The invention discloses a multi-dimensional vibration platform with double
sandwich type piezoelectric actuators arranged in the same direction and an excitation method of the multi-dimensional vibration platform, and relates to the field of high-frequency vibration
engineering and micro-
nano machining. Aiming at the problem that a traditional piezoelectric vibration platform is difficult to realize higher-dimension multi-degree-of-freedom operation capability, the piezoelectric vibration platform comprises an output platform, two
piezoelectric actuators, two end covers and two bolts. The piezoelectric
actuator is provided with a
longitudinal vibration ceramic set and two
bending vibration ceramic sets arranged in the orthogonal direction, and through excitation of
voltage signals with the same phase or the
phase difference of 180 degrees, rotation around the X axis, the Y axis and the Z axis and translation along the X axis and the Y axis are achieved. Due to
structural symmetry and driver arrangement constraint, Z-direction translation is
strongly coupled with an existing mode, so that high-practicability five-degree-of-freedom output is focused. The same-direction arrangement type design is adopted, the characteristic of low motion
coupling is achieved, and displacement deformation of the piezoelectric
actuator can be converted into different actions needed by multi-dimensional vibration of the
tail end platform. The method is suitable for the fields of
laser processing, vibration-assisted
processing, micro-nano operation, active vibration suppression and the like.