The application discloses a MEMS
sound wave sensor with scalar and vector composite sensing and a manufacturing method thereof, and belongs to the technical field of micro-electro-mechanical systems. The piezoelectric film, the scalar lower lead wire area and the scalar upper lead wire area constitute a
piezoelectric MEMS sensor for sensing scalar
sound wave information; the upper plate vector lead wire area, the upper plate, the upper plate lower insulating layer, the upper plate limiting concave frame, the upper plate anti-collision convex point, the back-shaped upper
cantilever beam group, the vector lead wire area, the back-shaped lower
cantilever beam group, the
mass block, the support frame, the lower plate upper insulating layer, the lower plate limiting concave frame, the lower plate anti-collision convex point, the lower plate, the lower plate vector lead wire area constitute a
sandwich type differential capacitance MEMS sensor for sensing vector
sound wave information. The application has the advantages of scalar and vector composite sensing, small volume,
large range, high sensitivity, high reliability, high integration, low cost,
low noise, stable performance and the like.