Single dielectric section, electrostatic chuck, substrate holder, and plasma processing apparatus

Abstract

To provide a technique that mitigates the effect of the phase difference between the electrical bias for a substrate and the electrical bias for an edge ring on plasma processing.SOLUTION: A substrate support device according to one exemplary embodiment comprises a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold the substrate placed on it. The second region is arranged to surround the first region and is configured to hold the edge ring placed on it. The first electrode is provided in the first region to receive the first electrical bias. The second electrode is provided at least within the second region to receive the second electrical bias. The second electrode extends below the first electrode within the first region, facing the first electrode.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] SUMMARY Exemplary embodiments of the present disclosure relate to a substrate support and a plasma processing apparatus. [Background technology]

[0002] A plasma processing apparatus is used for plasma processing of a substrate. The substrate is placed in a chamber of the plasma processing apparatus within a region surrounded by a bias electrode and an edge ring. The edge ring is placed on a ring electrode. Patent Document 1 discloses such a plasma processing apparatus. The plasma processing apparatus disclosed in Patent Document 1 includes two bias power supplies. The two bias power supplies are connected to the bias electrode and the ring electrode, respectively, to form a flat plasma sheath above the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2018 / 0082824 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides techniques for mitigating the effect on plasma processing of a phase difference between an electrical bias for a substrate and a second electrical bias for an edge ring. [Means for solving the problem]

[0005] In one exemplary embodiment, a substrate support is provided. The substrate support includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate placed thereon. The second region surrounds the first region and is configured to hold an edge ring placed thereon. The first electrode is disposed within the first region to receive a first electrical bias. The second electrode is disposed within at least the second region to receive a second electrical bias. The second electrode extends below the first electrode so as to face the first electrode within the first region. [Effects of the Invention]

[0006] According to one exemplary embodiment, the effect of the phase difference between the electrical bias for the substrate and the electrical bias for the edge ring on the plasma processing is mitigated. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a diagram illustrating a schematic diagram of a plasma processing apparatus according to an exemplary embodiment; [Figure 2] 1 is a diagram showing the configuration inside a chamber of a plasma processing apparatus according to an exemplary embodiment; [Figure 3] 1 is a plan view schematically illustrating a first region, a second region, a first electrode, and a second electrode of a substrate support according to an example embodiment; [Figure 4] 10 is a timing chart showing an example of a first electrical bias, a second electrical bias, a potential of a first electrode, and a potential of a second electrode. [Figure 5] FIG. 10 is an enlarged partial cross-sectional view of a substrate support according to another exemplary embodiment. [Figure 6] FIG. 10 is a diagram schematically illustrating a plasma processing apparatus according to another exemplary embodiment. [Figure 7] FIG. 10 is a plan view schematically illustrating a first region, a second region, a first electrode, and a second electrode in a substrate support according to yet another exemplary embodiment. [Figure 8]FIG. 10 is a diagram schematically illustrating a plasma processing apparatus according to yet another exemplary embodiment. [Figure 9] FIG. 10 is a diagram schematically illustrating a plasma processing apparatus according to another exemplary embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Various exemplary embodiments are described below.

[0009] In one exemplary embodiment, a substrate support is provided. The substrate support includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate placed thereon. The second region surrounds the first region and is configured to hold an edge ring placed thereon. The first electrode is disposed within the first region to receive a first electrical bias. The second electrode is disposed within at least the second region to receive a second electrical bias. The second electrode extends below the first electrode so as to face the first electrode within the first region.

[0010] In the substrate support of the above embodiment, the first electrode and the second electrode face each other within the first region and are therefore capacitively coupled within the first region. Therefore, a portion of the second electrical bias is applied to the first electrode, and a portion of the first electrical bias is applied to the second electrode. Therefore, the potential difference between the first electrode and the second electrode caused by the phase difference between the first electrical bias and the second electrical bias is alleviated, thereby alleviating the potential difference between the substrate and the edge ring caused by the phase difference. As a result, the effect of the phase difference between the first electrical bias and the second electrical bias on plasma processing is alleviated.

[0011] In one exemplary embodiment, the first region may comprise a first electrostatic chuck configured to hold a substrate disposed thereon, and the second region may comprise a second electrostatic chuck configured to hold an edge ring disposed thereon.

[0012] In one exemplary embodiment, the first region may have a first dielectric portion and a second dielectric portion. The first dielectric portion extends around the first electrode. The second dielectric portion is formed from a dielectric material different from that forming the first dielectric portion. The second dielectric portion is disposed between the first electrode and the second electrode.

[0013] In one exemplary embodiment, at least a portion of the second electrode may protrude from the second region into the first region.

[0014] In another exemplary embodiment, a plasma processing apparatus is provided, comprising a chamber and a substrate support, the substrate support being any of the substrate support of the various exemplary embodiments described above, the substrate support being configured to support a substrate and an edge ring within the chamber.

[0015] In one exemplary embodiment, the plasma processing apparatus may further include a first bias power supply and a second bias power supply, the first bias power supply configured to generate a first electrical bias and electrically connected to the first electrode, and the second bias power supply configured to generate a second electrical bias and electrically connected to the second electrode.

[0016] In one exemplary embodiment, each of the first and second electrical biases may be high frequency power. In one exemplary embodiment, each of the first and second electrical biases may be a periodically generated pulse wave including a pulse of negative DC voltage.

[0017] In yet another exemplary embodiment, a plasma processing apparatus is provided. The plasma processing apparatus includes a chamber, a first bias power supply, a second bias power supply, a substrate support, a first electrical path, a second electrical path, and a capacitor. The first bias power supply is configured to generate a first electrical bias. The second bias power supply is configured to generate a second electrical bias. The substrate support is configured to support a substrate and an edge ring within the chamber. The substrate support has a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate disposed thereon. The second region surrounds the first region and is configured to hold an edge ring disposed thereon. The first electrode is disposed within the first region to receive the first electrical bias. The second electrode is disposed within the second region to receive the second electrical bias. The first electrical path is connected between the first bias power supply and the first electrode. A second electrical path is connected between the second bias power supply and the second electrode, and a capacitor is connected between the first electrical path and the second electrical path.

[0018] In the plasma processing apparatus of the above embodiment, the first electrode and the second electrode are capacitively coupled by a capacitor. Therefore, a portion of the second electrical bias is applied to the first electrode, and a portion of the first electrical bias is applied to the second electrode. Therefore, the potential difference between the first electrode and the second electrode caused by the phase difference between the first electrical bias and the second electrical bias is alleviated, and the potential difference between the substrate and the edge ring caused by the phase difference is alleviated. As a result, the influence of the phase difference between the first electrical bias and the second electrical bias on the plasma processing is alleviated.

[0019] In one exemplary embodiment, each of the first and second electrical biases may be high frequency power. In one exemplary embodiment, each of the first and second electrical biases may be a periodically generated pulse wave including a pulse of negative DC voltage.

[0020] In one exemplary embodiment, the capacitor may be a variable capacitor.

[0021] Various exemplary embodiments will be described in detail below with reference to the drawings, in which the same or equivalent parts are designated by the same reference numerals.

[0022] Fig. 1 is a diagram schematically illustrating a plasma processing apparatus according to an exemplary embodiment. The plasma processing apparatus 1 illustrated in Fig. 1 includes a chamber 10. Fig. 2 is a diagram illustrating the configuration inside the chamber of the plasma processing apparatus according to an exemplary embodiment. As illustrated in Fig. 2, the plasma processing apparatus 1 may be a capacitively coupled plasma processing apparatus.

[0023] The chamber 10 provides an internal space 10s therein. The central axis of the internal space 10s is an axis AX extending in the vertical direction. In one embodiment, the chamber 10 includes a chamber body 12. The chamber body 12 has a substantially cylindrical shape. The internal space 10s is provided within the chamber body 12. The chamber body 12 is formed of, for example, aluminum. The chamber body 12 is electrically grounded. A plasma-resistant film is formed on the inner wall surface of the chamber body 12, i.e., the wall surface defining the internal space 10s. This film may be a film formed by anodizing or a ceramic film such as a film formed from yttrium oxide.

[0024] A passage 12p is formed in the sidewall of the chamber body 12. The substrate W passes through the passage 12p when being transferred between the internal space 10s and the outside of the chamber 10. A gate valve 12g is provided along the sidewall of the chamber body 12 to open and close the passage 12p.

[0025] The plasma processing apparatus 1 further includes a substrate support 16. The substrate support 16 is configured to support a substrate W placed thereon in the chamber 10. The substrate W has a substantially disk shape. The substrate support 16 is supported by a support portion 17. The support portion 17 extends upward from the bottom of the chamber body 12. The support portion 17 has a substantially cylindrical shape. The support portion 17 is made of an insulating material such as quartz.

[0026] The substrate support 16 has a lower electrode 18 and an electrostatic chuck 20. The lower electrode 18 and the electrostatic chuck 20 are provided in the chamber 10. The lower electrode 18 is made of a conductive material such as aluminum and has a generally disk shape.

[0027] A flow path 18f is formed in the lower electrode 18. The flow path 18f is a flow path for a heat exchange medium. For example, a liquid refrigerant is used as the heat exchange medium. A heat exchange medium supply device (for example, a chiller unit) is connected to the flow path 18f. This supply device is provided outside the chamber 10. The heat exchange medium is supplied to the flow path 18f from the supply device via a pipe 23a. The heat exchange medium supplied to the flow path 18f is returned to the supply device via a pipe 23b.

[0028] The electrostatic chuck 20 is provided on the lower electrode 18. As shown in FIG. 1, the electrostatic chuck 20 includes a dielectric portion 20d and an electrode 21a. The dielectric portion 20d is made of a dielectric material, such as aluminum nitride or aluminum oxide. The electrostatic chuck 20 further includes an electrode 22a and an electrode 22b. When the substrate W is processed in the internal space 10s, the substrate W is placed on the electrostatic chuck 20 and held by the electrostatic chuck 20. An edge ring ER is also mounted on the substrate support 16. The edge ring ER is a plate having a substantially ring shape. The edge ring ER is made of, for example, silicon, silicon carbide, or quartz. As shown in FIG. 2, the edge ring ER is mounted on the substrate support 16 so that its central axis coincides with the axis AX. The substrate W accommodated in the chamber 10 is disposed on the electrostatic chuck 20 and within a region surrounded by the edge ring ER.

[0029] The plasma processing apparatus 1 may further include a gas line 25. The gas line 25 supplies a heat transfer gas, such as He gas, from a gas supply mechanism to the gap between the upper surface of the electrostatic chuck 20 (a first region described later) and the rear surface (lower surface) of the substrate W.

[0030] The plasma processing apparatus 1 may further include an outer circumferential portion 28 and an outer circumferential portion 29. The outer circumferential portion 28 extends upward from the bottom of the chamber body 12. The outer circumferential portion 28 has a substantially cylindrical shape and extends along the outer periphery of the support portion 17. The outer circumferential portion 28 is formed of a conductive material and has a substantially cylindrical shape. The outer circumferential portion 28 is electrically grounded. A plasma-resistant film is formed on the surface of the outer circumferential portion 28. This film may be a film formed by anodizing or a ceramic film such as a film formed from yttrium oxide.

[0031] The outer peripheral portion 29 is provided on the outer peripheral portion 28. The outer peripheral portion 29 is made of an insulating material. The outer peripheral portion 29 is made of ceramic, such as quartz. The outer peripheral portion 29 has a substantially cylindrical shape. The outer peripheral portion 29 extends along the outer peripheries of the lower electrode 18 and the electrostatic chuck 20.

[0032] The plasma processing apparatus 1 further includes an upper electrode 30. The upper electrode 30 is provided above the substrate support 16. The upper electrode 30 closes the upper opening of the chamber body 12 together with a member 32. The member 32 has insulating properties. The upper electrode 30 is supported on the upper part of the chamber body 12 via this member 32.

[0033] The upper electrode 30 includes a top plate 34 and a support 36. The lower surface of the top plate 34 defines an internal space 10s. A plurality of gas discharge holes 34a are formed in the top plate 34. Each of the plurality of gas discharge holes 34a penetrates the top plate 34 in the thickness direction (vertical direction). The top plate 34 is made of, for example, silicon. Alternatively, the top plate 34 may have a structure in which a plasma-resistant film is provided on the surface of an aluminum member. This film may be a ceramic film, such as a film formed by anodizing or a film formed from yttrium oxide.

[0034] The support 36 detachably supports the top plate 34. The support 36 is made of a conductive material such as aluminum. A gas diffusion chamber 36a is provided inside the support 36. A plurality of gas holes 36b extend downward from the gas diffusion chamber 36a. The plurality of gas holes 36b are respectively connected to the plurality of gas discharge holes 34a. A gas introduction port 36c is formed in the support 36. The gas introduction port 36c is connected to the gas diffusion chamber 36a. A gas supply pipe 38 is connected to the gas introduction port 36c.

[0035] A gas source group 40 is connected to the gas supply pipe 38 via a valve group 41, a flow rate controller group 42, and a valve group 43. The gas source group 40, the valve group 41, the flow rate controller group 42, and the valve group 43 constitute a gas supply unit. The gas source group 40 includes a plurality of gas sources. Each of the valve group 41 and the valve group 43 includes a plurality of valves (e.g., on-off valves). The flow rate controller group 42 includes a plurality of flow rate controllers. Each of the plurality of flow rate controllers in the flow rate controller group 42 is a mass flow controller or a pressure-controlled flow rate controller. Each of the plurality of gas sources in the gas source group 40 is connected to the gas supply pipe 38 via a corresponding valve in the valve group 41, a corresponding flow rate controller in the flow rate controller group 42, and a corresponding valve in the valve group 43. The plasma processing apparatus 1 can supply gas from one or more selected gas sources of the gas source group 40 to the internal space 10s at individually adjusted flow rates.

[0036] A baffle plate 48 is provided between the outer periphery 28 and the side wall of the chamber body 12. The baffle plate 48 can be formed, for example, by coating an aluminum member with a ceramic such as yttrium oxide. A large number of through-holes are formed in the baffle plate 48. Below the baffle plate 48, an exhaust pipe 52 is connected to the bottom of the chamber body 12. An exhaust device 50 is connected to the exhaust pipe 52. The exhaust device 50 has a pressure controller such as an automatic pressure control valve and a vacuum pump such as a turbomolecular pump, and is able to reduce the pressure in the internal space 10s.

[0037] The substrate support 16 will be described in detail below. As described above, the substrate support 16 has a lower electrode 18 and an electrostatic chuck 20. As shown in FIG. 1, the plasma processing apparatus 1 has a high-frequency power supply 57. The high-frequency power supply 57 is connected to the lower electrode 18 via a matching box 58. The high-frequency power supply 57 is a power supply that generates high-frequency power for generating plasma. The high-frequency power generated by the high-frequency power supply 57 has a first frequency. The first frequency may be a frequency in the range of 27 to 100 MHz. The first frequency is, for example, 40 MHz or 60 MHz. The matching box 58 has a matching circuit for matching the impedance on the load side (lower electrode 18 side) of the high-frequency power supply 57 to the output impedance of the high-frequency power supply 57. Note that the high-frequency power supply 57 does not have to be electrically connected to the lower electrode 18, and may be connected to the upper electrode 30 via the matching box 58.

[0038] In the plasma processing apparatus 1, a high-frequency electric field is generated in the chamber 10 by high-frequency power from the high-frequency power supply 57. The gas in the chamber 10 is excited by the generated high-frequency electric field. As a result, plasma is generated in the chamber 10. The substrate W is processed by chemical species such as ions and / or radicals from the generated plasma. The processing of the substrate W by the chemical species from the plasma is, for example, etching.

[0039] The substrate support 16 has a first region 21 and a second region 22. FIG. 3 is a plan view schematically illustrating the first region, the second region, the first electrode, and the second electrode of a substrate support according to an exemplary embodiment. Hereinafter, reference will be made to FIG. 3 in addition to FIGS. 1 and 2. The first region 21 is a central region of the substrate support 16. The first region 21 includes a central region of the electrostatic chuck 20. The second region 22 extends circumferentially radially outward from the first region 21. The second region 22 includes a peripheral region of the electrostatic chuck 20. In the plasma processing apparatus 1, the first region 21 and the second region 22 are integrated with each other and constitute a single electrostatic chuck 20. Note that in FIG. 1, the boundary between the first region 21 and the second region 22 is indicated by a dashed line. In addition, in FIG. 3, the boundary between the first region 21 and the second region 22 is indicated by a dashed line.

[0040] The first region 21 is configured to support the substrate W placed thereon (i.e., on its upper surface). The first region 21 is a region having a disk shape. The central axis of the first region 21 substantially coincides with the axis AX. The first region 21 shares the dielectric portion 20d with the second region 22. The dielectric portion 20d has a substantially disk shape. In one embodiment, the thickness of the dielectric portion 20d in the second region 22 is smaller than the thickness of the dielectric portion 20d in the first region 21. The vertical position of the upper surface of the dielectric portion 20d in the second region 22 may be lower than the vertical position of the upper surface of the dielectric portion 20d in the first region 21.

[0041] The first region 21 has an electrode 21a (chuck electrode). The electrode 21a is a film-like electrode and is provided in the dielectric portion 20d within the first region 21. The planar shape of the electrode 21a may be circular. The central axis of the electrode 21a substantially coincides with the axis AX. A DC power supply 55 is connected to the electrode 21a via a switch 56. When a DC voltage from the DC power supply 55 is applied to the electrode 21a, an electrostatic attraction force is generated between the first region 21 and the substrate W. The generated electrostatic attraction force attracts the substrate W to the first region 21 and the substrate W is held by the first region 21. In other words, the first region 21 constitutes a first electrostatic chuck configured to hold the substrate W placed thereon.

[0042] The substrate support 16 further includes a first electrode 211. The first electrode 211 is a film-like electrode and is provided in the dielectric portion 20d within the first region 21. The first electrode 211 may have a circular planar shape. The central axis of the first electrode 211 substantially coincides with the axis AX. Note that the electrode 21a may extend closer to the top surface of the first region 21 in the vertical direction than the first electrode 211.

[0043] The plasma processing apparatus 1 further includes a first bias power supply 61. The first bias power supply 61 is electrically connected to the first electrode 211 via a circuit 62. The first bias power supply 61 generates a first electric bias. The first electric bias is applied to the first electrode 211.

[0044] In one embodiment, the first electrical bias is radio frequency bias power. The radio frequency bias power has a second frequency. The second frequency may be lower than the first frequency. The second frequency may be within a range of 100 kHz to 13.56 MHz. The second frequency is, for example, 400 kHz. When the first electrical bias is radio frequency bias power, the circuit 62 is a matching circuit. The circuit 62 is configured to match the impedance of the load side of the first bias power supply 61 to the output impedance of the first bias power supply 61.

[0045] In another embodiment, the first electrical bias is a pulse wave periodically generated at the second frequency. In each cycle, the pulse wave includes a negative DC voltage pulse. The voltage level of the pulse wave may be 0 V during periods other than the period during which the negative DC voltage pulse lasts. Alternatively, the voltage of the pulse wave may have an absolute value lower than the absolute value of the voltage of the pulse during periods other than the period during which the negative DC voltage pulse lasts. Note that the voltage level of the pulse may vary over time within a cycle. When the first electrical bias is a periodically generated pulse wave, the circuit 62 may be an electrical filter configured to block or attenuate high-frequency power from the high-frequency power supply 57.

[0046] The second region 22 extends to surround the first region 21. The second region 22 is a substantially annular region. The central axis of the second region 22 substantially coincides with the axis AX. The second region 22 is configured to support the edge ring ER placed thereon (i.e., on the upper surface thereof). The second region 22 shares the dielectric portion 20d with the first region 21.

[0047] In one embodiment, the second region 22 may hold the edge ring ER by electrostatic attraction. That is, the second region 22 may constitute a second electrostatic chuck configured to hold the edge ring ER placed thereon. In this embodiment, the second region 22 may have one or more electrodes (chuck electrodes). In one embodiment, the second region 22 has a pair of electrodes, namely, electrode 22a and electrode 22b. The electrodes 22a and 22b are provided in the dielectric portion 20d within the second region 22. The electrodes 22a and 22b constitute a bipolar electrode. That is, in one embodiment, the second region 22 constitutes a bipolar electrostatic chuck. Each of the electrodes 22a and 22b is a film-like electrode. The planar shape of each of the electrodes 22a and 22b is, for example, a ring shape. The electrode 22a may extend inside the electrode 22b. The electrodes 22a and 22b may extend at substantially the same height in the vertical direction. Note that the electrodes 22a and 22b may extend closer to the top surface of the second region 22 in the vertical direction than the second electrode 222 described below.

[0048] A DC power supply 71 is connected to the electrode 22a via a switch 72 and a filter 73. The filter 73 is an electric filter configured to block or attenuate the high-frequency power and the first and second electric biases. A DC power supply 74 is connected to the electrode 22b via a switch 75 and a filter 76. The filter 76 is an electric filter configured to block or attenuate the high-frequency power and the first and second electric biases.

[0049] The DC power supplies 71 and 74 apply DC voltages to the electrodes 22a and 22b, respectively, so as to generate a potential difference between the electrodes 22a and 22b. The set potentials of the electrodes 22a and 22b may be any of a positive potential, a negative potential, and 0 V. For example, the potential of the electrode 22a may be set to a positive potential, and the potential of the electrode 22b may be set to a negative potential. The potential difference between the electrodes 22a and 22b may be generated using a single DC power supply instead of two DC power supplies.

[0050] When a potential difference occurs between the electrodes 22a and 22b, an electrostatic attractive force is generated between the second region 22 and the edge ring ER. The edge ring ER is attracted to the second region 22 by the generated electrostatic attractive force and is held by the second region 22. The second region 22 may constitute a monopolar electrostatic chuck. When the second region 22 is a monopolar electrostatic chuck, a DC voltage is applied to one or more chuck electrodes in the second region 22.

[0051] The substrate support 16 further includes a second electrode 222. The second electrode 222 is a film-like electrode. The second electrode 222 is provided in the dielectric portion 20d. The second electrode 222 is provided at least in the second region 22. The second electrode 222 is separated from the first electrode 211. The second electrode 222 extends below the first electrode 211 so as to face the first electrode 211 in the first region 21. In one embodiment, the planar shape of the second electrode 222 may be annular. In this embodiment, the central axis of the second electrode 222 substantially coincides with the axis AX. In this embodiment, the radius of the inner edge 222i of the second electrode 222 is smaller than the radius of the outer edge 211e of the first electrode 211, and the radius of the outer edge 222o of the second electrode 222 is larger than the radius of the outer edge 211e of the first electrode 211.

[0052] The plasma processing apparatus 1 further includes a second bias power supply 81. The second bias power supply 81 is electrically connected to the second electrode 222 via a circuit 82. The second bias power supply 81 generates a second electric bias. The second electric bias is applied to the second electrode 222.

[0053] In one embodiment, the second electrical bias is radio frequency bias power. The radio frequency bias power has the second frequency described above. When the second electrical bias is radio frequency bias power, the circuit 82 is a matching circuit. The circuit 82 is configured to match the impedance of the load side of the second bias power supply 81 to the output impedance of the second bias power supply 81.

[0054] In another embodiment, the second electrical bias is a pulse wave periodically generated at the second frequency. In each cycle, the pulse wave includes a negative DC voltage pulse. The voltage level of the pulse wave may be 0 V during periods other than the period during which the negative DC voltage pulse lasts. Alternatively, the voltage of the pulse wave may have an absolute value lower than the absolute value of the voltage of the pulse during periods other than the period during which the negative DC voltage pulse lasts. Note that the voltage level of the pulse may vary over time within a cycle. When the second electrical bias is a periodically generated pulse wave, the circuit 82 may be an electrical filter configured to block or attenuate high-frequency power from the high-frequency power supply 57.

[0055] The second region 22 may further include a gas line 22g. The gas line 22g is provided to supply a heat transfer gas, such as He gas, to the gap between the second region 22 and the edge ring ER. The gas line 22g is connected to a gas supply mechanism 86, which is a source of the heat transfer gas.

[0056] 2, the plasma processing apparatus 1 may further include a control unit MC. The control unit MC is a computer including a processor, a storage device, an input device, a display device, etc., and controls each part of the plasma processing apparatus 1. Specifically, the control unit MC executes a control program stored in the storage device and controls each part of the plasma processing apparatus 1 based on recipe data stored in the storage device. Under the control of the control unit MC, the process specified by the recipe data is executed in the plasma processing apparatus 1.

[0057] As described above, in the substrate support 16, the first electrode 211 and the second electrode 222 face each other in the first region 21 and are therefore capacitively coupled within the first region 21. Therefore, a part of the second electric bias is applied to the first electrode 211, and a part of the first electric bias is applied to the second electrode 222. Therefore, the potential difference between the first electrode 211 and the second electrode 222 caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate W and the edge ring ER is alleviated. As a result, the influence of the phase difference between the first electric bias and the second electric bias on plasma processing is alleviated.

[0058] FIG. 4 is a timing chart illustrating an example of the first electric bias, the second electric bias, the potential of the first electrode, and the potential of the second electrode. In the example illustrated in FIG. 4, each of the first electric bias and the second electric bias is a pulse wave. In the example illustrated in FIG. 4, the phase of the second electric bias lags behind the phase of the first electric bias. However, even during a period when the second electric bias is not applied to the second electrode 222, a portion of the first electric bias is applied to the second electrode 222. Furthermore, even during a period when the first electric bias is not applied to the first electrode 211, a portion of the second electric bias is applied to the first electrode 211. Therefore, the potential difference between the first electrode 211 and the second electrode 222 caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate W and the edge ring ER is alleviated.

[0059] Please refer to FIG. 5. FIG. 5 is a partially enlarged cross-sectional view of a substrate support according to another exemplary embodiment. The substrate support 16B shown in FIG. 5 can be used in the plasma processing apparatus 1 in place of the substrate support 16. The substrate support 16B has a dielectric portion 20m, i.e., a second dielectric portion, in addition to a dielectric portion 20d, i.e., a first dielectric portion. Other configurations of the substrate support 16B may be the same as those of the substrate support 16. The dielectric portion 20d extends around the first electrode 211. The dielectric portion 20m is formed from a dielectric material different from that forming the dielectric portion 20d. The dielectric portion 20m is provided between the first electrode 211 and the second electrode 222. According to this embodiment, by appropriately selecting the dielectric material forming the dielectric portion 20m, it is possible to set the capacitance of the capacitor formed between the first electrode 211 and the second electrode 222. In one embodiment, the dielectric portion 20m may be formed from a dielectric having a higher dielectric constant and higher dielectric strength than the dielectric constant of the dielectric portion 20d. The dielectric portion 20m may be formed from, for example, zirconia (ZrO2).

[0060] Please refer to FIG. 6. FIG. 6 is a diagram schematically illustrating a plasma processing apparatus according to another exemplary embodiment. The plasma processing apparatus 1C illustrated in FIG. 6 includes a substrate support 16C. The substrate support 16C differs from the substrate support 16 in that the electrode 21a also serves as the first electrode 211. Other configurations of the substrate support 16C may be the same as corresponding configurations of the substrate support 16. Furthermore, other configurations of the plasma processing apparatus 1C may be the same as corresponding configurations of the plasma processing apparatus 1. Note that, in the substrate support 16C as well, a dielectric portion 20m different from the dielectric portion 20d may be provided between the first electrode 211 and the second electrode 222, similar to the substrate support 16B.

[0061] Please refer to FIG. 7. FIG. 7 is a plan view schematically illustrating a first region, a second region, a first electrode, and a second electrode in a substrate support according to yet another exemplary embodiment. The substrate support 16D shown in FIG. 7 can be used in the plasma processing apparatus 1 or 1C instead of the substrate support 16. The substrate support 16D has a second electrode 222D instead of the second electrode 222. The second electrode 222D differs from the second electrode 222 in that multiple portions of its inner edge protrude from the second region 22 into the first region 21. Other configurations of the substrate support 16D may be the same as the corresponding configurations of the substrate support 16. Like the second electrode 222D in the substrate support 16, one or more portions of the inner edge of the second electrode of the substrate support may protrude into the first region and extend below the first electrode.

[0062] In the substrate support 16D, similarly to the substrate support 16B, a dielectric portion 20m different from the dielectric portion 20d may be provided between the first electrode 211 and the second electrode 222D. Also in the substrate support 16D, the electrode 21a may also serve as the first electrode 211.

[0063] 8. FIG. 8 is a schematic diagram illustrating a plasma processing apparatus according to yet another exemplary embodiment. The plasma processing apparatus 1E illustrated in FIG. 8 includes a substrate support 16E. The substrate support 16E differs from the substrate support 16 in that the second electrode 222 extends within the second region 22 and does not extend into the first region 21. Other configurations of the substrate support 16E may be identical to the corresponding configurations of the substrate support 16. In the plasma processing apparatus 1E, a capacitor 90 is connected between the first electrical path 63 and the second electrical path 83. The first electrical path 63 is connected between the first bias power supply 61 and the first electrode 211. The second electrical path 83 is connected between the second bias power supply 81 and the second electrode 222. The capacitor 90 may be a fixed capacitor or a variable capacitor. Note that other configurations of the plasma processing apparatus 1E may be identical to the corresponding configurations of the plasma processing apparatus 1.

[0064] In the plasma processing apparatus 1E, the first electrode 211 and the second electrode 222 are capacitively coupled by the capacitor 90. Therefore, a part of the second electric bias is applied to the first electrode 211, and a part of the first electric bias is applied to the second electrode 222. Therefore, the potential difference between the first electrode 211 and the second electrode 222 caused by the phase difference between the first electric bias and the second electric bias is alleviated, and the potential difference between the substrate W and the edge ring ER is alleviated. As a result, the influence of the phase difference between the first electric bias and the second electric bias on the plasma processing is alleviated.

[0065] Please refer to FIG. 9. FIG. 9 is a diagram schematically illustrating a plasma processing apparatus according to yet another exemplary embodiment. The plasma processing apparatus 1F illustrated in FIG. 9 includes a substrate support 16F. The substrate support 16F differs from the substrate support 16E in that the electrode 21a also serves as the first electrode 211, and the electrodes 22a and 22b also serve as the second electrode 222. Other configurations of the substrate support 16F may be the same as the corresponding configurations of the substrate support 16E. Furthermore, other configurations of the plasma processing apparatus 1F may be the same as the corresponding configurations of the plasma processing apparatus 1E. Note that in the substrate support 16F, the first electrode 211 may be an electrode separate from the electrode 21a. Alternatively, the second electrode 222 may be an electrode separate from the electrodes 22a and 22b.

[0066] Although various exemplary embodiments have been described above, the present invention is not limited to the above-described exemplary embodiments, and various additions, omissions, substitutions, and modifications may be made. Furthermore, elements in different embodiments may be combined to form other embodiments.

[0067] In another embodiment, the plasma processing apparatus may be another type of plasma processing apparatus, such as an inductively coupled plasma processing apparatus, an electron cyclotron resonance (ECR) plasma processing apparatus, or a plasma processing apparatus that generates plasma using surface waves such as microwaves.

[0068] The present disclosure includes the aspects described in the appendix below. (Appendix 1) a first region configured to hold a substrate disposed thereon; a second region surrounding the first region and configured to hold an edge ring disposed thereon; a first electrode disposed within the first region for receiving a first electrical bias; a second electrode disposed within at least the second region for receiving a second electrical bias; Equipped with the second electrode extends below the first electrode so as to face the first electrode in the first region; Board support. (Appendix 2) the first region comprises a first electrostatic chuck configured to hold the substrate disposed thereon; the second region comprises a second electrostatic chuck configured to hold the edge ring disposed thereon; 2. The substrate support of claim 1. (Appendix 3) The first region comprises: a first dielectric portion extending around the first electrode; a second dielectric portion formed from a dielectric different from the dielectric forming the first dielectric portion, the second dielectric portion being provided between the first electrode and the second electrode; 3. The substrate support according to claim 1 or 2, comprising: (Appendix 4) 4. The substrate support according to any one of claims 1 to 3, wherein at least a portion of the second electrode protrudes from the second region into the first region. (Appendix 5) a chamber; 5. The substrate support of claim 1, wherein the substrate support is configured to support a substrate and an edge ring within the chamber; A plasma processing apparatus comprising: (Appendix 6) a first bias power supply configured to generate the first electrical bias and electrically connected to the first electrode; a second bias power supply configured to generate the second electrical bias and electrically connected to the second electrode; 6. The plasma processing apparatus according to claim 5, further comprising: (Appendix 7) 7. The plasma processing apparatus of claim 6, wherein each of the first electrical bias and the second electrical bias is high-frequency power. (Appendix 8) 7. The plasma processing apparatus according to claim 6, wherein each of the first electrical bias and the second electrical bias is a periodically generated pulse wave including a pulse of a negative DC voltage. (Appendix 9) a chamber; a first bias power supply configured to generate a first electrical bias; a second bias power supply configured to generate a second electrical bias; a substrate support configured to support a substrate and an edge ring within the chamber; a first region configured to hold the substrate disposed thereon; a second region surrounding the first region and configured to hold the edge ring disposed thereon; a first electrode disposed within the first region for receiving the first electrical bias; a second electrode disposed within the second region for receiving the second electrical bias; the substrate support having a first electrical path connected between the first bias power supply and the first electrode; a second electrical path connected between the second bias power supply and the second electrode; a capacitor connected between the first electrical path and the second electrical path; A plasma processing apparatus comprising: (Appendix 10) 10. The plasma processing apparatus of claim 9, wherein each of the first electrical bias and the second electrical bias is high-frequency power. (Appendix 11) 10. The plasma processing apparatus of claim 9, wherein each of the first electrical bias and the second electrical bias is a periodically generated pulse wave including a pulse of a negative DC voltage. (Appendix 12) 12. The plasma processing apparatus according to claim 9, wherein the capacitor is a variable capacitor.

[0069] From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims. [Explanation of symbols]

[0070] 1...plasma processing apparatus, 10...chamber, 16...substrate support, 21...first region, 22...second region, 211...first electrode, 222...second electrode.

Claims

1. a single dielectric portion; a first region configured to hold a substrate; a second region surrounding the first region and configured to hold an edge ring; the single dielectric portion including a first electrode disposed within the first region and receiving a first electrical bias; a second electrode disposed within at least the second region and receiving a second electrical bias; Equipped with the second electrode has a ring shape and extends below the first electrode so as to face the first electrode in the first region; Electrostatic chuck.

2. a single dielectric portion; a first region configured to hold a substrate; a second region surrounding the first region and configured to hold an edge ring; the single dielectric portion including a first electrode disposed within the first region and receiving a first electrical bias; a second electrode disposed within at least the second region and receiving a second electrical bias; Equipped with the second electrode extends below the first electrode so as to face the first electrode in the first region; an area of ​​a portion of the first electrode facing the second electrode is smaller than an area of ​​a portion of the first electrode not facing the second electrode; Electrostatic chuck.

3. a single dielectric portion; a first region configured to hold a substrate; a second region surrounding the first region and configured to hold an edge ring; the single dielectric portion including a first electrode disposed within the first region and receiving a first electrical bias; a second electrode disposed within at least the second region and receiving a second electrical bias; Equipped with the second electrode extends below the first electrode so as to face the first electrode in the first region; a distance between an inner edge of the second electrode and an outer edge of the first electrode in any radial direction relative to a center of the first electrode is smaller than a distance between the center of the first electrode and the inner edge of the second electrode; Electrostatic chuck.

4. 4. The electrostatic chuck of claim 2, wherein the second electrode has a ring shape.

5. 5. The electrostatic chuck according to claim 1, wherein no electrode is provided in the region surrounded by the second electrode.

6. the first region comprises a first electrostatic chuck configured to hold the substrate disposed thereon; the second region comprises a second electrostatic chuck configured to hold the edge ring disposed thereon; The electrostatic chuck according to any one of claims 1 to 5.

7. 6. The electrostatic chuck of claim 1, wherein the first region constitutes a first electrostatic chuck configured to hold the substrate placed thereon.

8. 8. The electrostatic chuck according to claim 1, wherein at least a portion of the second electrode protrudes from the second region into the first region.

9. 9. The electrostatic chuck of claim 1, further comprising a chuck electrode that extends within the first region closer to a top surface of the first region than the first electrode.

10. 10. An electrostatic chuck according to claim 1, configured to support a substrate and an edge ring in a chamber; a lower electrode made of a conductive material and disposed below the electrostatic chuck; A substrate support comprising:

11. a chamber; A substrate support according to claim 10; A plasma processing apparatus comprising:

12. a first bias power supply configured to generate the first electrical bias and electrically connected to the first electrode; a second bias power supply configured to generate the second electrical bias and electrically connected to the second electrode; The plasma processing apparatus of claim 11 further comprising:

13. The plasma processing apparatus of claim 12 , further comprising: a filter provided between the first bias power supply and the first electrode; and a filter provided between the second bias power supply and the second electrode.

14. 14. The plasma processing apparatus according to claim 11, wherein each of the first electric bias and the second electric bias is a high frequency power.

15. 14. The plasma processing apparatus according to claim 11, wherein each of the first electric bias and the second electric bias is a pulse wave that includes a voltage pulse and is generated periodically.

16. 16. The plasma processing apparatus according to claim 11, further comprising a high frequency power supply configured to generate high frequency power for generating plasma and electrically connected to the lower electrode.

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