Heating disc capable of uniformly heating

Abstract

The utility model relates to the field of heating plates, and discloses a heating plate capable of uniformly heating, which comprises a heating plate main body and a base layer, a temperature measuring joint is fixedly arranged on one side of the heating plate main body, a graphite sheet is fixedly arranged at the lower end of the heating plate main body, and a heating mechanism is fixedly arranged in the heating plate main body. A reinforcing layer is fixedly arranged on the outer surface of the base layer. According to the utility model, the plurality of heating wires of the heating mechanism are distributed on the inner surface of the connecting ring at equal intervals, so that heat can be uniformly generated, and the generated heat is transmitted to the aluminum alloy base layer through the disc body and is further uniformly diffused to the surface of the whole heating disc through the graphite sheet with high thermal conductivity, so that uniform heating is realized; the temperature measuring connector can monitor the temperature in real time by being connected with external equipment, a user can adjust electric energy input according to the temperature measuring connector, it is ensured that the needed heating temperature is reached, the uniform and efficient heating effect can meet various scenes with the high requirement for heating uniformity, and the heating efficiency and the product quality are improved.

Description

Technical Field

[0001] This utility model relates to the field of heating plates, and more particularly to a heating plate that can heat evenly. Background Technology

[0002] In semiconductor equipment, the heating plate is a key component used to heat silicon wafers. It is usually made of highly thermally conductive materials, has uniform heating performance, and can precisely control the temperature, providing a stable and suitable processing temperature environment for silicon wafers. Its good thermal stability and precise temperature control capabilities play an important role in the quality and efficiency of photolithography and deposition processes of silicon wafers in semiconductor manufacturing.

[0003] Existing heating plates often have poorly designed heating components, resulting in uneven heat distribution. This can easily cause localized overheating or underheating of the object being heated, affecting the cooking effect and product quality. Therefore, those skilled in the art have provided a heating plate that can heat evenly to solve the problems mentioned in the background art. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a heating plate that can heat evenly. This heating plate can meet the requirements of various application scenarios with high requirements for heating uniformity, thereby improving heating efficiency and product quality.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A heating plate capable of uniform heating includes a heating plate body and a base layer. A temperature measuring connector is fixedly installed on one side of the heating plate body. A graphite sheet is fixedly installed at the lower end of the heating plate body. A heating mechanism is fixedly installed inside the heating plate body. A reinforcing layer is fixedly installed on the outer surface of the base layer. A first coating layer is fixedly installed on the outer surface of the reinforcing layer. A second coating layer is fixedly installed on the outer surface of the first coating layer.

[0007] The heating mechanism includes a connecting ring and a fixed plate. Multiple heating wires are fixedly arranged at equal intervals on the inner surface of the connecting ring. One side of each heating wire is fixedly connected to the fixed plate. Multiple second fixing bolts are threadedly connected to the upper end of the fixed plate.

[0008] Furthermore, the heating plate body includes a plate body, a plurality of first fixing bolts and a plate cover, a first connector is fixedly provided on one side of the center of the front of the plate body, and a second connector is fixedly provided on the other side of the center of the front of the plate body.

[0009] Furthermore, the upper end of the disc cover is threaded with multiple connecting screws, and the disc body and the disc cover are connected by multiple first fixing bolts.

[0010] Furthermore, the base layer is made of aluminum alloy.

[0011] Furthermore, the reinforcing layer is made of stainless steel.

[0012] Furthermore, the first coating is made of a high-temperature resistant ceramic coating.

[0013] Furthermore, the second coating is made of polytetrafluoroethylene coating.

[0014] This utility model has the following beneficial effects:

[0015] 1. This utility model proposes a heating plate that can heat evenly. Multiple heating wires of the heating mechanism are equidistantly distributed on the inner surface of the connecting ring, which can generate heat evenly. The generated heat is transferred to the aluminum alloy base through the plate body, and then further evenly diffused to the entire surface of the heating plate through a highly thermally conductive graphite sheet, achieving uniform heating. At the same time, the temperature measuring connector can monitor the temperature in real time by connecting to external equipment. The user can adjust the power input accordingly to ensure that the required heating temperature is reached. This uniform and efficient heating effect can meet the needs of various scenarios with high requirements for heating uniformity, improving heating efficiency and product quality.

[0016] 2. The heating plate proposed in this utility model is made of aluminum alloy for the base layer, which can quickly and evenly transfer heat and improve heating efficiency. The reinforcing layer is made of stainless steel, which greatly enhances the overall structural strength of the heating plate, making it able to withstand a certain degree of external impact and effectively avoid damage caused by daily collisions or squeezing. The first coating is made of high-temperature resistant ceramic coating, which protects the internal structure of the heating plate from high-temperature corrosion in all aspects and significantly extends the service life of the product. The second coating is made of polytetrafluoroethylene coating, which gives the heating plate excellent non-stick properties, making the cleaning process easy and convenient. Attached Figure Description

[0017] Figure 1 This is an axonometric view of the present invention;

[0018] Figure 2 This is a top view of the present invention;

[0019] Figure 3 This is a top sectional view of the present invention;

[0020] Figure 4 This is a schematic diagram of the main structure of the heating plate of this utility model.

[0021] Legend:

[0022] 1. Heating plate body; 2. Temperature measuring connector; 3. Graphite sheet; 4. Heating mechanism; 5. Base layer; 6. Reinforcing layer; 7. First coating layer; 8. Second coating layer; 101. First connector; 102. Second connector; 103. Plate body; 104. First fixing bolt; 105. Connecting screw; 106. Plate cover; 401. Connecting ring; 402. Heating wire; 403. Fixing plate; 404. Second fixing bolt. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Reference Figure 1-4 An embodiment of this utility model provides a heating plate capable of uniform heating, comprising a heating plate body 1 and a base layer 5. A temperature measuring connector 2 is fixedly disposed on one side of the heating plate body 1, a graphite sheet 3 is fixedly disposed at the lower end of the heating plate body 1, a heating mechanism 4 is fixedly disposed inside the heating plate body 1, a reinforcing layer 6 is fixedly disposed on the outer surface of the base layer 5, a first coating layer 7 is fixedly disposed on the outer surface of the reinforcing layer 6, and a second coating layer 8 is fixedly disposed on the outer surface of the first coating layer 7. The base layer 5 is made of aluminum alloy, the reinforcing layer 6 is made of stainless steel, the first coating layer 7 is made of high-temperature resistant ceramic coating, and the second coating layer 8 is made of polytetrafluoroethylene coating.

[0025] Specifically, the heating plate body 1 serves as the core structure of the heating plate, supporting all components and providing a basic platform for heating operations, ensuring a stable and orderly heating process. The temperature measuring connector 2 connects to external devices to monitor the heating plate temperature in real time and accurately, feeding the data back to the user so that heating parameters can be adjusted in a timely manner to ensure heating effect. The graphite sheet 3, with its good thermal conductivity, evenly diffuses the heat generated by the heating mechanism 4, making the surface temperature of the heating plate uniform and improving heating quality. The heating mechanism 4 excites the heating wire 402 to generate heat through current, providing a heat source for the heating plate and is the key power component for realizing the function of the heating plate. The aluminum alloy base layer 5 has the characteristics of being lightweight and having good thermal conductivity, which can quickly transfer the heat generated by the heating mechanism 4. The stainless steel reinforcing layer 6 enhances the overall structural strength of the heating plate, making it more durable and able to withstand certain external impacts without being easily damaged. The first coating 7, made of high-temperature resistant ceramic coating, can effectively protect the internal structure of the heating plate from high-temperature corrosion and improve the high-temperature resistance of the heating plate. The second coating 8, made of polytetrafluoroethylene coating, has non-stick properties, making it easy to clean the surface of the heating plate after use and preventing the heated object from sticking to the surface of the heating plate.

[0026] Reference Figure 1 The heating plate body 1 includes a plate body 103, multiple first fixing bolts 104 and a plate cover 106. A first connector 101 is fixedly provided on one side of the center of the front of the plate body 103, and a second connector 102 is fixedly provided on the other side of the center of the front of the plate body 103. Multiple connecting screws 105 are threaded on the upper end of the plate cover 106. The plate body 103 and the plate cover 106 are connected by multiple first fixing bolts 104.

[0027] Specifically, in the heating plate body 1, the first connector 101 and the second connector 102 can be connected to an external power source to provide power to the heating mechanism 4. The plate body 103 and the plate cover 106 are connected by the first fixing bolt 104. This detachable connection method facilitates the installation, maintenance and replacement of the heating mechanism 4 inside the heating plate body 1. The connecting screw 105 is used to install the heating plate onto a specific device or workbench.

[0028] Reference Figure 3 The heating mechanism 4 includes a connecting ring 401 and a fixed plate 403. Multiple heating wires 402 are fixedly arranged at equal intervals on the inner surface of the connecting ring 401. One side of each heating wire 402 is fixedly connected to the fixed plate 403. Multiple second fixing bolts 404 are threadedly connected to the upper end of the fixed plate 403.

[0029] Specifically, in the heating mechanism 4, the connecting ring 401 serves to fix the heating wire 402. Multiple heating wires 402 are equidistantly distributed on the inner surface of the connecting ring 401, so that heat can be generated evenly. The fixing plate 403 provides a stable support structure for the heating wire 402. The fixing plate 403 is fixed in a suitable position by the second fixing bolt 404 to ensure the stability of the heating mechanism 4.

[0030] Working principle: When the heating plate is needed, the first connector 101 and the second connector 102 are connected to an external power source. Current flows through the heating wire 402, and the heating wire 402 begins to heat up. Since multiple heating wires 402 are equidistantly distributed, the heat generated is relatively uniform. The generated heat is first transferred to the plate body 103, and then quickly conducted through the aluminum alloy base layer 5. At the same time, the graphite sheet 3 at the lower end has good thermal conductivity, which can further diffuse the heat evenly to the entire surface of the heating plate, thereby achieving a uniform heating effect. The temperature measuring connector 2 can monitor the temperature of the heating plate in real time by connecting to an external device. The user can adjust the input power according to the monitored temperature to achieve the required heating temperature. During use, the stainless steel reinforcing layer 6 ensures the structural strength of the heating plate, the first coating 7 made of high-temperature resistant ceramic coating protects the internal structure from high-temperature damage, and the second coating 8 made of polytetrafluoroethylene coating makes the surface of the heating plate easy to clean. When maintenance of the heating plate is required, the first fixing bolt 104 and the connecting screw 105 can be unscrewed to open the plate cover 106, and the second fixing bolt 404 can be unscrewed to inspect or replace the heating mechanism 4.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A heating tray which can be uniformly heated, comprising a heating tray main body (1) and a base layer (5), characterized in that: The heating disc body (1) is fixedly provided with a temperature joint (2) on one side, and is fixedly provided with a graphite sheet (3) at the lower end, and is fixedly provided with a heating mechanism (4) inside, and the outer surface of the base layer (5) is fixedly provided with a reinforcing layer (6), and the outer surface of the reinforcing layer (6) is fixedly provided with a first coating layer (7), and the outer surface of the first coating layer (7) is fixedly provided with a second coating layer (8); The heating mechanism (4) comprises a connecting ring (401) and a fixed disc (403), a plurality of heating wires (402) are fixedly arranged on the inner surface of the connecting ring (401) at equal intervals, one side of each of the plurality of heating wires (402) is fixedly connected with the fixed disc (403), and the upper end of the fixed disc (403) is threadedly connected with a plurality of second fixing bolts (404).

2. A uniformly heatable platen according to claim 1, characterized in that: The heating disc body (1) comprises a disc body (103), a plurality of first fixing bolts (104) and a disc cover (106), the first joint (101) is fixedly arranged on one side of the front surface of the disc body (103), and the second joint (102) is fixedly arranged on the other side of the front surface of the disc body (103).

3. A uniformly heatable platen according to claim 2, wherein: The disc cover (106) is threadedly provided with a plurality of connecting screws (105) at the upper end, and the disc body (103) and the disc cover (106) are connected through the plurality of first fixing bolts (104).

4. The uniformly heatable platen of claim 1, wherein: The base layer (5) is made of aluminum alloy material.

5. The uniformly heatable platen of claim 1, wherein: The reinforcing layer (6) is made of stainless steel material.

6. The uniformly heatable platen of claim 1, wherein: The first coating layer (7) is made of high-temperature-resistant ceramic coating.

7. The uniformly heatable platen of claim 1, wherein: The second coating layer (8) is made of polytetrafluoroethylene coating.

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