Target holder; 5. Connecting block; 6. Clamping block; 7. Connecting frame; 8. First motor; 9. Bevel gear; 10. Connecting box; 11. Threaded cylinder; 12. Threaded rod; 13. Guide cylinder; 14. Guide plate; 15. Rotating rod; 16. Sprocket; 17. Chain; 18. Second motor; 19. Connecting gear; 20. Vacuum tube; 21. Cover plate; 22. Clamping rod; 23. Glass observation window; 24. Electric telescopic rod; 25. Machining parts. Detailed Implementation

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings are used to distinguish different objects, not to describe a particular order; the terms "inner," "outer," "left," and "right" indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0021] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0022] This utility model provides a magnetron sputtering coating apparatus, such as... Figure 1-4 As shown, the magnetron sputtering coating apparatus includes: a housing 1 and a magnet 2 and a sputterer 3 installed on the bottom of the inner wall of the housing 1; a vacuum tube 20 installed on one side of the housing 1; a target holder 4 disposed inside the housing 1 for placing the target material, the target holder 4 being located above the sputterer 3; a set of connecting blocks 5 disposed above the target holder 4; a set of clamping blocks 6 rotatably mounted on the set of connecting blocks 5 for fixing the processed parts 25; and a flipping mechanism disposed on any of the clamping blocks 6 for flipping the processed parts 25.

[0023] In this embodiment, the part 25 to be coated is fixed on a set of clamping blocks 6, and the target material is placed on the target holder 4. Then, the vacuum equipment evacuates the air in the chamber 1 through the vacuum tube 20 and adds gas to make the coating environment reach the required vacuum level and gas composition. Then, the power supply of the sputtering device 3 is turned on, and the electron beam generated by the sputtering device 3 passes through the target holder 4 and strikes the target material at the upper end of the target holder 4. The sputtered atoms cover the surface of the part 25 to form a deposition, which eventually becomes a specific film. After coating one side of the surface of the part 25, the flipping mechanism is activated to drive a set of clamping blocks 6. The rotation of clamping block 6 causes a set of clamping blocks 6 to rotate the workpiece 25, thereby flipping the workpiece 25. The flipping mechanism eliminates the need to shut down the equipment and remove the workpiece 25 for flipping. Instead, the workpiece 25 can be flipped directly inside the housing 1, thus continuously completing double-sided or full-body coating. This greatly reduces the total time and operation steps required for coating, improves coating efficiency, and reduces the risk of contamination and damage to the workpiece 25 during the coating process by avoiding the process of removing and repositioning it. This helps to maintain the quality and consistency of the coating.

[0024] In a further preferred embodiment of the present invention, the flipping mechanism includes: a connecting frame 7 disposed inside the housing 1, the connecting frame 7 being rotatably connected to the output rod of any of the clamping blocks 6; a first motor 8 fixedly installed on the top of the connecting frame 7; and a set of bevel gears 9 respectively fixedly sleeved on the output shaft of the first motor 8 and the output rod of the clamping block 6, the set of bevel gears 9 meshing with each other.

[0025] In this embodiment, when the first motor 8 is started, the output shaft of the first motor 8 will start to rotate. Through the transmission of a set of bevel gears 9, the output rod of the clamping block 6 (i.e. the part rotatably connected to the connecting frame 7) will be driven to rotate. Since the clamping block 6 is used to fix the processing part 25, this rotation will directly cause the processing part 25 to flip. Through the transmission of the first motor 8 and the bevel gears 9, the automatic flipping of the processing part 25 is realized without manual operation, which further improves the coating efficiency and the convenience of operation. The first motor 8 can precisely control the rotation angle and speed, thereby ensuring the stability and accuracy of the processing part 25 during the flipping process and avoiding negative impacts on the coating quality.

[0026] In a further preferred embodiment of the present invention, a set of connecting boxes 10 are fixedly installed on one side of the box 1, and a threaded cylinder 11 is rotatably installed on one side of the connecting box 10. A threaded rod 12 is threadedly installed on the threaded cylinder 11, and the threaded rod 12 is fixedly connected to the connecting block 5.

[0027] In this embodiment, when it is necessary to fix the processed part 25 on a set of clamping blocks 6, the threaded cylinder 11 is first rotated. Due to the interaction of the threads, the threaded rod 12 will move along the axial direction of the threaded cylinder 11. This movement will drive the connecting block 5 and the clamping block 6 to move, so that the set of clamping blocks 6 slides closer to each other, clamping and fixing the processed part 25, thus realizing the fixing operation of the processed part 25. The operation is relatively quick. By rotating the threaded cylinder 11, the position of the threaded rod 12 and the connecting block 5 can be easily adjusted, thereby realizing the clamping and fixing of the processed part 25. It is suitable for the coating requirements of processed parts 25 of different sizes and shapes.

[0028] In a further preferred embodiment of the present invention, a guide cylinder 13 is fixedly installed on one side of the inner wall of a set of connecting boxes 10, and a guide plate 14 is slidably installed on a set of guide cylinders 13. The guide plates 14 are respectively fixedly connected to the clamping block 6 and the connecting frame 7.

[0029] In this embodiment, when the clamping blocks 6 move, they will drive the guide plate 14 to slide within the guide cylinder 13. This sliding connection not only ensures the accuracy of the movement direction, but also effectively prevents the clamping blocks 6 and the connecting frame 7 from shifting or shaking during the movement through the constraint of the guide cylinder 13. The sliding connection design of the guide cylinder 13 and the guide plate 14 effectively enhances the stability of the coating device when adjusting the position of the processing part 25, avoiding the problem of uneven coating or quality degradation caused by the shaking of the processing part 25. The guiding mechanism ensures the straightness and accuracy of the clamping blocks 6 and the connecting frame 7 during the movement, thereby improving the accuracy of the position of the processing part 25 and helping to improve the coating quality.

[0030] In a further preferred embodiment of this utility model, a rotating rod 15 is rotatably mounted on one side of the housing 1. A sprocket 16 is fixedly sleeved on one end of the rotating rod 15 and on the threaded cylinder 11. A chain 17 is sleeved on the two sprockets 16, and the chain 17 meshes with the two sprockets 16. A second motor 18 is fixedly mounted on one side of the housing 1. A connecting gear 19 is fixedly sleeved on the output shaft of the second motor 18 and on the rotating rod 15, and the two connecting gears 19 mesh with each other.

[0031] In this embodiment, when the second motor 18 starts, its output shaft drives the connected gear 19 to rotate. Through the meshing of the connected gear 19, the rotating rod 15 is driven to rotate along with the threaded cylinder 11 via the transmission action of the chain 17. This causes a set of threaded cylinders 11 to rotate synchronously, thereby achieving synchronous movement of a set of clamping blocks 6. This facilitates the clamping and fixing of the workpiece 25. By introducing the second motor 18 and its related chain and gear transmission mechanisms, the automated rotation of the threaded cylinder 11 is achieved, eliminating the need for manual operation and improving work efficiency and ease of operation. Both chain and gear transmission are highly efficient transmission methods, ensuring synchronous rotation between the rotating rod 15 and the threaded cylinder 11, thus enabling rapid fixing of the workpiece 25.

[0032] In a further preferred embodiment of this utility model, an operating port is provided on one side of the box body 1, and a cover plate 21 is hinged inside the operating port. Both the cover plate 21 and the operating port are equipped with sealing rings, and the two sealing rings are in close contact. A locking rod 22 is rotatably installed on one side of the box body 1, and the arc-shaped piece of the locking rod 22 is in rotatable contact with one side of the cover plate 21.

[0033] In this embodiment, when the cover plate 21 is closed, the two sealing rings will be in close contact, forming a sealing barrier to prevent gas or sputtering during the coating process from leaking out of the operating port. One side of the clamping rod 22 is provided with an arc-shaped piece that can rotate and contact one side of the cover plate 21. When the cover plate 21 is closed and the sealing rings are pressed together, the clamping rod 22 can be rotated to allow its arc-shaped piece to engage with the side of the cover plate 21, thereby fixing the position of the cover plate 21. The operating port allows workers to easily enter the coating device for maintenance and operation, improving work efficiency and convenience. The close contact between the sealing rings and the cover plate 21 ensures a tight seal during the coating process, preventing gas or sputtering leakage and guaranteeing coating quality. The design of the clamping rod 22 ensures that the cover plate 21 maintains a stable position during the coating process, preventing safety accidents caused by accidental opening of the cover plate.

[0034] In a further preferred embodiment of the present invention, a glass observation window 23 is installed on the cover plate 21, the glass observation window 23 is located on one side of the clamping block 6, and an electric telescopic rod 24 for adjusting the height of the target frame 4 is fixedly installed inside the box body 1.

[0035] In this embodiment, when the cover plate 21 is closed, the operator can clearly observe the internal condition of the coating device through the glass observation window 23, especially the condition of the clamping block 6 and the processed parts 25 on it. This design allows the operator to monitor the coating process in real time without opening the cover plate 21, thereby improving work efficiency and safety. The telescopic function of the electric telescopic rod 24 allows the height of the target frame 4 to be adjusted. This adjustment function is crucial to ensuring the optimal distance between the target and the processed parts 25, because the distance between the target and the processed parts 25 directly affects the quality and efficiency of the coating. By adjusting the height of the target frame 4, the operator can ensure that the distance between the target and the processed parts 25 is always kept within the optimal range, thereby improving the coating quality.

[0036] In summary, compared with related technologies, this device, through its flipping mechanism design, effectively improves coating efficiency and ease of operation, while maintaining coating quality and expanding the device's applicability.

[0037] It should be understood, in the several embodiments provided in this application, that the disclosed apparatus may be implemented in other ways.

[0038] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Although this utility model has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of this utility model according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of this utility model. These technical solutions are also within the scope of protection of this utility model.

Claims

1. A magnetron sputter coating device, characterized in that The utility model relates to a magnetron sputtering device for processing parts, comprising: a box and a magnet and a sputter installed on the bottom of the inner wall of the box; a vacuum tube installed on one side of the box; a target holder provided in the box for placing a target material, the target holder being located above the sputter; a set of connecting blocks provided above the target holder; a set of clamping blocks respectively rotatably installed on the set of connecting blocks for fixing the processed parts; a turning mechanism provided on any of the clamping blocks for turning the processed parts, the turning mechanism comprising: a connecting frame provided in the box, the connecting frame being rotatably connected to the output rod of any of the clamping blocks; a first motor fixedly installed on the top of the connecting frame; a set of bevel gears respectively fixedly sleeved on the output shaft of the first motor and the output rod of the clamping block, the set of bevel gears being engaged with each other.

2. The magnetron sputter coating apparatus of claim 1, wherein A set of connecting boxes are fixedly installed on one side of the box, a threaded cylinder is rotatably installed on one side of the connecting box, a threaded rod is screwedly installed in the threaded cylinder, and the threaded rod is fixedly connected with the connecting block.

3. The magnetron sputter coating apparatus of claim 2, wherein the magnetron sputter coating apparatus is configured to deposit a layer of material on the substrate. A guide cylinder is fixedly installed on one side of the inner wall of each of the connecting boxes, a guide plate is slidingly installed on each of the guide cylinders, and the guide plate is fixedly connected with the clamping block and the connecting frame, respectively.

4. The magnetron sputter coating apparatus of claim 2, wherein the magnetron sputter coating apparatus is configured to deposit a coating on the substrate by sputtering a target material in the presence of a plasma generated by the microwave plasma source. A rotating rod is rotatably installed on one side of the box, chain wheels are fixedly sleeved on one end of the rotating rod and the threaded cylinder, respectively, a chain is sleeved on the two chain wheels, the chain is engaged with the two chain wheels, a second motor is fixedly installed on one side of the box, connecting gears are fixedly sleeved on the output shaft of the second motor and the rotating rod, respectively, and the two connecting gears are engaged with each other.

5. The magnetron sputter coating apparatus of claim 1, wherein An operation opening is formed on one side of the box, a cover plate is hingedly connected in the operation opening, sealing rings are installed on the cover plate and the operation opening, the two sealing rings are in close contact, a clamping rod is rotatably installed on one side of the box, and the arc-shaped piece of the clamping rod is rotatably connected with one side of the cover plate.

6. The magnetron sputter coating apparatus of claim 5, wherein the magnetron sputter coating apparatus is configured to deposit a layer of material on the substrate. A glass observation window is installed on the cover plate, the glass observation window is located on one side of the clamping block, and an electric telescopic rod for adjusting the height of the target holder is fixedly installed in the box.

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