Air floating platform for optical lens detection
By using an air-float platform substrate and automated adjustment components, the problem of insufficient adjustment accuracy of existing air-float platforms has been solved, enabling high-precision optical lens detection and improving the stability and safety of the device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- NANJING JIABO OPTICAL INSTR CO LTD
- Filing Date
- 2025-06-03
- Publication Date
- 2026-04-21
AI Technical Summary
Existing air flotation platforms rely on manual operation for balance adjustment, which lacks precision and cannot be accurately quantified. Uneven temperature control and pressure distribution also affect detection accuracy.
It employs components such as an air-floating platform substrate, a laser interferometer adjustment mechanism, a support adjustment mechanism, and a pressure-sensitive valve to achieve precise balance and stability through automated adjustment. It is combined with an ion air curtain isolation system and cooling pipes for temperature control and electrostatic protection.
The system achieves automated and precise adjustment of the air flotation platform, improving detection stability and accuracy, reducing human error, and enhancing the practicality and safety of the device.
Smart Images
Figure CN224144597U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the fields of precision optical inspection and air-bearing support technology, and in particular to an air-bearing platform for optical lens inspection. Background Technology
[0002] In recent years, with the rapid development of optical technology, high-precision optical lenses have been increasingly widely used in semiconductor manufacturing, aerospace, medical equipment and other fields. However, the detection accuracy of optical lenses directly affects their performance, thus placing extremely high demands on the stability and accuracy of the detection platform. At present, the industry generally adopts air-floating platforms as the basic support structure of detection equipment, using gas thin films to achieve frictionless support, so as to reduce the impact of external interference on the detection results.
[0003] When using existing air flotation platforms, it is necessary to first adjust their balance. The current adjustment method mainly relies on workers to adjust them with wrenches, which has a certain degree of error in accuracy, is relatively inconvenient to adjust, and cannot accurately quantify and measure the adjustment distance. Furthermore, there is room for improvement in temperature control and pressure distribution uniformity. Utility Model Content
[0004] To address the shortcomings of existing technologies, this application provides an air flotation platform for optical lens inspection, which overcomes the deficiencies of existing technologies. It aims to solve the problems that existing air flotation platforms require balance adjustment during use. The existing adjustment method mainly relies on operators using wrenches, which has certain errors in accuracy, is inconvenient to adjust, and cannot accurately quantify the adjustment distance. Furthermore, there are issues with the need for improvement in temperature control and pressure distribution uniformity.
[0005] To achieve the above objectives, this application provides the following technical solution: an air-float platform for optical lens inspection, comprising a base, an air-float platform substrate disposed above the base, multiple sets of air-float holes disposed inside the air-float platform substrate, each set of air-float holes being equipped with a pressure-sensitive valve, laser interferometer adjustment mechanisms disposed around the perimeter of the air-float platform substrate, four sets of laser interferometer adjustment mechanisms being slidably connected to the perimeter of the air-float platform substrate, a honeycomb matrix air cushion array disposed inside the base, four sets of support adjustment mechanisms disposed at the bottom of the base, each set of support adjustment mechanisms including a support frame, a threaded rotating shaft rotatably connected inside the support frame, a support sleeve threadedly connected above the threaded rotating shaft, the top of the support sleeve penetrating the support frame and abutting against the bottom of the base, a rotating shaft rotatably connected to one side of the support frame, and bevel gears disposed at the bottom of the threaded rotating shaft and one end of the rotating shaft, the two sets of bevel gears meshing with each other.
[0006] By adopting the above technical solution and setting a base, the optical lens to be tested can be positioned and limited above the air-float platform substrate during use. The air-float holes and pressure-sensitive valves on the upper part of the air-float platform substrate provide air-float support, ensuring stability during use. The accuracy is measured by multiple sets of laser interferometer adjustment mechanisms. When the base is moved to a certain location, it can be balanced by the support adjustment mechanism at the bottom. The rotation of the threaded rotating shaft can be driven by rotating the rotating shaft, thereby quickly raising and lowering the support sleeve to achieve a balancing effect on the base. In this way, the overall balance of the base can be better adjusted during use or after the position is changed. No other tools are needed for adjustment, and the threaded adjustment method is relatively accurate, improving the practicality of the device.
[0007] As a preferred technical solution of this application, the pressure-sensitive valve includes a sleeve located inside the air float hole. A circular displacement block is slidably connected inside the sleeve. A base is provided at the bottom of the sleeve, and a spring is provided above the base. The top of the spring is fixedly connected to the bottom of the circular displacement block.
[0008] By adopting the above technical solution and setting a pressure-sensitive valve, when the clamp holding the lens is moved above the pressure-sensitive valve during use, it will press the circular displacement block, which will change the position of the circular displacement block inside the sleeve. At this time, the airflow at the bottom will support the clamp through the gap between the circular displacement block and the inside of the sleeve. The spring can adjust the size of the gap inside the sleeve according to the weight of the object above, thereby improving the practicality of the device.
[0009] As a preferred technical solution of this application, an ion air curtain isolation system is provided on the outer side of the base, and an air outlet is provided above the ion air curtain isolation system.
[0010] By adopting the above technical solution and setting up an ion air curtain isolation system, static electricity attached to the personnel can be removed when using the device, preventing electrostatic breakdown.
[0011] As a preferred embodiment of this application, the laser interferometer adjustment mechanism includes an adjustment frame, a sliding connecting block at the bottom of the adjustment frame, the sliding connecting block being slidably connected to the air-floating platform substrate, an adjustment screw being rotatably connected inside the adjustment frame, a moving block being threadedly connected to the outside of the adjustment screw, and a laser interferometer being disposed on one side of the moving block.
[0012] By adopting the above technical solution and setting an adjustment frame, the height of the laser interferometer can be adjusted by rotating the adjustment screw, which can match the lens during use, making it more convenient and flexible.
[0013] As a preferred technical solution of this application, the air flotation platform substrate is provided with multiple sets of cooling pipes inside, and connecting pipes are provided on both sides of the multiple sets of cooling pipes respectively.
[0014] By adopting the above technical solution and setting up cooling pipes, the air flotation platform substrate can be cooled quickly during use, preventing high temperature phenomena and improving stability during use.
[0015] As a preferred technical solution of this application, the external thread of the threaded rotating shaft is connected to a displacement ring, a slider is provided on one side of the displacement ring, a moving groove is provided on one side of the support frame, and the slider is slidably connected to the inside of the moving groove.
[0016] By adopting the above technical solution and setting a movable groove, the slider can slide inside the movable groove during use, thereby making it easier to observe the overall height change of the pressure-sensitive valve and indicating the practicality of the device.
[0017] As a preferred technical solution of this application, a scale is provided on the front of the support frame, and the scale is located on one side of the moving groove.
[0018] By adopting the above technical solution and setting the scale, it is easy to intuitively view the height of the displacement, thus improving the accuracy of adjustment.
[0019] As a preferred technical solution of this application, a reinforcing rod is provided between the four groups, a caster wheel is provided at the bottom of the reinforcing rod, and a stabilizing pad is provided at the bottom of the support frame.
[0020] By adopting the above technical solution and setting up stable supports, the device can be better supported during use, and the casters make it more convenient and labor-saving to move and relocate the device.
[0021] The beneficial effects of this application are:
[0022] 1. By setting up a base, the optical lens to be tested can be positioned and limited above the air-float platform substrate during use. The air-float holes and pressure valves on the upper part of the air-float platform substrate provide air-float support, ensuring stability during use. The accuracy is measured by multiple sets of laser interferometer adjustment mechanisms. When the base is moved to a certain location, it can be balanced by the support adjustment mechanism at the bottom. The rotation of the threaded rotating shaft can be driven by rotating the rotating shaft, thereby quickly raising and lowering the support sleeve to achieve a balancing effect on the base. In this way, the overall balance of the base can be better adjusted during use or after the position is changed. No other tools are needed for adjustment, and the threaded adjustment method is relatively accurate, improving the practicality of the device.
[0023] 2. By setting a pressure-sensitive valve, when the clamp holding the lens moves above the pressure-sensitive valve during use, it will press the circular displacement block, causing the circular displacement block to change its position inside the sleeve. At this time, the airflow at the bottom will support the clamp through the gap between the circular displacement block and the inside of the sleeve. The spring can adaptively adjust the size of the gap inside the sleeve according to the weight of the object above, improving the practicality of the device. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the overall structure of this application;
[0025] Figure 2 This is a schematic diagram of the internal structure of the base in this application;
[0026] Figure 3 This is a schematic diagram of the internal structure of the air flotation platform substrate and the pressure-sensitive valve in this application.
[0027] Figure 4 This is a schematic diagram of the supporting adjustment mechanism structure of this application;
[0028] Figure 5 This is a schematic diagram of the adjustment mechanism of the laser interferometer in this application.
[0029] In the diagram: 1. Base; 101. Honeycomb matrix air cushion array; 2. Air flotation platform substrate; 201. Air flotation hole; 202. Cooling pipe; 203. Connecting pipe; 3. Ion air curtain isolation system; 301. Air outlet; 4. Pressure-sensitive valve; 401. Sleeve; 402. Base; 403. Circular displacement block; 404. Spring; 5. Reinforcing rod; 501. Caster wheel; 6. Support adjustment mechanism; 601. Support frame; 602. Moving groove; 603. Threaded rotating shaft; 604. Support sleeve; 605. Rotating shaft; 606. Bevel gear; 608. Stabilizing support; 7. Laser interferometer adjustment mechanism; 701. Adjustment frame; 702. Sliding connecting block; 703. Moving block; 704. Laser interferometer; 706. Adjusting screw; 8. Displacement ring; 801. Slider; 9. Scale. Detailed Implementation
[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0031] Reference Figure 1-5 An air-floating platform for optical lens inspection includes a base 1, an air-floating platform substrate 2 on top of the base 1, multiple sets of air-floating holes 201 inside the air-floating platform substrate 2, each set of air-floating holes 201 having a pressure-sensitive valve 4 inside, four sets of laser interferometer adjustment mechanisms 7 slidably connected to the periphery of the air-floating platform substrate 2, a honeycomb matrix air cushion array 101 inside the base 1, and four sets of supports at the bottom of the base 1. The adjustment mechanism 6, consisting of four sets of support adjustment mechanisms, each includes a support frame 601. A threaded rotating shaft 603 is rotatably connected inside the support frame 601. A support sleeve 604 is threadedly connected above the threaded rotating shaft 603. The top of the support sleeve 604 passes through the support frame 601 and abuts against the bottom of the base 1. A rotating shaft 605 is rotatably connected to one side of the support frame 601. Bevel gears 606 are provided at the bottom of the threaded rotating shaft 603 and at one end of the rotating shaft 605, and the two sets of bevel gears 606 mesh with each other. An ion air curtain isolation system 3 is provided on the outside of the base 1, and an air outlet 301 is provided above the ion air curtain isolation system 3.
[0032] By setting up the base 1, the optical lens to be tested can be positioned and limited above the air flotation platform substrate 2 during use. The air flotation holes 201 and pressure valve 4 on the upper part of the air flotation platform substrate 2 provide air flotation support, ensuring stability during use. The accuracy is measured by multiple sets of laser interferometer adjustment mechanisms 7. When the base 1 is moved to a certain location, it can be balanced by the support adjustment mechanism 6 at the bottom. The rotation shaft 605 drives the rotation of the threaded rotation shaft 603, thereby quickly raising and lowering the support sleeve 604 to achieve the balancing effect of the base 1. In this way, the overall balance of the base 1 can be better adjusted during use or after the position is changed. No other tools are needed for adjustment, and the threaded adjustment method is relatively accurate, improving the practicality of the device. By setting up the ion air curtain isolation system 3, static electricity on the personnel can be removed when using the device, preventing electrostatic discharge.
[0033] Reference Figure 1-5 The pressure-sensitive valve 4 includes a sleeve 401 located inside the air flotation hole 201. A circular displacement block 403 is slidably connected inside the sleeve 401. A base 402 is provided at the bottom of the sleeve 401, and a spring 404 is provided above the base 402. The top of the spring 404 is fixedly connected to the bottom of the circular displacement block 403. The laser interferometer adjustment mechanism 7 includes an adjustment frame 701. A sliding connecting block 702 is provided at the bottom of the adjustment frame 701 and is slidably connected to the air flotation platform base plate 2. An adjustment screw 706 is rotatably connected inside the adjustment frame 701. A moving block 703 is threadedly connected to the external of the adjustment screw 706. A laser interferometer 704 is provided on one side of the moving block 703. A displacement ring 8 is threadedly connected to the external of the threaded rotating shaft 603. A slider 801 is provided on one side of the displacement ring 8. A moving groove 602 is provided on one side of the support frame 601, and the slider 801 is slidably connected to the moving groove 602. Inside 2; by setting a pressure-sensitive valve 4, when the clamp holding the lens moves above the pressure-sensitive valve 4, it will press the circular displacement block 403, causing the circular displacement block 403 to change its position inside the sleeve 401. At this time, the airflow at the bottom will support the clamp through the gap between the circular displacement block 403 and the inside of the sleeve 401. The spring 404 can adaptively adjust the size of the gap inside the sleeve 401 according to the weight of the object above, improving the practicality of the device; by setting an adjustment frame 701, the height of the laser interferometer 704 can be adjusted by rotating the adjustment screw 706, which can match the lens during use, making it more convenient and flexible; by setting a moving groove 602, the slider 801 can slide inside the moving groove 602 during use, so that the overall height change of the pressure-sensitive valve 4 can be observed more intuitively, indicating the practicality of the device.
[0034] Reference Figure 1-5 The air-floating platform substrate 2 has multiple sets of cooling pipes 202 inside, and connecting pipes 203 are respectively provided on both sides of the multiple sets of cooling pipes 202. By setting the cooling pipes 202, the air-floating platform substrate 2 can be quickly cooled during use, preventing high temperature phenomena and improving stability during use. The support frame 601 has a scale 9 on the front, which is located on one side of the moving groove 602. The scale 9 makes it easy to intuitively view the displacement height, improving the accuracy of adjustment. A reinforcing rod 5 is set between the four sets, and a universal wheel 501 is set at the bottom of the reinforcing rod 5. A stabilizing pad 608 is set at the bottom of the support frame 601. By setting the stabilizing pad 608, the device can be better supported during use, and the universal wheel 501 makes it more convenient and labor-saving to transfer and move the device.
[0035] Working principle: By setting the base 1, the optical lens to be tested can be positioned and limited above the air-float platform substrate 2 during use. The air-float holes 201 and pressure-sensitive valve 4 on the upper part of the air-float platform substrate 2 provide air-float support, ensuring stability during use. The accuracy is measured by multiple sets of laser interferometer adjustment mechanisms 7. When the base 1 is moved to a certain position, it can be balanced by the support adjustment mechanism 6 at the bottom. The rotation of the threaded rotating shaft 603 can be driven by rotating the rotating shaft 605, thereby enabling rapid... The support sleeve 604 rises and falls to achieve a balancing effect on the base 1. By setting a pressure-sensitive valve 4, when the clamp holding the lens moves above the pressure-sensitive valve 4 during use, it will press the circular displacement block 403, causing the circular displacement block 403 to change its position inside the sleeve 401. At this time, the airflow at the bottom will support the clamp through the gap between the circular displacement block 403 and the inside of the sleeve 401. The spring 404 can adaptively adjust the size of the gap inside the sleeve 401 according to the weight of the object above.
[0036] The above are merely preferred embodiments of this application and are not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. An air floating platform for optical lens detection, comprising a base (1), characterized in that, An air-floating platform substrate (2) is provided above the base (1). Multiple sets of air-floating holes (201) are provided inside the air-floating platform substrate (2). Each set of air-floating holes (201) is equipped with a pressure-sensitive valve (4). Laser interferometer adjustment mechanisms (7) are provided around the air-floating platform substrate (2). The four sets of laser interferometer adjustment mechanisms (7) are slidably connected to the perimeter of the air-floating platform substrate (2). A honeycomb matrix air cushion array (101) is provided inside the base (1). Four sets of support adjustment mechanisms (6) are provided at the bottom of the base (1). All mechanisms (6) include a support frame (601), a threaded rotating shaft (603) is rotatably connected inside the support frame (601), a support sleeve (604) is threadedly connected above the threaded rotating shaft (603), the top of the support sleeve (604) passes through the support frame (601) and abuts against the bottom of the base (1), a rotating shaft (605) is rotatably connected to one side of the support frame (601), and bevel gears (606) are provided at the bottom of the threaded rotating shaft (603) and one end of the rotating shaft (605), and the two sets of bevel gears (606) mesh with each other.
2. An air floating platform for optical lens inspection according to claim 1, characterized in that, The pressure-sensitive valve (4) includes a sleeve (401) located inside the air float hole (201). A circular displacement block (403) is slidably connected inside the sleeve (401). A base (402) is provided at the bottom of the sleeve (401). A spring (404) is provided above the base (402). The top of the spring (404) is fixedly connected to the bottom of the circular displacement block (403).
3. An air floating platform for optical lens inspection according to claim 1, characterized in that, An ion curtain isolation system (3) is provided on the outside of the base (1), and an air outlet (301) is provided above the ion curtain isolation system (3).
4. An air floating platform for optical lens inspection according to claim 1, characterized in that, The laser interferometer adjustment mechanism (7) includes an adjustment frame (701), a sliding connecting block (702) is provided at the bottom of the adjustment frame (701), the sliding connecting block (702) is slidably connected to the air-floating platform substrate (2), an adjustment screw (706) is rotatably connected inside the adjustment frame (701), a moving block (703) is threadedly connected to the outside of the adjustment screw (706), and a laser interferometer (704) is provided on one side of the moving block (703).
5. An air floating platform for optical lens inspection according to claim 1, characterized in that, The air flotation platform substrate (2) is provided with multiple sets of cooling pipes (202) inside, and connecting pipes (203) are provided on both sides of the multiple sets of cooling pipes (202).
6. An air bearing platform for optical lens inspection according to claim 1, characterized in that, The external thread of the threaded rotating shaft (603) is connected to a displacement ring (8), and a slider (801) is provided on one side of the displacement ring (8). A moving groove (602) is provided on one side of the support frame (601), and the slider (801) is slidably connected to the inside of the moving groove (602).
7. An air bearing platform for optical lens inspection according to claim 6, characterized in that, The support frame (601) has a scale (9) on its front side, and the scale (9) is located on one side of the moving groove (602).
8. An air floating platform for optical lens inspection according to claim 1, characterized in that, Four groups are provided between the described reinforcing rod (5), the bottom of the reinforcing rod (5) is provided with universal wheel (501), the bottom of the support frame (601) is provided with stable support pad (608).