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Device and method for measuring performance of energy sensor of stepper

An energy sensor and measuring device technology, applied in the field of lithography machines, can solve the problems of affecting the spectral ratio of the beam splitting prism, cannot completely eliminate the influence of the measurement accuracy of the light source, etc., and achieve the effects of easy implementation, simple measurement method and low cost

Active Publication Date: 2015-02-18
BEIJING GUOWANG OPTICAL TECH CO LTD
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Problems solved by technology

However, the change of the polarization state of the light source will affect the splitting ratio of the beam splitting prism, so the light intensity ratio of the first measurement light and the second measurement light under different beam illumination conditions is not a constant, and the influence of the problem of the light source itself on the measurement accuracy cannot be completely eliminated.

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  • Device and method for measuring performance of energy sensor of stepper
  • Device and method for measuring performance of energy sensor of stepper
  • Device and method for measuring performance of energy sensor of stepper

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Embodiment Construction

[0047] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0048] see figure 1 , figure 1 It is a structural diagram of the performance measuring device of the energy sensor of the lithography machine of the present invention, and it is also the best embodiment of the present invention. Such as figure 1 As shown, the performance measurement device of the energy sensor of the lithography machine of the present invention includes a light source 1, a polarizer 2, a beam splitter 3, a measuring light attenuating sheet 4, a rotation controller 8, an energy sensor to be measured 5, and a reference light attenuating sheet 6. With reference to the energy sensor 7, the multi-function signal processing card 9 and the computer 10, the positional relationship of the above components is as follows:

[0049] In the direction of the output bea...

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Abstract

The invention relates to a device and method for measuring the performance of an energy sensor of a stepper. The device consists of a light source, a polarizer, a beam splitter, a measurement light attenuation piece, a rotary controller, the energy sensor to be measured, a reference light attenuation piece, a reference energy sensor, a multifunctional signal processing card and a computer. The device can be used for respectively carrying out high-accuracy measurement on the repeatability, the energy linearity and the frequency linearity of the energy sensor of the stepper; and the device and the method have the characteristics of being simple in measurement method, easy to implement and low in cost.

Description

technical field [0001] The invention relates to a lithography machine, in particular to a performance measurement device and a measurement method for an energy sensor of a lithography machine. Background technique [0002] A photolithography machine is a high-precision ultra-large-scale integrated circuit manufacturing device, and its lighting system has a sensor for measuring the energy of the exposure beam. The working principle of the energy sensor is to use the photoelectric sensor to convert the optical signal into an electrical signal, measure the intensity of the electrical signal, and then calculate the energy of the beam measured by the energy sensor. The energy sensor dynamically monitors the exposure beam energy during the exposure process. The dose control of the lithography machine is based on the measured value of the energy sensor for feedback control to achieve the exposure of the set dose. [0003] As one of the key components of exposure dose control, the...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G01J1/42
Inventor 谢承科陈明杨宝喜黄惠杰
Owner BEIJING GUOWANG OPTICAL TECH CO LTD
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